KR101672039B1 - Air flow sensor for preventing pollution - Google Patents

Air flow sensor for preventing pollution Download PDF

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Publication number
KR101672039B1
KR101672039B1 KR1020150061466A KR20150061466A KR101672039B1 KR 101672039 B1 KR101672039 B1 KR 101672039B1 KR 1020150061466 A KR1020150061466 A KR 1020150061466A KR 20150061466 A KR20150061466 A KR 20150061466A KR 101672039 B1 KR101672039 B1 KR 101672039B1
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KR
South Korea
Prior art keywords
temperature
micro
heater
sensor
air flow
Prior art date
Application number
KR1020150061466A
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Korean (ko)
Inventor
전명건
임승구
조성화
조수만
최정환
Original Assignee
주식회사 현대케피코
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Priority to KR1020150061466A priority Critical patent/KR101672039B1/en
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Publication of KR101672039B1 publication Critical patent/KR101672039B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The present invention relates to an air flow rate sensor for preventing contamination of an air flow rate sensor by heating a protective film through an element heating unit electrically connected in series with a micro heater, A temperature sensor which is stacked on the support film and measures a temperature change of ambient air caused by heat emitted from the micro heater; An air temperature sensor disposed in a direction in which the air is introduced and measuring the temperature of air introduced from the outside, a sensor unit having a temperature-measuring resistor disposed on each side of the temperature sensor, Wherein the heating unit is electrically connected to the micro-heater, Further it includes a heating and, at the same time, the micro-heater heating section and said element.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an air flow sensor,

The present invention relates to an air flow rate sensor, and more particularly, to an air flow rate sensor for preventing contamination of an air flow rate sensor by heating a protective film through an element heating unit electrically connected in series with a micro heater.

An air flow sensor is installed in the intake line of the vehicle as disclosed in Patent No. 10-0559129 (Published Mar. 10, 2006).

Therefore, since the amount of the air sucked into the engine can be measured through the air flow sensor on the intake line, the combustion operation is controlled in consideration of the amount of the air sucked into the engine through the control unit, have.

1, a general air flow sensor is composed of a silicon substrate 10, a support film 20 laminated on the silicon substrate 10, a lamination layer 22 formed on the support film 20, A sensor unit 30 having a temperature measurement resistor 32 disposed on each side of the temperature sensor 31 and a lead pattern 33 extending from the temperature sensor 31 and the temperature measurement resistor 32, And a protective layer 50 stacked on the sensor portion 30 and the heating portion 40. The protective layer 50 is formed on the upper surface of the sensor portion 30 and the heating portion 40,

In such an air flow sensor, the surface of the protective film 50 could be easily contaminated by oil sticking.

That is, when the engine is stopped, the oil in the cylinder is scattered and adhered to the surface of the air flow rate sensor, thereby easily fouling the surface of the air flow rate sensor.

At this time, the oil adhered to the surface of the air flow sensor interferes with the flow of air and the heat of the air, thereby deteriorating the accuracy of measurement of the air flow rate through the air flow sensor.

For this reason, in the related field, the air flow sensor is heated before and after the engine is driven to generate a tropical stream around the air flow sensor.

If the air flow sensor is heated to generate a flow around the air flow sensor, the oil around the air flow sensor will evaporate and the oil flow to the air flow sensor will be blocked, preventing the surface of the air flow sensor from being contaminated Could.

However, the prevention of the contamination of the air flow rate sensor by heating does not mean that the adhesion of the oil can be fundamentally blocked, so that there is still a problem that the air flow rate sensor is contaminated due to oil sticking.

For the above reasons, in the related field, an attempt has been made to develop an air flow sensor that can prevent the surface of the protective film from being contaminated due to oil sticking, but the results have not been satisfactorily achieved.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an air flow sensor which can prevent contamination due to oil sticking due to oil sticking, And an object of the present invention is to provide an air flow sensor for an air flow sensor.

An air flow sensor for preventing contamination according to an embodiment of the present invention includes a silicon substrate, a support film stacked on the silicon substrate, a heating unit having a micro heater stacked on the support film and radiating heat, A temperature sensor for measuring a temperature change of ambient air caused by heat emitted from the micro heater, an outside air temperature sensor arranged in a direction in which air is introduced and measuring the temperature of the air introduced from the outside, A sensor unit having a temperature-measuring resistor disposed on each side of the temperature sensor, and a protective film stacked on the sensor unit and the heating unit, wherein the heating unit is electrically connected to the micro-heater to heat the device And the micro heater and the element heating unit are simultaneously heated.

The micro-heater is disposed at the center of the upper portion of the support film.

The temperature-side resistance includes an upstream-layer temperature-side resistance and a downstream-layer temperature-side resistance.

The upstream-layer temperature-side resistance is disposed between the outside temperature sensor and the micro-heater, and the downstream-layer temperature-side resistance is disposed in a direction opposite to the upstream-side temperature-side resistance with respect to the micro-heater.

The element heating unit is connected in series with the micro heater.

The resistance value of the micro heater and the resistance value of the element heating section are different from each other.

The resistance value of the micro-heater is 100 to 120 ohms (Ω).

The resistance value of the element heating portion is 60 to 80 ohms (?).

In the air flow sensor for preventing contamination according to the present invention, since the element heating portion is disposed at the center of the upper portion of the support film to generate heat, the entire support film is heated due to the characteristic of the material of the support film having high thermal conductivity, It is possible to effectively block and evaporate the adhesion to the surface of the substrate.

By simultaneously heating the microheater and the element heating unit, power consumption for heating the microheater and the element heating unit can be efficiently reduced as compared with when the microheater and the element heating unit are independently heated.

Also, by electrically connecting the microheater and the element heating unit, pads for contacting the microheater and the element heating unit with the external conductor are simultaneously connected, so that the element for contacting the heating unit with the external conductor can reduce the pad corresponding to the heating unit Thereby simplifying the circuitry that forms the air flow sensor.

The resistance value of the element heating section is formed to be lower than the resistance value of the micro heater so that the temperature of the element heating section electrically connected to the micro heater is not affected by the temperature of the micro heater, The temperature of the air can be accurately measured.

1 is a cross-sectional view of an air flow sensor for preventing contamination according to the prior art;
2 is a cross-sectional view schematically showing a cross-section of an air flow sensor according to an embodiment of the present invention.
3 is a plan view schematically illustrating a plane of an air flow sensor according to an embodiment of the present invention.
4 is a circuit diagram of an air flow sensor according to an embodiment of the present invention;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 to 4, the air flow sensor for preventing contamination according to the present invention includes a silicon substrate 100, a support film 200, a heating unit 300, a sensor unit 400, (500).

The silicon substrate 100 has an opening 110 formed at an intermediate portion thereof.

Since the opening 110 is formed in the middle of the silicon substrate 100, the lower part of the sensor unit 400 positioned above the silicon substrate 100 can be opened, The heat transfer between the sensor units 400 can be minimized.

The support film 200 is formed on the silicon substrate 100 and is formed of a nitride film.

Since the support film 200 is formed of silicon nitride, it can be insulated from the sensor unit 400 due to its material characteristics.

The heating unit 300 is stacked on the supporting film 200 and includes a micro heater 310 and a heating unit 320.

The micro-heater 310 is formed of a resistor, and is stacked on the center of the support film 200.

The micro heaters 310 are stacked on the center of the support film 200 so that the heat emitted from the heating unit 300 is not deviated to one side from the upper side of the support film 200, 200 in the direction of the rim of the support membrane 200.

The micro-heater 310 is powered by a separate controller or directly controlled by the ECU and generates heat whenever necessary.

The micro heater 310 generates heat, so that the air introduced into the cylinder can be heated.

The heating unit 320 is formed of a resistor and is stacked on the supporting film 200 and electrically connected to the micro-heater 310 in series.

The heating unit 320 is electrically connected to the micro heater 310 in series so that the heating unit 320 can be heated simultaneously with the micro heater 310.

The sensor unit 400 is stacked on the support film 200 and includes a temperature sensor 410, an ambient temperature sensor 420, and a temperature-measuring resistor 430.

The temperature sensor 410 flows adjacent to the micro heater 310 and measures the temperature of the air changed by the heat of the micro heater 310.

The ambient temperature sensor 420 is disposed in a direction in which air flows in from above the support membrane 200 to measure the temperature of the air introduced from the outside of the air flow sensor.

The temperature-measuring resistor 430 is disposed on each side of the temperature sensor 410, and measures the temperature change of the air flowing adjacent to the micro-heater 310.

The temperature-measuring resistor 430 includes an upstream-layer temperature-measuring resistor 431 and a downstream-layer temperature-measuring resistor 432.

Here, in the present invention, the direction in which air flows in from the outside is referred to as an upstream layer, and the direction in which air flows out is referred to as a downstream layer.

The upper-layer temperature-side resistance 431 is disposed between the outside temperature sensor 420 and the micro-heater 310.

The downstream-side temperature-side resistance 432 is disposed in a direction opposite to the upstream-side temperature-side resistance 431 with respect to the micro-heater 310.

That is, the upper-layer temperature-side resistance 431 and the lower-layer temperature-side resistance 432 are arranged symmetrically with respect to the microheater 310.

The heat generated by the micro-heater 310 is transmitted to the upper-layer temperature-side resistance 431 and the lower-layer temperature-side resistance 432 through the support film 200 and the protection film 500 having high thermal conductivity.

At this time, since the upper layer side temperature resistance 431 and the downstream layer temperature side resistance 432 are symmetrical with respect to the micro heater 310, when there is no air flow, the upper layer temperature side temperature resistance 431 and the downstream layer temperature side resistance 432, The air temperature difference of the temperature-measuring resistor 432 is not generated.

However, when there is an air flow, the upstream-layer temperature-side resistance 431 is cooled by air, but the downstream-layer temperature-side resistance 432 is supplied with the air whose temperature has been raised by the heat emitted from the micro-heater 310 Therefore, the temperature of the upstream-side temperature-side resistor 431 may be lower than the temperature of the upstream-side temperature-side resistor 431.

For example, when an airflow is generated in the direction of arrow A as shown in FIG. 3, the temperature of the upstream-side temperature-side resistance 431 becomes lower than the temperature of the downstream-side temperature-side resistance 432.

Therefore, the flow velocity is measured by detecting the air temperature difference between the upstream-side temperature-side resistance 431 and the downstream-side temperature-side resistance 432.

Further, the direction of flow of the fluid is also detected depending on which of the temperature of the upstream-side temperature-resisting resistor 431 and the temperature of the downstream-side temperature-side resistor 432 is low.

The protective layer 500 is laminated on the heating part 300 and the sensor part 400 and is formed of silica.

The protective layer 500 may be formed of silica and may be insulated from the sensor unit 400 due to its material properties.

Hereinafter, prevention of contamination due to oil sticking in the air flow sensor of the present invention will be described in detail as follows.

As shown in FIGS. 3 and 4, the heating unit 320 is electrically connected in series with the micro-heater 310 to be heated simultaneously with the micro-heater 310.

Here, since the micro-heater 310 and the heating element 320 generate heat at the upper portion of the support film 200 having high thermal conductivity, due to the material properties of the support film 200 having high thermal conductivity, So that the entire body 200 is heated.

This makes it possible to effectively block and evaporate the scattered oil in the cylinder from adhering to the surface of the air flow rate sensor.

In addition, the micro-heater 310 and the heating unit 320 are disposed at the upper center of the support film 200 and heated.

Therefore, the entire support film 200 is heated, and heat emitted from the heating unit 300 is not removed from the upper portion of the support film 200, And may be evenly distributed in the direction of the film 200 edge.

As a result, the scattered oil in the cylinder is effectively blocked and evaporated on the surface of the air flow sensor.

The micro heater 310 and the heating unit 320 are simultaneously heated so that the temperature of the micro heater 310 and the heating unit 320 are lower than those of the micro heater 310 and the heating unit 320, The power consumption for heating the heating portion 320 can be effectively reduced.

The micro heater 310 and the heating unit 320 are electrically connected in series to each other so that the micro heater 310 and the pad 600 for contacting the heating unit 320 with the external heating wire So that the device for contacting the heating part 320 with the external conductor can reduce the pad 600 corresponding to the heating part 320. [

This makes it possible to simplify the circuit for forming the air flow sensor.

At this time, the temperature of the air introduced into the cylinder is increased by the heat of the micro-heater 310, and the temperature of the air is measured by the temperature sensor 410.

Accordingly, the resistance value of the heating portion 320 may be adjusted such that the temperature of the heating portion 320 does not affect the heated temperature of the micro-heater 310, as the element electrically connected in series with the micro- Is set to be lower than the resistance value of the micro-heater (310).

More specifically, the resistance value of the micro-heater 310 is about 100 to 120 ohms, and the resistance of the element 320 is about 60 to 80 ohms.

That is, since the resistance value of the heating part 320 of the device is lower than that of the micro-heater 310, the temperature of the heating part 320, which is electrically connected in series with the micro-heater 310, It does not affect the heated temperature of the heater 310 and the temperature sensor 410 can accurately measure the temperature of the air heated by the micro heater 310. [

As described above, in the air flow sensor according to the present invention, since the heating portion 320 is disposed at the center of the upper portion of the support film 200, the element is heated, It is possible to effectively block and evaporate the entire support membrane 200 from being heated so that the scattered oil in the cylinder is adhered to the surface of the air flow rate sensor.

The micro heater 310 and the heating unit 320 are electrically connected in series so that the micro heater 310 and the pad 600 for contacting the heating unit 320 with the external heating wire The device can reduce the pad 600 corresponding to the heating part 320 for the contact between the heating part 320 and the external conductor, thereby simplifying the circuit for forming the air flow sensor.

The resistance of the heating part 320 of the device is lower than that of the micro heater 310 so that the device is electrically connected in series with the micro heater 310 so that the temperature of the heating part 320 is lower than the resistance of the micro heater 310 so that the temperature sensor 410 can accurately measure the temperature of the air heated by the micro-heater 310. As a result, the temperature of the air heated by the micro-heater 310 can be accurately measured.

100: silicon substrate 110: open groove
200: supporting film 300: heating part
310: Micro-heater 320:
400: sensor part 410: temperature sensor
420: Outside temperature sensor 430:
431: Upstream temperature side temperature resistance 432: Downstream temperature side temperature resistance
500: protective film 600: pad

Claims (8)

A silicon substrate;
A support film stacked on the silicon substrate;
A heating unit stacked on the supporting film and including a micro heater for emitting heat and an element heating unit electrically connected to the micro heater to emit heat;
A temperature sensor which is stacked on the support film and measures changes in temperature of the ambient air caused by the heat emitted from the micro heater, an outside temperature sensor arranged in the direction in which the air is introduced and measuring the temperature of the air introduced from the outside, A sensor unit having a temperature-measuring resistor disposed on each side of the temperature sensor;
And a protection film stacked on the sensor unit and the heating unit,
The micro-heater and the element heating unit are connected in series to each other and heated simultaneously,
Wherein the resistance value of said element heating section is lower than the resistance value of said micro-heater.
The micro-heater according to claim 1,
Wherein the support film is disposed at the center of the upper portion of the support film.
The apparatus according to claim 1, wherein the temperature-
And an upstream layer temperature-measuring resistor and a downstream-layer temperature-measuring resistor.
The apparatus according to claim 3, wherein the upstream-
A micro-heater disposed between the outside temperature sensor and the micro-heater,
The downstream-side layer temperature-
Wherein the micro-heater is disposed in a direction opposite to the upstream-side temperature-side resistance with respect to the micro-heater.
delete delete The method according to claim 1,
Wherein the resistance value of the micro-heater is 100 to 120 ohms (Ω).
The method according to claim 1,
And the resistance value of the element heating section is 60 to 80 ohms (Ω).
KR1020150061466A 2015-04-30 2015-04-30 Air flow sensor for preventing pollution KR101672039B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180137665A (en) 2017-06-19 2018-12-28 (주)포인트엔지니어링 Flow sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3355127B2 (en) * 1998-02-23 2002-12-09 株式会社日立製作所 Thermal air flow sensor
JP2008170382A (en) * 2007-01-15 2008-07-24 Hitachi Ltd Thermal fluid flow sensor, and manufacturing method therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3355127B2 (en) * 1998-02-23 2002-12-09 株式会社日立製作所 Thermal air flow sensor
JP2008170382A (en) * 2007-01-15 2008-07-24 Hitachi Ltd Thermal fluid flow sensor, and manufacturing method therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180137665A (en) 2017-06-19 2018-12-28 (주)포인트엔지니어링 Flow sensor

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