KR20100110488A - Slot valve - Google Patents

Slot valve Download PDF

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Publication number
KR20100110488A
KR20100110488A KR1020090028842A KR20090028842A KR20100110488A KR 20100110488 A KR20100110488 A KR 20100110488A KR 1020090028842 A KR1020090028842 A KR 1020090028842A KR 20090028842 A KR20090028842 A KR 20090028842A KR 20100110488 A KR20100110488 A KR 20100110488A
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KR
South Korea
Prior art keywords
cylinder
slot
door
slots
actuators
Prior art date
Application number
KR1020090028842A
Other languages
Korean (ko)
Inventor
손영만
Original Assignee
주식회사 에스알티
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에스알티 filed Critical 주식회사 에스알티
Priority to KR1020090028842A priority Critical patent/KR20100110488A/en
Publication of KR20100110488A publication Critical patent/KR20100110488A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)

Abstract

According to the present invention, the valve housing is provided between the processing module side and the transfer module side is in communication with one side of the vacuum housing is formed a first slot is a passage for moving the object to be processed; A door provided outside the valve housing; A shaft connected to one end of the door; A cylinder provided inside the valve housing; A piston connected to the other end of the shaft in the cylinder to move in parallel to the first and second slots such that the door connected to the shaft has a position corresponding to the first and second slots; A second actuator provided at the other end of the cylinder through which the shaft penetrates to rotate the cylinder so that the door selectively contacts the first slot; And a first and second connection links connected between the other end of the cylinder and the first and second actuators to transmit the driving force to rotate the cylinders according to the selective driving of the first and second actuators.

Description

Slot valve

The present invention relates to a slot valve, and more particularly, a door for opening and closing the slot in the valve housing located on one side of the vacuum housing having two slots formed for the passage of the object to be processed between the processing module and the transfer module. It relates to a slot valve that can reduce the manufacturing cost by simplifying the configuration of the drive unit.

In general, in a semiconductor manufacturing apparatus, a plurality of process chambers are disposed adjacent to each other to allow wafers to pass therethrough. Here, the wafer transfer between the process chambers is made by a transfer module for moving the wafer through slots or ports formed in adjacent walls of adjacent process chambers. In this case, in order to prevent the air pressure from being changed between the transfer module and the process chamber, that is, the processing module, or to seal the transfer module during the processing operation in the processing module, various types of gate valves, that is, slot valves, may be used. Is used to isolate the various modules.

Such a slot valve has been disclosed in, for example, "double wing type slot valve and its installation method" of Patent Application No. 10-2001-7012363.

1A and 1B are front end shaving and side cross-sectional views, respectively, of a conventional double winged slot valve.

The conventional slot valve as described above, as shown in Figure 1a and 1b, having a first wall and a second wall, the first wall so as to transfer the workpiece between the first module and the second module Has a first slot (S1) and the second wall has a second slot (S2), the first module is installed in the first wall and the second module of the vacuum housing (H1) is installed in the second wall A second door (D1) opening and closing the first slot (S1) and the second slot (S2) to be movable in the vacuum housing (H2) from the valve housing (H2) provided on one side ( D2) and the first door D1 and the second door D2, respectively, to move the doors vertically or parallel to the first wall and the second wall, respectively, so that the first slot S1 and the second door, respectively. It includes a vertical actuator (A1) and a horizontal actuator (A2) for opening and closing the slot (S2).

However, the conventional slot valve as described above, the opening and closing of the slot is made by a door driver for controlling the opening and closing operation of the door and the door respectively corresponding to the slot, wherein the door driver is perpendicular to the corresponding slot Alternatively, a complicated configuration consisting of a plurality of vertical / horizontal actuators moving in parallel makes the control method complicated and increases the space of the vacuum housing or the valve housing for providing the components, thereby increasing the manufacturing cost of the semiconductor manufacturing apparatus. There is a problem that increases.

In addition, since the driving of the vertical actuator for vertically moving the door with respect to the slots is made perpendicular to the direction of movement of the door in the valve housing, one body may be fastened by a fastening member or the like during repeated driving of the vertical actuator. There is a problem in that the fastening portion of the valve housing is fastened to the gap, and in this case there is a problem that the operation of opening and closing the semiconductor passage as a sealing means is difficult to control accurately.

Accordingly, an object of the present invention is a simple configuration in which the slot has one door and a door driving part inside the valve housing located at one side of the vacuum housing having two slots formed for the movement passage of the workpiece between the processing module and the transfer module. It is to provide a slot valve that can be selectively opened and closed by.

In addition, another object of the present invention is to simplify the configuration of the door drive unit for selectively opening and closing the slots in the interior of the valve housing and to reduce the manufacturing cost by reducing the size of the space or area of the valve housing slot valve To provide.

In addition, another object of the present invention is to operate the actuator of the door driving portion for rotating the door to open and close the slot in the valve housings formed perpendicular to the direction of travel of the door can prevent the valve housing fastening portion is short. To provide a slotted valve.

Meanwhile, the object of the present invention is not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

To this end, according to the present invention, the valve housing is provided between the processing module side and the transfer module side communicated to one side of the vacuum housing is formed a first slot that is a passage for moving the object to be processed; A door provided outside the valve housing; A shaft connected to one end of the door; A cylinder provided inside the valve housing; A piston connected to the other end of the shaft in the cylinder to move in parallel to the first and second slots such that the door connected to the shaft has a position corresponding to the first and second slots; A second actuator provided at the other end of the cylinder through which the shaft penetrates to rotate the cylinder so that the door selectively contacts the first slot; And a first and second connection links connected between the other end of the cylinder and the first and second actuators to transmit the driving force to rotate the cylinders according to the selective driving of the first and second actuators.

Here, the door preferably includes a first and second blades for selectively sealing the first slot and the second slot, respectively.

In addition, the first and second actuators are preferably provided to be driven in a direction parallel to the driving direction of the cylinder.

In addition, it is preferable that one end of each of the first and second connection links is connected to the pivoting protrusions formed at both sides of the cylinder, and the other ends thereof are respectively fixed to the first and second actuators.

In addition, the first connection link preferably includes a guide hole which is inserted to guide the pivoting projection and is formed obliquely with respect to the driving direction of the first and second actuators.

In addition, one end of both sides of the cylinder is valved by a pivot member which allows the cylinder to rotate in one or the other direction with respect to the driving direction of the cylinder when the pivoting protrusion is guided along the guide hole when the first and second actuators are driven. It is preferably installed inside the housing.

Therefore, according to the present invention, the slot is formed in the valve housing located on one side of the vacuum housing having two slots formed for the movement passage of the object between the processing module and the transfer module, a simple configuration consisting of one door and a door driving part. By selectively opening and closing by, it is possible to reduce the manufacturing space of the semiconductor manufacturing equipment by reducing the space of the valve housing or vacuum housing.

In addition, the first and second actuators are provided to be parallel to the longitudinal direction of the shaft flowing by the cylinder in the valve housing, and thus, extend and operate to prevent the coupling portions of the valve housing from being spaced apart as in the related art.

On the other hand, the effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 to 4 are respectively a front view, a side perspective view and a side cross-sectional view showing a slot valve according to a preferred embodiment of the present invention, Figures 5 and 6 are the slots of the slot valve of FIG. Figure showing the process.

As shown in Figures 2 to 4, the slot valve according to a preferred embodiment of the present invention is provided between the processing module (PM) side and the transfer module (TM) side is a first passage that is a passage for moving the object to be processed Door 110 and door 110 having first and second blades 111 and 112 provided outside the valve housing H2 communicating with one side of the vacuum housing H1 in which the / 2 slots S1 and S2 are formed. Is connected to one end of the shaft 120 is provided in the interior of the valve housing (H2), the cylinder 130 is provided in the interior of the valve housing (H2), is connected to the other end of the shaft 120 in the cylinder 130 Piston 140 and the shaft to move in parallel to the first / second slots (S1, S2) so that the door 110 connected to the shaft 120 has a position corresponding to the first / second slots (S1, S2) 120 is provided at the other end of the cylinder 130 through which the cylinder 130 is rotated so that the first and second blades 111 and 112 of the door 110 selectively contact the first and second slots S1 and S2. The first and second actuators 150-1 and 150-2 are locked and connected between the other end of the cylinder 130 and the first and second actuators 150-1 and 150-2, and the cylinders are selectively driven by the actuator 150. The first and second connection links 160-1 and 160-2 transmit the driving force so that the 130 is rotated.

The vacuum housing H1 is a moving passage in a vacuum state that connects the processing module PM and the transfer module TM to move the workpiece such as a wafer or a semiconductor substrate to each other, and the processing module PM side. The first slot (S1) is formed in the second slot (S2) is formed on the transfer module (TM) side.

The valve housing H2 communicates with the vacuum housing H1 in a direction perpendicular to the movement passage of the workpiece through the first slot S1 and the second slot S2 of the vacuum housing H1. The shaft 120, the cylinder 130, the piston 140, and the first / first door driving unit for moving the door 110 for opening and closing the first slot S1 and the second slot S2 to the vacuum housing H1. 2 actuators (150-1, 150-2) and the first connection link (160-1, 160-2) is provided a space provided.

Here, the vacuum housing (H1) and the valve housing (H2) is preferably connected to each other to maintain a vacuum state, one end of the valve housing (H2) connected to the vacuum housing (H1) to facilitate mutual connection and support. Flange 101 is formed.

The door 110 includes first and second blades 111 and 112 positioned outside the valve housing H2 to selectively open and close the first and second slots S1 and S2 of the vacuum housing H1, respectively. On one surface of the first and second blades 111 and 112, an O-ring member 113 is provided to seal the slot when the blade contacts the slot.

The shaft 120 has one end connected to the door 110 and the other end penetrated through the cylinder 130 of the valve housing H2 to maintain the door 110 supported by the valve housing H2. Here, a bellows 121 may be further provided between the shaft 120 and the flange 101 of the valve housing H2 to prevent the inflow of foreign matters and to facilitate the movement of the shaft 120.

The cylinder 130 is provided inside the valve housing H2 in a state where one end of the shaft 120 penetrates to protrude a predetermined length out of the flange 101 of the valve housing H2, and the shaft 120 Through-holes (unsigned), which are spaces for flow, are formed.

The piston 140 is connected to the other end of the shaft 120 penetrating the cylinder 130 in the cylinder 130 and flows the shaft 120 from the inside of the cylinder 130 through air pressure to the shaft 120. The connected door 110 is moved in parallel with the first and second slots S1 and S2 to have a position corresponding to the first and second slots S1 and S2.

The first and second actuators 150-1 and 150-2 are provided outside the other end of the cylinder 130 through which the shaft 120 penetrates to rotate the cylinder 130 to rotate the first and second blades 111 and 112 of the door 110. ) Is a moving member for driving to be selectively sealed in the first and second slots (S1, S2), there may be automatic or manual, etc., in the case of automatic type is to be a PNEUMATIC type that operates by compressed air desirable. The pneumatic actuator includes a compressed air inlet (not shown), a cylinder (not shown), a drive shaft (not shown), etc., through which compressed air is introduced, but a detailed description thereof will be omitted.

The first and second connection links 160-1 and 160-2 are connected between the other end of the cylinder 130 and the second and second actuators 150-1 and 150-2, respectively. According to the selective driving of the cylinder 130 is a driving force transmission member for transmitting a driving force to be rotated to one side or the other side relative to the axis of the movement of the piston 140, for example, the shaft 120 by the piston 140 Is driven to drive the first actuator 150-1 while the door 110 connected to the shaft 120 corresponds to the first and second slots S1 and S2, the driving force is the first connection link 160-1. To the cylinder 130 is rotated to the left so that the first slot (S1) is closed by the first blade 111 of the door 110, and the shaft (140) by the piston (140) When the second actuator 150-2 is driven while the door 110 connected to the shaft 120 is connected to the first and second slots S1 and S2, the driving force is applied to the second connection link ( The first slot 130 is rotated to the right so that the second slot S1 is closed by the second blade 112 of the door 110. Allow S1 and S2 to be selectively opened and closed.

Here, the first and second connection links 160-1 and 160-2 are connected to the rotation protrusions 131 formed at both ends of the cylinder 130, respectively, and the other ends of the first and second actuators 150-1 and 150-2. Are respectively fixed to the rotating projection 131 is inserted to be guided to the guide hole 161 formed obliquely oblique with respect to the driving direction of the first / second actuators 150-1, 150-2, and the first / second When the actuators 150-1 and 150-2 are extended, the pivot protrusion 131 of the cylinder 130 is guided to the guide hole 161 of the first and second coupling links 160-1 and 160-2 and the first and second connections are made. Both sides of the cylinder 130 connected to the links 160-1 and 160-2 are selectively rotated in the left / right directions.

At this time, both ends of one end of the cylinder 130 are installed inside the valve housing H2 by the pivot member 132 so that the first and second actuators 150-1 and 150-2 can be rotated in the left / right directions. It is preferable to be.

In addition, the flange 101 of the valve housing H2 has a through hole (unsigned), which is a space in which the cylinder 130 can be rotated to the left or the right by the first and second actuators 150-1 and 150-2. It is preferable to be.

Accordingly, as described above, the first and second blades 111 and 112 for opening and closing the first and second slots S1 and S2 to open and close the first and second slots S1 and S2 inside the valve housing H2. And move the door 110 having a) in parallel to correspond to the first and second slots S1 and S2 through a single cylinder 130 and then selectively through the first and second actuators 150-1 and 150-2. Since the cylinder 130 is rotated perpendicularly to the first and second slots S1 and S2, the first and second blades 111 and 112 are selectively sealed to the first and second slots S1 and S2. The manufacturing cost of the semiconductor manufacturing equipment can be reduced by reducing the space of the valve housing H2 or the vacuum housing H1.

In addition, the first and second actuators 150-1 and 150-2 are provided to be parallel to the longitudinal direction of the shaft 120 that is flowed by the cylinder 130 inside the valve housing H2, thereby extending and operating. As such, it is possible to prevent the coupling portion of the valve housing H2 from being spaced apart.

In addition, since the first and second actuators 150-1 and 150-2 are provided parallel to the cylinder 130, the space of the valve housing H2 can be minimized.

Hereinafter, with reference to the drawings will be described the operation and effect of the slot valve according to a preferred embodiment of the present invention.

First, the process when the first slot S1 is closed by the first blade 111 of the slot valve will be described.

First, as shown in FIG. 5, when the inside of the cylinder 130 is raised by the air pressure of the piston 140 of the cylinder 130, the shaft 120 having one end connected to the piston 140 is the cylinder 130. The first and second slots so that the door 110 connected to the other end of the shaft 120 has a position corresponding to the first and second slots S1 and S2 of the vacuum housing H1. It rises in parallel with (S1, S2).

In this state, when the first actuator 150-1 connected to the lower end of the cylinder 130 via the first connection link 160-1 rises, the guide hole 161 of the first connection link 160-1 is raised. The rotation protrusion 131 of the cylinder 130 inserted into the guide is guided along the guide hole 161, and the cylinder 130, which is rotatably installed in the valve housing H2 by the pivot member 132, is provided in the first slot ( S1) is rotated vertically and thus the first blade 111 of the door 110 is in contact with the first slot (S1) to close the first slot (S1).

Meanwhile, a process when the second slot S2 is closed by the second blade 112 of the slot valve will be described below.

First, as shown in FIG. 6, when the inside of the cylinder 130 is raised by the air pressure of the piston 140 of the cylinder 130, the shaft 120 having one end connected to the piston 140 is the cylinder 130. The first and second slots (1, 2, and 2) have a position corresponding to the first and second slots S1 and S2 of the vacuum housing H1. It rises in parallel with respect to S1, S2).

In this state, when the second actuator 150-2 connected to the lower end of the cylinder 130 via the second connection link 160-2 rises, the guide hole 161 of the second connection link 160-2 is raised. The rotation protrusion 131 of the cylinder 130 inserted into the guide is guided along the guide hole 131, the cylinder 130 is installed rotatably in the valve housing (H2) by the pivot member 132, the second slot ( S2) is rotated vertically so that the second blade 112 of the door 110 is in contact with the second slot (S2) to close the second slot (S2).

On the other hand, the process when the moving passage of the workpiece of the slots selectively closed by the blades of the slot valve is opened is reversed when the slots are selectively closed by the blades.

Therefore, according to the present invention, the configuration of the door driver for opening and closing the first / second slots inside the valve housing so that the door for opening and closing the first / second slots corresponds to the first / second slots through a single cylinder. The valve housing is simply configured to selectively seal the first and second blades in the first and second slots by selectively rotating the cylinder perpendicularly to the first and second slots through a first and second actuator. Alternatively, the manufacturing cost of the semiconductor manufacturing equipment can be reduced by reducing the space of the vacuum housing.

In addition, the first and second actuators are provided to extend in parallel with the longitudinal direction of the shaft flowing by the cylinder in the valve housing, thereby preventing the coupling portions of the valve housing from being spaced apart as in the related art. The space of the valve housing can be minimized.

In addition, the operation of opening and closing the first and second slots through the door is performed by a door driving unit including a single cylinder and a pair of first and second actuators, thereby simplifying the control operation and rapidly progressing the semiconductor manufacturing process. You can do that.

While the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations and modifications without departing from the spirit or essential features of the present invention. It is to be understood that the present invention may be practiced in other specific forms, since modifications may be made. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

1A and 1B are front and side cross-sectional views schematically showing a conventional double winged slot valve, respectively;

2 to 4 are respectively a front view, a side perspective view and a side sectional view showing a slot valve according to a preferred embodiment of the present invention; And

5 and 6 are views illustrating a process of selectively opening and closing slots in the slot valve of FIG. 2, respectively.

* Drawing reference *

110: door 120: shaft

130: cylinder 131: rotating protrusion

132: pivot member 140: piston

150-1: first actuator 150-2: second actuator

160-1: first connection link 160-2: second connection link

161: Guide Ball

Claims (6)

A valve housing provided between the processing module PM side and the transfer module TM side to communicate with one side of the vacuum housing H1 in which the first and second slots S1 and S2, which are passages through which the workpiece is moved, are formed. (H2); A door 110 provided at an outer side of the valve housing H2; A shaft 120 connected to one end of the door 110; A cylinder 130 provided inside the valve housing H2; The first and second slots S1 are connected to the other end of the shaft 120 in the cylinder 130 so that the door 110 connected to the shaft 120 has a position corresponding to the first and second slots S1 and S2. Piston 140 for moving in parallel to S2; The first and second actuators 150 for rotating the cylinder 130 such that the shaft 120 is provided at the other end of the cylinder 130 through which the door 110 selectively contacts the first and second slots S1 and S2. -1,150-2); And A first connection link connected between the other end of the cylinder 130 and the first and second actuators 150-1 and 150-2 to transmit a driving force to rotate the cylinder 130 according to the selective driving of the actuator 150. And a slot valve (160-1, 160-2). 2. The slot valve according to claim 1, wherein the door (110) comprises first and second blades (111, 112) for selectively sealing the first slot (S1) and the second slot (S2), respectively. The slot valve according to claim 1, wherein the first and second actuators (150-1,150-2) are provided to be driven in a direction parallel to the driving direction of the cylinder (130). The first and second connection links 160-1 and 160-2 of the first and second coupling links 160-1 and 160-2 are connected to the pivoting protrusions 131 formed at both ends of the cylinder 130, respectively, and the other end of the first and second actuators 150 and 150 is provided. Slot valves, characterized in that fixed to -1,150-2. The first and second connection links 160-1 and 160-2 are inserted to guide the pivoting protrusion 131 and are obliquely oblique to the driving direction of the first and second actuators 150-1 and 150-2. Slot valve characterized in that it comprises a guide hole (161) formed. 6. The cylinder 130 of claim 5, wherein both ends of the cylinder 130 are positioned when the pivoting protrusion 131 is guided along the guide hole 161 when the first and second actuators 150-1 and 150-2 are driven. The slot valve, characterized in that installed in the valve housing (H2) by the pivot member 132 to be able to rotate in one direction or the other direction relative to the driving direction of the cylinder (130).
KR1020090028842A 2009-04-03 2009-04-03 Slot valve KR20100110488A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130055901A (en) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 Valve apparatus for vapor deposition of organic thin film
KR101293590B1 (en) * 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 Two way gate valve and substrate processing system having the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130055901A (en) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 Valve apparatus for vapor deposition of organic thin film
KR101293590B1 (en) * 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 Two way gate valve and substrate processing system having the same

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