KR20020019393A - 위치검출기능을 갖춘 매니폴드밸브 - Google Patents
위치검출기능을 갖춘 매니폴드밸브 Download PDFInfo
- Publication number
- KR20020019393A KR20020019393A KR1020010053853A KR20010053853A KR20020019393A KR 20020019393 A KR20020019393 A KR 20020019393A KR 1020010053853 A KR1020010053853 A KR 1020010053853A KR 20010053853 A KR20010053853 A KR 20010053853A KR 20020019393 A KR20020019393 A KR 20020019393A
- Authority
- KR
- South Korea
- Prior art keywords
- solenoid valve
- valve
- manifold
- magnetic sensor
- piston
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
- F15B13/0839—Stacked plate type valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0821—Attachment or sealing of modular units to each other
- F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0853—Electric circuit boards
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0857—Electrical connecting means, e.g. plugs, sockets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0867—Data bus systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0875—Channels for electrical components, e.g. for cables or sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B2013/0409—Position sensing or feedback of the valve member
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/86582—Pilot-actuated
- Y10T137/86614—Electric
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/86622—Motor-operated
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Magnetically Actuated Valves (AREA)
- Valve Housings (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
Description
Claims (5)
- 압력유체를 컨트롤하기 위한 전자밸브와, 이 전자밸브에 압력유체와 전력을 공급하기 위한 매니폴드 베이스를 포함하고,상기 전자밸브가, 상기 매니폴드 베이스 상에 설치되기 위한 설치면을 보유하는 케이싱과, 이 케이싱의 내부에 설치된 유체컨트롤용 밸브부재와, 이 밸브부재를 구동하는 전자식 구동수단과, 상기 밸브부재와 동기하여 변이하도록 설치된 위치검출용 자석과, 상기 케이싱의 설치면에 상기 자석과 대응하도록 설치된 센서설치용 오목부를 보유하고,상기 매니폴드 베이스가, 상기 전자밸브를 탑재하기 위한 탑재면과, 전자밸브제어용 컨트롤러에 접속하기 위한 제 1플러그와, 상기 오목부와 대응하는 탑재면 상의 위치에 이 탑재면으로부터 전자밸브측으로 돌출하도록 설치되어 있고, 상기 탑재면 상으로의 전자밸브의 탑재에 의해 상기 오목부 내에 끼워맞추는 1개 이상의 자기센서와, 이 자기센서와 상기 제 1플러그를 도통시키는 도통수단을 보유하는 것을 특징으로 하는 위치검출기능을 구비한 매니폴드밸브.
- 제 1항에 있어서, 상기 매니폴드 베이스의 탑재면에 상기 오목부에 끼워맞추는 중공의 돌출부가 설치되고, 이 돌출부 내에 자기센서를 수용함으로써 상기 돌출부가, 상기 매니폴드 베이스와 전자밸브를 연결할 때의 위치결정수단과, 상기 자기센서를 탑재면으로부터 돌출상태로 유지하기 위한 홀더를 겸하고 있는 것을 특징으로 하는 매니폴드밸브.
- 제 1항 또 제 2항에 있어서, 상기 전자밸브가 스풀식 전자밸브임과 아울러, 상기 구동수단이 전자조작식의 1개 또는 2개의 파일럿밸브로서, 상기 전자밸브가 밸브부재의 양측에 각각 파일럿유체의 작용에 의해 동작하는 피스톤을 보유하고, 상기 밸브부재 또는 피스톤 중 어느 하나에 상기 자석이 설치되어 있는 것을 특징으로 하는 매니폴드밸브.
- 제 3항에 있어서, 상기 자석은 압력유체 또는 파일럿유체로부터 격리된 상태로 설치되어 있는 것을 특징으로 하는 매니폴드 밸드.
- 제 3항에 있어서, 상기 각 피스톤은 그 일단면측에 형성된 압력실과, 타단면측에 형성된 호흡실과, 이들 양 실 간을 차단하는 피스톤패킹을 보유하고 있고, 한쪽의 피스톤에 있어서의 상기 피스톤패킹보다도 호흡실측에 치우친 위치에 상기 자석이, 이 피스톤패킹으로 파일럿유체와의 접촉이 방지된 상태로 설치되어 있는 것을 특징으로 하는 매니폴드밸브.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000268918A JP3590762B2 (ja) | 2000-09-05 | 2000-09-05 | 位置検出機能を備えたマニホールドバルブ |
JPJP-P-2000-00268918 | 2000-09-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020019393A true KR20020019393A (ko) | 2002-03-12 |
KR100415783B1 KR100415783B1 (ko) | 2004-01-24 |
Family
ID=18755618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2001-0053853A KR100415783B1 (ko) | 2000-09-05 | 2001-09-03 | 위치검출기능을 갖춘 매니폴드밸브 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6520202B2 (ko) |
EP (1) | EP1184611B1 (ko) |
JP (1) | JP3590762B2 (ko) |
KR (1) | KR100415783B1 (ko) |
CN (1) | CN1166884C (ko) |
DE (1) | DE60119638T2 (ko) |
TW (1) | TW501693U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100712453B1 (ko) * | 2005-01-31 | 2007-04-27 | 에스엠시 가부시키가이샤 | 위치 검출 기구가 설치된 스위칭 밸브 |
KR100799296B1 (ko) * | 2006-03-31 | 2008-01-31 | 주식회사 비에프에스 | 센서가 장착되는 컨트롤밸브 |
Families Citing this family (49)
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JP3590762B2 (ja) * | 2000-09-05 | 2004-11-17 | Smc株式会社 | 位置検出機能を備えたマニホールドバルブ |
JP3609331B2 (ja) * | 2000-09-12 | 2005-01-12 | Smc株式会社 | 位置検出機能を備えたマニホールドバルブ |
US6850849B1 (en) | 2001-06-20 | 2005-02-01 | Curtis Roys | Fluid flow monitor and control system |
JP3523629B2 (ja) * | 2001-10-18 | 2004-04-26 | Smc株式会社 | 出力圧をモニター可能なバルブユニット |
US6776192B2 (en) * | 2002-04-12 | 2004-08-17 | Mead Fluid Dynamics, Inc. | Pneumatic valve and manifold mounting system |
JP4058531B2 (ja) * | 2002-06-11 | 2008-03-12 | Smc株式会社 | ユニットマニホールドバルブ |
JP3968647B2 (ja) * | 2002-06-11 | 2007-08-29 | Smc株式会社 | 位置検出機構を備えたマニホールドバルブ |
JP4003219B2 (ja) * | 2002-06-25 | 2007-11-07 | Smc株式会社 | 位置検出機構を備えたマニホールドバルブ |
JP4072756B2 (ja) * | 2002-07-05 | 2008-04-09 | Smc株式会社 | センサー付きマニホールドバルブ |
DE20219497U1 (de) | 2002-12-17 | 2003-03-06 | Festo Ag & Co | Fluidtechnisches Steuergerät |
DE10304608B4 (de) * | 2003-02-05 | 2007-05-03 | Festo Ag & Co. | Mehrwegeventil mit Mitteln zur Schaltstellungserfassung |
AU2003903036A0 (en) * | 2003-06-17 | 2003-07-03 | Nautitech Manufacturing Services Pty Ltd | Spool position detection for a hydraulic valve |
US20050011556A1 (en) * | 2003-06-17 | 2005-01-20 | Mariusz Dudzik | Spool position detection for a hydraulic valve |
DE10328422A1 (de) * | 2003-06-25 | 2005-01-27 | Festo Ag & Co. | Positionserfassungsvorrichtung sowie damit ausgestattete fluidtechnische Vorrichtung |
US7647940B2 (en) * | 2004-04-05 | 2010-01-19 | Westlock Control Corporation | Device and method for pneumatic valve control |
JP4122500B2 (ja) * | 2004-10-15 | 2008-07-23 | Smc株式会社 | 電磁弁 |
WO2007110095A1 (en) * | 2006-03-28 | 2007-10-04 | Norgren Gmbh | Displacement sensor for a rod |
DE102006045827A1 (de) * | 2006-09-22 | 2008-04-10 | Dichtungstechnik G. Bruss Gmbh & Co. Kg | Axialverschiebbares Bauteil insbesondere in einem Kraftfahrzeugmotor oder -getriebe |
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-
2000
- 2000-09-05 JP JP2000268918A patent/JP3590762B2/ja not_active Expired - Fee Related
-
2001
- 2001-08-06 TW TW090213322U patent/TW501693U/zh not_active IP Right Cessation
- 2001-08-13 US US09/927,325 patent/US6520202B2/en not_active Expired - Lifetime
- 2001-08-30 EP EP01307371A patent/EP1184611B1/en not_active Expired - Lifetime
- 2001-08-30 DE DE60119638T patent/DE60119638T2/de not_active Expired - Lifetime
- 2001-09-03 KR KR10-2001-0053853A patent/KR100415783B1/ko active IP Right Grant
- 2001-09-04 CN CNB011324600A patent/CN1166884C/zh not_active Expired - Fee Related
Cited By (2)
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KR100712453B1 (ko) * | 2005-01-31 | 2007-04-27 | 에스엠시 가부시키가이샤 | 위치 검출 기구가 설치된 스위칭 밸브 |
KR100799296B1 (ko) * | 2006-03-31 | 2008-01-31 | 주식회사 비에프에스 | 센서가 장착되는 컨트롤밸브 |
Also Published As
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US6520202B2 (en) | 2003-02-18 |
TW501693U (en) | 2002-09-01 |
EP1184611B1 (en) | 2006-05-17 |
US20020026959A1 (en) | 2002-03-07 |
JP3590762B2 (ja) | 2004-11-17 |
EP1184611A3 (en) | 2003-06-04 |
DE60119638T2 (de) | 2007-05-10 |
EP1184611A2 (en) | 2002-03-06 |
JP2002081568A (ja) | 2002-03-22 |
CN1166884C (zh) | 2004-09-15 |
DE60119638D1 (de) | 2006-06-22 |
KR100415783B1 (ko) | 2004-01-24 |
CN1342858A (zh) | 2002-04-03 |
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