KR20070032623A - 유도성 클램프를 구비한 e급 증폭기 - Google Patents
유도성 클램프를 구비한 e급 증폭기 Download PDFInfo
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- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
- H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
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- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
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- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/493—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
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- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
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- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
- H03F3/2176—Class E amplifiers
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- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
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Abstract
Description
부하 | DC전류 (암페어) | RF 전송전력 (와트) | 소비전력 (와트) | 피크 PET 전류 (암페어) | 다이오드 전류 (암페어) | |
50옴 | 1.71 | 465 | 48 | 10 | 4 | |
개방회로 | 0.109 | 138 | 33 | 10 | 0 | |
유도성 | 200옴 | 0.139 | 145 | 42 | 12 | 0 |
100 | 0.162 | 157 | 49 | 13 | 0 | |
50 | 0.226 | 176 | 68 | 14 | 10 | |
25 | 0.240 | 155 | 72 | 14 | 18 | |
12 | 0.242 | 149 | 73 | 13 | 23 | |
단락회로 | 0.204 | 202 | 61 | 10 | 24 | |
용량성 | 12옴 | 0.184 | 231 | 55 | 9 | 23 |
25 | 0.173 | 342 | 52 | 7 | 23 | |
50 | 0.071 | 300 | 22 | 4 | 0 | |
100 | 0.073 | 190 | 22 | 7 | 0 | |
200 | 0.088 | 150 | 26 | 9 | 0 |
부하 | DC 전류 (암페어) | RF 전송전력 (와트) | 소비전력 (와트) | 피크 PET 전류 (암페어) | |
50옴 | 1.86 | 514 | 44 | 10 | |
유도성 | 50옴 | 0.25 | 241 | 75 | 15 |
25 | 0.41 | 424 | 124 | 18 | |
12 | 220V에서0.36 | 331 | 73 | 14 | |
단락회로 | 42V에서2.15 | 752 | 90 | 14 | |
용량성 | 12옴 | 40V에서0.46 | 53 | 23 | 2.0 |
25 | 50V에서0.12 | 21 | 6 | 0.5 |
Claims (33)
- 직류(DC) 전압의 소스와,상기 DC 입력전압을 받아들이고 교류전류(AC) 출력신호를 발생시키는 E급 증폭기와,상기 증폭기의 출력부에서 상기 AC 신호의 기설정된 고조파 성분을 여과하여 여과된 AC 신호를 발생시키는 제 1 고조파 필터(harmonic filter)와,상기 여과된 AC 신호를 수신하고 상기 여과된 AC 신호를 부하에 공급하기 위해 상기 제 1 고조파 필터의 출력부에 출력회로를 구비하고,상기 출력회로는 상기 출력회로내의 한 지점에 대해 연결된 정류기를 포함하여 상기 지점에서의 전압이 기설정된 임계치를 초과하는 경우 상기 정류기가 전압 및 전류 중 적어도 하나를 상기 DC 전압의 소스로 복귀시키게 하고 상기 지점을 기설정된 전압으로 클램프시키게 수행되는 부하에 교류전원을 공급하기 위한 전원회로.
- 제 1 항에 있어서,상기 출력회로는 상기 부하와 병렬 연결된 정류기를 포함하는 전원회로.
- 제 1 항에 있어서,상기 제 1 고조파 필터는 직렬의 인덕터와 커패시터를 포함하고, 상기 제 1 고조파 필터는 증폭기의 스위치와는 병렬로 배치되는 전원회로.
- 제 1 항에 있어서,상기 제 1 고조파 필터는 인덕터와 커패시터를 포함하고, 상기 인덕터는 상기 증폭기 스위치의 출력부와 상기 정류기의 단자 사이에 배치되는 전원회로.
- 제 1 항에 있어서,상기 정류기는 다이오드를 더 구비하고, 상기 제 1 고조파 필터는 인덕터와 커패시터를 포함하며, 상기 인덕터는 상기 증폭기 스위치의 출력부와 상기 다이오드의 음극 사이에 배치되는 전원회로.
- 제 1 항에 있어서,병렬로 배열된 복수의 증폭기를 더 구비하는 전원회로.
- 제 1 항에 있어서,상기 부하와 병렬로 배열된 제 2 고조파 필터를 더 구비하고, 상기 제 2 고조파 필터는 상기 여과된 AC 신호로부터 기설정된 고조파 성분을 더 여과하는 전원회로.
- 직류(DC) 전압의 소스와,상기 DC 입력전압을 받아들이고 교류전류(AC) 출력신호를 발생시키며, 푸쉬-풀(push-pull) 구성으로 배열되는 한 쌍의 E급 증폭기와,상기 각 증폭기의 출력부에서, 상기 AC 신호의 기설정된 고조파 성분을 여과하여 여과된 AC 신호를 발생시키는 제 1 고조파 필터와,상기 여과된 AC 신호를 수신하고 상기 여과된 AC 신호를 부하에 공급하기 위해 상기 각각의 제 1 고조파 필터의 출력부에 출력회로를 구비하고,상기 출력회로는 상기 출력회로내의 한 지점에 대해 연결된 정류기를 포함하여 상기 지점에서의 전압이 기설정된 임계치를 초과하는 경우 상기 정류기가 전압 및 전류 중 적어도 하나를 상기 DC 전압의 소스로 복귀시키게 하고 상기 지점을 기설정된 전압으로 클램프시키게 수행되는 부하에 교류전원을 공급하기 위한 전원회로.
- 제 8 항에 있어서,상기 DC 전압 소스의 제 1 레일에 연결된 스위치와,상기 DC 전압 소스의 제 1 및 제 2 전압 레일 사이에 연결된 공진회로를 구비하고,상기 스위치의 동작으로 상기 공진회로에 전압이 인가되는 전원회로.
- 제 9 항에 있어서,상기 공진회로는상기 DC 전압 소스의 스위치 및 제 2 레일 사이에 연결된 인덕터와,상기 스위치와 병렬로 된 커패시터를 더 구비하는 전원회로.
- 제 9 항에 있어서,상기 제 1 고조파 필터의 출력부에 상기 제 2 고조파 필터를 더 구비하고, 상기 제 2 고조파 필터는 상기 여과된 AC 신호로부터 고조파 성분을 제거하여 출력 신호를 생성하는 전원회로.
- 제 11 항에 있어서,상기 제 2 고조파 필터는 상기 부하와 병렬로 배열된 인덕터를 구비하는 전원회로.
- 제 11 항에 있어서,상기 제 2 고조파 필터의 출력으로부터 DC 성분을 제거하기 위해 상기 제 2 고조파 필터에 블로킹 커패시터(blocking capacitor)를 더 구비하는 전원회로.
- 제 8 항에 있어서,상기 제 1 고조파 필터는 직렬의 인덕터와 커패시터를 포함하고, 상기 제 1 고조파 필터는 상기 증폭기의 스위치와 병렬로 배열되는 전원회로.
- 제 9 항에 있어서,상기 제 1 고조파 필터는 인덕터와 커패시터를 포함하고, 상기 인덕터는 상기 스위치의 출력부와 상기 정류기의 단자 사이에 배열되는 전원회로.
- 제 15 항에 있어서,상기 제 2 고조파 필터는 인덕터를 포함하고, 상기 인덕터는 상기 부하와 병렬로 배열되는 전원회로.
- 제 9 항에 있어서,상기 증폭기는 상기 부하와 병렬로 배열되는 복수의 증폭기를 더 구비하는 전원회로.
- 제 9 항에 있어서,상기 각각의 증폭기는 하프회로를 형성하고 트랜스포머(transformer)가 각 하프회로를 상호연결시키는 전원회로.
- 제 18 항에 있어서,상기 각각의 하프회로의 출력부를 상기 부하와 상호연결시킴으로써 균형된 부하를 제공하는 제 2 트랜스포머를 포함하는 전원회로.
- 직류(DC) 전압의 소스와,상기 DC 입력전압을 받아들이고 교류전류(AC) 출력신호를 발생시키기 위해 병렬로 배열된 한 쌍의 E급 증폭기와,상기 증폭기의 출력부에서, 상기 AC 신호의 기설정된 고조파 성분을 여과하여 여과된 AC 신호를 발생시키는 제 1 고조파 필터와,상기 여과된 AC 신호를 수신하고 상기 여과된 AC 신호를 부하에 공급하기 위해 상기 각각의 제 1 고조파 필터의 출력부에 출력회로를 구비하고,상기 출력회로는 상기 출력회로내의 한 지점에 대해 연결된 정류기를 포함하여 상기 지점에서의 전압이 기설정된 임계치를 초과하는 경우 상기 정류기가 전압 및 전류 중 적어도 하나를 상기 DC 전압의 소스로 복귀시키게 하고 상기 지점을 기설정된 전압으로 클램프시키게 수행되는 부하에 교류전원을 공급하기 위한 전원회로.
- 제 20 항에 있어서,상기 각각의 증폭기는DC 전압 소스의 제 1 레일에 연결된 스위치와,상기 DC 전압 소스의 제 1 및 제 2 전압 레일 사이에 연결된 공진회로를 더 구비하고,상기 스위치를 동작시킴으로써 상기 공진회로에 전압이 가해지는 전원회로.
- 제 21 항에 있어서,상기 공진회로는상기 DC 전압 소스의 상기 스위치와 상기 제 2 레일 사이에 연결된 인덕터와,상기 스위치와 병렬인 커패시터를 더 구비하는 전원회로.
- 제 21 항에 있어서,상기 제 1 고조파 필터의 출력부에 제 2 고조파 필터를 더 구비하고, 상기 제 2 고조파 필터는 상기 여과된 AC 신호로부터 고조파 성분을 제거하여 출력 신호를 발생시키는 전원회로.
- 제 23 항에 있어서,상기 제 2 고조파 필터는 상기 부하와 병렬로 배열된 인덕터를 구비하는 전원회로.
- 제 23 항에 있어서,상기 제 2 고조파 필터의 출력으로부터 DC 성분을 제거하기 위해 상기 제 2 고조파 필터의 출력부에 블로킹 커패시터를 더 구비하는 전원회로.
- 제 25 항에 있어서,상기 제 1 고조파 필터는 직렬의 인덕터와 커패시터를 포함하고, 상기 제 1 고조파 필터는 상기 증폭기의 스위치와 병렬로 배열되는 전원회로.
- 제 23 항에 있어서,상기 제 1 고조파 필터는 인덕터와 커패시터를 포함하고, 상기 인덕터는 상기 스위치의 출력부와 상기 정류기의 단자 사이에 배열되는 전원회로.
- 제 27 항에 있어서,상기 제 2 고조파 필터는 인덕터를 포함하고, 상기 인덕터는 상기 부하와 병렬로 배열되는 전원회로.
- 제 20 항에 있어서,제 2 쌍의 E급 증폭기를 더 구비하고, 상기 각각의 제 2 쌍의 E급 증폭기는 상기 제 1 쌍의 E급 증폭기와 병렬로 배열되는 전원회로.
- 제 29 항에 있어서,상기 각 쌍의 증폭기는 하프회로를 형성하고 트랜스포머가 각 하프회로를 상호연결시키는 전원회로.
- 제 30 항에 있어서,상기 각 하프회로의 출력을 상기 부하와 상호연결시키는 제 2 트랜스포머를 더 구비하고, 이에 의해 균형잡힌 부하를 제공하는 전원회로.
- 무선주파수(RF) 신호에 의해 여기된 플라즈마 챔버와,상기 플라즈마 챔버의 동작 상태를 측정하고 상기 플라즈마 챔버내의 상태를 변경시키기 위해 제어신호를 발생하기 위한 플라즈마 컨트롤러와,상기 플라즈마 챔버에 RF 신호를 발생하기 위한 RF 발생기와,상기 플라즈마 제어기로부터 제어신호를 수신하고 전원 제어신호를 발생하는 RF 컨트롤러와,상기 전원 제어신호를 수신하고 상기 전원 제어신호에 따라 RF 신호를 발생하기 위한 전원을 구비하고,상기 전원은직류(DC) 전압의 소스와,상기 DC 입력전압을 받아들이고 교류전류(AC) 출력신호를 발생시키는 E급 증폭기와,상기 증폭기의 출력부에서, 상기 AC 신호의 기설정된 고조파 성분을 여과하여 여과된 AC 신호를 발생시키는 제 1 고조파 필터를 포함하며,상기 전원은 기설정된 지점에 대해 연결된 정류기를 포함하는 보호회로를 구비하여 상기 지점에서의 전압이 기설정된 임계치를 초과하는 경우 상기 정류기가 상기 지점에서의 전압을 기설정된 전압으로 클램프시키도록 수행되는 플라즈마 제 어 시스템.
- 제 32 항에 있어서,상기 출력회로는 전압 및 전류 중 적어도 하나를 상기 증폭기로 복귀시키는 플라즈마 제어 시스템.
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US10/760,174 | 2004-01-16 | ||
US10/760,174 US7180758B2 (en) | 1999-07-22 | 2004-01-16 | Class E amplifier with inductive clamp |
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KR1020067014315A KR101046282B1 (ko) | 2004-01-16 | 2004-08-25 | 유도성 클램프를 구비한 e급 증폭기 |
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US (2) | US7180758B2 (ko) |
EP (2) | EP3598624A1 (ko) |
JP (1) | JP4972411B2 (ko) |
KR (1) | KR101046282B1 (ko) |
CN (3) | CN103124067B (ko) |
WO (1) | WO2005074413A2 (ko) |
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-
2004
- 2004-01-16 US US10/760,174 patent/US7180758B2/en not_active Expired - Lifetime
- 2004-08-25 JP JP2006549233A patent/JP4972411B2/ja active Active
- 2004-08-25 CN CN201310044812.1A patent/CN103124067B/zh active Active
- 2004-08-25 KR KR1020067014315A patent/KR101046282B1/ko active IP Right Grant
- 2004-08-25 EP EP19190566.0A patent/EP3598624A1/en active Pending
- 2004-08-25 CN CN2012101891983A patent/CN102684164A/zh active Pending
- 2004-08-25 CN CNA2004800349267A patent/CN101061615A/zh active Pending
- 2004-08-25 EP EP04782105.3A patent/EP1735889B1/en active Active
- 2004-08-25 WO PCT/US2004/027544 patent/WO2005074413A2/en active Application Filing
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Also Published As
Publication number | Publication date |
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US20070206395A1 (en) | 2007-09-06 |
CN103124067A (zh) | 2013-05-29 |
CN101061615A (zh) | 2007-10-24 |
WO2005074413A2 (en) | 2005-08-18 |
US7180758B2 (en) | 2007-02-20 |
EP1735889A2 (en) | 2006-12-27 |
EP1735889B1 (en) | 2019-10-09 |
KR101046282B1 (ko) | 2011-07-04 |
WO2005074413A3 (en) | 2006-10-19 |
JP2007519340A (ja) | 2007-07-12 |
CN103124067B (zh) | 2017-04-26 |
CN102684164A (zh) | 2012-09-19 |
EP3598624A1 (en) | 2020-01-22 |
EP1735889A4 (en) | 2010-08-11 |
US20060158911A1 (en) | 2006-07-20 |
US7397676B2 (en) | 2008-07-08 |
JP4972411B2 (ja) | 2012-07-11 |
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