KR20030078372A - 지문인식장치의 tft 지문입력기 제조방법 - Google Patents
지문인식장치의 tft 지문입력기 제조방법 Download PDFInfo
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- KR20030078372A KR20030078372A KR1020020017382A KR20020017382A KR20030078372A KR 20030078372 A KR20030078372 A KR 20030078372A KR 1020020017382 A KR1020020017382 A KR 1020020017382A KR 20020017382 A KR20020017382 A KR 20020017382A KR 20030078372 A KR20030078372 A KR 20030078372A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
- G02F1/13318—Circuits comprising a photodetector
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Image Input (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
Description
Claims (3)
- 소정 두께의 투명한 기판상에 광감지부 및 스위칭부 게이트 전극을 형성하는 단계와;상기 게이트 전극들을 포함한 투명기판 상면 중앙부 일부와 상기 광감지부 게이트 전극의 일측면상에만 위치하도록 제 2전극을 형성하는 단계와;상기 제 2전극 및 게이트전극들을 포함한 투명기판상의 전면에 실리콘 질화막층(SiNx)과 비정질 실리콘층을 순차적으로 증착형성하는 단계와;상기 비정질 실리콘층들을 포토리소그래피 공정을 통해 상기 게이트 전극들 상에만 위치하도록 활성층 분리 영역을 형성하는 단계와;상기 활성층 분리 영역을 포함한 상기 실리콘 질화막층(12)의 전면에 데이터 라인층을 증착형성 하는 단계와;상기 데이터 라인층을 백채널 식각하여 각각 광감지부의 소스전극과 드레인전극 및 스위칭부의 소스전극 및 드레인전극을 형성하되, 상기 광감지부의 소스전극과 드레인전극은 상기 데이터 라인층의 증착 형성전에 ITO(Indium Tin Oxide)막을 먼저 증착 형성한 후 포토리소그래피 공정을 통해 형성하여 이루어진 단계와;상기 광감지부의 소스전극과 드레인전극 및 스위칭부의 소스전극 및 드레인전극을 포함한 전면상에 절연층을 증착 형성하는 단계와;상기 절연층의 전면상에 차폐층을 증착 형성하는 단계와;포토리소그래피 공정을 통해 상기 차폐층의 일부를 식각하여 상기 광감지부의 감광층의 상부 부위의 절연층 부분이 노출되도록 형성하는 단계와;상기 노출된 절연층 부분을 포함하여 상기 차폐층의 전면상에 패시베이션(passivation)층을 증착 형성하는 것을 특징으로 하는 지문입력장치의 TFT 지문입력기의 제조방법.
- 제 1 항에 있어서, 상기 비정질 실리콘 층은 비정질 실리콘층(a-Si:H) 및 n+ 비정질 실리콘층(n+ a-Si:H)을 순차적으로 증착형성하여 이루어진 것을 특징으로 하는 지문입력장치의 TFT 지문입력기의 제조방법.
- 제 1 항에 있어서, 상기 광감지부에서 광감지부의 감광층의 상면의 절연층이 개방된 상태인 것을 특징으로 하는 지문입력장치의 TFT 지문입력기의 제조방법.
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KR1020020017382A KR100560347B1 (ko) | 2002-03-29 | 2002-03-29 | 지문인식장치의 tft 지문입력기 제조방법 |
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KR1020020017382A KR100560347B1 (ko) | 2002-03-29 | 2002-03-29 | 지문인식장치의 tft 지문입력기 제조방법 |
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KR20030078372A true KR20030078372A (ko) | 2003-10-08 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8507911B2 (en) | 2009-11-13 | 2013-08-13 | Samsung Display Co., Ltd. | Thin film transistor and organic light emitting display apparatus |
WO2016064222A1 (ko) * | 2014-10-24 | 2016-04-28 | 주식회사 비욘드아이즈 | 단위 화소 및 el 지문인식센서 |
CN111123568A (zh) * | 2019-12-05 | 2020-05-08 | 武汉华星光电技术有限公司 | 显示面板及其制备方法、显示装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101851567B1 (ko) | 2011-07-04 | 2018-04-25 | 삼성전자주식회사 | 트랜지스터, 트랜지스터를 포함하는 전자소자 및 이들의 제조방법 |
US8824792B2 (en) | 2012-07-25 | 2014-09-02 | Ib Korea Ltd. | Image element brightness adjustment |
KR102106175B1 (ko) | 2012-10-04 | 2020-05-04 | 아이비코리아 유한회사 | 충격-방지 릴리프 프린트 스캐닝 |
US9228824B2 (en) | 2013-05-10 | 2016-01-05 | Ib Korea Ltd. | Combined sensor arrays for relief print imaging |
KR101349682B1 (ko) | 2013-08-12 | 2014-01-16 | (주)드림텍 | 평탄도가 우수한 지문인식 홈키 제조방법 |
KR101368264B1 (ko) * | 2013-08-14 | 2014-02-28 | (주)드림텍 | 에폭시 몰딩을 이용한 지문인식 홈키 제조방법 및 이를 통해 제조된 지문인식 홈키 |
WO2015157423A1 (en) | 2014-04-10 | 2015-10-15 | Ib Korea Ltd. | Biometric sensor for touch-enabled device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0730084A (ja) * | 1993-07-14 | 1995-01-31 | Fuji Xerox Co Ltd | 2次元密着型イメージセンサ |
JP4027465B2 (ja) * | 1997-07-01 | 2007-12-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型表示装置およびその製造方法 |
KR100608571B1 (ko) * | 1999-01-14 | 2006-08-03 | 엘지.필립스 엘시디 주식회사 | 박막 트랜지스터형 광 감지소자 |
KR100338978B1 (ko) * | 2001-01-30 | 2002-06-03 | 안준영 | 광감지부에 광차폐층이 형성된 박막트랜지스터 지문입력기 |
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2002
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8507911B2 (en) | 2009-11-13 | 2013-08-13 | Samsung Display Co., Ltd. | Thin film transistor and organic light emitting display apparatus |
WO2016064222A1 (ko) * | 2014-10-24 | 2016-04-28 | 주식회사 비욘드아이즈 | 단위 화소 및 el 지문인식센서 |
CN111123568A (zh) * | 2019-12-05 | 2020-05-08 | 武汉华星光电技术有限公司 | 显示面板及其制备方法、显示装置 |
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