KR20090048524A - Method for inspecting pressure mark using system for inspecting lcd panel - Google Patents

Abstract

The present invention relates to an indentation inspection method of an LCD panel inspection system for accurately grasping an error of a device caused by pressing in an LCD panel or a semiconductor element in an LCD panel inspection system using a microscope image.

The present invention extracts the indentation generated in the LCD panel or semiconductor device as an image using a microscopic image, and implements a new type of indentation inspection method to accurately identify the error of the device through the extracted indentation image, defect inspection for indentation Indentation test method of LCD inspection system that can perform effective and can obtain accurate data about indentation information, as well as accurate pass / fail determination of products and systematic management of indentation information such as LCD panel. to provide.

LCD Panel, Inspection System, Microscope, Indentation Counting, Image Measurement

Description

Method for inspecting pressure mark using system for inspecting LCD panel

The present invention relates to a method for inspecting an indentation using a microscope image in the LCD panel inspection system, and more particularly, an LCD panel inspection for precisely grasping an error of a device caused by pressing in an LCD panel or a semiconductor device. It relates to a method for inspecting the indentation of the system.

In general, LCD panels have characteristics such as low voltage driving, low power consumption, full color, light weight and small size, and are used for watches, calculators, PC monitors, notebooks, and so on. Is becoming diverse.

In order to manufacture such an LCD panel, first, a TFT (Thin Film Transistor) plate and a color filter plate are manufactured, and then the TFT plate and the color filter plate are bonded through an assembly process.

Then, when the TFT plate and the color filter plate are bonded, they are separated into each unit panel through a cutting process.

Subsequently, when the TFT plate and the color filter plate are bonded to each other and cut into LCD cells, liquid crystal is injected between the TFT plate and the color filter plate and then sealed to produce a single LCD display panel.

Normally, the LCD panel is subjected to various quality inspections after manufacturing, and an important quality inspection is inspection of defects on indentation caused by pressing.

If an indentation occurs due to excessive press on the LCD panel, a problem such as deterioration of the image quality due to light refracting of the light passing through the LCD cell occurs, and the degree of indentation greatly affects the pass / fail judgment of the product. Incomplete inspection of the indentation is an important part of the inspection items.

That is, it is essential to inspect the indentation inspection (indentation number, indentation strength, indentation length, indentation distribution) and the like during the quality inspection of the LCD panel.

At present, it is impossible to analyze the information on the indentation in the inspection method using the microscope image applied to the inspection system of the semiconductor or LCD panel.

As a result, it is impossible to establish a close countermeasure against defects such as indentations that occur repeatedly, and in particular, fail to effectively cope with the continuous failure of the semiconductor or LCD elements due to fixed pressing due to the poor installation of equipment. It is true.

As a way to solve this problem, water inspection using a naked eye or a tool microscope is being conducted, but there is an unproductive problem that requires a lot of manpower and takes a considerable amount of time to perform smooth inspection. There is a lack of systematic management of indentation information, such as low reliability and limitations on test items.

Accordingly, the present invention has been made in view of the above, and a new form of extracting an indentation generated in an LCD panel or a semiconductor element into an image using a microscopic image and accurately grasping an error of the element through the extracted indentation image By implementing the indentation inspection method, it is possible to efficiently perform inferior inspection on indentation and obtain accurate data on indentation information. Its purpose is to provide an indentation inspection method for LCD inspection systems that can be systematically managed.

The objects of the present invention are not limited to the above-mentioned objects, and other objects which are not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, indentation inspection method through a microscope image of the LCD panel inspection system according to an embodiment of the present invention, in the LCD panel inspection system, the inspection region designation step for specifying the inspection region of the LCD panel, the inspection An illumination step that provides appropriate illumination for the designated inspection area through the area designation step, an indentation counting step that counts the indentation using the illumination provided through the illumination step, and an indentation counting step that readjusts the lighting in case of a counting failure; If the indentation is successful, the display and storage steps include displaying and storing the chart in the form of a chart.

Here, the indentation counting step applied to the indentation inspection method through a microscope image of the LCD panel inspection system according to an embodiment of the present invention, the image input step of receiving color image information, the color image input through the image input step Indentation detection to detect indentation of the pad region separated by the image conversion step of converting to the gray image, the pad area separation step of separating the pad (pad) of the image converted by the image conversion step, the pad area separation step And an indentation counting step of counting the indentation detected through the indentation detecting step.

According to the indentation inspection method using the microscope image of the present invention as described above, it is possible to accurately grasp the indentation area and the resulting distribution according to the analysis of the microscopic image data, thereby preventing the occurrence of periodic defects There is an advantage that can effectively cope with problems.

In addition, it is possible to improve the reliability of the inspection results such as the accuracy of the data as well as to quickly and smoothly inspect the good image quality and the clear indentation image in an optimal state. In addition, inspection of items such as distribution can be performed, and thus it is possible to accurately determine the pass / fail of the product.

In addition, it is possible to secure the indentation image in an optimal state through a microscope image, there is an advantage that can be applied universally regardless of the specifications or specifications of the LCD panel or semiconductor device.

Indentation inspection method of the LCD panel inspection system provided in one embodiment of the present invention, that is, more specifically, microscopic image indentation counting method, after specifying the inspection area, provides the appropriate illumination for the specified inspection area, and then continues The indentation is counted using the provided light, and if the indentation counts successfully, the indentation counts and displays it in chart form.In case of a counting failure, the indentation counting is performed, and then the indentation counting is performed again. .

In particular, the detailed process for the indentation counting first, after receiving the color image information, converts the input color image to a gray image, and separates the pad (pad) region from the converted image, and then separated the pad The process consists of detecting the indentation of the area and then counting the detected indentation.

Further details of other embodiments are included in the detailed description and the drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be embodied in various different forms, and the present embodiments are merely common knowledge in the technical field to which the present disclosure is completed and to which the present invention pertains. It is provided to fully inform the person having the scope of the invention, the invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a flowchart showing a method for inspecting indentation through a microscope image of the LCD panel inspection system according to an embodiment of the present invention, Figure 2 is a test for indentation through a microscope image of the LCD panel inspection system according to an embodiment of the present invention Detailed flowchart of the indentation counting step in the method.

As shown in FIG. 1, the indentation inspection process for the LCD panel basically loads the LCD panel on the stage, inspects the indentation of the LCD panel by the image information obtained by photographing the loaded LCD panel, and finishes the inspection. Unloading the LCD panel.

The stage where the LCD panel is loaded is moved into the working area of the microscope image to reach the microscope position and the inspection is performed.

As a prerequisite for indentation (counting) of LCD panels, the object is 10x and the reflector is DIC.

First, an inspection region designation step S110 of designating an inspection region of an LCD panel is performed.

The user-specified area, the whole area, and the partial / whole automatic division area setting function sets an arbitrary unit area on the LCD panel and checks for indentations existing within the unit area.

In this case, the inspection area may be appropriately adjusted, and the inspection area may be appropriately selected according to the inspection environment.

Next, when the designation of the inspection area is completed, an illumination step of providing appropriate illumination for the designated inspection area is performed (S120).

In the lighting step, a process of optimizing the indentation image through adjusting the DIC prism and adjusting the brightness is performed as a step for providing clear and optimal image information.

When the illumination is provided in the lighting step, the step of inspecting the indentation, that is, counting the indentation proceeds (S130).

That is, the indentation in the inspection area is captured as an image by the microscope.

The capture signal generated at the same time as the indentation image is captured is applied to the control means, and the control means counts the indentation using an algorithm.

Next, if the indentation counting step is successful in the indentation counting step, a display step of displaying it in the form of a chart is performed (S150), and the step of continuously storing as an image is performed (S160).

For example, the number of counts for each pad and region may be displayed in the indentation test result, and the distribution may be displayed in the indentation graph.

Meanwhile, if the indentation counting fails in the indentation counting step, the process returns to the step of retrying the area designation and illumination provision (S140).

The inspection area designation, lighting provision, indentation counting, display and storage steps above are repeated. If the stage including the LCD panel is transferred and the position where the stage is transferred is not the last inspection area, the indentation image The inspection is repeated. When the stage including the LCD panel is transferred and the transferred position is the last inspection area, the inspection is terminated by ending the indentation image inspection and unloading the LCD panel.

As shown in Fig. 2, the detailed procedure of the indentation inspection, that is, the specific step of counting the indentation is shown here.

First, a step of obtaining an image through a microscope (camera) is performed in a state where inspection region designation and illumination provision are completed (S210).

That is, an image input step of receiving color image information is performed.

Next, an image conversion step S220 of converting the color image input through the image input step into a gray image is performed.

This process is part of the preprocessing of the Image Processing procedure for detecting and counting indentations.

Next, a pad region separation step S230 of separating a pad region of an image converted through the image conversion step is performed.

For example, an image processing process may be performed by cutting only a pad portion from the acquired entire image.

Next, an indentation detecting step of detecting the indentation of the pad region separated by the pad region separation step is performed (S240). That is, a process of detecting and indexing indentations in the detected pad portion is performed.

Subsequently, the indentation counting step (S250) of counting the detected indentation is performed, and the overall indentation counting process is completed.

In the indentation counting step S250, the user may set the area automatically or manually through the partial / whole division function, and may automatically calculate data such as the number, area, and distribution using the start button.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. I can understand that. Therefore, the embodiments described above are to be understood in all respects as illustrative and not restrictive.

1 is a flow chart showing the indentation inspection method of the LCD panel inspection system according to an embodiment of the present invention.

FIG. 2 is a flowchart illustrating the indentation counting process in more detail in the indentation inspection method of FIG. 1.

Claims (2)

LCD panel inspection system, An inspection region designation step of designating an inspection region of the LCD panel; An illumination step of providing appropriate illumination for a designated inspection area through the inspection area designation step; An indentation counting step of counting the indentation using the illumination provided through the illumination step, and readjusting the illumination in case of a counting failure; And If the indentation counting through the indentation counting step, the indentation inspection method of the LCD panel inspection system comprising a display and storage step of displaying and storing in the form of a chart. The method according to claim 1, The indentation counting step may include an image input step of receiving color image information; An image conversion step of converting the color image input through the image input step into a gray image; A pad area separation step of separating a pad area of an image converted through the image conversion step; An indentation detecting step of detecting an indentation of the pad area separated by the pad area separating step; And Indentation inspection method of the LCD panel inspection system comprising a indentation counting step of counting the indentation detected through the indentation detection step.

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