KR102295310B1 - 밸브장치 - Google Patents

밸브장치 Download PDF

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Publication number
KR102295310B1
KR102295310B1 KR1020207008602A KR20207008602A KR102295310B1 KR 102295310 B1 KR102295310 B1 KR 102295310B1 KR 1020207008602 A KR1020207008602 A KR 1020207008602A KR 20207008602 A KR20207008602 A KR 20207008602A KR 102295310 B1 KR102295310 B1 KR 102295310B1
Authority
KR
South Korea
Prior art keywords
flow path
valve
valve seat
side flow
valve body
Prior art date
Application number
KR1020207008602A
Other languages
English (en)
Korean (ko)
Other versions
KR20200040868A (ko
Inventor
카즈나리 와타나베
코헤이 시교
켄지 아이카와
토모히로 나카타
타카히로 마츠다
츠토무 시노하라
Original Assignee
가부시키가이샤 후지킨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 후지킨 filed Critical 가부시키가이샤 후지킨
Publication of KR20200040868A publication Critical patent/KR20200040868A/ko
Application granted granted Critical
Publication of KR102295310B1 publication Critical patent/KR102295310B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)
KR1020207008602A 2017-10-31 2018-10-22 밸브장치 KR102295310B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017210282 2017-10-31
JPJP-P-2017-210282 2017-10-31
PCT/JP2018/039154 WO2019087838A1 (ja) 2017-10-31 2018-10-22 バルブ装置

Publications (2)

Publication Number Publication Date
KR20200040868A KR20200040868A (ko) 2020-04-20
KR102295310B1 true KR102295310B1 (ko) 2021-08-30

Family

ID=66331874

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207008602A KR102295310B1 (ko) 2017-10-31 2018-10-22 밸브장치

Country Status (6)

Country Link
US (1) US11320056B2 (ja)
JP (1) JP7157461B2 (ja)
KR (1) KR102295310B1 (ja)
CN (1) CN111316026A (ja)
TW (1) TWI717648B (ja)
WO (1) WO2019087838A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11402029B2 (en) * 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
JP2021008829A (ja) * 2019-06-28 2021-01-28 株式会社フジキン バキュームジェネレータ
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置
US11454325B2 (en) 2020-11-12 2022-09-27 Honeywell International Inc. Overpressure protection valve

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015036563A (ja) 2013-08-12 2015-02-23 株式会社フジキン ダイヤフラム弁

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH03168494A (ja) 1989-11-14 1991-07-22 Cryolab Inc Ｔ字管
DE19511395A1 (de) * 1995-03-28 1996-10-02 Buerkert Werke Gmbh & Co Modulares Ventilsystem zum Sammeln und Verteilen von Flüssigkeiten
JP3068010B2 (ja) * 1996-07-30 2000-07-24 株式会社ベンカン 集積化ガス制御装置におけるバルブ結合装置
FR2755512B1 (fr) * 1996-11-05 1998-12-18 Air Liquide Procede et dispositif de fourniture a un appareil d'un gaz pur charge d'une quantite predeterminee d'au moins une impurete gazeuse
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
JP4902912B2 (ja) * 2001-07-10 2012-03-21 旭有機材工業株式会社 マニホールドバルブ
KR100905518B1 (ko) 2001-06-21 2009-07-01 아사히 유키자이 고교 가부시키가이샤 매니폴드 밸브
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP4395641B2 (ja) 2006-10-06 2010-01-13 忠弘 大見 流体制御装置
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
WO2015089202A1 (en) * 2013-12-10 2015-06-18 Semba Biosciences, Inc. High-flow fluid valve block
DE102014105097A1 (de) * 2014-04-10 2015-10-15 Halla Visteon Climate Control Corporation Ventilblockanordnung für mehrere Ventile
JP6416529B2 (ja) * 2014-07-23 2018-10-31 株式会社フジキン 圧力式流量制御装置
WO2017063707A1 (de) * 2015-10-15 2017-04-20 Festo Ag & Co. Kg Ventileinrichtung
CN106122526B (zh) * 2016-08-05 2018-10-02 宁波方太厨具有限公司 燃气灶阀体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015036563A (ja) 2013-08-12 2015-02-23 株式会社フジキン ダイヤフラム弁

Also Published As

Publication number Publication date
US11320056B2 (en) 2022-05-03
TWI717648B (zh) 2021-02-01
CN111316026A (zh) 2020-06-19
TW201923265A (zh) 2019-06-16
US20210199205A1 (en) 2021-07-01
JPWO2019087838A1 (ja) 2020-11-12
WO2019087838A1 (ja) 2019-05-09
JP7157461B2 (ja) 2022-10-20
KR20200040868A (ko) 2020-04-20

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