KR20060114620A - 파면 수차 측정 장치 - Google Patents

파면 수차 측정 장치 Download PDF

Info

Publication number
KR20060114620A
KR20060114620A KR1020057009749A KR20057009749A KR20060114620A KR 20060114620 A KR20060114620 A KR 20060114620A KR 1020057009749 A KR1020057009749 A KR 1020057009749A KR 20057009749 A KR20057009749 A KR 20057009749A KR 20060114620 A KR20060114620 A KR 20060114620A
Authority
KR
South Korea
Prior art keywords
wavelength
wavefront aberration
optical system
coherent light
beam splitter
Prior art date
Application number
KR1020057009749A
Other languages
English (en)
Korean (ko)
Inventor
유끼오 에다
Original Assignee
올림푸스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20060114620A publication Critical patent/KR20060114620A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
KR1020057009749A 2003-09-05 2004-09-01 파면 수차 측정 장치 KR20060114620A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003314403A JP4229782B2 (ja) 2003-09-05 2003-09-05 波面収差測定装置
JPJP-P-2003-00314403 2003-09-05

Publications (1)

Publication Number Publication Date
KR20060114620A true KR20060114620A (ko) 2006-11-07

Family

ID=34269801

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057009749A KR20060114620A (ko) 2003-09-05 2004-09-01 파면 수차 측정 장치

Country Status (4)

Country Link
JP (1) JP4229782B2 (ja)
KR (1) KR20060114620A (ja)
CN (1) CN100526830C (ja)
WO (1) WO2005024373A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903264B1 (ko) * 2007-04-30 2009-06-17 광주과학기술원 파면 수차 측정 장치 및 방법

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4814583B2 (ja) * 2005-08-29 2011-11-16 オリンパス株式会社 波面収差測定装置
JP4709642B2 (ja) * 2005-12-22 2011-06-22 オリンパス株式会社 波面収差測定装置
JP5489392B2 (ja) * 2007-05-09 2014-05-14 オリンパス株式会社 光学系評価装置、光学系評価方法および光学系評価プログラム
JP2009139151A (ja) * 2007-12-04 2009-06-25 Fujinon Corp 干渉計装置のシステム誤差較正方法
FR2926636B1 (fr) * 2008-01-18 2010-09-17 Imagine Optic Instrument et procede de caracterisation d'un systeme optique
JP5158798B2 (ja) * 2008-10-17 2013-03-06 独立行政法人産業技術総合研究所 レンズ検査装置
CN102297759B (zh) * 2011-06-24 2013-03-27 北京理工大学 基于横向剪切干涉的扩束准直***波面像差检测方法
CN102607719B (zh) * 2011-06-24 2013-07-17 北京理工大学 基于横向剪切干涉的扩束准直***波面像差检测装置
CN105022232B (zh) * 2014-04-15 2017-12-29 上海微电子装备（集团）股份有限公司 波像差测量装置的误差校准方法
CN104101487B (zh) * 2014-07-31 2017-01-18 中国科学院光电研究院 一种光学***波像差测量装置与测量方法
CN106338380B (zh) * 2016-06-23 2018-08-10 中国科学院长春光学精密机械与物理研究所 干涉仪***、干涉仪传递函数及性能优劣的检测方法
CN106768886B (zh) * 2016-12-16 2019-03-08 中国科学院光电研究院 一种深紫外光学***波像差检测装置和方法
CN112284686B (zh) * 2019-07-25 2022-02-25 上海微电子装备（集团）股份有限公司 一种像差测量装置及方法
CN114088352B (zh) * 2021-10-29 2022-09-06 中国科学院深圳先进技术研究院 一种相机全***的波像差检测***及检测方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH073323B2 (ja) * 1985-11-29 1995-01-18 株式会社ニコン 干渉装置
JP3613906B2 (ja) * 1996-09-20 2005-01-26 株式会社ニコン 波面収差測定装置
JP3759677B2 (ja) * 1998-07-17 2006-03-29 株式会社ミツトヨ 光波干渉計における寸法測定方法
WO2002052620A1 (fr) * 2000-12-22 2002-07-04 Nikon Corporation Instrument de mesure de l'aberration d'un front d'onde, procede de mesure de l'aberration d'un front d'onde, appareil d'exposition et procede de fabrication d'un microdispositif

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903264B1 (ko) * 2007-04-30 2009-06-17 광주과학기술원 파면 수차 측정 장치 및 방법

Also Published As

Publication number Publication date
CN100526830C (zh) 2009-08-12
CN1705867A (zh) 2005-12-07
JP4229782B2 (ja) 2009-02-25
WO2005024373A1 (ja) 2005-03-17
JP2005083824A (ja) 2005-03-31

Similar Documents

Publication Publication Date Title
CN104040308B (zh) 用于光谱分析的光谱仪器和方法以及用于光学相干层析成像的***
US7170610B2 (en) Low-coherence inferometric device for light-optical scanning of an object
US6882433B2 (en) Interferometer system of compact configuration
JP6448532B2 (ja) 光学顕微鏡および光学顕微鏡を用いた画像記録方法
CN100414248C (zh) 组合式几何检测的设备和方法
US6137565A (en) Bragg grating temperature/strain fiber sensor having combination interferometer/spectrometer output arrangement
KR20060114620A (ko) 파면 수차 측정 장치
EP1873481B1 (en) Oblique incidence interferometer
US6545761B1 (en) Embedded interferometer for reference-mirror calibration of interferometric microscope
US7379191B2 (en) Optical MEMS wavefront diagnostic transceivers and receiver
US6806965B2 (en) Wavefront and intensity analyzer for collimated beams
JP2009162539A (ja) 光波干渉測定装置
US4620089A (en) Automatic optical focusing device
US5552882A (en) Methods of and apparatus for calibrating precisely spaced multiple transverse holographic gratings in optical fibers
CN100451580C (zh) 波面测定用干涉仪装置、光束测定装置及方法
KR970003422A (ko) 다층 박막 시스템을 기판상에 형성하고 박막의 2개의 표면 사이의 거리를 측정하는 방법 및 장치
US20240085269A1 (en) Acquiring apparatus, acquiring method, and optical system manufacturing method
JP4223349B2 (ja) 耐振動型干渉計装置
KR20060127803A (ko) 광빔 측정장치
JP2011519040A (ja) 被測定物に照射するための光学装置、および被測定物の面を測定するための干渉測定装置
US6459490B1 (en) Dual field of view optical system for microscope, and microscope and interferometer containing the same
JP4814583B2 (ja) 波面収差測定装置
US20120002210A1 (en) Optical interferometer
CN115950350A (zh) 一种双角度激光干涉***
CN115962848A (zh) 一种双角度并联干涉***

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination