KR101759727B1 - Apodized Gratings for Polymeric Waveguide Tunable Wavelength Filters in the manufacturing method - Google Patents
Apodized Gratings for Polymeric Waveguide Tunable Wavelength Filters in the manufacturing method Download PDFInfo
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- KR101759727B1 KR101759727B1 KR1020150128746A KR20150128746A KR101759727B1 KR 101759727 B1 KR101759727 B1 KR 101759727B1 KR 1020150128746 A KR1020150128746 A KR 1020150128746A KR 20150128746 A KR20150128746 A KR 20150128746A KR 101759727 B1 KR101759727 B1 KR 101759727B1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04J—MULTIPLEX COMMUNICATION
- H04J14/00—Optical multiplex systems
- H04J14/02—Wavelength-division multiplex systems
Abstract
The present invention proposes a polymer Bragg reflection filter having an epitaxial lattice structure in order to realize a low-cost, compact variable wavelength filter for use in a WDM optical communication system. A cladding forming step of forming a coated lower cladding on a substrate; And forming a Bragg grating on the lower cladding using a laser interferometer to grasp the Bragg grating; And a shadow mask on the grating region on the Bragg grating; And forming an epitaxial lattice in which, after the fixing step, the depth of the etched lattice is gradually reduced from the center of the lattice region exposed from the oxygen plasma to both sides, thereby forming a lattice; The etch depth can be gradually changed along the direction by forming an epitaxial lattice by the lattice exposed by the oxygen plasma. In order to obtain a high reflectance in a short lattice, an optical waveguide having a large difference in refractive index between the core and the cladding was fabricated. In order to solve the problem of wide bandwidth in a uniform lattice structure, we proposed an epitaxial lattice structure in which the depth of the lattice structure changes slowly along the direction of the light wave. The shadow mask can be used to form an epodized lattice on the polymer optical waveguide. The polymer bandgap lattice filter fabricated in this way has a narrow bandwidth and high reflectance. Also, it was confirmed that when the micro heater was heated, the filtering wavelength was shifted to the short wavelength side. Therefore, the high reflectance reduces the signal loss due to the filter, and the narrow bandwidth can prevent the crosstalk caused by the wavelength signal of the adjacent channel in the WDM optical communication system. In addition, among the multiplexed and transmitted signals, a specific wavelength signal can be filtered to be filtered, and an excellent tunable wavelength characteristic of the polymer Bragg element can select a specific wavelength signal over a wide wavelength range.
Description
The present invention relates to a method of fabricating a polymer optical waveguide tunable filter based on an epoxide grid, and more particularly, to a method of manufacturing a polymer optical waveguide tunable filter that provides a variable wavelength filter having a high reflectance and a narrow reflection bandwidth And a manufacturing method thereof.
Wavelength Division Multiplexing (WDM) optical communication systems have provided a very important technical solution for handling ever-increasing Internet traffic capacity. When data of 10 Gigabits per second can be transmitted at one wavelength, data can be generated using 40 wavelengths, multiplexed, and transmitted through one optical fiber. In the WDM optical communication system, 400 Gigabits of data are transmitted in one second And the like. In a WDM optical communication system using several different wavelengths, it is desired to increase the data transmission speed by using a plurality of light sources having different wavelengths. In order to extract data having different wavelengths, a wavelength (D. Sadot and E. Boimovich, " Tunable optical filters for dense WDM networks, " IEEE Commun. Mag., Vol. 36, No. 12, pp. 50-55, Dec. 1998).
A lot of researches about wavelength filters for WDM optical communication systems have been actively conducted, and there are several filters showing good characteristics.
. The tunable tunable silicon ring resonator can be tuned over a free spectral range (FSR) of 11 nm (P. Dong, W. Qian, H. Liang, R. Shafiiha, D. Feng, G. Li, JE Cunningham , AV Krishnamoorthy, and M. Asghari, " Thermally tunable silicon racetrack resonators with ultralow tuning power, " Opt. Express, vol. 18, No. 19, pp. 20298-20304, Sep. 2010.).
[5] P. Orlandi, C. Ferrari, MJ Strain, A. Canciamilla, F. Morichetti, M. Sorel, and P. Bassi, "The effect of the ring resonator on the Mach-Zehnder interferometer" and A. Melloni, " Reconfigurable silicon filter with continuous bandwidth tunability, " Opt. Lett., vol. 37, No. 17, pp. 3669-3671, Sep. 2012.).
Using three ring resonators, the side-mode suppression ratio (SMSR) was increased to 40 dB and a flat passband was obtained in the transmission spectrum (T. Hu, W. Wang, C. Qiu, P. Yu, H. Qiu, Y. Zhao, X. Jiang, and J. Yang, "Thermally tunable filters based on third order microring resonators for WDM applications," IEEE Photon. Technol. Lett., Vol. 24, no. -526, Jan. 2012.).
A silicon photonic wavelength multiplexer with a variable range of 2.5 nm and a 3-dB bandwidth of 0.4 nm has been implemented for application to integrated optical interconnection (X. Zheng, I. Shubin, G. Li, T. Pinguet, A. Express, Express, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, Expression, vol. 18, no. 5, pp. 5151-5160, Mar. 2010.).
[8] JS Milne, JM Dell, AJ Keating, and L. Faraone, "Widely Tunable MEMS Devices with Wide Bandwidth and Variable Tuning Range" -based Fabry-Perot filter, " J. Microelectromech. Syst., vol. 18, No. 4, pp. 905-908, Aug. 2009.).
In addition, a thermo-optic tunable filter using a waveguide mode resonator was also implemented, with a tunable range of 15 nm and a bandwidth of several nanometers ([9] MJ Uddin and R. Magnusson, "Guided-mode resonant thermo-optic tunable filters, Photon. Technol. Lett., Vol. 25, no. 15, pp. 1412-1415, Aug. 2013.).
The asymmetric directional coupler fabricated from the polymer optical waveguide Bragg grating has a narrow bandwidth of 3-dB bandwidth of 0.5 nm (W.-C. Chuang, A.-C. Lee, C.-K. Chao , and C.-T. Ho, "Fabrication of optical filters based on polymeric asymmetric Bragg couplers," Opt. Express, vol.17, no.2, pp. 18003-18013, Sep. 2009.).
The various studies described above have advantages and disadvantages as filters for WDM optical communication systems. However, there is a problem that it is difficult to simultaneously satisfy a narrow bandwidth and a wide range of variable characteristics.
Therefore, in order to solve such a problem, a polymer optical waveguide variable wavelength filter based on an epicatech lattice is proposed.
The polymer optical waveguide device can excellently accomplish the object of controlling and modifying the light transmitted through the optical fiber in various forms within the device to output. The waveguide mode of the polymer optical waveguide can basically be matched with the waveguide mode of the optical fiber and the refractive index can be similarly adjusted, so that no additional loss occurs when the optical fiber is connected.
In addition, since the polymer optical waveguide device is suitable for manufacturing basic devices for optical signal control such as an optical switch and an optical attenuator, a polymer optical waveguide device provides a suitable platform for integrating various functional optical devices.
In addition, polymer optical devices are well suited for optical signal control using heat due to their excellent thermal insulation and high thermo-optic properties.
In addition, since the size of the thermo-optic effect is 10 times larger than that of silica or other materials, efficient optical signal control can be achieved by using less heat.
In order to fabricate a small-sized wavelength filter using such a polymer, the length of the lattice must be shortened. However, as the length of the grating becomes shorter, the reflectivity decreases.
In order to increase the reflectance, the effective refractive index difference value caused by the lattice structure must be made large. However, at this time, there is a problem that the reflection bandwidth increases with the increase of the reflectance.
In order to solve this problem, a lattice is fabricated while changing the lattice thickness gradually along the propagation direction of the light wave during the fabrication of the lattice structure, and the lattice fabricated by this method is called an epodized lattice.
There are various techniques for manufacturing the lattice such as molding, embossing, stamping, electron beam, two-beam interference, and photochemical process. We propose a method of manufacturing grid by irradiating ultraviolet (UV) (Method of precision fabrication by light exposure and structure of tunable waveguide bragg grating, US 6,522,812 B1, Feb. 18,2003).
In addition, a method of making a pseudomorphic grating directly on a polymer optical waveguide using a photochemical process has also been proposed (L. Eldada, R. Blomquist, M. Maxfield, D. Pant, G. Boudoughian, C. Poga, and RA Norwood, " Thermooptic Planar Polymer Bragg Grating OADM's with Broad Tuning Range, " IEEE Photon. Technol. Lett.,
However, there is a limit that is not proposed in a method of fabricating an epitaxial lattice in a polymer optical waveguide device.
In addition, when a Bragg grating is formed in a polymer optical waveguide and used as a wavelength filter, a uniform lattice element in which a lattice structure is uniformly formed from the beginning to the end is generally manufactured. In the case of the uniform grating, if the grating structure is deeply formed to increase the reflectance of the Bragg grating, the reflection bandwidth of the Bragg reflection wavelength spectrum increases.
This is because, when a desired one of the wavelength channels multiplexed in the WDM optical communication system is selectively filtered, adjacent wavelengths are also filtered to cause crosstalk of the adjacent channel signal. Therefore, a filter having a narrow bandwidth is required to prevent signal crosstalk between adjacent channels.
Accordingly, the present invention has been made in order to solve such a problem, and it is an object of the present invention to provide a polymer based on an epodavalent grating capable of forming an epodized lattice using a shadow mask in an oxygen plasma etching process It is another object of the present invention to provide a manufacturing method of an optical waveguide variable wavelength filter.
In order to realize a tunable filter having a narrow bandwidth while obtaining a high reflectance in a short lattice, a polymer optical waveguide for fabricating an epitaxial lattice fabricated such that the depth of the lattice gradually changes along the traveling direction of the optical wave And a method for manufacturing the variable wavelength filter.
According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, including: forming a cladding layer on a substrate; And forming a Bragg grating on the lower cladding using a laser interferometer to grasp the Bragg grating; And a shadow mask on the grating region on the Bragg grating; And forming an epitaxial lattice in which, after the fixing step, the depth of the etched lattice is gradually reduced from the center of the lattice region exposed from the oxygen plasma to both sides, thereby forming a lattice; The etch depth can be gradually changed along the direction by forming an epitaxial lattice by the lattice exposed by the oxygen plasma.
In the method of fabricating the polymer optical waveguide tunable filter, the thickness of the spacer is adjusted to prevent penetration of the oxygen plasma into the surface by using one or more spacers at the time of formation of the epitaxial grid, And an adjusting step for adjusting the depth variation of the pseudo-grating.
The method of fabricating such a polymer optical waveguide tunable filter has an element structure in which the above-described epheded lattice is formed on a core layer.
According to the fabrication method of the polymer optical waveguide tunable filter based on the epodayzed grating, a small tunable filter having an epodized lattice structure is implemented, and the present invention can be applied to a WDM optical communication system. The high reflectance reduces the signal loss due to the filter, and the narrow bandwidth can be effective in preventing crosstalk due to the wavelength signal of the adjacent channel in the WDM optical communication system. In addition, it is possible to perform filtering by reflecting a specific wavelength signal among signals multiplexed and transmitted, and an excellent variable wavelength characteristic possessed by a polymer Bragg element enables a specific wavelength signal to be selected over a wide wavelength range.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flowchart of a method for fabricating a polymer optical waveguide tunable filter based on an epodialized grating according to a preferred embodiment of the present invention; FIG.
FIG. 2 is a block diagram of a polymer variable wavelength filter based on an epodata Bragg grating according to a preferred embodiment of the present invention; FIG.
FIG. 3 illustrates a reflection spectrum of a design result for various refractive index distributions in a lattice structure according to a preferred embodiment of the present invention; FIG.
4 is a graph illustrating a result of calculating reflectance, a 3-dB bandwidth, and a 2-dB bandwidth using a combination of a uniform lattice and a Gaussian lattice according to a preferred embodiment of the present invention;
FIG. 5 illustrates a single mode optical waveguide design graph with a high refractive index difference using an effective refractive index calculation method according to a preferred embodiment of the present invention;
FIG. 6 is a view illustrating a manufacturing process of a polymer optical waveguide tunable filter having an epitaxial lattice structure according to a preferred embodiment of the present invention; FIG.
FIG. 7 is a diagram illustrating a shadow mask precision used in oxygen plasma etching to fabricate an epoxide grid according to a preferred embodiment of the present invention; FIG.
8 is a diagram showing transmission and reflection spectra of a wavelength tunable filter having an epitaxial lattice structure according to a preferred embodiment of the present invention;
FIG. 9 is a graph showing a result of checking wavelength tuning characteristics of a filter having an epiloaded grating length of 7 mm according to a preferred embodiment of the present invention.
The reflectance of the Bragg grating, which is widely used in filter structures, is determined by the length of the Bragg grating and the index modulation of the grating structure.
In the two factors that determine the reflectance, it is possible to fabricate a filter with a narrow bandwidth by using a small index modulation and a long grating. However, in order to obtain a high reflectance in a structure having a small modulation value of the Bragg grating, a sufficiently long grating is required. If the length of the Bragg grating becomes long, it is difficult to fabricate the grating uniformly. If the wavelength tuning is performed, the same thermo-optic effect can not be excited in the entire grating structure. In order to produce a uniform grating, it is advantageous to shorten the grating length, but it is difficult to obtain a high reflectance. Therefore, in order to obtain a high reflectance in a short lattice length, the index modulation value by the lattice must be increased. However, the larger the index modulation value, the wider the bandwidth. This causes crosstalk due to the wavelength signal of the adjacent channel in the WDM optical communication system.
Researches on a filter using a uniform Bragg grating have been conducted. In order to realize a small tunable filter, the length of the grating must be short. In order to obtain a high reflectance in a short grating, the effective refractive index difference in the grating structure must be large. To solve these problems, we introduced an ephodized lattice structure that can reduce the bandwidth of the polymer optical waveguide.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. 1 to 9. FIG. On the other hand, those skilled in the art to which the present invention applies, such as the related art for operating the oxygen plasma, the technology relating to bonding of the lower cladding and the substrate, and the related technology for coating the lower cladding, And the detailed description thereof will be omitted, and portions related to the present invention will be mainly shown and described.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flowchart showing a method of manufacturing a polymer optical waveguide tunable filter based on an epodialized grating according to a preferred embodiment of the present invention. FIG.
Referring to FIG. 1, a method for fabricating a polymer optical waveguide tunable filter includes a cladding formation step, a Bragg grating formation step, a fixing step, and an epitaxial grating formation step.
The method of fabricating such a polymer optical waveguide tunable filter has a cladding formation step of forming a coated
In the cladding-forming step, the coating is spin-coated with the polymer to form the
FIG. 2 is a block diagram of a polymer variable wavelength filter based on an epodata Bragg grating according to a preferred embodiment of the present invention. Referring to FIG.
Referring to FIG. 2, a filter having a pseudo-grating structure is proposed in order to realize a small-sized filter having a high reflectance and a narrow bandwidth. The lattice structure is formed between the core cladding layers, and the depth of the lattice structure gradually changes according to the traveling direction of the light wave, and the reflectance of the lattice gradually changes. In order to vary the reflection wavelength of the Bragg grating, a metal heater is formed on the grating pattern area.
FIG. 3 is a diagram showing reflection spectra of design results for various refractive index distributions in a lattice structure according to a preferred embodiment of the present invention.
Referring to FIG. 3, a transmission matrix method is used to calculate an effective refractive index of a grating structure in accordance with the traveling direction of a light wave in order to design an epodata Bragg grating.
For a uniform grid, the maximum index modulation value
As shown in FIG. 3 (b), the results of the pseudo-grating design are shown in Gaussian. The 20-dB bandwidth is much smaller than the uniform grating, but the grating length must be 10 nm or more to obtain a reflectance of 95% or more. The structured grating structure to reduce the length of the grating is shown in Figure 3 (c).
FIG. 4 is a graph showing the reflectance, 3-dB bandwidth, and 20-dB bandwidth calculated by a combination of a uniform grating and a Gaussian grating according to a preferred embodiment of the present invention.
Referring to FIG. 4, the proposed structure has a uniform grating length
In order to obtain adequate reflectivity and bandwidth in a short lattice, a uniform lattice length
At a given lattice length
The materials of core and cladding were 1.455 and 1.430, respectively, to fabricate optical waveguide with large refractive index difference. When the refractive index difference between the core and the cladding material is large, a high refractive index difference can be obtained because of a high refractive index difference even at a small depth of the lattice structure.
FIG. 5 is a diagram illustrating a single mode optical waveguide design graph having a high refractive index difference using the effective refractive index calculating method according to a preferred embodiment of the present invention.
FIG. 5 (a) shows the result of calculation using the effective refractive index method to fabricate a single-mode optical waveguide. When the thickness of the nose is 2.5 μm, the effective refractive index is 1.44475, It can be seen that the effective refractive index is 1.43775 when the thickness is 1.3 mu m.
The effective refractive index according to the thickness of the optical waveguide is shown in FIG. 5 (b) using the two effective refractive indexes calculated above, and it can be seen that the designed optical waveguide is in a single mode. Also, when the depth of the lattice structure is 200 nm, the refractive index change due to the lattice structure is And a high reflectance can be obtained even in a short lattice.
FIG. 6 is a view showing a manufacturing process of a polymer optical waveguide tunable filter having an epicatequent lattice structure according to a preferred embodiment of the present invention.
Referring to FIG. 6, two ZPU polymers of Chem Optics Inc. having a refractive index difference of 0.025 were used to fabricate a tunable wavelength filter having an epodized lattice structure. The optical waveguide was fabricated in the form of a lip having a core size of 4 탆 x 2.7 탆 and a planar waveguide thickness of 1.3 탆. First, a polymer having a refractive index of 1.430 was spin-coated to form a lower cladding on the
FIG. 7 is a diagram showing a shadow mask high-accuracy used in oxygen plasma etching to fabricate an epoxide grid according to a preferred embodiment of the present invention.
Referring to FIG. 7, the
As shown in Figs. 7 (a) and 7 (b), the
A polymer core layer having a refractive index of 1.455 and a thickness of 2.7 탆 was spin-coated on the pseudodized lattice, and a lip type optical waveguide was formed by photolithography and dry etching. A polymer having a refractive index of 1.430 was spin-coated to a thickness of 9 mu m to form an upper cladding. A micro heater was fabricated to change the wavelength.
FIG. 8 is a diagram illustrating transmission and reflection spectra of a wavelength tunable filter having an epitaxial lattice structure according to a preferred embodiment of the present invention.
In order to verify the characteristics of the fabricated variable wavelength filter, the SLED with a center wavelength of 1550 nm and a bandwidth of 60 nm was used as the light source and the polarization of the input light was maintained in the TE mode. The signal reflected by the pseudo-grating was measured by an optical spectrum analyzer (OSA) through a circulator. The transmission spectrum and the reflection spectrum are shown in Fig. 7, and the Bragg reflection pic was shown at 1576.7 nm. It was confirmed that the 3-dB and 20-dB bandwidths were 95% and 0.72 nm, respectively, when the grating length was 7 mm. The flat-top passband was defined as a 0.5-dB bandwidth and was 0.18 nm.
FIG. 9 is a graph showing a result of checking wavelength tuning characteristics of a filter having an epiloaded grating length of 7 mm according to a preferred embodiment of the present invention.
A thin film heater was connected to the power supply to check the variable characteristics of the variable wavelength filter using the thermo - optic effect. The results of measuring the varying reflection spectrum while increasing the power applied to the heater are shown in Fig. When the thermal power of 509 mW is applied, it can be seen that the wavelength is more than 14 nm. The shape of the reflection spectrum is maintained in the wavelength tuning process, but the spectrum is slightly widened when it is tuned to 10 nm or more. Since the pseudo-grating structure is not uniformly fabricated with respect to the propagation direction of the light, it can be seen that the bandwidth of the reflection spectrum is gradually increased due to the change of the refractive index due to the lattice structure as the thermal power is increased. When the temperature of the heater is high, the change of the refractive index becomes large, the power of the propagation mode decreases and the reflectance of the grating decreases. FIG. 9 (b) shows that the wavelength tunable characteristic of the filter is linearly proportional to the heat of the micro heater and the wavelength tuning efficiency is 27 nm / W.
Although the method of fabricating the polymer optical waveguide tunable filter based on the epodized grid according to the preferred embodiment of the present invention as described above has been described according to the above description and drawings, It will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit of the invention.
11: substrate
12: Lower cladding
13: Shadow mask
14: oxygen plasma
15: Spacer
Claims (3)
Forming a Bragg grating on the lower cladding using a laser interferometer to grasp the Bragg grating; Wow
A fixing step of fixing the shadow mask on the grating area using at least one spacer on the Bragg grating to prevent penetration of oxygen plasma into the surface; And
And forming an etch lattice on both sides of the center of the lattice region exposed from the oxygen plasma after the fixing step,
Wherein the forming step forms an epitaxial lattice by the lattice exposed by the oxygen plasma, wherein the depth of the etching is gradually changed by decreasing the oxygen plasma amount by the shadow mask in the fixing step. A Fabrication Method of Polymer Optical Waveguide Tunable Filters Based on Izd Grid.
Further comprising the step of adjusting the thickness of the spacer to adjust the shape of the epilayered grating when forming the epilayered grating. ≪ RTI ID = 0.0 > 8. < / RTI >
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| US11726332B2 (en) | 2009-04-27 | 2023-08-15 | Digilens Inc. | Diffractive projection apparatus |
| WO2016020630A2 (en) | 2014-08-08 | 2016-02-11 | Milan Momcilo Popovich | Waveguide laser illuminator incorporating a despeckler |
| US9933684B2 (en) | 2012-11-16 | 2018-04-03 | Rockwell Collins, Inc. | Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration |
| US10241330B2 (en) | 2014-09-19 | 2019-03-26 | Digilens, Inc. | Method and apparatus for generating input images for holographic waveguide displays |
| EP3245444B1 (en) | 2015-01-12 | 2021-09-08 | DigiLens Inc. | Environmentally isolated waveguide display |
| US9632226B2 (en) | 2015-02-12 | 2017-04-25 | Digilens Inc. | Waveguide grating device |
| EP3359999A1 (en) | 2015-10-05 | 2018-08-15 | Popovich, Milan Momcilo | Waveguide display |
| US10545346B2 (en) | 2017-01-05 | 2020-01-28 | Digilens Inc. | Wearable heads up displays |
| KR20210138609A (en) | 2019-02-15 | 2021-11-19 | 디지렌즈 인코포레이티드. | Method and apparatus for providing a holographic waveguide display using an integral grating |
| CN114207492A (en) | 2019-06-07 | 2022-03-18 | 迪吉伦斯公司 | Waveguide with transmission grating and reflection grating and method for producing the same |
| KR20220054386A (en) | 2019-08-29 | 2022-05-02 | 디지렌즈 인코포레이티드. | Vacuum Bragg grating and manufacturing method thereof |
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| JP2012054367A (en) * | 2010-08-31 | 2012-03-15 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor element, and method of manufacturing the same |
| JP2014516479A (en) | 2011-04-25 | 2014-07-10 | オーエフエス ファイテル，エルエルシー | Raman distributed feedback fiber laser and high power laser system using the same |
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| JP2012054367A (en) * | 2010-08-31 | 2012-03-15 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor element, and method of manufacturing the same |
| JP2014516479A (en) | 2011-04-25 | 2014-07-10 | オーエフエス ファイテル，エルエルシー | Raman distributed feedback fiber laser and high power laser system using the same |
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