KR102362929B1 - 프로브 니들의 니들 팁 위치 조정 방법 및 검사 장치 - Google Patents
프로브 니들의 니들 팁 위치 조정 방법 및 검사 장치 Download PDFInfo
- Publication number
- KR102362929B1 KR102362929B1 KR1020207017822A KR20207017822A KR102362929B1 KR 102362929 B1 KR102362929 B1 KR 102362929B1 KR 1020207017822 A KR1020207017822 A KR 1020207017822A KR 20207017822 A KR20207017822 A KR 20207017822A KR 102362929 B1 KR102362929 B1 KR 102362929B1
- Authority
- KR
- South Korea
- Prior art keywords
- needle
- probe
- needle tip
- image
- camera
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2017-231874 | 2017-12-01 | ||
JP2017231874A JP2019102640A (ja) | 2017-12-01 | 2017-12-01 | プローブ針の針先位置調整方法および検査装置 |
PCT/JP2018/042384 WO2019107173A1 (ja) | 2017-12-01 | 2018-11-16 | プローブ針の針先位置調整方法および検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20200090211A KR20200090211A (ko) | 2020-07-28 |
KR102362929B1 true KR102362929B1 (ko) | 2022-02-14 |
Family
ID=66663948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020207017822A KR102362929B1 (ko) | 2017-12-01 | 2018-11-16 | 프로브 니들의 니들 팁 위치 조정 방법 및 검사 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2019102640A (zh) |
KR (1) | KR102362929B1 (zh) |
CN (1) | CN111386595A (zh) |
TW (1) | TW201928364A (zh) |
WO (1) | WO2019107173A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021086634A1 (en) * | 2019-10-31 | 2021-05-06 | Baker Hughes Oilfield Operations Llc | Testing and inspection method and system |
CN112684224A (zh) * | 2020-12-29 | 2021-04-20 | 无锡圆方半导体测试有限公司 | 一种高效预防芯片焊点扎针偏移的方法及*** |
TWI769698B (zh) * | 2021-02-08 | 2022-07-01 | 鴻勁精密股份有限公司 | 取像裝置及其應用之作業設備 |
CN113687215B (zh) * | 2021-08-04 | 2024-03-19 | 深圳市森美协尔科技有限公司 | 一种提高探针与晶圆测试点接触精度的方法及设备 |
CN114088979A (zh) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | 探针校准方法、表面测量方法以及探针控制设备 |
JP2024010713A (ja) | 2022-07-13 | 2024-01-25 | 東京エレクトロン株式会社 | 検査装置、検査方法及びプログラム |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000077502A (ja) * | 1998-08-27 | 2000-03-14 | Ando Electric Co Ltd | 電子部品検査装置及び電子部品検査方法 |
JP2001144197A (ja) | 1999-11-11 | 2001-05-25 | Fujitsu Ltd | 半導体装置、半導体装置の製造方法及び試験方法 |
JP2006177787A (ja) * | 2004-12-22 | 2006-07-06 | Matsushita Electric Ind Co Ltd | 針圧調整用プローブカード、プローブ針の針圧調整方法および半導体装置の特性検査方法 |
JP2007010671A (ja) | 2005-06-30 | 2007-01-18 | Feinmetall Gmbh | 被験体を電気的に検査する方法および装置ならびに検査時に使用される接触装置の製造方法 |
JP2007071765A (ja) | 2005-09-08 | 2007-03-22 | Tokyo Seimitsu Co Ltd | プローブ位置測定のためのプローブ制御装置、及び、プローブ制御方法 |
JP2013003108A (ja) * | 2011-06-21 | 2013-01-07 | Panasonic Corp | 半導体検査装置 |
JP2013137224A (ja) | 2011-12-28 | 2013-07-11 | Sharp Corp | マルチチッププローバ、そのコンタクト位置補正方法、制御プログラムおよび可読記録媒体 |
JP2017183755A (ja) | 2016-03-28 | 2017-10-05 | 株式会社東京精密 | プローブカードの傾き検出方法及びプローバ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01119036A (ja) * | 1987-10-31 | 1989-05-11 | Canon Inc | ウエハプローバ |
JPH0536767A (ja) * | 1991-08-01 | 1993-02-12 | Tokyo Electron Yamanashi Kk | プローブ装置 |
JP3163221B2 (ja) * | 1993-08-25 | 2001-05-08 | 東京エレクトロン株式会社 | プローブ装置 |
JP2661872B2 (ja) * | 1994-03-28 | 1997-10-08 | 東京エレクトロン株式会社 | プローブ装置及びプロービング方法 |
JP2737744B2 (ja) * | 1995-04-26 | 1998-04-08 | 日本電気株式会社 | ウエハプロービング装置 |
JPH10247669A (ja) | 1997-03-04 | 1998-09-14 | Canon Inc | ボンディングワイヤ検査装置および方法 |
JP4071461B2 (ja) * | 2001-07-05 | 2008-04-02 | 大日本スクリーン製造株式会社 | 基板処理システム、基板処理装置、プログラム及び記録媒体 |
JP2005351807A (ja) * | 2004-06-11 | 2005-12-22 | Kawasaki Microelectronics Kk | プローブカードおよびプローブカードの管理方法 |
CN101611324B (zh) * | 2005-10-18 | 2012-11-21 | Gsi集团公司 | 利用光学基准的方法和器件 |
JP2007183193A (ja) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | プロービング装置 |
MY180103A (en) * | 2010-03-12 | 2020-11-22 | Cascade Microtech Inc | System for testing semiconductors |
EP3988985A3 (en) * | 2011-02-01 | 2022-07-13 | Roche Diagnostics Hematology, Inc. | Fast auto-focus in microscopic imaging |
JP6445887B2 (ja) * | 2015-02-09 | 2018-12-26 | キヤノン株式会社 | 焦点調節装置、撮像装置およびこれらの制御方法、プログラム |
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2017
- 2017-12-01 JP JP2017231874A patent/JP2019102640A/ja active Pending
-
2018
- 2018-11-16 WO PCT/JP2018/042384 patent/WO2019107173A1/ja active Application Filing
- 2018-11-16 KR KR1020207017822A patent/KR102362929B1/ko active IP Right Grant
- 2018-11-16 CN CN201880075721.5A patent/CN111386595A/zh active Pending
- 2018-11-29 TW TW107142659A patent/TW201928364A/zh unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000077502A (ja) * | 1998-08-27 | 2000-03-14 | Ando Electric Co Ltd | 電子部品検査装置及び電子部品検査方法 |
JP2001144197A (ja) | 1999-11-11 | 2001-05-25 | Fujitsu Ltd | 半導体装置、半導体装置の製造方法及び試験方法 |
JP2006177787A (ja) * | 2004-12-22 | 2006-07-06 | Matsushita Electric Ind Co Ltd | 針圧調整用プローブカード、プローブ針の針圧調整方法および半導体装置の特性検査方法 |
JP2007010671A (ja) | 2005-06-30 | 2007-01-18 | Feinmetall Gmbh | 被験体を電気的に検査する方法および装置ならびに検査時に使用される接触装置の製造方法 |
JP2007071765A (ja) | 2005-09-08 | 2007-03-22 | Tokyo Seimitsu Co Ltd | プローブ位置測定のためのプローブ制御装置、及び、プローブ制御方法 |
JP2013003108A (ja) * | 2011-06-21 | 2013-01-07 | Panasonic Corp | 半導体検査装置 |
JP2013137224A (ja) | 2011-12-28 | 2013-07-11 | Sharp Corp | マルチチッププローバ、そのコンタクト位置補正方法、制御プログラムおよび可読記録媒体 |
JP2017183755A (ja) | 2016-03-28 | 2017-10-05 | 株式会社東京精密 | プローブカードの傾き検出方法及びプローバ |
Also Published As
Publication number | Publication date |
---|---|
WO2019107173A1 (ja) | 2019-06-06 |
TW201928364A (zh) | 2019-07-16 |
JP2019102640A (ja) | 2019-06-24 |
KR20200090211A (ko) | 2020-07-28 |
CN111386595A (zh) | 2020-07-07 |
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