KR102190030B1 - 플라즈마 발생 장치 - Google Patents

플라즈마 발생 장치 Download PDF

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Publication number
KR102190030B1
KR102190030B1 KR1020130148469A KR20130148469A KR102190030B1 KR 102190030 B1 KR102190030 B1 KR 102190030B1 KR 1020130148469 A KR1020130148469 A KR 1020130148469A KR 20130148469 A KR20130148469 A KR 20130148469A KR 102190030 B1 KR102190030 B1 KR 102190030B1
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KR
South Korea
Prior art keywords
dielectric layer
electrode
high dielectric
low dielectric
plasma generating
Prior art date
Application number
KR1020130148469A
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English (en)
Korean (ko)
Other versions
KR20140071250A (ko
Inventor
세이로 유게
카즈토시 타케노시타
유키카 야마다
마코토 미야모토
Original Assignee
삼성전자주식회사
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Publication of KR20140071250A publication Critical patent/KR20140071250A/ko
Application granted granted Critical
Publication of KR102190030B1 publication Critical patent/KR102190030B1/ko

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/30—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10—Apparatus features
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2317/00—Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass
    • F25D2317/04—Treating air flowing to refrigeration compartments
    • F25D2317/041—Treating air flowing to refrigeration compartments by purification
    • F25D2317/0415—Treating air flowing to refrigeration compartments by purification by deodorizing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Plasma Technology (AREA)
KR1020130148469A 2012-12-03 2013-12-02 플라즈마 발생 장치 KR102190030B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012264271 2012-12-03
JPJP-P-2012-264271 2012-12-03

Publications (2)

Publication Number Publication Date
KR20140071250A KR20140071250A (ko) 2014-06-11
KR102190030B1 true KR102190030B1 (ko) 2020-12-14

Family

ID=50864242

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130148469A KR102190030B1 (ko) 2012-12-03 2013-12-02 플라즈마 발생 장치

Country Status (3)

Country Link
JP (1) JP2014132566A (ja)
KR (1) KR102190030B1 (ja)
CN (1) CN103857167B (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107427693B (zh) * 2015-04-13 2019-11-29 株式会社首琳医疗保险 利用等离子体的皮肤治疗装置
KR102121136B1 (ko) * 2016-01-18 2020-06-09 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치 및 성막 처리 장치
KR102235221B1 (ko) * 2017-02-16 2021-04-02 닛신덴키 가부시키 가이샤 플라즈마 발생용의 안테나, 그것을 구비하는 플라즈마 처리 장치 및 안테나 구조
KR102064452B1 (ko) * 2018-01-03 2020-02-11 강경두 플라즈마를 이용한 식품 살균 장치
KR102262447B1 (ko) * 2018-01-03 2021-06-07 강경두 플라즈마를 이용한 식품 살균 장치
KR102229290B1 (ko) * 2019-04-16 2021-03-17 한국핵융합에너지연구원 피부 처리를 위한 대기압 공기 플라즈마 제트 장치
KR102274231B1 (ko) * 2019-05-27 2021-07-06 광운대학교 산학협력단 오존 프리 소독용 대기압 플라즈마 처리시스템
US20240066161A1 (en) * 2021-08-09 2024-02-29 TellaPure, LLC Methods and apparatus for generating atmospheric pressure, low temperature plasma

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009081134A (ja) 2007-09-09 2009-04-16 Kazuo Shimizu プラズマ電極
JP2009078266A (ja) 2007-09-09 2009-04-16 Kazuo Shimizu プラズマを用いた流体浄化方法および流体浄化装置
JP2010149053A (ja) 2008-12-25 2010-07-08 Kyocera Corp 誘電性構造体、誘電性構造体を用いた放電装置、流体改質装置、および反応システム
WO2012063856A1 (ja) 2010-11-09 2012-05-18 株式会社サムスン横浜研究所 プラズマ発生装置、プラズマ発生方法及びオゾン発生抑制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002224211A (ja) 2000-05-18 2002-08-13 Sharp Corp 殺菌方法、イオン発生装置及び空気調節装置
US6729734B2 (en) 2002-04-01 2004-05-04 Hewlett-Packard Development Company, L.P. System for enhancing the quality of an image
CN2604846Y (zh) * 2003-02-26 2004-02-25 王守国 常压射频圆筒形外射冷等离子体发生器
JP2007250284A (ja) 2006-03-14 2007-09-27 National Univ Corp Shizuoka Univ プラズマ電極
JP5081689B2 (ja) * 2008-03-28 2012-11-28 日本碍子株式会社 マイクロプラズマジェット反応器、及びマイクロプラズマジェット発生装置
US9220162B2 (en) * 2011-03-09 2015-12-22 Samsung Electronics Co., Ltd. Plasma generating apparatus and plasma generating method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009081134A (ja) 2007-09-09 2009-04-16 Kazuo Shimizu プラズマ電極
JP2009078266A (ja) 2007-09-09 2009-04-16 Kazuo Shimizu プラズマを用いた流体浄化方法および流体浄化装置
JP2010149053A (ja) 2008-12-25 2010-07-08 Kyocera Corp 誘電性構造体、誘電性構造体を用いた放電装置、流体改質装置、および反応システム
WO2012063856A1 (ja) 2010-11-09 2012-05-18 株式会社サムスン横浜研究所 プラズマ発生装置、プラズマ発生方法及びオゾン発生抑制方法

Also Published As

Publication number Publication date
CN103857167A (zh) 2014-06-11
KR20140071250A (ko) 2014-06-11
CN103857167B (zh) 2017-11-21
JP2014132566A (ja) 2014-07-17

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