EP1870681A3 - Thermal type flow rate measuring apparatus - Google Patents

Thermal type flow rate measuring apparatus Download PDF

Info

Publication number
EP1870681A3
EP1870681A3 EP07012215A EP07012215A EP1870681A3 EP 1870681 A3 EP1870681 A3 EP 1870681A3 EP 07012215 A EP07012215 A EP 07012215A EP 07012215 A EP07012215 A EP 07012215A EP 1870681 A3 EP1870681 A3 EP 1870681A3
Authority
EP
European Patent Office
Prior art keywords
heat
wiring portions
temperature
disposed
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07012215A
Other languages
German (de)
French (fr)
Other versions
EP1870681B1 (en
EP1870681A2 (en
Inventor
Masahiro Matsumoto
Masamichi Yamada
Hiroshi Nakano
Keiji Hanzawa
Yasuhiro Kanamaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP1870681A2 publication Critical patent/EP1870681A2/en
Publication of EP1870681A3 publication Critical patent/EP1870681A3/en
Application granted granted Critical
Publication of EP1870681B1 publication Critical patent/EP1870681B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/6986—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters with pulsed heating, e.g. dynamic methods

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent the drop in response characteristics. A detection element 1 of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm 2 is formed. On the surface of the diaphragm 2, there are disposed a heat-generating resistor 6 as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor 5 for detecting the temperature of the heat-generating resistor 6, and temperature-detecting resistors 3, 4, 7, and 8 disposed on both sides of the heat-generating resistor 6 as temperature-detecting means. The detection element 1 also includes: wiring portions 18 and 24 which have connecting terminals 31 and 32, electrically connected to the heat-generating resistor 6; wiring portions 15 and 16 having connecting terminals 29 and 30; wiring portions 10 to 13 and 19 to 22 having connecting terminal 25 to 28 and 33 to 36; a wiring pattern 14 disposed between the wiring portions 13 and 15; a wiring pattern 17 disposed between the wiring portions 16 and 18; a wiring pattern 23 disposed between the wiring portions 22 and 24; and a wiring pattern 9 electrically connected with the surface of the planar substrate.
EP07012215.5A 2006-06-21 2007-06-21 Thermal type flow rate measuring apparatus Expired - Fee Related EP1870681B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006171594A JP4226616B2 (en) 2006-06-21 2006-06-21 Thermal flow meter

Publications (3)

Publication Number Publication Date
EP1870681A2 EP1870681A2 (en) 2007-12-26
EP1870681A3 true EP1870681A3 (en) 2013-02-27
EP1870681B1 EP1870681B1 (en) 2016-08-24

Family

ID=38654807

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07012215.5A Expired - Fee Related EP1870681B1 (en) 2006-06-21 2007-06-21 Thermal type flow rate measuring apparatus

Country Status (3)

Country Link
US (1) US7617723B2 (en)
EP (1) EP1870681B1 (en)
JP (1) JP4226616B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4976469B2 (en) 2009-08-28 2012-07-18 日立オートモティブシステムズ株式会社 Thermal humidity sensor
JP5152292B2 (en) * 2010-10-06 2013-02-27 株式会社デンソー Flow measuring device
US20180231410A1 (en) * 2014-11-28 2018-08-16 Hitachi Automotive Systems, Ltd. Thermal-Type Flow Rate Sensor
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
FR3069126B1 (en) * 2017-07-12 2020-11-13 Commissariat Energie Atomique DEVICE FOR REGENERATION OF ELECTRONIC COMPONENTS IN A NUCLEAR ENVIRONMENT
US11092101B2 (en) * 2018-08-22 2021-08-17 Rosemount Aerospace Inc. Heater in-circuit capacitive measurement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06230021A (en) * 1993-02-01 1994-08-19 Ricoh Co Ltd Thermosensible currentmenter and fluidic flow meter using it
EP1484584A2 (en) * 2003-06-05 2004-12-08 Hitachi, Ltd. Thermal air flowmeter

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6239722A (en) 1985-08-16 1987-02-20 Nippon Soken Inc Membrane type resistor for flow sensor
US5291781A (en) * 1991-04-12 1994-03-08 Yamatake-Honeywell Co., Ltd. Diaphragm-type sensor
US6095084A (en) * 1996-02-02 2000-08-01 Applied Materials, Inc. High density plasma process chamber
JP3513041B2 (en) * 1999-01-25 2004-03-31 三菱電機株式会社 Flow sensor
JP2001176365A (en) * 1999-12-15 2001-06-29 Mitsubishi Electric Corp Pressure switch
US6516785B1 (en) * 2000-07-27 2003-02-11 Hitachi, Ltd. Air flow sensor
US6432812B1 (en) * 2001-07-16 2002-08-13 Lsi Logic Corporation Method of coupling capacitance reduction
DE10324292B4 (en) * 2003-05-21 2018-03-15 Robert Bosch Gmbh Measuring element for a flow sensor, in particular an air mass sensor for internal combustion engines
DE10345584A1 (en) * 2003-09-29 2005-04-28 Bosch Gmbh Robert Printed circuit board with plastic part for receiving a measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06230021A (en) * 1993-02-01 1994-08-19 Ricoh Co Ltd Thermosensible currentmenter and fluidic flow meter using it
EP1484584A2 (en) * 2003-06-05 2004-12-08 Hitachi, Ltd. Thermal air flowmeter

Also Published As

Publication number Publication date
JP4226616B2 (en) 2009-02-18
EP1870681B1 (en) 2016-08-24
US7617723B2 (en) 2009-11-17
JP2008002896A (en) 2008-01-10
EP1870681A2 (en) 2007-12-26
US20080016958A1 (en) 2008-01-24

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