KR20060114620A - 파면 수차 측정 장치 - Google Patents
파면 수차 측정 장치 Download PDFInfo
- Publication number
- KR20060114620A KR20060114620A KR1020057009749A KR20057009749A KR20060114620A KR 20060114620 A KR20060114620 A KR 20060114620A KR 1020057009749 A KR1020057009749 A KR 1020057009749A KR 20057009749 A KR20057009749 A KR 20057009749A KR 20060114620 A KR20060114620 A KR 20060114620A
- Authority
- KR
- South Korea
- Prior art keywords
- wavelength
- wavefront aberration
- optical system
- coherent light
- beam splitter
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003314403A JP4229782B2 (ja) | 2003-09-05 | 2003-09-05 | 波面収差測定装置 |
JPJP-P-2003-00314403 | 2003-09-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20060114620A true KR20060114620A (ko) | 2006-11-07 |
Family
ID=34269801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057009749A KR20060114620A (ko) | 2003-09-05 | 2004-09-01 | 파면 수차 측정 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4229782B2 (ja) |
KR (1) | KR20060114620A (ja) |
CN (1) | CN100526830C (ja) |
WO (1) | WO2005024373A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903264B1 (ko) * | 2007-04-30 | 2009-06-17 | 광주과학기술원 | 파면 수차 측정 장치 및 방법 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4814583B2 (ja) * | 2005-08-29 | 2011-11-16 | オリンパス株式会社 | 波面収差測定装置 |
JP4709642B2 (ja) * | 2005-12-22 | 2011-06-22 | オリンパス株式会社 | 波面収差測定装置 |
JP5489392B2 (ja) * | 2007-05-09 | 2014-05-14 | オリンパス株式会社 | 光学系評価装置、光学系評価方法および光学系評価プログラム |
JP2009139151A (ja) * | 2007-12-04 | 2009-06-25 | Fujinon Corp | 干渉計装置のシステム誤差較正方法 |
FR2926636B1 (fr) * | 2008-01-18 | 2010-09-17 | Imagine Optic | Instrument et procede de caracterisation d'un systeme optique |
JP5158798B2 (ja) * | 2008-10-17 | 2013-03-06 | 独立行政法人産業技術総合研究所 | レンズ検査装置 |
CN102297759B (zh) * | 2011-06-24 | 2013-03-27 | 北京理工大学 | 基于横向剪切干涉的扩束准直***波面像差检测方法 |
CN102607719B (zh) * | 2011-06-24 | 2013-07-17 | 北京理工大学 | 基于横向剪切干涉的扩束准直***波面像差检测装置 |
CN105022232B (zh) * | 2014-04-15 | 2017-12-29 | 上海微电子装备(集团)股份有限公司 | 波像差测量装置的误差校准方法 |
CN104101487B (zh) * | 2014-07-31 | 2017-01-18 | 中国科学院光电研究院 | 一种光学***波像差测量装置与测量方法 |
CN106338380B (zh) * | 2016-06-23 | 2018-08-10 | 中国科学院长春光学精密机械与物理研究所 | 干涉仪***、干涉仪传递函数及性能优劣的检测方法 |
CN106768886B (zh) * | 2016-12-16 | 2019-03-08 | 中国科学院光电研究院 | 一种深紫外光学***波像差检测装置和方法 |
CN112284686B (zh) * | 2019-07-25 | 2022-02-25 | 上海微电子装备(集团)股份有限公司 | 一种像差测量装置及方法 |
CN114088352B (zh) * | 2021-10-29 | 2022-09-06 | 中国科学院深圳先进技术研究院 | 一种相机全***的波像差检测***及检测方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH073323B2 (ja) * | 1985-11-29 | 1995-01-18 | 株式会社ニコン | 干渉装置 |
JP3613906B2 (ja) * | 1996-09-20 | 2005-01-26 | 株式会社ニコン | 波面収差測定装置 |
JP3759677B2 (ja) * | 1998-07-17 | 2006-03-29 | 株式会社ミツトヨ | 光波干渉計における寸法測定方法 |
WO2002052620A1 (fr) * | 2000-12-22 | 2002-07-04 | Nikon Corporation | Instrument de mesure de l'aberration d'un front d'onde, procede de mesure de l'aberration d'un front d'onde, appareil d'exposition et procede de fabrication d'un microdispositif |
-
2003
- 2003-09-05 JP JP2003314403A patent/JP4229782B2/ja not_active Expired - Lifetime
-
2004
- 2004-09-01 KR KR1020057009749A patent/KR20060114620A/ko not_active Application Discontinuation
- 2004-09-01 CN CNB2004800014437A patent/CN100526830C/zh not_active Expired - Fee Related
- 2004-09-01 WO PCT/JP2004/012635 patent/WO2005024373A1/ja active Application Filing
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903264B1 (ko) * | 2007-04-30 | 2009-06-17 | 광주과학기술원 | 파면 수차 측정 장치 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN100526830C (zh) | 2009-08-12 |
CN1705867A (zh) | 2005-12-07 |
JP4229782B2 (ja) | 2009-02-25 |
WO2005024373A1 (ja) | 2005-03-17 |
JP2005083824A (ja) | 2005-03-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |