KR20030056537A - 액정표시장치의 제조방법 - Google Patents
액정표시장치의 제조방법 Download PDFInfo
- Publication number
- KR20030056537A KR20030056537A KR1020010086764A KR20010086764A KR20030056537A KR 20030056537 A KR20030056537 A KR 20030056537A KR 1020010086764 A KR1020010086764 A KR 1020010086764A KR 20010086764 A KR20010086764 A KR 20010086764A KR 20030056537 A KR20030056537 A KR 20030056537A
- Authority
- KR
- South Korea
- Prior art keywords
- electrode
- forming
- gate
- storage
- semiconductor layer
- Prior art date
Links
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (3)
- 기판을 제공하는 단계;상기 기판에 게이트 전극을 구비한 다수 개의 게이트 배선을 형성하는 단계;상기 게이트 배선이 형성된 기판 상에 절연막을 형성하는 단계;상기 절연막 상의 각 박막 트랜지스터 형성영역에 제 1 반도체층과 각 스토리지 커패시터 형성 영역에 상기 게이트 배선과 중첩되지 않도록 2 반도체층을 동시에 형성하는 단계;상기 제 1 반도체층 상에 소오스전극과 드레인전극이 위치되도록 상기 절연막 상에 상기 게이트 배선과 수직한 방향으로 다수 개의 데이터 배선을 형성함과 동시에 상기 제 2 반도체층을 덮고 상기 게이트 배선과 일부 중첩되도록 스토리지 상부전극을 형성하는 단계;상기 데이터 배선이 형성된 기판 전면에 보호막을 형성하는 단계;상기 드레인 전극과 상기 제 2 반도체층 상측의 스토리지 상부전극이 노출되도록 상기 보호막을 식각하여 콘택홀을 형성하는 단계; 및상기 콘택홀을 통해 상기 드레인 전극 및 스토리지 상부전극에 연결되도록 화소 영역에 화소 전극을 형성하는 단계를 포함하는 것을 특징으로 하는 액정표시장치의 제조방법.
- 제 1항에 있어서,상기 제 2 반도체층은 비정질 실리콘막인 것을 특징으로 하는 액정표시장치의 제조방법.
- 제 1항에 있어서,상기 데이터 배선은 몰리브덴으로 형성되는 것을 특징으로 하는 액정표시장치의 제조방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0086764A KR100493380B1 (ko) | 2001-12-28 | 2001-12-28 | 액정표시장치의 제조방법 |
US10/316,107 US6757033B2 (en) | 2001-12-28 | 2002-12-11 | Liquid crystal display device and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0086764A KR100493380B1 (ko) | 2001-12-28 | 2001-12-28 | 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030056537A true KR20030056537A (ko) | 2003-07-04 |
KR100493380B1 KR100493380B1 (ko) | 2005-06-07 |
Family
ID=19717763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2001-0086764A KR100493380B1 (ko) | 2001-12-28 | 2001-12-28 | 액정표시장치의 제조방법 |
Country Status (2)
Country | Link |
---|---|
US (1) | US6757033B2 (ko) |
KR (1) | KR100493380B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101055201B1 (ko) * | 2004-07-30 | 2011-08-08 | 엘지디스플레이 주식회사 | Cot형 액정표시소자의 제조방법 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040037944A (ko) * | 2002-10-31 | 2004-05-08 | 엘지.필립스 엘시디 주식회사 | 기판내부에 보상필름을 형성한 액정표시장치 및 그제조방법 |
KR100945579B1 (ko) * | 2003-03-17 | 2010-03-08 | 삼성전자주식회사 | 표시 장치용 표시판 및 그의 제조 방법과 그 표시판을포함하는 액정 표시 장치 |
US6961032B2 (en) * | 2003-05-06 | 2005-11-01 | Eastman Kodak Company | Reducing the effects of shorts in pixels of an active matrix organic electroluminescent device |
KR101219041B1 (ko) * | 2005-07-07 | 2013-01-07 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
US20140014948A1 (en) | 2012-07-12 | 2014-01-16 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device |
CN104977764A (zh) * | 2015-06-18 | 2015-10-14 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制作方法、液晶显示器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06337436A (ja) * | 1993-05-27 | 1994-12-06 | Fujitsu Ltd | 薄膜トランジスタマトリクスの製造方法 |
KR100205373B1 (ko) * | 1996-06-11 | 1999-07-01 | 구자홍 | 액정표시소자의 제조방법 |
JPH1048664A (ja) * | 1996-07-19 | 1998-02-20 | Lg Electron Inc | 液晶表示装置及びその製造方法 |
KR100289538B1 (ko) * | 1998-05-20 | 2001-06-01 | 김순택 | 박막트랜지스터 액정표시소자의 배선 레이아웃 |
JP3512675B2 (ja) * | 1999-04-27 | 2004-03-31 | Nec液晶テクノロジー株式会社 | 薄膜トランジスタアレイ |
JP2001021919A (ja) * | 1999-07-07 | 2001-01-26 | Matsushita Electric Ind Co Ltd | 液晶表示装置 |
KR100348995B1 (ko) * | 1999-09-08 | 2002-08-17 | 엘지.필립스 엘시디 주식회사 | 4 마스크를 이용한 액정표시소자의 제조방법 및 그에 따른 액정표시소자 |
-
2001
- 2001-12-28 KR KR10-2001-0086764A patent/KR100493380B1/ko active IP Right Grant
-
2002
- 2002-12-11 US US10/316,107 patent/US6757033B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101055201B1 (ko) * | 2004-07-30 | 2011-08-08 | 엘지디스플레이 주식회사 | Cot형 액정표시소자의 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
US6757033B2 (en) | 2004-06-29 |
US20030122984A1 (en) | 2003-07-03 |
KR100493380B1 (ko) | 2005-06-07 |
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