KR20100110488A - Slot valve - Google Patents
Slot valve Download PDFInfo
- Publication number
- KR20100110488A KR20100110488A KR1020090028842A KR20090028842A KR20100110488A KR 20100110488 A KR20100110488 A KR 20100110488A KR 1020090028842 A KR1020090028842 A KR 1020090028842A KR 20090028842 A KR20090028842 A KR 20090028842A KR 20100110488 A KR20100110488 A KR 20100110488A
- Authority
- KR
- South Korea
- Prior art keywords
- cylinder
- slot
- door
- slots
- actuators
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Valves (AREA)
Abstract
According to the present invention, the valve housing is provided between the processing module side and the transfer module side is in communication with one side of the vacuum housing is formed a first slot is a passage for moving the object to be processed; A door provided outside the valve housing; A shaft connected to one end of the door; A cylinder provided inside the valve housing; A piston connected to the other end of the shaft in the cylinder to move in parallel to the first and second slots such that the door connected to the shaft has a position corresponding to the first and second slots; A second actuator provided at the other end of the cylinder through which the shaft penetrates to rotate the cylinder so that the door selectively contacts the first slot; And a first and second connection links connected between the other end of the cylinder and the first and second actuators to transmit the driving force to rotate the cylinders according to the selective driving of the first and second actuators.
Description
The present invention relates to a slot valve, and more particularly, a door for opening and closing the slot in the valve housing located on one side of the vacuum housing having two slots formed for the passage of the object to be processed between the processing module and the transfer module. It relates to a slot valve that can reduce the manufacturing cost by simplifying the configuration of the drive unit.
In general, in a semiconductor manufacturing apparatus, a plurality of process chambers are disposed adjacent to each other to allow wafers to pass therethrough. Here, the wafer transfer between the process chambers is made by a transfer module for moving the wafer through slots or ports formed in adjacent walls of adjacent process chambers. In this case, in order to prevent the air pressure from being changed between the transfer module and the process chamber, that is, the processing module, or to seal the transfer module during the processing operation in the processing module, various types of gate valves, that is, slot valves, may be used. Is used to isolate the various modules.
Such a slot valve has been disclosed in, for example, "double wing type slot valve and its installation method" of Patent Application No. 10-2001-7012363.
1A and 1B are front end shaving and side cross-sectional views, respectively, of a conventional double winged slot valve.
The conventional slot valve as described above, as shown in Figure 1a and 1b, having a first wall and a second wall, the first wall so as to transfer the workpiece between the first module and the second module Has a first slot (S1) and the second wall has a second slot (S2), the first module is installed in the first wall and the second module of the vacuum housing (H1) is installed in the second wall A second door (D1) opening and closing the first slot (S1) and the second slot (S2) to be movable in the vacuum housing (H2) from the valve housing (H2) provided on one side ( D2) and the first door D1 and the second door D2, respectively, to move the doors vertically or parallel to the first wall and the second wall, respectively, so that the first slot S1 and the second door, respectively. It includes a vertical actuator (A1) and a horizontal actuator (A2) for opening and closing the slot (S2).
However, the conventional slot valve as described above, the opening and closing of the slot is made by a door driver for controlling the opening and closing operation of the door and the door respectively corresponding to the slot, wherein the door driver is perpendicular to the corresponding slot Alternatively, a complicated configuration consisting of a plurality of vertical / horizontal actuators moving in parallel makes the control method complicated and increases the space of the vacuum housing or the valve housing for providing the components, thereby increasing the manufacturing cost of the semiconductor manufacturing apparatus. There is a problem that increases.
In addition, since the driving of the vertical actuator for vertically moving the door with respect to the slots is made perpendicular to the direction of movement of the door in the valve housing, one body may be fastened by a fastening member or the like during repeated driving of the vertical actuator. There is a problem in that the fastening portion of the valve housing is fastened to the gap, and in this case there is a problem that the operation of opening and closing the semiconductor passage as a sealing means is difficult to control accurately.
Accordingly, an object of the present invention is a simple configuration in which the slot has one door and a door driving part inside the valve housing located at one side of the vacuum housing having two slots formed for the movement passage of the workpiece between the processing module and the transfer module. It is to provide a slot valve that can be selectively opened and closed by.
In addition, another object of the present invention is to simplify the configuration of the door drive unit for selectively opening and closing the slots in the interior of the valve housing and to reduce the manufacturing cost by reducing the size of the space or area of the valve housing slot valve To provide.
In addition, another object of the present invention is to operate the actuator of the door driving portion for rotating the door to open and close the slot in the valve housings formed perpendicular to the direction of travel of the door can prevent the valve housing fastening portion is short. To provide a slotted valve.
Meanwhile, the object of the present invention is not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.
To this end, according to the present invention, the valve housing is provided between the processing module side and the transfer module side communicated to one side of the vacuum housing is formed a first slot that is a passage for moving the object to be processed; A door provided outside the valve housing; A shaft connected to one end of the door; A cylinder provided inside the valve housing; A piston connected to the other end of the shaft in the cylinder to move in parallel to the first and second slots such that the door connected to the shaft has a position corresponding to the first and second slots; A second actuator provided at the other end of the cylinder through which the shaft penetrates to rotate the cylinder so that the door selectively contacts the first slot; And a first and second connection links connected between the other end of the cylinder and the first and second actuators to transmit the driving force to rotate the cylinders according to the selective driving of the first and second actuators.
Here, the door preferably includes a first and second blades for selectively sealing the first slot and the second slot, respectively.
In addition, the first and second actuators are preferably provided to be driven in a direction parallel to the driving direction of the cylinder.
In addition, it is preferable that one end of each of the first and second connection links is connected to the pivoting protrusions formed at both sides of the cylinder, and the other ends thereof are respectively fixed to the first and second actuators.
In addition, the first connection link preferably includes a guide hole which is inserted to guide the pivoting projection and is formed obliquely with respect to the driving direction of the first and second actuators.
In addition, one end of both sides of the cylinder is valved by a pivot member which allows the cylinder to rotate in one or the other direction with respect to the driving direction of the cylinder when the pivoting protrusion is guided along the guide hole when the first and second actuators are driven. It is preferably installed inside the housing.
Therefore, according to the present invention, the slot is formed in the valve housing located on one side of the vacuum housing having two slots formed for the movement passage of the object between the processing module and the transfer module, a simple configuration consisting of one door and a door driving part. By selectively opening and closing by, it is possible to reduce the manufacturing space of the semiconductor manufacturing equipment by reducing the space of the valve housing or vacuum housing.
In addition, the first and second actuators are provided to be parallel to the longitudinal direction of the shaft flowing by the cylinder in the valve housing, and thus, extend and operate to prevent the coupling portions of the valve housing from being spaced apart as in the related art.
On the other hand, the effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
2 to 4 are respectively a front view, a side perspective view and a side cross-sectional view showing a slot valve according to a preferred embodiment of the present invention, Figures 5 and 6 are the slots of the slot valve of FIG. Figure showing the process.
As shown in Figures 2 to 4, the slot valve according to a preferred embodiment of the present invention is provided between the processing module (PM) side and the transfer module (TM) side is a first passage that is a passage for moving the object to be processed
The vacuum housing H1 is a moving passage in a vacuum state that connects the processing module PM and the transfer module TM to move the workpiece such as a wafer or a semiconductor substrate to each other, and the processing module PM side. The first slot (S1) is formed in the second slot (S2) is formed on the transfer module (TM) side.
The valve housing H2 communicates with the vacuum housing H1 in a direction perpendicular to the movement passage of the workpiece through the first slot S1 and the second slot S2 of the vacuum housing H1. The
Here, the vacuum housing (H1) and the valve housing (H2) is preferably connected to each other to maintain a vacuum state, one end of the valve housing (H2) connected to the vacuum housing (H1) to facilitate mutual connection and support.
The
The
The
The
The first and second actuators 150-1 and 150-2 are provided outside the other end of the
The first and second connection links 160-1 and 160-2 are connected between the other end of the
Here, the first and second connection links 160-1 and 160-2 are connected to the
At this time, both ends of one end of the
In addition, the
Accordingly, as described above, the first and
In addition, the first and second actuators 150-1 and 150-2 are provided to be parallel to the longitudinal direction of the
In addition, since the first and second actuators 150-1 and 150-2 are provided parallel to the
Hereinafter, with reference to the drawings will be described the operation and effect of the slot valve according to a preferred embodiment of the present invention.
First, the process when the first slot S1 is closed by the
First, as shown in FIG. 5, when the inside of the
In this state, when the first actuator 150-1 connected to the lower end of the
Meanwhile, a process when the second slot S2 is closed by the
First, as shown in FIG. 6, when the inside of the
In this state, when the second actuator 150-2 connected to the lower end of the
On the other hand, the process when the moving passage of the workpiece of the slots selectively closed by the blades of the slot valve is opened is reversed when the slots are selectively closed by the blades.
Therefore, according to the present invention, the configuration of the door driver for opening and closing the first / second slots inside the valve housing so that the door for opening and closing the first / second slots corresponds to the first / second slots through a single cylinder. The valve housing is simply configured to selectively seal the first and second blades in the first and second slots by selectively rotating the cylinder perpendicularly to the first and second slots through a first and second actuator. Alternatively, the manufacturing cost of the semiconductor manufacturing equipment can be reduced by reducing the space of the vacuum housing.
In addition, the first and second actuators are provided to extend in parallel with the longitudinal direction of the shaft flowing by the cylinder in the valve housing, thereby preventing the coupling portions of the valve housing from being spaced apart as in the related art. The space of the valve housing can be minimized.
In addition, the operation of opening and closing the first and second slots through the door is performed by a door driving unit including a single cylinder and a pair of first and second actuators, thereby simplifying the control operation and rapidly progressing the semiconductor manufacturing process. You can do that.
While the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations and modifications without departing from the spirit or essential features of the present invention. It is to be understood that the present invention may be practiced in other specific forms, since modifications may be made. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.
1A and 1B are front and side cross-sectional views schematically showing a conventional double winged slot valve, respectively;
2 to 4 are respectively a front view, a side perspective view and a side sectional view showing a slot valve according to a preferred embodiment of the present invention; And
5 and 6 are views illustrating a process of selectively opening and closing slots in the slot valve of FIG. 2, respectively.
* Drawing reference *
110: door 120: shaft
130: cylinder 131: rotating protrusion
132: pivot member 140: piston
150-1: first actuator 150-2: second actuator
160-1: first connection link 160-2: second connection link
161: Guide Ball
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090028842A KR20100110488A (en) | 2009-04-03 | 2009-04-03 | Slot valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090028842A KR20100110488A (en) | 2009-04-03 | 2009-04-03 | Slot valve |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20100110488A true KR20100110488A (en) | 2010-10-13 |
Family
ID=43131072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090028842A KR20100110488A (en) | 2009-04-03 | 2009-04-03 | Slot valve |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20100110488A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130055901A (en) * | 2011-11-21 | 2013-05-29 | 엘지디스플레이 주식회사 | Valve apparatus for vapor deposition of organic thin film |
KR101293590B1 (en) * | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | Two way gate valve and substrate processing system having the same |
-
2009
- 2009-04-03 KR KR1020090028842A patent/KR20100110488A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130055901A (en) * | 2011-11-21 | 2013-05-29 | 엘지디스플레이 주식회사 | Valve apparatus for vapor deposition of organic thin film |
KR101293590B1 (en) * | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | Two way gate valve and substrate processing system having the same |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9782894B2 (en) | Hydraulic rotary actuator | |
US8382066B2 (en) | Gate valve | |
KR101099571B1 (en) | Vacuum gate valve | |
CN101375136B (en) | Dual chamber orifice fitting isolation valve | |
WO2002001035A3 (en) | Dual pendulum valve assembly | |
US10352480B2 (en) | Bidirectional gate valve | |
KR20100110488A (en) | Slot valve | |
US20090189107A1 (en) | Valve device | |
KR101071955B1 (en) | A gate valve | |
US20180156339A1 (en) | Blade for vacuum valve | |
KR102237186B1 (en) | Vacuum gate valve | |
KR101531632B1 (en) | Gate valve structure for vacuum system | |
KR100520727B1 (en) | Rectangular gate vacuum valve | |
KR20100085880A (en) | Butterfly valve | |
KR102228429B1 (en) | Slit Valve | |
KR101258240B1 (en) | Bidirectional drive gate valve | |
KR100459344B1 (en) | Vacuum valve of semiconductor chip manufactory system | |
KR102131284B1 (en) | Door exchange type gate valve system | |
KR102656261B1 (en) | Flap push valve | |
KR102267578B1 (en) | Gate valve control system and control method thereof | |
KR20230056979A (en) | Gate valve with shaft shield wing | |
KR20220104480A (en) | Vacuum valve assembly for semiconductor equipment | |
KR20190012371A (en) | Gate valve | |
JPS62267586A (en) | Device with vane pump | |
KR101805475B1 (en) | Vaccum valve |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |