KR20110074157A - Servo type accelerometer - Google Patents

Servo type accelerometer Download PDF

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Publication number
KR20110074157A
KR20110074157A KR1020090131046A KR20090131046A KR20110074157A KR 20110074157 A KR20110074157 A KR 20110074157A KR 1020090131046 A KR1020090131046 A KR 1020090131046A KR 20090131046 A KR20090131046 A KR 20090131046A KR 20110074157 A KR20110074157 A KR 20110074157A
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South Korea
Prior art keywords
vibration
acceleration sensor
servo
displacement
type acceleration
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KR1020090131046A
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Korean (ko)
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KR101105310B1 (en
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조철환
조성태
양경현
양동육
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한국전력공사
한국서부발전 주식회사
한국남동발전 주식회사
양동육
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • G01C19/42—Rotary gyroscopes for indicating rate of turn; for integrating rate of turn
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE: A servo type acceleration sensor is provided to increase the accuracy of a measurement displacement value and simplify the structure of a vibration board. CONSTITUTION: A servo type acceleration sensor includes a vibration generating unit(100), a displacement sensor(120), a voltage/current converting unit(130), a controller(140), an amplification unit(150), and an output unit(160). A leaf spring(116) is arranged on a support block(110). A vibration board(118) is connected to the leading end of the leaf spring.

Description

서보형 가속도센서{Servo type accelerometer}Servo type accelerometer

본 발명은 서보형 가속도센서에 관한 것으로, 특히 서보형 가속도센서의 진동검출부를 비접촉식으로 진동변위를 측정하여 가속도 측정이 가능한 서보형 가속도센서에 관한 것이다.The present invention relates to a servo type acceleration sensor, and more particularly, to a servo type acceleration sensor capable of measuring acceleration by measuring vibration displacement in a non-contact manner.

일반적으로 진동가속도센서는 진동체의 속도변화비율인 가속도를 측정하는 장치이다. 이러한 진동가속도센서는 압전형 가속도센서(Piezoelectric Accelerometer), 서보형 가속도센서(Servo electric Accelerometer)로 구분할 수 있다.In general, the vibration acceleration sensor is a device for measuring acceleration, which is a rate of change of a vibration body. Such vibration acceleration sensors may be classified into piezoelectric accelerometers and servo electric accelerometers.

진동가속도센서 중 압전형 가속도센서는 다른 진동센서 보다 넓은 주파수 범위에서 좋은 선형성을 갖고, 내부에서 기전력이 발생되므로 전원이 필요치 않은 특성이 있다. 서보형 가속도센서는 내부에 움직이는 별도의 가동부가 구비되어 그 가동부에서 발생되는 변위를 피드백시켜 가동코일을 구동하고 자석과 가동코일의 힘의 균형을 이용하여 출력을 발생시킨다. 이러한 서보형 가속도센서는 진동 검출센 서로서 저주파 특성이 우수하여 지진계 또는 특수용도의 저주파 측정용 센서로 주로 이용된다.Among the vibration acceleration sensors, piezoelectric acceleration sensors have a good linearity over a wider frequency range than other vibration sensors, and since electromotive force is generated inside, there is no need for a power source. Servo-type accelerometer is provided with a separate movable part that moves inside to feed the displacement generated from the movable part to drive the movable coil and generate output by using the balance of the force between the magnet and the movable coil. This servo type acceleration sensor is a vibration detection sensor with excellent low frequency characteristics and is mainly used as a seismograph or low frequency sensor for special purposes.

일반적인 서보형 가속도센서는 도 1에 도시된 바와 같이, 진동발생부(1)와, 상기 진동발생부(1)의 진동을 검출하는 변위검출부(2)와, 상기 변위검출부(2)에서 검출된 전압을 전류로 변환하는 전압전류변환부(3)와, 상기 진동발생부(1)의 위치를 제어하는 제어부(4)와, 센서의 주파수 직진성을 유지하는 댐핑부(5)와, 상기 전압전류변환부(3)에서 변환된 전류값을 증폭하는 증폭부(6) 및, 상기 증폭부(6)를 거쳐서 나온 신호를 측정하려는 진동값으로 출력하는 출력부(7)를 포함한다.As shown in FIG. 1, a general servo type acceleration sensor includes a vibration generator 1, a displacement detector 2 for detecting vibrations of the vibration generator 1, and a voltage detected by the displacement detector 2. A voltage current converter 3 for converting the current into a current, a controller 4 for controlling the position of the vibration generator 1, a damping part 5 for maintaining the frequency linearity of the sensor, and the voltage current conversion. And an output unit 7 for amplifying the current value converted by the unit 3, and an output unit 7 for outputting a signal outputted through the amplifier 6 as a vibration value to be measured.

이러한 서보형 가속도센서는 변위측정용 떨림판에 의해 감지된 외부힘이 신호로 입력되면 증폭, 복조 및 필터링 그리고 보상기에 의한 신호처리과정을 거쳐서 변위측정용 떨림판이 영점위치에서 동작할 수 있도록 복원신호를 만들어 내도록 되어 있다. When the external force sensed by the displacement measuring vibration plate is inputted as a signal, the servo type acceleration sensor performs amplification, demodulation, filtering, and signal processing by the compensator to restore the recovery signal so that the displacement vibration plate can operate at the zero position. It is meant to be created.

종래의 서보형 가속도센서는 도 2에 도시된 바와 같이, 지지블록(10)의 상부에 보조블럭(11)을 매개로 판스프링(12)이 설치되어 있고, 상기 판스프링(12)의 선단에 진동판(14)이 설치되어 있다. 상기 지지블록(10)의 내부에는 영구자석(16)이 배치되어 있고, 상기 영구자석(16)의 상부에 요크(18)가 배치되어 있다. 상기 요크(18)의 외주를 따라 코일(20)이 변위측정용 떨림판에 고정되어 있다.In the conventional servo type acceleration sensor, as shown in FIG. 2, a plate spring 12 is installed at an upper portion of the support block 10 via an auxiliary block 11, and a diaphragm is provided at the tip of the plate spring 12. (14) is provided. The permanent magnet 16 is disposed inside the support block 10, and the yoke 18 is disposed above the permanent magnet 16. A coil 20 is fixed to the vibration measuring plate for displacement measurement along the outer circumference of the yoke 18.

그리고, 상기 판스프링(12)과 진동판(14)으로부터 정전용량변화를 측정하는 변위검출부(30)와, 상기 변위검출부(30)에서 검출된 전압을 전류로 변환하는 전압전류변환부(40)와, 상기 코일(20)의 위치를 제어하는 제어부(50) 및 상기 전압전류 변환부(40)에서 변환된 전류값을 증폭하는 증폭부(60)와, 상기 증폭부(60)를 거쳐서 나온 신호를 측정하려는 진동값으로 출력하는 출력부(70)를 포함한다.Then, the displacement detection unit 30 for measuring the change in capacitance from the leaf spring 12 and the diaphragm 14, and the voltage current converter 40 for converting the voltage detected by the displacement detection unit 30 into a current; A control unit 50 for controlling the position of the coil 20 and an amplifying unit 60 for amplifying the current value converted by the voltage-current converting unit 40 and a signal from the amplifying unit 60. Output unit 70 for outputting the vibration value to be measured.

그런데, 종래의 서보형 가속도센서는 진동판(14)에서 변위검출부(30)가 정전용량을 이용한 검출방법을 사용하기 때문에 직접적인 변위검출이 어렵고 정확한 정전용량 결정에 어려운 문제점이 있었다.However, in the conventional servo type acceleration sensor, since the displacement detection unit 30 uses the capacitance method in the diaphragm 14, direct displacement detection is difficult and it is difficult to accurately determine the capacitance.

또한, 진동판(14)을 연결하는 판스프링(12)은 센서의 공진주파수를 결정하는 중요한 구성일 뿐만 아니라 센서의 특성을 결정하는 중요한 구성이지만, 진동판(14)과 판스프링(12)이 조각으로 이루어져 조립과정에서 조그만 어긋남에도 비틀림이 발생하기 때문에 정밀한 측정이 불가능하였다.In addition, the leaf spring 12 connecting the diaphragm 14 is not only an important configuration for determining the resonant frequency of the sensor but also an important configuration for determining the characteristics of the sensor, but the diaphragm 14 and the leaf spring 12 are divided into pieces. As a result, torsion occurs even in the small deviation in the assembly process, and precise measurement was not possible.

본 발명의 목적은 상술한 문제점을 해소하기 위해 안출된 것으로, 진동판을 사용하더라도 항상 일정한 진동신호를 검출할 수 있고, 진동변위를 정밀하게 측정할 수 있는 서보형 가속도센서을 제공하는데 있다.Disclosure of Invention An object of the present invention is to provide a servo type acceleration sensor capable of detecting a constant vibration signal at all times and accurately measuring vibration displacement even when using a diaphragm.

상기 목적을 달성하기 위해 본 발명은, 진동발생부와, 상기 진동발생부의 진동을 검출하는 변위검출부와, 상기 변위검출부에서 검출된 전압을 전류로 변환하는 전압전류변환부와, 상기 진동발생부의 위치를 제어하는 제어부 및 상기 전압전류변 환부에서 변환된 전류값을 증폭하는 증폭부 및 상기 증폭부를 거쳐서 나온 신호를 측정하려는 진동값으로 출력하는 출력부를 포함하고, 상기 변위검출부는 상기 진동발생부의 진동판 주변에 진동을 검출하는 변위센서를 배치하여 그 변위센서와 상기 진동판의 사이거리 변화량을 전압으로 검출하도록 구성되어 있다.In order to achieve the above object, the present invention provides a vibration generator, a displacement detector for detecting vibration of the vibration generator, a voltage current converter for converting a voltage detected by the displacement detector into a current, and a position of the vibration generator. A control unit for controlling a; and an amplifying unit for amplifying the current value converted by the voltage current converting unit, and an output unit for outputting a signal output through the amplifying unit as a vibration value to be measured, wherein the displacement detection unit is around the vibration plate of the vibration generating unit. The displacement sensor which detects a vibration is arrange | positioned at this, and it is comprised so that the amount of distance change between the displacement sensor and the said diaphragm may be detected as a voltage.

상기 진동발생부는 마그네트 사이에 요크가 배치되고, 상기 요크의 외주면을 따라 코일이 상하방향으로 이동가능하게 배치되며, 상기 코일 상부에 진동판이 배치되도록 구성되어 있다.The vibration generating unit is disposed between the magnets, the coil is arranged to be movable in the vertical direction along the outer circumferential surface of the yoke, the vibration plate is configured to be disposed on the coil.

상기 진동판은 판스프링과 연결된 상태로 지지블럭 상부에 설치되는 지지판에 캔틸레버 타입으로 지지되도록 되어 있다.The diaphragm is configured to be supported by a cantilever type on a support plate installed above the support block while being connected to the leaf spring.

상기 판스프링은 ㄷ자구조로 되어 한쪽 선단이 상기 지지판에 다점으로 연결되고, 타단이 상기 진동판과 연결되도록 되어 있다.The leaf spring has a U-shaped structure, one end of which is connected to the support plate at multiple points, and the other end of which is connected to the diaphragm.

상기 진동판은 상기 지지판에 결합되는 복수의 높이조절부재를 매개로 상하로 높이조절이 가능하도록 되어 있다.The diaphragm is capable of height adjustment up and down via a plurality of height adjustment members coupled to the support plate.

이와 같은 본 발명에 따른 변위센서를 이용한 서보형 가속도센서에 의하면, 변위센서를 통하여 진동변위를 직접 검출하기 때문에 측정변위값의 정밀도를 향상시킬 수 있고, 진동판의 구조를 단순화시킬 수 있다. 또한 ㄷ자로 구조의 판스프링을 진동판에 일체형으로 고정되게 조립함으로써 비틀림에 의한 하모닉진동의 왜곡현상을 줄일 수 있다. According to the servo type acceleration sensor using the displacement sensor according to the present invention, since the vibration displacement is directly detected through the displacement sensor, the accuracy of the measured displacement value can be improved, and the structure of the diaphragm can be simplified. In addition, it is possible to reduce the distortion phenomenon of harmonic vibration due to torsion by assembling the plate spring of the U-shaped structure fixedly to the diaphragm.

이하, 본 발명에 따른 바람직한 실시예를 첨부한 도면에 따라 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 4는 본 발명에 따른 서보형 가속도센서를 도시한 구성도이고, 도 5a 및 도 5b는 본 발명에 따른 서보형 가속도센서를 도시한 측면도와 평면도이다.4 is a configuration diagram showing a servo acceleration sensor according to the present invention, Figures 5a and 5b is a side view and a plan view showing a servo acceleration sensor according to the present invention.

본 발명에 따른 서보형 가속도센서는 도 4에 도시된 바와 같이, 진동발생부(100)와, 상기 진동발생부(100)의 진동을 검출하는 변위센서(120)와, 상기 변위센서(120)에서 검출된 전압을 전류로 변환하는 전압전류변환부(130)와, 상기 진동발생부(100)의 위치를 제어하는 제어부(140)와, 상기 전압전류변환부(130)에서 변환된 전류값을 증폭하는 증폭부(150) 및, 상기 증폭부(150)를 거쳐서 나온 신호를 측정하려는 진동값으로 출력하는 출력부(160)를 포함한다.As shown in FIG. 4, the servo-type acceleration sensor according to the present invention includes a vibration generating unit 100, a displacement sensor 120 detecting a vibration of the vibration generating unit 100, and the displacement sensor 120. Amplifies the current value converted by the voltage current converter 130 for converting the detected voltage into a current, the controller 140 for controlling the position of the vibration generator 100, and the voltage current converter 130. And an output unit 160 for outputting a signal output through the amplifying unit 150 as a vibration value to be measured.

상기 진동발생부(100)는 지지블록(110)의 내벽을 따라 마그네트(112)가 배치되어 있고, 상기 마그네트(112)의 사이에 요크(113)가 배치되어 있으며, 상기 요크(113)의 외주면을 따라 코일(114)이 상하방향으로 이동가능하게 배치되어 있다.The vibration generator 100 has a magnet 112 is disposed along the inner wall of the support block 110, the yoke 113 is disposed between the magnet 112, the outer peripheral surface of the yoke 113 The coil 114 is arranged to be movable in the up and down direction.

그리고, 진동발생부(100)는 지지블럭(110) 상부에 지지판(115)에 다점으로 연결된 판스프링(116)이 배치되고, 상기 판스프링(116)의 선단부에 진동판(118)이 연결되도록 되어 있다. 여기서, 상기 진동판(118)은 상기 코일(114)의 움직임에 따라 진동이 발생되도록 되어 있다.In addition, the vibration generating unit 100 has a leaf spring 116 connected to the support plate 115 in multiple points on the support block 110 is disposed, the vibration plate 118 is connected to the front end of the leaf spring 116 have. Here, the diaphragm 118 is configured to generate vibrations in accordance with the movement of the coil 114.

상기 판스프링(116)은 도 5에 도시된 바와 같이, ㄷ자구조로 일체형으로 되어 있다. 판스프링(116)은 한쪽 선단이 상기 지지판(115)에 다점으로 연결되어 있고, 타단이 상기 진동판(118)과 연결하도록 되어 있다. 여기서, 판스프링(116)은 ㄷ자구조로 일체형으로 형성되어 상기 진동판(118)이 조립될 때 비틀림을 방지할 수 있다.The leaf spring 116 is integrated in a U-shaped structure, as shown in FIG. The leaf spring 116 has one end connected to the support plate 115 at multiple points, and the other end connected to the diaphragm 118. Here, the leaf spring 116 is integrally formed with a U-shaped structure to prevent the twist when the diaphragm 118 is assembled.

상기 진동판(118)은 도 4에 도시된 바와 같이, 판스프링(116)을 매개로 상기 지지블럭(110) 상부에 설치되는 지지판(115)에 캔틸레버(Cantilever) 타입으로 지지되도록 되어 있다.As shown in FIG. 4, the diaphragm 118 is supported by a support plate 115 installed above the support block 110 via a leaf spring 116 in a cantilever type.

그리고, 상기 진동판(118)은 도 6에 도시된 바와 같이, 상기 지지판(115)에 결합되는 복수의 높이조절부재(117)를 사용하여 상하높이를 조절하도록 되어 있다. 여기서, 높이조절부재(117)는 상기 지지판(115)을 관통하여 상기 지지블럭(110)에 결합됨으로써 상기 지지블럭(110)의 상부에서 일정높이로 유지하게 하는 역할을 한다.And, as shown in Figure 6, the diaphragm 118 is to adjust the vertical height by using a plurality of height adjusting member 117 coupled to the support plate 115. Here, the height adjusting member 117 penetrates the support plate 115 and is coupled to the support block 110 to maintain the height at a predetermined height at the top of the support block 110.

한편, 높이조절부재(117)에는 수평조절용 스프링(119)이 삽입되도록 되어 있다. 여기서, 수평조절용 스프링(119)은 상기 높이조절부재(117)에 삽입되어 상기 지지판(115)을 상기 지지블럭(110)에 대하여 탄성적으로 지지하는 역할을 한다.On the other hand, the height adjustment member 117 is to be inserted into the horizontal adjustment spring 119. Here, the horizontal adjustment spring 119 is inserted into the height adjusting member 117 serves to elastically support the support plate 115 with respect to the support block 110.

본 발명에 따른 서보형 가속도센서는 기존과 달리, 변위센서(120)를 통하여 진동판(118)의 진동을 직접 검출하도록 되어 있다. 즉 진동판(118)의 진동을 변위센서(120)와 진동판(118)의 사이거리 변화량을 전압으로 측정하여 전류로 변환하여 이용하는데 기술적 특징이 있다.Unlike the conventional servo type acceleration sensor, the vibration of the diaphragm 118 is directly detected through the displacement sensor 120. That is, there is a technical feature to convert the vibration of the diaphragm 118 into a current by measuring a change in distance between the displacement sensor 120 and the diaphragm 118 as a voltage.

본 발명에 따른 변위센서를 이용한 서보형 가속도센서에 의하면, 변위센서(120)를 통하여 진동변위를 직접 검출하기 때문에 측정변위값의 정밀도를 향상시킬 수 있다. 또한 ㄷ자구조의 판스프링(116)을 진동판(118)에 고정함으로써 비틀림에 의한 하모닉진동의 왜곡현상을 줄일 수 있다. According to the servo type acceleration sensor using the displacement sensor according to the present invention, since the vibration displacement is directly detected through the displacement sensor 120, the accuracy of the measured displacement value can be improved. In addition, by fixing the c-shaped leaf spring 116 to the diaphragm 118, it is possible to reduce the distortion phenomenon of harmonic vibration due to torsion.

이상에서 설명한 바와 같이, 본 발명은 바람직한 실시예를 기초로 설명하였으나 특정 실시예에 한정되는 것은 아니며, 해당분야 통상의 지식을 가진 자가 특허청구범위 내에서 기재된 범주내에서 변경할 수 있다.As described above, the present invention has been described based on the preferred embodiments, but is not limited to the specific embodiments, it can be changed within the scope described within the claims by those skilled in the art.

도 1은 일반적인 서보형 가속도센서를 도시한 구성도,1 is a configuration diagram showing a general servo type acceleration sensor,

도 2는 종래의 서보형 가속도센서를 도시한 구성도,2 is a block diagram showing a conventional servo acceleration sensor,

도 3은 스프링과 진동판이 연결된 상태를 도시한 평면도,3 is a plan view showing a state in which the spring and the diaphragm are connected,

도 4는 본 발명에 따른 서보형 가속도센서를 도시한 구성도,4 is a block diagram showing a servo-type acceleration sensor according to the present invention,

도 5는 스프링과 진동판이 연결된 상태를 도시한 평면도,5 is a plan view illustrating a state in which a spring and a diaphragm are connected;

도 6은 도 4의 A방향에서 바라본 측면도이다. FIG. 6 is a side view seen from the direction A of FIG. 4.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

100 : 진동발생부 110 : 지지블럭100: vibration generating unit 110: support block

112 : 마그네트 113 : 요크112: magnet 113: yoke

114 : 코일 115 : 지지판114: coil 115: support plate

116 : 판스프링 117 : 높이조절부재116: leaf spring 117: height adjustment member

118 : 진동판 119 : 수평조절용 스프링118: diaphragm 119: horizontal adjustment spring

120 : 변위센서 130 : 전압전류변환부120: displacement sensor 130: voltage current converter

140 : 제어부 150 : 증폭부140: control unit 150: amplifying unit

160 : 출력부160: output unit

Claims (5)

진동발생부와, 상기 진동발생부의 진동을 검출하는 변위검출부와, 상기 변위검출부에서 검출된 전압을 전류로 변환하는 전압전류변환부와, 상기 진동발생부의 위치를 제어하는 제어부와, 상기 전압전류변환부에서 변환된 전류값을 증폭하는 증폭부 및, 상기 증폭부를 거쳐서 나온 신호를 측정하려는 진동값으로 출력하는 출력부를 포함하는 서보형 가속도센서에 있어서,A vibration generator, a displacement detector for detecting vibration of the vibration generator, a voltage current converter for converting the voltage detected by the displacement detector into a current, a controller for controlling the position of the vibration generator, and the voltage current converter In the servo-type acceleration sensor comprising an amplifier for amplifying the current value converted by the unit, and an output unit for outputting the signal from the amplification unit to the vibration value to be measured, 상기 변위검출부는 상기 진동발생부의 진동판 주변에 진동을 검출하는 변위센서를 배치하여 그 변위센서와 상기 진동판의 사이거리 변화량을 전압으로 검출하는 것을 특징으로 하는 서보형 가속도센서.The displacement detection unit is a servo-type acceleration sensor, characterized in that for placing a displacement sensor for detecting the vibration around the vibration plate of the vibration generating unit detects the change in distance between the displacement sensor and the vibration plate as a voltage. 제 1 항에 있어서,The method of claim 1, 상기 진동발생부는 마그네트 사이에 요크가 배치되고, 상기 요크의 외주면을 따라 코일이 상하방향으로 이동가능하게 배치되며, 상기 코일 상부에 진동판이 배치된 것을 특징으로 하는 서보형 가속도센서.The vibration generating unit has a yoke disposed between the magnets, the coil is arranged to be movable in the vertical direction along the outer circumferential surface of the yoke, servo-type acceleration sensor, characterized in that the vibration plate is disposed on the coil. 제 2 항에 있어서,The method of claim 2, 상기 진동판은 판스프링과 연결된 상태로 지지블럭 상부에 설치되는 지지판 에 캔틸레버 타입으로 지지되는 것을 특징으로 하는 서보형 가속도센서. The diaphragm is a servo type acceleration sensor, characterized in that supported by the cantilever type on the support plate installed on the support block in the state connected to the leaf spring. 제 3 항에 있어서,The method of claim 3, wherein 상기 판스프링은 ㄷ자구조로 되어 한쪽 선단이 상기 지지판에 다점으로 연결되고, 타단이 상기 진동판과 연결되는 것을 특징으로 하는 서보형 가속도센서.The leaf spring has a U-shape structure, one end is connected to the support plate in multiple points, the other end is connected to the diaphragm. 제 3 항에 있어서,The method of claim 3, wherein 상기 진동판은 상기 지지판에 결합되는 복수의 높이조절부재를 매개로 상하로 높이조절이 가능한 것을 특징으로 하는 서보형 가속도센서.The vibration plate is a servo-type acceleration sensor, characterized in that the height can be adjusted up and down via a plurality of height adjusting members coupled to the support plate.
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KR101356631B1 (en) * 2012-07-09 2014-02-04 한국과학기술원 Tunable micro-accelerometer sensor using Magneto-rheological fluid and manufacturing method thereof
KR101660768B1 (en) 2016-04-01 2016-09-29 (주)오토시스 The apparatus for controlling status information of earthquake accelerometer, and method thereof

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KR20200060627A (en) 2018-11-22 2020-06-01 (주)오토시스 The earthquake sensing apparatus including sensors and earthquake recorder
KR102213528B1 (en) * 2019-12-06 2021-02-09 (주)오토시스 Seismic acceleration sensor with leaf spring modulus control depending on temperature/humidity effect

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JP2004251666A (en) * 2003-02-18 2004-09-09 Kazuto Sedo Servo type absolute displacement/velocity sensor

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KR101356631B1 (en) * 2012-07-09 2014-02-04 한국과학기술원 Tunable micro-accelerometer sensor using Magneto-rheological fluid and manufacturing method thereof
KR101660768B1 (en) 2016-04-01 2016-09-29 (주)오토시스 The apparatus for controlling status information of earthquake accelerometer, and method thereof

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