KR102324548B9 - 레이저 가공 시스템 및 레이저 가공 방법 - Google Patents
레이저 가공 시스템 및 레이저 가공 방법Info
- Publication number
- KR102324548B9 KR102324548B9 KR1020190179976A KR20190179976A KR102324548B9 KR 102324548 B9 KR102324548 B9 KR 102324548B9 KR 1020190179976 A KR1020190179976 A KR 1020190179976A KR 20190179976 A KR20190179976 A KR 20190179976A KR 102324548 B9 KR102324548 B9 KR 102324548B9
- Authority
- KR
- South Korea
- Prior art keywords
- laser machining
- machining method
- machining system
- laser
- machining
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190179976A KR102324548B1 (ko) | 2019-12-31 | 2019-12-31 | 레이저 가공 시스템 및 레이저 가공 방법 |
CN202080079628.9A CN114728373A (zh) | 2019-12-31 | 2020-12-18 | 激光加工***及激光加工方法 |
DE112020006412.3T DE112020006412T5 (de) | 2019-12-31 | 2020-12-18 | Laserbearbeitungssystem und Laserbearbeitungsverfahren |
JP2022527834A JP7522834B2 (ja) | 2019-12-31 | 2020-12-18 | レーザ加工システム及びレーザ加工方法 |
PCT/KR2020/018695 WO2021137488A1 (ko) | 2019-12-31 | 2020-12-18 | 레이저 가공 시스템 및 레이저 가공 방법 |
KR1020210150297A KR102483670B1 (ko) | 2019-12-31 | 2021-11-04 | 레이저 가공 시스템 및 레이저 가공 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190179976A KR102324548B1 (ko) | 2019-12-31 | 2019-12-31 | 레이저 가공 시스템 및 레이저 가공 방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020210150297A Division KR102483670B1 (ko) | 2019-12-31 | 2021-11-04 | 레이저 가공 시스템 및 레이저 가공 방법 |
Publications (3)
Publication Number | Publication Date |
---|---|
KR20210086199A KR20210086199A (ko) | 2021-07-08 |
KR102324548B1 KR102324548B1 (ko) | 2021-11-10 |
KR102324548B9 true KR102324548B9 (ko) | 2022-03-15 |
Family
ID=76686009
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020190179976A KR102324548B1 (ko) | 2019-12-31 | 2019-12-31 | 레이저 가공 시스템 및 레이저 가공 방법 |
KR1020210150297A KR102483670B1 (ko) | 2019-12-31 | 2021-11-04 | 레이저 가공 시스템 및 레이저 가공 방법 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020210150297A KR102483670B1 (ko) | 2019-12-31 | 2021-11-04 | 레이저 가공 시스템 및 레이저 가공 방법 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7522834B2 (ko) |
KR (2) | KR102324548B1 (ko) |
CN (1) | CN114728373A (ko) |
DE (1) | DE112020006412T5 (ko) |
WO (1) | WO2021137488A1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102324548B1 (ko) * | 2019-12-31 | 2021-11-10 | (주)미래컴퍼니 | 레이저 가공 시스템 및 레이저 가공 방법 |
KR20240002660A (ko) * | 2022-06-29 | 2024-01-05 | (주)미래컴퍼니 | 표시 장치 제조에 사용되는 레이저 가공 장치 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100500343B1 (ko) * | 2000-08-29 | 2005-07-12 | 미쓰비시덴키 가부시키가이샤 | 레이저 가공 장치 |
JP2005262251A (ja) | 2004-03-17 | 2005-09-29 | Shibaura Mechatronics Corp | レーザ加工装置 |
JP4667329B2 (ja) * | 2006-08-30 | 2011-04-13 | 三菱電機株式会社 | レーザ加工装置 |
JP4805123B2 (ja) | 2006-12-22 | 2011-11-02 | 日酸Tanaka株式会社 | トーチの開先角度の制御方法及びトーチの開先角度の制御装置 |
JP4386137B2 (ja) * | 2008-02-29 | 2009-12-16 | トヨタ自動車株式会社 | レーザ加工装置及びレーザ加工方法 |
JP5288987B2 (ja) * | 2008-10-21 | 2013-09-11 | 三菱電機株式会社 | レーザ加工装置 |
JP2010227962A (ja) * | 2009-03-26 | 2010-10-14 | Fujitsu Ltd | レーザ加工方法 |
SE533066C2 (sv) * | 2009-08-24 | 2010-06-22 | Esab Ab | Anordning och förfarande för automatisk flersträngssvetsning |
FR2949618B1 (fr) * | 2009-09-01 | 2011-10-28 | Air Liquide | Tete de focalisation laser pour installation laser solide |
JP5994723B2 (ja) * | 2013-05-09 | 2016-09-21 | トヨタ自動車株式会社 | レーザ穴あけ加工方法および装置 |
US10357848B2 (en) * | 2015-01-19 | 2019-07-23 | General Electric Company | Laser machining systems and methods |
JP6451420B2 (ja) | 2015-03-11 | 2019-01-16 | オムロン株式会社 | 接合構造体の製造方法 |
KR101742132B1 (ko) * | 2015-08-10 | 2017-05-31 | 주식회사 이오테크닉스 | 레이저 가공장치 |
WO2018047823A1 (ja) * | 2016-09-09 | 2018-03-15 | 三菱電機株式会社 | レーザ加工装置 |
KR102603393B1 (ko) | 2016-12-06 | 2023-11-17 | 삼성디스플레이 주식회사 | 레이저 가공 장치 |
KR102108403B1 (ko) * | 2017-04-14 | 2020-05-26 | (주)비슬로 | 다축 레이저 가공기 |
KR102324548B1 (ko) | 2019-12-31 | 2021-11-10 | (주)미래컴퍼니 | 레이저 가공 시스템 및 레이저 가공 방법 |
-
2019
- 2019-12-31 KR KR1020190179976A patent/KR102324548B1/ko active IP Right Grant
-
2020
- 2020-12-18 CN CN202080079628.9A patent/CN114728373A/zh active Pending
- 2020-12-18 DE DE112020006412.3T patent/DE112020006412T5/de active Pending
- 2020-12-18 WO PCT/KR2020/018695 patent/WO2021137488A1/ko active Application Filing
- 2020-12-18 JP JP2022527834A patent/JP7522834B2/ja active Active
-
2021
- 2021-11-04 KR KR1020210150297A patent/KR102483670B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2023502617A (ja) | 2023-01-25 |
KR20210086199A (ko) | 2021-07-08 |
KR102483670B1 (ko) | 2023-01-03 |
JP7522834B2 (ja) | 2024-07-25 |
WO2021137488A1 (ko) | 2021-07-08 |
KR20210136946A (ko) | 2021-11-17 |
DE112020006412T5 (de) | 2022-11-17 |
CN114728373A (zh) | 2022-07-08 |
KR102324548B1 (ko) | 2021-11-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
G170 | Re-publication after modification of scope of protection [patent] |