KR101807002B1 - Apparatus for spraying liquid plasma jet - Google Patents

Apparatus for spraying liquid plasma jet Download PDF

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Publication number
KR101807002B1
KR101807002B1 KR1020150184847A KR20150184847A KR101807002B1 KR 101807002 B1 KR101807002 B1 KR 101807002B1 KR 1020150184847 A KR1020150184847 A KR 1020150184847A KR 20150184847 A KR20150184847 A KR 20150184847A KR 101807002 B1 KR101807002 B1 KR 101807002B1
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KR
South Korea
Prior art keywords
liquid
plasma jet
plasma
nozzle
electrode
Prior art date
Application number
KR1020150184847A
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Korean (ko)
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KR20170075330A (en
Inventor
홍용철
김강일
김지훈
허진영
Original Assignee
한국기초과학지원연구원
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Priority to KR1020150184847A priority Critical patent/KR101807002B1/en
Priority to PCT/KR2016/015149 priority patent/WO2017111520A1/en
Publication of KR20170075330A publication Critical patent/KR20170075330A/en
Application granted granted Critical
Publication of KR101807002B1 publication Critical patent/KR101807002B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/24—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means incorporating means for heating the liquid or other fluent material, e.g. electrically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/001—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means incorporating means for heating or cooling, e.g. the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/16—Arrangements for supplying liquids or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)

Abstract

The present invention relates to a liquid plasma jet ejecting apparatus, and more particularly, to a liquid plasma jet ejecting apparatus including a power supply unit for supplying power; 1. A cylindrical chamber having a nozzle portion, comprising: a plasma nozzle for injecting a liquid or a mixed fluid of liquid and fluid into a plasma state and injecting the plasma; And an electrode part formed inside the plasma nozzle and converting the supplied liquid or a mixed fluid of the liquid and the gas into a plasma state by applying a voltage supplied from a power supply part, wherein the electrode part is electrically connected to a power supply part electrode; And a dielectric tube surrounding the inner electrode.

Description

[0001] APPARATUS FOR SPRAYING LIQUID PLASMA JET [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid plasma jet jetting apparatus, and more particularly, to a technique of cleaning or coating a surface of a semiconductor and optical components using a liquid plasma jet.

In recent years, it has been further demanded that these surfaces are not contaminated with metal impurities or fine particles, along with high-functionalization of semiconductors and optical components, and various cleaning methods have been demanded.

For example, there are a physical method of polishing the surface of the object to be cleaned to remove impurities, a chemical method of cleaning the surface by immersing an object to be cleaned in the chemical agent, and the like.

However, the physical method is disadvantageous in that the surface of the object to be cleaned is damaged and the cleaning ability is poor. The chemical method has an excellent cleaning effect, but the rinse and drying process after the cleaning is added to increase the processing time, Therefore, there is a problem in that there is a problem of environmental pollution.

Accordingly, physicochemical methods of cleaning the surface of an object by using a vacuum plasma have been studied. However, when vacuum plasma is used, there is a disadvantage in that it is economically disadvantageous because of expensive equipment and large-area processing is impossible. Plasma-based methods have also been developed, but the disadvantage is that the surfaces of heat-sensitive objects are difficult to process.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a liquid plasma jet ejecting apparatus for ejecting a liquid suitable for surface cleaning and surface coating of semiconductor, glass,

According to an embodiment of the present invention, there is provided a power supply apparatus including: a power supply unit for supplying power; 1. A cylindrical chamber having a nozzle portion, comprising: a plasma nozzle in which a liquid or a mixed fluid of liquid and gas introduced into the inside is converted into a plasma state and injected; And an electrode part formed inside the plasma nozzle and converting the supplied liquid or a mixed fluid of the liquid and the gas into a plasma state by applying a voltage supplied from a power supply part, wherein the electrode part is electrically connected to a power supply part electrode; And a dielectric tube surrounding the inner electrode.

The present invention also provides a surface cleaning apparatus including the liquid plasma jet ejecting apparatus.

Further, the present invention provides an air purification apparatus including the liquid plasma jet injection device.

The present invention also provides a surface coating apparatus including the liquid plasma jet ejecting apparatus.

The liquid plasma jet injecting apparatus according to the present invention is a liquid plasma jet injecting apparatus according to the present invention which generates a plasma by using a liquid or a mixed fluid of liquid and gas to generate an active radical and generates a liquid in which the generated active radical is dissolved or a mixed fluid It is possible to perform the cleaning in an economical manner without surface damage or environmental pollution of the object to be treated and to add a particle to be coated to a liquid or a mixed fluid of liquid and gas to obtain a surface coating effect .

1 shows a schematic cross-sectional view of a liquid plasma jet injector 100 according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view showing a nozzle portion shape of a plasma nozzle 104 according to another embodiment of the present invention.
3 is a schematic cross-sectional view of a plasma nozzle 104 in which a plurality of fluid inlets are formed in a liquid plasma jet injection apparatus 100 according to another embodiment of the present invention.
4 shows a liquid plasma jet injection apparatus 100 according to another embodiment of the present invention in which (a) a fluid inlet 110 is formed in a nozzle portion of a plasma nozzle 104, and (b) a fluid inlet 110 are formed so as to communicate directly with the discharge forming space S1 through the cylindrical chamber of the plasma nozzle 104 and the dielectric tube.
FIG. 5 is a photograph illustrating a process of spraying a liquid plasma jet according to an increase in voltage through a liquid plasma jet injecting apparatus 100 according to an embodiment of the present invention.
6 is a view showing an electrode unit 106 of a liquid plasma jet injection apparatus 100 according to an embodiment of the present invention.
7 is a side view showing a further embodiment of the liquid plasma jet injection device 100 according to the present invention.
8 is a schematic sectional view in the lateral direction of the liquid plasma jet injection device 100 according to another embodiment of the present invention.
9 is a schematic diagram illustrating a further embodiment of a liquid plasma jet injector 100 according to the present invention.
10 shows the state of the surface of the alumina ball through the liquid plasma jet injector 100 according to an embodiment of the present invention before copper coating (left ball) and after coating (right ball).
11 is a SEM photograph of a surface of an alumina ball through a liquid plasma jet injecting apparatus 100 according to an embodiment of the present invention before coating.
FIG. 12 shows a SEM photograph of a surface of an alumina ball after copper coating through a liquid plasma jet injector 100 according to an embodiment of the present invention.
FIG. 13 shows the resistance values measured before and after the copper (a) coating and the (b) coating of the surface of the alumina ball through the liquid plasma jet injecting apparatus 100 according to an embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited by these drawings and the like.

The liquid plasma jet injector of the present invention includes: a power supply unit for supplying power; 1. A cylindrical chamber having a nozzle portion, comprising: a plasma nozzle in which a liquid or a mixed fluid of liquid and gas introduced into the inside is converted into a plasma state and injected; And an electrode part formed inside the plasma nozzle and converting the supplied liquid or a mixed fluid of the liquid and the gas into a plasma state by applying a voltage supplied from a power supply part, wherein the electrode part is electrically connected to a power supply part electrode; And a dielectric tube surrounding the inner electrode.

1 shows a schematic cross-sectional view of a liquid plasma jet injector 100 according to an embodiment of the present invention.

As shown in the figure, a liquid plasma jet injection apparatus 100 according to an embodiment of the present invention includes a power supply unit 102, a plasma nozzle 104, and an electrode unit 106.

The power supply unit 102 supplies power to the liquid-plasma-jet spraying apparatus of the present invention, and can be configured in a suitable form according to the type and voltage of the power source. For example, the power supply unit 102 may supply a direct current or alternating current, and may apply an RF or pulse voltage.

The plasma nozzle 104 is a cylindrical chamber having a nozzle portion and is provided with at least one fluid inlet 110 through which fluid or a mixed fluid of liquid and gas flows into the interior of the plasma nozzle 104 through the fluid inlet . The mixed liquid of the liquid or gas and the mixed fluid of the liquid and the gas introduced into the space is converted into the plasma state in the discharge forming space S1 by the electrode unit 106 by receiving the power supplied from the power supply unit 102, A liquid plasma jet is formed in the forming space S2 and is sprayed in a mist form through the nozzle unit. The liquid is, for example, water, H 2 O 2 , C 2 H 5 OH, CH 3 OH, CH 3 COOH or a mixture of two or more thereof. In addition, the gas may be appropriately selected in consideration of the kind of liquid to be used and the like. For example, air, nitrogen, oxygen, an inert gas (e.g., helium, argon, neon, etc.) .

The material of the plasma nozzle 104 is not particularly limited as long as it has conductivity, and examples thereof include stainless steel, carbon steel, tungsten, molybdenum, brass, bronze, copper and aluminum. The nozzle part formed in the cylindrical chamber of the plasma nozzle 104 may have a suitable shape in consideration of the type of liquid and / or gas and the object to be treated, and for example, the nozzle part may be linear or radial, 2, the nozzle unit has a configuration in which the diameter of the nozzle flow path is constant in the direction of the end of the nozzle within the plasma nozzle 104 (FIG. 2 (a)), (Fig. 2 (b)) or a shape in which the diameter of the nozzle flow path becomes larger (Fig. 2 (c)).

A fluid inlet 110 is provided in the plasma nozzle 104 and may be a single fluid inlet or a plurality of fluid inlets may be formed, A plurality of inlets may be formed to flow in the tangential direction. The fluid inlet 110 may be formed in the cylindrical chamber of the plasma nozzle 104 as shown in FIG. 1 and may be formed in the nozzle of the plasma nozzle 104 as shown in FIG. 4 (a) And may be formed directly through the cylindrical chamber of the plasma nozzle 104 and the dielectric tube, as shown in FIG. 4 (b), to directly communicate with a discharge forming space S1 described later. Meanwhile, a liquid or a mixed fluid of liquid and gas may be introduced through the fluid inlet 110, but a gas inlet may be additionally provided in addition to the fluid inlet 110 to introduce only gas.

The electrode unit 106 receives the voltage supplied from the power supply unit 102, and converts the liquid or liquid mixed with the gas into the plasma nozzle 104 into the plasma state. The plasma contains oxygen and hydrogen, and generates active species such as a hydroxyl radical (OH - ), an oxygen atom or a hydrogen atom. The active species is dissolved in a liquid or a mixed fluid of liquid and gas, .

FIG. 5 is a photograph illustrating a process of spraying a liquid plasma jet according to an increase in voltage through a liquid plasma jet injecting apparatus 100 according to an embodiment of the present invention.

As shown in the figure, as the voltage increases, the liquid plasma jet is injected through the liquid plasma jet injector 100 of the present invention, for example, when the liquid flows into the fluid inlet 110 and flows into the plasma nozzle 104 (Fig. 5) in which the liquid is affected by the electric field so that the liquid stream is bent (step 2 in Fig. 5), the liquid plasma is generated (step 3 in Fig. 5), and the liquid plasma jet is generated (5 in Fig. 5) in which the liquid in which the active radicals are dissolved is injected in a mist form by the step of injecting (4 in Fig. 5) and the pressure generated in the liquid plasma generation.

6 is a view illustrating an electrode unit 106 of a liquid plasma jet injection apparatus 100 according to an embodiment of the present invention.

As shown in the figure, the electrode unit 106 includes an internal electrode 400 electrically connected to the power supply unit 102; And a dielectric tube 402 surrounding the inner electrode 400.

The internal electrode 400 is electrically connected to the power supply unit 102 and is not particularly limited as long as it has conductivity as a material of the internal electrode 400. Examples thereof include tungsten, molybdenum, titanium, or stainless steel It can be composed of one or more materials. The material constituting the internal electrode 400 may be determined in consideration of the shape and size of the internal electrode 400, the processability or price of the metallic material, and the like. For example, the internal electrode 400 may be made of stainless steel with good processability, and the end where plasma is generated may be formed of tungsten or the like having high abrasion resistance.

The dielectric tube 402 surrounds the internal electrode 400. The dielectric tube 402 protrudes from the end of the internal electrode 400 and the dielectric tube 402 extends from the end of the internal electrode 400 The projected length d is several centimeters or less, preferably 0.1 mm to 100 mm. The dielectric tube 402 protrudes from the end of the internal electrode 400 to form a discharge forming space S1 and the voltage is applied to the plasma nozzle 104 and the electrode unit 106, The mixed liquid of the liquid filled in the discharge space and the gas is heated by Joule heating so that the discharge forming space S1 facilitates plasma formation. The dielectric tube 402 may be made of at least one of boron nitride (BN), alumina or quartz, and the diameter of the dielectric tube 402 may be, for example, And may be formed in a range of 0.1 mm to 1000 mm.

In the present invention, by using the electrode unit having the above-described structure, it is possible to easily replace only the electrode unit without using the entire plasma generating electrode module in case of electrode damage.

The electrode portion 106 of the present invention is usually located in the cylindrical chamber of the plasma nozzle 104. However, if necessary, a part of the electrode portion 106 may be located outside the cylindrical chamber. In this case, Is formed is preferably located at least in the cylindrical chamber.

7 is a side view showing a further embodiment of the liquid plasma jet injection device 100 according to the present invention.

As shown in the figure, the liquid-plasma jet injection apparatus 100 of the present invention may include a plurality of electrode units 106, and the number of the electrode units 106 may be adjusted so that the concentration of the generated active radicals Can be adjusted efficiently.

The internal electrode 400 surrounded by the dielectric tube 402 in the electrode portion 106 of the liquid plasma jet injection device 100 may be formed as a further embodiment of the liquid plasma jet injection device 100 according to the present invention, In this case, as shown in FIG. 8, a plurality of internal electrodes 400 may be formed in a bundle shape in the dielectric tube 402. When a plurality of internal electrodes 400 are formed in a bundle shape in one dielectric tube 402, even if some electrodes are worn, the plasma can be formed and the life of the entire internal electrode can be extended .

9 is a schematic diagram illustrating a further embodiment of a liquid plasma jet injector 100 according to the present invention.

As shown in the drawing, the liquid plasma jet injecting apparatus of the present invention arranges, for example, a plurality of liquid plasma jet injectors 100 at regular intervals in the lateral direction or the longitudinal direction, Cleaning and surface coating.

As described above, the liquid plasma jet injection apparatus of the present invention generates a plasma using a liquid or a mixed fluid of liquid and gas, generates active radicals, and mixes the liquid in which the generated active radical is dissolved or a mixed fluid of liquid and gas, The surface of the object to be treated can be used as a surface cleaning device for removing organic substances and metal residues present on the surface of the object to be treated and can also be used as an air purification device when it is sprayed into the air. Further, since the liquid particles to be injected are very small, they can also be used as a surface coating device by mixing and spraying a coating material in a liquid.

Example

Distilled water, a mixture of hydrazine (N 2 H 4 ) and Cu (OH) 2 , was sprayed onto the surface of an alumina (Al 2 O 3 ) ball having a diameter of 2 mm through a liquid plasma jet apparatus according to the present invention to perform copper coating . The liquid plasma jet injecting apparatus used in this embodiment is a plasma nozzle having a power supply unit for supplying DC power (-5 kV) and a linear nozzle unit made of stainless steel in a cylindrical chamber of an inner diameter of 8 mm and made of stainless steel And one fluid inlet is provided in the cylindrical chamber of the plasma nozzle. The electrode unit is composed of a tungsten inner electrode having a diameter of 2.4 mm and a dielectric tube made of alumina having an inner diameter of 3 mm and surrounding the inner electrode. 3 mm.

10 shows photographs of alumina balls before (left alumina ball) and after (right alumina ball) through a liquid plasma jet injector 100 according to an embodiment of the present invention.

11 is a SEM photograph of the surface of the alumina ball before coating with the liquid plasma jet injector 100 according to an embodiment of the present invention, and FIG. 12 is a cross-sectional view of the liquid plasma jet injector 100 according to an embodiment of the present invention. The surface of the alumina ball is copper coated on the surface of the alumina ball by treating the surface of the alumina ball through the liquid plasma jet injecting apparatus of the present invention, .

The resistance of the alumina balls before and after the copper coating with the liquid plasma jet injector 100 according to an embodiment of the present invention was measured using a resistance meter (Hioki-3288, manufactured by HIOKI) 13 (b)) compared to the resistance before coating (Fig. 13 (a)), as shown in Fig. 13 I could confirm.

100: liquid plasma jet injector
102: Power supply
104: Plasma nozzle
106:
110: fluid inlet
400: internal electrode
402: dielectric tube

Claims (14)

A power supply unit for supplying power;
1. A cylindrical chamber having a nozzle portion, comprising: a plasma nozzle in which a liquid or a mixed fluid of liquid and gas introduced into the inside is converted into a plasma state and injected; And
And an electrode part formed in the plasma nozzle and converting a supplied liquid or a mixed fluid of liquid and gas into a plasma state by applying a voltage supplied from a power supply part,
The electrode unit includes an internal electrode electrically connected to a power supply unit. And a dielectric tube surrounding the inner electrode, wherein a plurality of inner electrodes are formed in a bundle in the dielectric tube. 2. The liquid plasma jet according to claim 1, wherein the dielectric tube protrudes beyond the end of the inner electrode. The liquid plasma jet injector according to claim 2, wherein the length of the dielectric tube protruding from the end of the internal electrode is 0.1 to 100 mm. 2. The liquid plasma jet jetting apparatus according to claim 1, wherein the liquid to be introduced therein is water, H 2 O 2 , C 2 H 5 OH, CH 3 OH, CH 3 COOH or a mixture of two or more thereof. The apparatus of claim 1, wherein the material of the dielectric tube is comprised of one or more materials of boron nitride (BN), alumina or quartz. The liquid plasma jet injector according to claim 1, wherein the material of the inner electrode is at least one of tungsten, molybdenum, titanium, and stainless steel. 2. The liquid plasma jet jetting apparatus according to claim 1, wherein the nozzle portion is linear or radial. The liquid ejecting apparatus as claimed in claim 1, wherein the nozzle unit comprises: a liquid ejecting head for ejecting liquid, which is a shape in which the diameter of the nozzle passage is kept constant in the direction of the end of the nozzle unit from the inside of the plasma nozzle, a shape in which the diameter of the nozzle passage is increased, Plasma jet injector. 2. The liquid plasma jet jetting apparatus according to claim 1, wherein at least one fluid inlet is formed in the plasma nozzle. The liquid plasma jet jetting apparatus according to claim 1, comprising a plurality of electrode portions. delete A surface cleaning apparatus comprising the liquid plasma jet ejecting apparatus according to any one of claims 1 to 10. An air purification apparatus comprising the liquid plasma jet injecting apparatus according to any one of claims 1 to 10. A surface coating apparatus comprising the liquid plasma jet injecting apparatus according to any one of claims 1 to 10.
KR1020150184847A 2015-12-23 2015-12-23 Apparatus for spraying liquid plasma jet KR101807002B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020150184847A KR101807002B1 (en) 2015-12-23 2015-12-23 Apparatus for spraying liquid plasma jet
PCT/KR2016/015149 WO2017111520A1 (en) 2015-12-23 2016-12-23 Liquid plasma jet spraying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150184847A KR101807002B1 (en) 2015-12-23 2015-12-23 Apparatus for spraying liquid plasma jet

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KR101807002B1 true KR101807002B1 (en) 2018-01-18

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KR20210006686A (en) * 2019-07-09 2021-01-19 한국기초과학지원연구원 Waterjet liquid discharge generator and coating apparatus for liquid material using the same
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US11529655B2 (en) 2019-09-02 2022-12-20 Semes Co., Ltd. Nozzle, substrate processing apparatus including the same, and substrate processing method

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KR100625315B1 (en) * 2004-08-24 2006-09-20 세메스 주식회사 Apparatus and method for supplying cleaning liquid
KR100817038B1 (en) * 2005-10-10 2008-04-07 (주) 플라즈닉스 Methods and apparatus for treating the surface of materials by atmospheric pressure plasma
KR100977711B1 (en) * 2008-04-25 2010-08-24 주식회사 하나에프비 Apparatus for generating atmospheric pressure plasma and surface treatment method using the same
KR101056097B1 (en) * 2009-03-25 2011-08-10 박종훈 Atmospheric Pressure Plasma Generator
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KR20210006686A (en) * 2019-07-09 2021-01-19 한국기초과학지원연구원 Waterjet liquid discharge generator and coating apparatus for liquid material using the same
KR102243816B1 (en) * 2019-07-09 2021-04-23 한국핵융합에너지연구원 Waterjet liquid discharge generator and coating apparatus for liquid material using the same
US11529655B2 (en) 2019-09-02 2022-12-20 Semes Co., Ltd. Nozzle, substrate processing apparatus including the same, and substrate processing method
US11897005B2 (en) 2019-09-02 2024-02-13 Semes Co., Ltd. Nozzle, substrate processing apparatus including the same, and substrate processing method
KR20210078783A (en) * 2019-12-19 2021-06-29 주식회사 코드스테리 Media atomizing gun and apparatus for activating a media including the gun
KR102311139B1 (en) * 2019-12-19 2021-10-13 주식회사 코드스테리 Media atomizing gun and apparatus for activating a media including the gun

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KR20170075330A (en) 2017-07-03

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