JP4972411B2 - 誘導性クランプを備えたe級増幅器 - Google Patents
誘導性クランプを備えたe級増幅器 Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/10—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers
- H02H7/12—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers
- H02H7/122—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers for inverters, i.e. dc/ac converters
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
- H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/32—Means for protecting converters other than automatic disconnection
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/493—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/52—Circuit arrangements for protecting such amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
- H03F3/2173—Class D power amplifiers; Switching amplifiers of the bridge type
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
- H03F3/2176—Class E amplifiers
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/33—Bridge form coupled amplifiers; H-form coupled amplifiers
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/441—Protection of an amplifier being implemented by clamping means
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Description
本出願は、2003年9月8日に出願した米国特許出願第10/657,825号の一部継続出願であり、この米国特許出願は、2002年8月23日に出願した米国特許出願第10/227,613号の継続出願である。この継続出願は、2001年3月26日に出願した米国特許出願第09/763,500号の継続出願であり、この米国特許出願は、2000年7月21日に出願した国際特許出願を米国に国内移行した出願PCT/US00/19835号である。この国際特許出願は、1999年7月22日に出願した英国特許出願第9917047.4号および2000年4月20日に出願した英国特許出願第0009669.3号に基づく優先権を主張している。これらの出願の開示内容は、参照によって本明細書に組込まれる。
この発明は、一般に、交流電力を供給するための電源に関し、より詳細には、電源のスイッチング部分をE級増幅器として実施する電源におけるスイッチング部分のための保護回路に関する。
高周波(RF)エネルギーは、誘導加熱、誘電加熱およびプラズマ励起により、材料の処理をするための様々な産業において用いられる。プラズマ励起は、誘導性、容量性、真電磁(EM)波、マイクロ波の結合の形態をとることができる。このRFエネルギーを提供する発生器は、数十ワットを提供する単一のA級トランジスタ増幅器から、何千ワットをも提供する自励発振管(バルブ)発生器までにおよぶ、多くの回路形態を用いる。
本発明の一つの態様においては、DC入力部を有する電源回路は、負荷に交流電力を供給する。インバータが交流出力を生成し、出力回路が交流出力を直接的に受取り、それを負荷にフィードする。出力回路は、出力回路中の1点に関連して接続された第1および第2整流器を含み、これにより、インバータがその点を、所定の正電圧または所定の負電圧のいずれかを超える電圧まで駆動しようとした場合に、第1および第2整流器の対応する一方が、電圧および/または電流をDC電圧源に戻すように導通する。電圧および/または電流はインバータ内に帰還される。このことは、たとえば、第1整流器を、接地またはDC入力部の負側の入力と上記の点との間に接続し、第2整流器を、上記の点とDC電圧の正側の入力との間に接続することにより、達成可能である。いずれかの整流器が導通すると、その整流器は上記の点を、DC入力部のうちの対応する入力の電圧にクランプすることが理解されよう。
本発明は、詳細な説明および添付の図面によって、より完全に理解されるであろう。
好適な実施形態の以下の説明は、本質的に例示に過ぎず、決して、本発明、その用途または使用を限定することを意図したものではない。
V=V2+VBE(式中、VBE≒0.6V)
I=I2+IQ(式中、IQ≒HFE×I2であり、HFE≒100であるので、IQ≫I2であり、PQ≫P2)
C6およびC1の静電容量Cは、以下の式(2)で求められる。
コイルL1およびL3のインダクタンスLは、以下の式(3)で求められる。
Claims (30)
- 負荷に交流電力を供給するための電源回路であって、
直流(DC)電圧源と、
DC入力電圧が与えられ、交流(AC)出力信号を生成するE級増幅器と、
E級増幅器のスイッチの出力部に配置され出力AC信号を生成するように構成されるコイル、およびコンデンサと、
出力AC信号が与えられ、出力AC信号を負荷にフィードする出力回路とを含み、
出力回路は、出力回路中のある点に関連して接続された整流器を含み、前記整流器は、前記点における電圧が所定の閾値を超える場合に、導通して、電圧および電流の少なくとも一方をDC電圧源に戻し、前記点を所定の電圧にクランプするように接続され、
コイルは、整流器と増幅器のスイッチの出力部との間に配置されていることを特徴とする負荷に交流電力を供給するための電源回路。 - 整流器は、負荷と並列に接続されることを特徴とする請求項1記載の電源回路。
- コイルとコンデンサとが直列に配置されることを特徴とする請求項1記載の電源回路。
- 整流器は、ダイオードをさらに含み、コイルは、増幅器のスイッチの出力部とダイオードの負極との間に配置されることを特徴とする請求項1記載の電源回路。
- さらに、並列に配置された複数の増幅器を含むことを特徴とする請求項1記載の電源回路。
- さらに、負荷と並列に配置される高調波フィルタであって、出力AC信号から所定の高調波成分をさらにフィルタする高調波フィルタを含むことを特徴とする請求項1記載の電源回路。
- 負荷に交流電力を供給するための電源回路であって、
直流(DC)電圧源と、
DC入力電圧が与えられ、交流(AC)出力信号を生成する一対のE級増幅器であって、プッシュプル構成に配列される一対のE級増幅器と、
E級増幅器のスイッチの出力部に配置されAC出力信号を生成するように構成されるコイル、およびコンデンサと、
出力AC信号が与えられ、出力AC信号を負荷にフィードする出力回路とを含み、
出力回路は、出力回路中のある点に関連して接続された整流器を含み、前記整流器は、前記点における電圧が所定の閾値を超える場合に、導通して、電圧および電流の少なくとも一方をDC電圧源に戻し、前記点を所定の電圧にクランプするように接続され、
コイルは、整流器と増幅器のスイッチの出力部との間に配置されていることを特徴とする負荷に交流電力を供給するための電源回路。 - 各増幅器は、
DC電圧源の第1の線に接続されているスイッチと、
DC電圧源の第1の電圧線および第2の電圧線の間に接続された共振回路とを含み、
スイッチを動作させることにより共振回路が励起されることを特徴とする請求項7記載の電源回路。 - 共振回路はさらに、
スイッチとDC電圧源の第2の線との間に接続されたコイルと、
スイッチと並列なコンデンサとを含むことを特徴とする請求項8記載の電源回路。 - さらに、出力回路に接続された高調波フィルタであって、出力AC信号から高調波成分を除去して出力信号を生成する高調波フィルタを含むことを特徴とする請求項8記載の電源回路。
- 高調波フィルタは、負荷と並列に配置される少なくとも1つのコイルを含むことを特徴とする請求項10記載の電源回路。
- さらに、高調波フィルタの出力からDC成分を除去するための、高調波フィルタの出力部におけるブロッキングコンデンサを含むことを特徴とする請求項10記載の電源回路。
- コイルとコンデンサとが直列に配置されることを特徴とする請求項7記載の電源回路。
- 高周波フィルタは、コイルを含み、コイルは負荷と並列に配置されることを特徴とする請求項13記載の電源回路。
- 増幅器はさらに、負荷と並列に配置される複数の増幅器を含むことを特徴とする請求項8記載の電源回路。
- 各増幅器は、回路半部を形成し、変圧器は、各回路半部を相互接続することを特徴とする請求項8記載の電源回路。
- 第2変圧器は、各回路半部の出力部と負荷とを相互接続し、これによってバランスの取れた負荷を提供することを特徴とする請求項16記載の電源回路。
- 負荷に交流電力を供給するための電源回路であって、
直流(DC)電圧源と、
DC入力電圧が与えられ、交流(AC)出力信号を生成する、並列に配置された一対のE級増幅器と、
各E級増幅器のスイッチの出力部に配置され出力AC信号を生成するように構成されるコイル、およびコンデンサと、
各出力AC信号が与えられ、各出力AC信号を負荷にフィードするための、一対の出力回路とを含み、
出力回路は、出力回路中のある点に関連して接続された整流器を含み、前記整流器は、前記点における電圧が所定の閾値を超える場合に、導通して、電圧および電流の少なくとも一方をDC電圧源に戻し、前記点を所定の電圧にクランプするように接続され、
コイルは、整流器と増幅器のスイッチの出力部との間に配置されていることを特徴とする負荷に交流電力を供給するための電源回路。 - 各増幅器はさらに、
DC電圧源の第1の線に接続されたスイッチと、
DC電圧源の第1および第2電圧線の間に接続された共振回路とを含み、
スイッチを動作させることにより共振回路が励起されることを特徴とする請求項18の電源回路。 - 共振回路はさらに、
スイッチとDC電圧源の第2の線との間に接続されたコイルと、
スイッチと並列なコンデンサとを含むことを特徴とする請求項19の電源回路。 - さらに、出力回路に接続された高調波フィルタであって、出力AC信号から高調波成分を除去して出力信号を生成する高調波フィルタを含むことを特徴とする請求項19の電源回路。
- 高調波フィルタは、負荷と並列に配置されたコイルを含むことを特徴とする請求項21の電源回路。
- さらに、高調波フィルタの出力からDC成分を除去するための、高調波フィルタの出力部におけるブロッキングコンデンサを含むことを特徴とする請求項21の電源回路。
- コイルとコンデンサとが直列に配置されることを特徴とする請求項23の電源回路。
- 高調波フィルタは、コイルを含み、コイルは負荷と並列に配置されることを特徴とする請求項24の電源回路。
- さらに、第2の一対のE級増幅器を含み、第2の一対の各E級増幅器は、第1の一対のE級増幅器と並列に配置されることを特徴とする請求項18の電源回路。
- 一対の増幅器は各回路半部を形成し、変圧器は、各回路半部を相互接続することを特徴とする請求項26の電源回路。
- さらに、各回路半部の出力部を負荷と相互接続する第2変圧器を含み、これによってバランスの取れた負荷を提供することを特徴とする請求項27の電源回路。
- プラズマ制御システムであって、
高周波(RF)信号により励起されるプラズマチャンバと、
プラズマチャンバの動作条件を測定し、プラズマチャンバ内の条件を変えるための制御信号を生成するためのプラズマ制御器と、
プラズマチャンバに与えるRF信号を発生するためのRF発生器であって、
プラズマ制御器からの制御信号が与えられ、電力供給制御信号を生成するRF制御器と、
電力供給制御信号が与えられ、電力供給制御信号に応じてRF信号を生成する電源とを含むRF発生器とを備え、
電源は、
直流(DC)電圧源と、
DC入力電圧が与えられ、交流(AC)出力信号を生成するE級増幅器と、
E級増幅器のスイッチの出力部に配置され出力AC信号を生成するコイル、およびコンデンサとを含み、
所定の点に関連して接続された整流器を含む保護回路を含み、前記整流器は、前記点における電圧が所定の閾値を超える場合に、導通して、前記点における電圧を所定の電圧にクランプするように接続され、
コイルは、増幅器のスイッチの出力部と整流器との間に配置されていることを特徴とするプラズマ制御システム。 - 出力回路は、増幅器に戻すために、電圧および電流の少なくとも一方を戻すことを特徴とする請求項29のプラズマ制御システム。
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---|---|---|---|
US10/760,174 | 2004-01-16 | ||
US10/760,174 US7180758B2 (en) | 1999-07-22 | 2004-01-16 | Class E amplifier with inductive clamp |
PCT/US2004/027544 WO2005074413A2 (en) | 2004-01-16 | 2004-08-25 | Class e amplifier with inductive clamp |
Publications (2)
Publication Number | Publication Date |
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JP4972411B2 true JP4972411B2 (ja) | 2012-07-11 |
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---|---|---|---|
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Country Status (6)
Country | Link |
---|---|
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EP (2) | EP3598624A1 (ja) |
JP (1) | JP4972411B2 (ja) |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10461731B2 (en) | 2016-09-30 | 2019-10-29 | Ulvac, Inc. | Power supply device |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7180758B2 (en) * | 1999-07-22 | 2007-02-20 | Mks Instruments, Inc. | Class E amplifier with inductive clamp |
JP2006527979A (ja) * | 2003-06-19 | 2006-12-07 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 反射電力決定 |
CN100426056C (zh) * | 2005-08-26 | 2008-10-15 | 鸿富锦精密工业(深圳)有限公司 | 多灯管驱动***及方法 |
JP2007104576A (ja) * | 2005-10-07 | 2007-04-19 | Sony Corp | スイッチング回路及びディジタルアンプ |
TWM301464U (en) * | 2006-03-20 | 2006-11-21 | Shiu Shiou Yu | AC power controller |
US7511462B2 (en) * | 2006-08-07 | 2009-03-31 | Addtek Corp. | DC power conversion circuit having self-auxiliary power and self-protection |
US7688045B2 (en) * | 2006-08-07 | 2010-03-30 | Addtek Corp. | DC power conversion circuit with constant current output |
US7839234B2 (en) * | 2006-10-02 | 2010-11-23 | Skyworks Solutions, Inc. | Switching module with harmonic phase tuning filter |
US7808342B2 (en) * | 2006-10-02 | 2010-10-05 | Skyworks Solutions, Inc. | Harmonic phase tuning filter for RF switches |
US7777567B2 (en) * | 2007-01-25 | 2010-08-17 | Mks Instruments, Inc. | RF power amplifier stability network |
US20080303491A1 (en) * | 2007-06-07 | 2008-12-11 | Samsung Electronics Co., Ltd | Switched-mode power supply quasi-resonant converter, switch control circuit controlling switching operations of switched-mode power supply quasi-resonant converter, and input signal processing circuit connected to control integrated circuit of switch control circuit |
US7817966B2 (en) * | 2007-07-13 | 2010-10-19 | Skyworks Solutions, Inc. | Switching device with reduced intermodulation distortion |
US7646260B2 (en) * | 2007-07-13 | 2010-01-12 | Skyworks Solutions, Inc. | Switching device with selectable phase shifting modes for reduced intermodulation distortion |
WO2009012735A1 (de) * | 2007-07-23 | 2009-01-29 | Hüttinger Elektronik Gmbh + Co. Kg | Plasmaversorgungseinrichtung |
JP2009059662A (ja) * | 2007-09-03 | 2009-03-19 | Mitsubishi Electric Corp | 電力開閉装置およびその制御方法 |
US7592872B2 (en) * | 2007-10-10 | 2009-09-22 | Atmel Corporation | Differential amplifier with single ended output |
US7760018B2 (en) * | 2007-12-31 | 2010-07-20 | Tialinx, Inc. | High-efficiency switching power amplifiers with low harmonic distortion |
US7791912B2 (en) * | 2008-05-02 | 2010-09-07 | Advanced Energy Industries, Inc. | Protection method, system and apparatus for a power converter |
US8391025B2 (en) | 2008-05-02 | 2013-03-05 | Advanced Energy Industries, Inc. | Preemptive protection for a power convertor |
US7872523B2 (en) * | 2008-07-01 | 2011-01-18 | Mks Instruments, Inc. | Radio frequency (RF) envelope pulsing using phase switching of switch-mode power amplifiers |
US8060040B2 (en) * | 2008-08-18 | 2011-11-15 | Telefonaktiebolaget Lm Ericsson (Publ) | True root-mean-square detection with a sub-threshold transistor bridge circuit |
EP2319167A1 (de) * | 2008-08-27 | 2011-05-11 | Hüttinger Elektronik GmbH & Co. KG | Plasmaleistungsversorgung |
US8054135B2 (en) * | 2008-12-05 | 2011-11-08 | General Electric Company | Class-E amplifier and lighting ballast using the amplifier |
JP5017346B2 (ja) * | 2009-10-19 | 2012-09-05 | 株式会社東芝 | 電力増幅装置 |
FR2961966B1 (fr) * | 2010-06-25 | 2012-07-13 | Valeo Sys Controle Moteur Sas | Procede de charge de moyens d'accumulation et dispositif de charge correspondant |
US8416008B2 (en) * | 2011-01-20 | 2013-04-09 | Advanced Energy Industries, Inc. | Impedance-matching network using BJT switches in variable-reactance circuits |
WO2013128631A1 (ja) * | 2012-03-02 | 2013-09-06 | 東芝三菱電機産業システム株式会社 | 電力変換装置 |
US9279722B2 (en) | 2012-04-30 | 2016-03-08 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US9735676B2 (en) * | 2012-11-02 | 2017-08-15 | Danmarks Tekniske Universitet | Self-oscillating resonant power converter |
GB201301208D0 (en) * | 2012-12-31 | 2013-03-06 | Continental Automotive Systems | Turned power amplifier with loaded choke for inductively heated fuel injector |
US9536713B2 (en) * | 2013-02-27 | 2017-01-03 | Advanced Energy Industries, Inc. | Reliable plasma ignition and reignition |
TWI496400B (zh) * | 2013-07-29 | 2015-08-11 | Anpec Electronics Corp | 電壓轉換電路與使用其的電子系統 |
US9728378B2 (en) | 2014-05-02 | 2017-08-08 | Reno Technologies, Inc. | Method for controlling an RF generator |
US10431428B2 (en) | 2014-01-10 | 2019-10-01 | Reno Technologies, Inc. | System for providing variable capacitance |
US9345122B2 (en) | 2014-05-02 | 2016-05-17 | Reno Technologies, Inc. | Method for controlling an RF generator |
US9748864B2 (en) * | 2014-06-30 | 2017-08-29 | Mks Instruments, Inc. | Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits |
JP5797313B1 (ja) | 2014-08-25 | 2015-10-21 | 株式会社京三製作所 | 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法 |
WO2016042689A1 (ja) * | 2014-09-18 | 2016-03-24 | パナソニックIpマネジメント株式会社 | 電力増幅装置 |
DE102014115139A1 (de) | 2014-10-17 | 2016-04-21 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren und Vorrichtung zur Überspannungsbegrenzung einer Wechselspannungserzeugungsanordnung |
CA2962908C (en) * | 2014-10-30 | 2018-04-24 | Tatsumi Ryoki Co., Ltd | Load testing apparatus |
JP5788616B1 (ja) * | 2015-02-04 | 2015-10-07 | 株式会社京三製作所 | 高周波電源装置、及びデュアルカソード用電源 |
DE102015212247A1 (de) | 2015-06-30 | 2017-01-05 | TRUMPF Hüttinger GmbH + Co. KG | Hochfrequenzverstärkeranordnung |
DE102015212152B4 (de) | 2015-06-30 | 2018-03-15 | TRUMPF Hüttinger GmbH + Co. KG | Nicht lineare Hochfrequenzverstärkeranordnung |
DE102015212220A1 (de) * | 2015-06-30 | 2017-01-05 | TRUMPF Hüttinger GmbH + Co. KG | Hochfrequenzverstärkeranordnung |
US10177685B2 (en) * | 2015-09-10 | 2019-01-08 | Texas Instruments Incorporated | Switching converter with improved power density |
MX2018007707A (es) * | 2015-12-22 | 2018-11-09 | Thermatool Corp | Sistema de suministro de energia de alta frecuencia con salida muy regulada para calentar una pieza de trabajo. |
US20170310207A1 (en) * | 2016-04-26 | 2017-10-26 | Silicon Power Corporation | Circuit for alleviating high frequency switching noise and voltage overshooting in semiconductor components arrays and returning energy therefrom |
JP6702209B2 (ja) * | 2017-01-26 | 2020-05-27 | 株式会社デンソー | 電力変換装置 |
US10546724B2 (en) * | 2017-05-10 | 2020-01-28 | Mks Instruments, Inc. | Pulsed, bidirectional radio frequency source/load |
JP2020526965A (ja) * | 2017-06-30 | 2020-08-31 | エアリティー・テクノロジーズ・インコーポレイテッドAirity Technologies, Inc. | 抵抗性出力インピーダンスのための高利得共振増幅器 |
US10454455B2 (en) | 2017-09-25 | 2019-10-22 | Rezonent Corporation | Reduced-power electronic circuits with wide-band energy recovery using non-interfering topologies |
US11023631B2 (en) | 2017-09-25 | 2021-06-01 | Rezonent Corporation | Reduced-power dynamic data circuits with wide-band energy recovery |
US10461651B2 (en) * | 2017-12-05 | 2019-10-29 | Abb Schweiz Ag | Soft-switching power converters using air-core resonant inductor |
US10153795B1 (en) | 2018-02-20 | 2018-12-11 | Nxp B.V. | Switching amplifier circuit with amplitude control |
CN108539869B (zh) * | 2018-04-25 | 2020-10-09 | 柏壹科技(深圳)有限公司 | 一种无线充电发射器及无线充电*** |
CN108448684A (zh) * | 2018-04-25 | 2018-08-24 | 柏壹科技(深圳)有限公司 | 一种无线充电发射器、接收器及无线充电*** |
GB2580155A (en) * | 2018-12-21 | 2020-07-15 | Comet Ag | Radiofrequency power amplifier |
CN112236947B (zh) * | 2019-05-31 | 2022-03-25 | 倍加福欧洲股份公司 | 功率调节电路 |
US11206000B1 (en) * | 2019-11-26 | 2021-12-21 | Rockwell Collins, Inc. | Filterless high efficiency class D power amplifier |
GB2601742B (en) * | 2020-12-03 | 2024-04-24 | Dyson Technology Ltd | A drive circuit |
US11545943B2 (en) * | 2020-12-04 | 2023-01-03 | Mks Instruments, Inc. | Switched capacitor modulator |
Family Cites Families (98)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3493878A (en) * | 1967-02-03 | 1970-02-03 | Sperry Rand Corp | Self-resetting overload protection circuit for transistors |
US3636380A (en) * | 1970-09-04 | 1972-01-18 | Us Navy | Power amplifier |
US3919656A (en) * | 1973-04-23 | 1975-11-11 | Nathan O Sokal | High-efficiency tuned switching power amplifier |
US3939380A (en) * | 1974-02-21 | 1976-02-17 | Rca Corporation | Class D amplifier |
US3899745A (en) * | 1974-04-26 | 1975-08-12 | Nasa | Isolated output system for a class D switching-mode amplifier |
JPS585522B2 (ja) * | 1974-12-23 | 1983-01-31 | ソニー株式会社 | パルスハバヒヘンチヨウシンゴウゾウフクカイロ |
AT342713B (de) | 1976-01-14 | 1978-04-25 | Elin Union Ag | Schaltung fur einen wechselrichter |
US4042890A (en) * | 1976-05-14 | 1977-08-16 | Eckerle Joseph S | High efficiency electrical power conditioner |
US4067057A (en) * | 1976-06-25 | 1978-01-03 | Pacific Electronic Enterprises Inc. | DC to AC switching converter |
US4047120A (en) * | 1976-07-15 | 1977-09-06 | The United States Of America As Represented By The Secretary Of The Navy | Transient suppression circuit for push-pull switching amplifiers |
US4182992A (en) * | 1977-04-15 | 1980-01-08 | Attwood Brian E | Pulse width modulated signal amplifier |
SU669341A1 (ru) | 1977-06-27 | 1979-06-25 | Kharchenko Fedor M | Ключевой стабилизатор напр жени посто нного тока |
JPS6047771B2 (ja) * | 1977-09-20 | 1985-10-23 | ソニー株式会社 | 増幅器の過負荷保護装置 |
US4268898A (en) * | 1980-03-20 | 1981-05-19 | Lorain Products Corporation | Semiconductor switching circuit with clamping and energy recovery features |
SU928326A1 (ru) | 1980-05-22 | 1982-05-15 | Предприятие П/Я Г-4677 | Стабилизирующий преобразователь посто нного напр жени |
US4408267A (en) * | 1981-01-08 | 1983-10-04 | Rca Corporation | DC-to-DC Switching converters |
GB2108786B (en) * | 1981-11-05 | 1985-12-11 | Sanyo Electric Co | Induction heating apparatus |
FI65524C (fi) | 1982-04-21 | 1984-05-10 | Helvar Oy | Foerfarande och anordning foer matning av hoegfrekvent vaexelstroem till en fluorescenslampa |
GB2124042B (en) * | 1982-06-01 | 1986-10-01 | Control Logic | Reduction of harmonics in gas discharge lamp ballasts |
US4455600A (en) * | 1982-06-07 | 1984-06-19 | Lortec Power Systems, Inc. | Single phase, double-ended thyristor inverter with choke-coupled impulse commutation |
US4429339A (en) * | 1982-06-21 | 1984-01-31 | Eaton Corporation | AC Transistor switch with overcurrent protection |
US4509101A (en) * | 1982-08-24 | 1985-04-02 | Nippon Gakki Seizo Kabushiki Kaisha | Protection circuit for switching power amplifier |
US4564879A (en) * | 1982-09-20 | 1986-01-14 | International Standard Electric Corporation | Electronic power overload protection circuit |
AT375499B (de) | 1982-12-02 | 1984-08-10 | Zumtobel Ag | Wechselrichterschaltung |
AT380373B (de) | 1983-05-17 | 1986-05-12 | Zumtobel Ag | Umschwingwechselrichter zur speisung von leuchtstofflampen |
AT383000B (de) | 1983-06-23 | 1987-05-11 | Zumtobel Ag | Schaltung zum betrieb mindestens einer gasentladungslampe mit hochfrequenter spannung |
IL72925A0 (en) | 1983-10-07 | 1984-12-31 | Sundstrand Corp | Pulse width modulated inverter |
HU190639B (en) | 1983-12-12 | 1986-09-29 | Gyogyszerkutato Intezet Kv,Hu | Process for production of new aminoguanidin derivatives |
DE3508289C1 (de) | 1985-03-08 | 1986-09-11 | Thomson Brandt Gmbh | Wechselrichter zur Speisung eines Verbrauchers mit einer induktiven Komponente |
US4550359A (en) * | 1984-02-10 | 1985-10-29 | Honeywell Inc. | Voltage transient protection circuit for MOSFET power transistors |
US4600891A (en) * | 1984-08-21 | 1986-07-15 | Peavey Electronics Corporation | Digital audio amplifier having a high power output level and low distortion |
AT392384B (de) | 1985-02-04 | 1991-03-25 | Zumtobel Ag | Vorschaltgeraet zum betrieb von gasentladungslampen mit gleichstrom |
US4639849A (en) * | 1985-05-08 | 1987-01-27 | International Exide Electronics/Corporation | Snubber circuit for H.F. bridge converter |
GB2177273A (en) * | 1985-06-26 | 1987-01-14 | Philips Electronic Associated | R f power amplifier |
HU194421B (en) * | 1985-12-18 | 1988-01-28 | Mta Mueszaki Fiz Kutato Inteze | High-voltage supply unit for supplying regulable output high voltege, advantegously for operating ion- or electron ray processing and evaporating apparatus of low power |
US4720775A (en) * | 1986-06-03 | 1988-01-19 | Qualidyne Systems, Inc. | Inverter having saturating current transformer core for maintaining inverter current above minimum predetermined level |
US4670832A (en) * | 1986-06-12 | 1987-06-02 | General Electric Company | Resonant inverter having improved control at enablement |
US4691270A (en) * | 1986-07-22 | 1987-09-01 | Rca Corporation | Current fed inverter bridge with lossless snubbers |
US4719556A (en) * | 1986-08-07 | 1988-01-12 | Armstrong World Industries, Inc. | Current and voltage limited inverter |
US4709323A (en) * | 1986-09-29 | 1987-11-24 | Venus Scientific Inc. | Buck-boost parallel resonant converter with inductive energy recovery circuit |
KR900008393B1 (ko) | 1986-10-02 | 1990-11-17 | 미츠비시 덴키 가부시키가이샤 | 인버터장치의 과전류보호회로 |
GB2199184B (en) | 1986-12-19 | 1990-01-31 | Nat Semiconductor Corp | High reliability single-poly eeprom cell |
US4745537A (en) * | 1987-01-23 | 1988-05-17 | Cheung P S | Low dissipation power converter |
US4910416A (en) * | 1988-03-04 | 1990-03-20 | Modicon, Inc. | Power switch monitor to improve switching time |
DE68922049T2 (de) * | 1988-09-06 | 1995-09-21 | Toshiba Kawasaki Kk | Pulsbreiten-modulierte Leistungsversorgung mit Unterdrückungsfähigkeit von Modulierungsfrequenzsignalkomponenten von Erdpotentialen. |
JP2807760B2 (ja) | 1988-10-26 | 1998-10-08 | 九州大学長 | スイッチング電源 |
US4992749A (en) * | 1988-12-28 | 1991-02-12 | Pioneer Electronic Corporation | Pulse-width modulating amplifier circuit |
US4914399A (en) * | 1989-03-01 | 1990-04-03 | Minnesota Mining And Manufacturing Company | Induction coil driver |
US4916599A (en) * | 1989-03-29 | 1990-04-10 | Hyperpower, Inc. | Switching power supply |
JP2754411B2 (ja) * | 1989-09-20 | 1998-05-20 | 富士電機株式会社 | 電力変換装置のスナバ回路 |
US5196995A (en) * | 1989-12-01 | 1993-03-23 | Zdzislaw Gulczynski | 3-terminal bidirectional switching power supply with AC or DC input and AC or DC output |
US5023566A (en) * | 1989-12-21 | 1991-06-11 | General Electric Company | Driver for a high efficiency, high frequency Class-D power amplifier |
US5198969A (en) * | 1990-07-13 | 1993-03-30 | Design Automation, Inc. | Soft-switching full-bridge dc/dc converting |
IT1242227B (it) | 1990-10-15 | 1994-03-03 | Ansaldo Spa | Circuito di potenza per inverter a tensione impressa,a (2*n+1) livelli di tensione |
FR2668665B1 (fr) | 1990-10-25 | 1995-06-09 | Dassault Electronique | Convertisseur de tension a decoupage, a commutation perfectionnee. |
US5117167A (en) * | 1990-11-01 | 1992-05-26 | Rotron, Incorporated | Commutating energy suppression circuit for an electronically commutated DC motor |
US5187580A (en) * | 1991-02-04 | 1993-02-16 | Advanced Energy Industries, Inc. | High power switch-mode radio frequency amplifier method and apparatus |
US5065300A (en) * | 1991-03-08 | 1991-11-12 | Raytheon Company | Class E fixed frequency converter |
US5117198A (en) * | 1991-04-08 | 1992-05-26 | Kenneth Morenz | Class D MOSFET amplifier and voltage supply balance circuit therefor |
KR0184675B1 (ko) * | 1991-07-24 | 1999-04-15 | 이노우에 쥰이치 | 챔버내의 전극에 있어서의 실제의 rf파워를 검출 및 제어 가능한 플라즈마 처리장치 |
DE9109503U1 (de) * | 1991-07-31 | 1991-10-17 | Magtron Magneto Elektronische Geraete Gmbh, 7583 Ottersweier | Schaltungsanordnung für ein Stromversorgungsgerät für Geräte und Anlagen der Plasma- und Oberflächentechnik |
US5218315A (en) * | 1992-01-06 | 1993-06-08 | Infinity Systems, Inc. | Switching amplifier |
JP2710467B2 (ja) * | 1992-04-16 | 1998-02-10 | アドバンスド エナージィ インダストリーズ,インコーポレイテッド | プロセシング・プラズマのac特性を特徴付ける装置 |
US5367228A (en) * | 1992-11-05 | 1994-11-22 | General Electric Company | High-pressure sodium lamp control circuit providing constant peak current and color |
US5610553A (en) * | 1993-03-02 | 1997-03-11 | Kirn; Larry | Switching amplifier with impedance transformation output stage |
US5471376A (en) * | 1993-03-05 | 1995-11-28 | Digital Equipment Corporation | Low-loss active voltage-clamp circuit for single-ended forward PWM converter |
JP3153408B2 (ja) * | 1994-03-10 | 2001-04-09 | 株式会社日立製作所 | 直列多重電力変換器 |
NL9401262A (nl) * | 1994-08-01 | 1996-03-01 | Sony Telecom Europ Nv | Systeem voor telecommunicatie. |
JPH0898505A (ja) | 1994-09-20 | 1996-04-12 | Mitsubishi Electric Corp | 半導体複合素子およびこの素子を備えたインバータ装置の異常検出方法 |
DE19522369A1 (de) | 1995-06-20 | 1997-01-02 | Niepenberg Dalex Werke | Gleichrichter-Netzteil |
TW312890B (ja) * | 1995-10-20 | 1997-08-11 | Eni Inc | |
DE69522454D1 (de) * | 1995-10-31 | 2001-10-04 | St Microelectronics Srl | Sofortleistungsverlustmesser in einem Leistungstransistor |
US5757942A (en) * | 1995-11-13 | 1998-05-26 | Sony Corporation | Speaker unit with an improved acoustic equalizer |
US5747942A (en) * | 1996-07-10 | 1998-05-05 | Enersol Systems, Inc. | Inverter for an electronic ballast having independent start-up and operational output voltages |
US5909086A (en) * | 1996-09-24 | 1999-06-01 | Jump Technologies Limited | Plasma generator for generating unipolar plasma |
US5838193A (en) * | 1996-11-26 | 1998-11-17 | Motorola, Inc. | Time-delay compensating wideband class-s modulator and method therefor |
US6088052A (en) * | 1997-01-08 | 2000-07-11 | Recherches Point Lab Inc. | 3D stereoscopic video display system |
US5914974A (en) * | 1997-02-21 | 1999-06-22 | Cymer, Inc. | Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules |
JP2000511040A (ja) * | 1997-03-12 | 2000-08-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 変換器、電源及びバッテリー充電器 |
JPH10256957A (ja) * | 1997-03-13 | 1998-09-25 | Nagano Japan Radio Co | 電力伝送装置および電力伝送システム |
US5994848A (en) * | 1997-04-10 | 1999-11-30 | Philips Electronics North America Corporation | Triac dimmable, single stage compact flourescent lamp |
US5973437A (en) * | 1997-05-19 | 1999-10-26 | Philips Electronics North America Corporation | Scheme for sensing ballast lamp current |
US6016075A (en) * | 1997-06-04 | 2000-01-18 | Lord Corporation | Class-D amplifier input structure |
US5982231A (en) * | 1997-07-23 | 1999-11-09 | Linfinity Microelectronics, Inc. | Multiple channel class D audio amplifier |
US5963086A (en) * | 1997-08-08 | 1999-10-05 | Velodyne Acoustics, Inc. | Class D amplifier with switching control |
US5952794A (en) * | 1997-10-02 | 1999-09-14 | Phillips Electronics North America Corportion | Method of sampling an electrical lamp parameter for detecting arc instabilities |
JPH11136952A (ja) * | 1997-10-28 | 1999-05-21 | Matsushita Electric Works Ltd | インバータ装置 |
US5910886A (en) * | 1997-11-07 | 1999-06-08 | Sierra Applied Sciences, Inc. | Phase-shift power supply |
US6043607A (en) * | 1997-12-16 | 2000-03-28 | Applied Materials, Inc. | Apparatus for exciting a plasma in a semiconductor wafer processing system using a complex RF waveform |
US6091288A (en) * | 1998-05-06 | 2000-07-18 | Electro-Mag International, Inc. | Inverter circuit with avalanche current prevention |
US6072362A (en) * | 1998-07-10 | 2000-06-06 | Ameritherm, Inc. | System for enabling a full-bridge switch-mode amplifier to recover all reactive energy |
CA2249755C (en) * | 1998-10-02 | 2006-12-12 | Praveen K. Jain | Full bridge dc-dc converters |
IL127335A0 (en) * | 1998-11-30 | 1999-09-22 | N L G I Electronics Ltd | Self exciting high freqency converter for gas discharge lamp |
WO2001008288A2 (en) | 1999-07-22 | 2001-02-01 | Eni Technology, Inc. | Power supplies having protection circuits |
US6469919B1 (en) * | 1999-07-22 | 2002-10-22 | Eni Technology, Inc. | Power supplies having protection circuits |
US7180758B2 (en) * | 1999-07-22 | 2007-02-20 | Mks Instruments, Inc. | Class E amplifier with inductive clamp |
JP5255744B2 (ja) * | 2000-10-10 | 2013-08-07 | カリフォルニア・インスティテュート・オブ・テクノロジー | E/f級スイッチング電力増幅器 |
US6448720B1 (en) * | 2001-03-30 | 2002-09-10 | Matsushita Electric Works R&D Laboratory, Inc. | Circuit for driving an HID lamp |
-
2004
- 2004-01-16 US US10/760,174 patent/US7180758B2/en not_active Expired - Lifetime
- 2004-08-25 JP JP2006549233A patent/JP4972411B2/ja active Active
- 2004-08-25 CN CN201310044812.1A patent/CN103124067B/zh active Active
- 2004-08-25 KR KR1020067014315A patent/KR101046282B1/ko active IP Right Grant
- 2004-08-25 EP EP19190566.0A patent/EP3598624A1/en active Pending
- 2004-08-25 CN CN2012101891983A patent/CN102684164A/zh active Pending
- 2004-08-25 CN CNA2004800349267A patent/CN101061615A/zh active Pending
- 2004-08-25 EP EP04782105.3A patent/EP1735889B1/en active Active
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10461731B2 (en) | 2016-09-30 | 2019-10-29 | Ulvac, Inc. | Power supply device |
Also Published As
Publication number | Publication date |
---|---|
US20070206395A1 (en) | 2007-09-06 |
CN103124067A (zh) | 2013-05-29 |
CN101061615A (zh) | 2007-10-24 |
WO2005074413A2 (en) | 2005-08-18 |
US7180758B2 (en) | 2007-02-20 |
EP1735889A2 (en) | 2006-12-27 |
EP1735889B1 (en) | 2019-10-09 |
KR101046282B1 (ko) | 2011-07-04 |
KR20070032623A (ko) | 2007-03-22 |
WO2005074413A3 (en) | 2006-10-19 |
JP2007519340A (ja) | 2007-07-12 |
CN103124067B (zh) | 2017-04-26 |
CN102684164A (zh) | 2012-09-19 |
EP3598624A1 (en) | 2020-01-22 |
EP1735889A4 (en) | 2010-08-11 |
US20060158911A1 (en) | 2006-07-20 |
US7397676B2 (en) | 2008-07-08 |
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