KR101669220B1 - Apparatus for multi-element analyzing X-ray fluorescence - Google Patents

Apparatus for multi-element analyzing X-ray fluorescence Download PDF

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KR101669220B1
KR101669220B1 KR1020150086582A KR20150086582A KR101669220B1 KR 101669220 B1 KR101669220 B1 KR 101669220B1 KR 1020150086582 A KR1020150086582 A KR 1020150086582A KR 20150086582 A KR20150086582 A KR 20150086582A KR 101669220 B1 KR101669220 B1 KR 101669220B1
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sample
plate
ray
unit
rays
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Korean (ko)
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김재훈
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(주)에이아이엠
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/313—Accessories, mechanical or electrical features filters, rotating filter disc
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/316—Accessories, mechanical or electrical features collimators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/624—Specific applications or type of materials steel, castings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The present invention relates to an X-ray fluorescence analyzer capable of multi-element analysis, and more particularly, to an X-ray fluorescence analyzer capable of performing multi-element analysis and capable of effectively controlling the irradiation range (spot) of X- And an X-ray fluorescence analyzer capable of multi-element analysis. To this end, the present invention provides an X-ray imaging apparatus comprising: an X-ray generating unit for generating X-rays; A sample bed on which the sample to be analyzed lies; A detector for detecting fluorescent X-rays generated in the sample; An analyzer for analyzing the energy of the fluorescent X-rays detected by the detector to analyze an element in the sample; A plate-shaped filter unit disposed between the X-ray generating unit and the sample stage, the filters having different energy transmission areas arranged in a circular arrangement so that X-rays of energy suitable for analysis of the sample can be irradiated to the sample; A plate-shaped adjusting unit disposed between the X-ray generating unit and the sample stage, the plate-shaped adjusting unit having a circular array structure of irradiation beams of different sizes for adjusting an irradiation range of X-rays irradiated from the X-ray generating unit to the sample; And a rotating means for rotating the plate-shaped adjusting unit and the plate-shaped filter unit so that X-rays having an irradiation range and an energy suitable for the sample to be analyzed can be irradiated to the sample, wherein the X-ray fluorescence analyzer to provide.

Description

[0001] The present invention relates to an X-ray fluorescence analyzer capable of multi-element analysis,

[0001] The present invention relates to an X-ray fluorescence analyzer, and more particularly, to an X-ray fluorescence analyzer which is capable of effectively reducing an X-ray irradiation spot (spot) Ray fluorescence analyzer.

In general, an X-ray fluorescence analyzer is a device for measuring the component of a sample or the thickness of a coating by detecting the energy of a fluorescent X-ray generated in the sample after the X-ray is irradiated on the sample.

Incidentally, when a substance is irradiated with a strong X-ray (primary X-ray) generated in the X-ray generator, various interactions between the X-ray and the substance occur. One of them is a secondary X- Lt; / RTI > This fluorescence X-ray occurs when primary electrons of the element go out into the outer shell by the primary X-ray and then to the electron shell where the electrons with higher energy remain. The fluorescent X-ray is called the characteristic X- The X-ray has an inherent wavelength according to each element, and the X-ray fluorescence analyzer measures the wavelength and the energy intensity of the fluorescent X-ray to qualitatively and quantitatively analyze the element in the substance.

The X-ray fluorescence analyzer having the above-described measurement principle includes an X-ray generating unit for generating X-rays, a sample table on which a sample to be irradiated with X-rays generated from the X-ray generating unit is placed, And an analyzer for analyzing an element in the sample by counting the energy of the fluorescent X-ray detected from the detector according to the level and analyzing the count spectrum according to the energy, A collimator for adjusting the irradiation range of X-rays, and a filter for irradiating the sample with X-rays of the most suitable energy for the sample to be analyzed.

For reference, the structure of the X-ray fluorescence analyzer having the above-described structure is disclosed in Japanese Patent Application Laid-Open No. 10-2008-0088057.

The filter applied to the X-ray fluorescence analyzer disclosed in the present invention is a reflection type filter that reflects monochromatic X-rays among X-rays emitted from the X-ray generating part and is rotated around a hinge by a rack- and pinion- And the angle is adjusted.

In the case of the above-mentioned angle-regulating filter, since the use period of the X-ray fluorescence analyzer is increased, wear or deformation of the operating part can not be precisely positioned at a required position later on the reflection type filter, And the lifetime of the X-ray fluorescence analyzer is shortened.

Published Patent Application No. 10-2008-0088057 (published on October 2, 2008)

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide an X-ray fluorescence spectrophotometer capable of effectively controlling an X-ray irradiation spot (spot) Ray fluorescence analyzer capable of analyzing an element.

According to an aspect of the present invention, there is provided an X-ray imaging apparatus including: an X-ray generating unit generating X-rays; A sample bed on which the sample to be analyzed lies; A detector for detecting fluorescent X-rays generated in the sample; An analyzer for analyzing the energy of the fluorescent X-rays detected by the detector to analyze an element in the sample; A plate-shaped filter unit disposed between the X-ray generating unit and the sample stage, the filters having different energy transmission areas arranged in a circular arrangement so that X-rays of energy suitable for analysis of the sample can be irradiated to the sample; A plate-shaped adjusting unit disposed between the X-ray generating unit and the sample stage, the plate-shaped adjusting unit having a circular array structure of irradiation beams of different sizes for adjusting an irradiation range of X-rays irradiated from the X-ray generating unit to the sample; And a rotating unit for rotating the plate-shaped adjusting unit and the plate-shaped filter unit so that X-rays having an irradiation range and energy suitable for the sample to be analyzed can be irradiated to the sample, wherein the plate-shaped adjusting unit comprises: And a wing portion formed in a structure inclined from the periphery of the circular plate portion to the outside of the circular plate portion and the sample to be measured and having a plurality of through holes through which the fluorescent X-rays emitted from the sample to the detection portion pass. An X-ray fluorescence analyzer capable of multi-element analysis is provided.

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Meanwhile, in the X-ray fluorescence analyzer capable of multi-element analysis, any one of filters installed in the plate-shaped filter unit is composed of lead.

On the other hand, in the X-ray fluorescence analyzer capable of multi-element analysis, any one of the filters provided in the plate-shaped filter unit is composed of a transparent filter.

Meanwhile, in the X-ray fluorescence analyzer capable of multi-element analysis, the rotating means may include: a first rotating means connected to the plate-shaped filter portion to rotate the plate-shaped filter portion; And a second rotating means connected to the plate-shaped adjusting portion to rotate the plate-shaped adjusting portion.

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According to the present invention having the above-described features, there is provided a method of adjusting the irradiation range and energy of an X-ray by rotating a filter unit having a plurality of irradiation lenses and a plurality of filters, It is possible to maintain high precision for a long period of time because the abrasion of the working part is less than the method using the mechanism.

In addition, since the regulating portion and the filter portion located between the X-ray generating portion and the sample bed have a plate-like structure, the interval between the X-ray generating portion and the sample stage can be reduced, There is an effect to be.

It is also possible to analyze the elements of the sample more precisely by analyzing the elements of the sample through precise analysis after specifying the kind of the sample through the preliminary analysis and adjusting the control part and the filter part according to the type of the specified sample And it is also possible to prevent the occurrence of an error due to a mistake of the user.

1 is a structural view of an X-ray fluorescence analyzer according to a preferred embodiment of the present invention,
2 is a block diagram of an X-ray fluorescence analyzer according to a preferred embodiment of the present invention.
3 is a plan view of the plate-shaped filter unit according to the present invention,
FIG. 4 is a perspective view of a plate-
FIG. 5 is an exemplary diagram showing the form of spectra for each medium. FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

2 is a block diagram of an X-ray fluorescence analyzer according to a preferred embodiment of the present invention, and Fig. 3 is a plan view of a planar filter unit according to the present invention. Fig. And FIG. 4 is a perspective view of the plate-shaped adjusting portion according to the present invention.

The X-ray fluorescence analyzer according to the present invention includes an X-ray generator 110, a sample stage 120, a detector 130, an analyzer 140, a plate filter 150, a plate- (170).

The X-ray generating unit 110 is configured to generate X-rays while colliding with a target made of MO (molybdenum) accelerated in the X-ray tube.

The X-ray generating unit 110 generates X-rays using electricity supplied through the high voltage transformer 111.

The X-ray generating unit 110 includes a plurality of X-ray generators 110 and a plurality of X-ray generators 110. The X- Or vertically downward.

The detection unit 130 detects fluorescent X-rays generated in the sample due to irradiation with X-rays, and is arranged to be positioned at an angle of 45 ° from the sample stage 120.

The analyzer 140 analyzes the elements of the sample using the energy information of the fluorescent X-rays detected by the detector 130, receives energy information of the fluorescent X-rays from the detector 130, And a computer having hardware and software for displaying the result to the user.

The energy information of the fluorescent X-rays detected by the detection unit 130 is transmitted to the analysis unit 140 via the amplifier 180 and the controller 190. The amplifier 180 receives the energy information of the fluorescent X- The controller 190 provides a function of controlling the X-ray generating unit 110, the plate-shaped filter unit 150, and the plate-shaped adjusting unit 160 .

Since the X-ray generator 110, the sample stage 120, the detector 130, and the analyzer 140 are known configurations applied to widely-used X-ray fluorescence analyzers, A detailed description will be omitted.

The plate-shaped filter unit 150 adjusts the energy of X-rays irradiated from the X-ray generating unit 110 to the sample table 120, and is formed of a circular plate material. The X- And a plurality of filters (151) for adjusting the flow rate of the fluid.

The filter 151 filters X-rays so that only X-rays of a specific energy range are transmitted, and the plurality of filters transmit X-rays of different energy ranges and are arranged to have a circular array structure.

For reference, in the plate-shaped filter unit 150 according to the preferred embodiment of the present invention, various elements are divided into 16 groups, and one filter for each group is applied so that a filter optimized for analyzing elements belonging to each group can be applied. Filters are installed.

The rotation axis S1 of the plate-like filter unit 150 thus configured is spaced apart from the X-ray irradiation path, and the center of each filter 151 is configured to coincide with the X-ray irradiation path. According to this structure, the energy of the X-rays irradiated to the sample is adjusted by rotating one of the plate-shaped filter units 150 and positioning one of the filters 151 in the X-ray irradiation path.

When the X-ray fluorescence analyzer is not used and the sample is not placed on the sample stage 120, the lead filter may be connected to the X- So that the X-ray is prevented from being radiated to the outside by a device error or a malfunction.

In addition, the plate-shaped filter unit 150 further includes a transparent filter having no influence on the X-ray, and the transparent filter is used in a pre-irradiation process for specifying the kind of the sample.

The plate type regulating unit 160 regulates an irradiation spot of X-rays irradiated from the X-ray generating unit 110 to the sample table 120 and includes a circular plate 161 and a ring- And is disposed between the plate-shaped filter unit 150 and the sample stage 120. Of course, the plate-shaped regulating portion 160 may be disposed between the X-ray generating portion 110 and the plate-shaped filter portion 150.

On the other hand, in the circular plate portion 161, a plurality of irradiation light beams 163 which are located on the X-ray irradiation path and adjust the irradiation range of X-rays are formed.

The plurality of irradiation light beams 163 are configured to have diameters of different sizes ranging from as small as 0.5 mm to as large as 10 mm, and the plurality of irradiation light beams 163 are formed to have a circular array structure .

The wing portion 162 is formed so as to be inclined from the periphery of the circular plate portion 161 to the outside of the circular plate portion 161 and the direction of the sample stage 120 and the fluorescent X- And a plurality of through-holes 164 passing therethrough are formed.

The rotation axis S2 of the plate-shaped regulating portion 160 thus configured is spaced apart in parallel with the X-ray irradiation path, and the center of each irradiation light 163 is configured to coincide with the X-ray irradiation path. According to this structure, the irradiation range of the X-ray is controlled by locating one irradiation light 163 in the irradiation path of the X-ray through the rotation of the plate-

For reference, as is well known, if the sample has a curved surface, or if it is a very small precision component, the accuracy of analysis can be improved by reducing the irradiation range of X-rays.

However, when the irradiation range of the X-ray is reduced, the intensity of the X-ray decreases in proportion thereto. Therefore, conventionally, it has been difficult to reduce the irradiation range of the X-ray to 1 mm or less. However, in the case of the X- The X-ray generating unit 110 and the sample stage 120 are arranged such that only the filter unit 150 and the adjusting unit 160 are disposed between the X-ray generating unit 110 and the sample stage 120, Can be minimized.

Therefore, even when the irradiation light 163 having a diameter of 0.5 mm is formed in the plate-like regulating portion 160 and the irradiation light 163 is placed on the irradiation path of the X-ray, X- As shown in FIG.

The rotating unit 170 rotates the plate-shaped filter unit 150 and the plate-shaped adjuster 160. The rotating unit 170 is connected to the plate-shaped filter unit 150 and includes a first rotating unit 171 And a first rotating unit 172 connected to the plate-shaped adjusting unit 160 to rotate the plate-shaped adjusting unit 160.

The first rotating means 171 includes a first gear 1711 provided on the plate-shaped filter portion 150 to have a structure rotated together with the plate-shaped filter portion 150, A second gear 1712, and a first motor 1713 for rotating the second gear 1712.

The second rotating means 172 includes a third gear 1721 mounted on the plate-shaped adjusting portion 160 so as to rotate together with the plate-shaped adjusting portion 160, A fourth gear 1722, and a second motor 1723 that rotates the fourth gear 1722.

The X-ray fluorescence analysis method according to the present invention, which is implemented using the above-configured X-ray fluorescence analyzer, comprises a transparent filter installed in the plate-shaped filter unit 150, (S110) rotating the plate-like filter unit (150) and the plate-like regulating unit (160) so that the irradiation light having the predetermined range is positioned on the X-ray irradiation path; A step S120 of detecting a fluorescent X-ray generated from the sample after irradiating the sample with a transparent filter located on the X-ray irradiation path and the irradiation light; Analyzing the energy of the fluorescent X-ray detected through step S120 by the analyzer 140 and analyzing the kind of the sample (S130); The step of rotating the plate-shaped filter unit 150 and the plate-shaped adjusting unit 160 so that X-rays having an irradiation range and energy suitable for analysis of the sample can be irradiated to the sample according to the type of the analyzed sample in the step S130 S140); And a step S150 of detecting the fluorescent X-ray generated from the sample after the step S140 and analyzing the energy of the fluorescent X-ray detected by the detector 130 and analyzing the element of the sample (S150) do.

In step S110, the plate-shaped filter unit 150 is rotated so that the transparent filter provided on the plate-shaped filter unit 150 is located on the X-ray irradiation path. In addition, the plate- The irradiation light beam 163 having the largest irradiation range out of the irradiation light beams 163 formed on the X-ray irradiation path is located on the X-ray irradiation path.

The step S120 is performed by the X-ray generating unit 110 and the detecting unit 130. The X-ray is irradiated to the sample through the transparent filter located on the X- And detecting the fluorescence X-ray emitted from the sample by the detecting unit 130.

In step S120, the sample is irradiated with X-rays for 5 seconds, and fluorescent X-rays generated from the sample are detected. At this time, a voltage of 5 Kv and a current of 900 uA are supplied to the X- And the fluorescent X-rays emitted from the sample are received by the detecting unit 130 through the transmission port 164 formed in the plate-shaped regulating unit 160.

When the X-ray having the maximum value is irradiated onto the sample, the value received by the detector varies depending on the type of the sample. This is related to the kind and shape of the sample. For example, when X-rays are irradiated to a weak material such as a hard metal such as titanium (Ti) and a weak material such as titanium (Ti) There is a difference.

Therefore, the user has to set the intensity of X-ray according to the matrix. It is not easy to control the intensity of X-ray according to the medium, since the PE series is very various such as LDPE, ABS, PVC, PT and PP.

Also, if there is a step like a screw, or a product with a transparent material, the amount of X-ray will not be accepted even if the same medium is used. Therefore, it is necessary to give more X-ray dose and longer analysis time.

In the meantime, the present invention provides a value that is received by a detection unit and appears in an analysis unit through an amplifier 180 and a controller 190 as a basis in a detection unit. By using the value, a CPS (count per sec) And the controller 190 gives a command to the controller 190. The controller 190 controls the high voltage supply to flow the appropriate voltage and current so that more accurate and reliable analysis data can be obtained.

In step S130, the analysis unit 140 analyzes the energy of the fluorescent X-ray detected in step S120, and analyzes the kind of the sample.

In step S120, the analysis unit 140 diagnoses the type of sample based on the qualitative (visible light region) analysis received by the detection unit 130, and the qualitative peak (Peak) of the element in the visible light region is shown in FIG. The analyzer 140 may determine the type of the sample to be compared with the spectrum of the fluorescent X-ray transmitted from the detector 130 and the spectrum of the specimen stored in advance as the data because the spectrum has the form of spectra corresponding to the medium, .

In step S140, the plate-shaped adjusting unit 160 is rotated so that X-rays having a suitable irradiation range for the analysis of the sample can be irradiated onto the sample based on the type of the analyzed sample in step S130. In addition, Shaped filter unit 150 so that the X-ray having the X-ray can be irradiated to the sample.

The step S140 may be performed automatically based on the analysis result of step S130, or may display a preliminary analysis result through the screen. Based on the analysis result, the irradiation area 163 having an irradiation range suitable for the analysis of the sample and the energy area And the user may select the filter 151 to be selected.

When the kind of the sample to be analyzed is analyzed as a metal, the plate-shaped filter unit 150 and the plate-shaped adjusting unit 160 are adjusted so that a predetermined irradiation-passing filter suitable for analysis of the metal sample is positioned on the X- .

In step S150, the detection unit 130 detects the fluorescent X-rays emitted from the sample by the X-ray irradiated to the sample through the filter 151 and the irradiation light 163 disposed on the X- And the analysis unit 140 analyzes the energy of the fluorescent X-ray, and the analysis result is displayed on the screen.

In step S150, the X-ray dose received for 5 seconds by the detector is calculated per 1 second for each medium, and the X-ray dose (intensity) is automatically adjusted.

That is, the X-ray fluorescence analyzer and the X-ray fluorescence analysis method according to the present invention detect the amount received by the amplifier 180 from the beginning of the analysis to the end of the analysis in real time by CPS (Count Per Sec) It is easy to see if there is a curvature in the measured object or if the product to be transmitted is small.

In step S110 through step S130, the kind of the sample is preliminarily analyzed. In step S140 and step S150, the element of the sample is precisely analyzed. After performing the precise analysis after the preliminary analysis, , It is possible to eliminate the error caused by the mistake of the user and make it possible to analyze even when the user does not know the kind of the element of the sample accurately.

For reference, the conventional X-ray fluorescence analyzer uses an ultra-small CCD camera to confirm the image of the irradiated portion through a PC, and analyzes the sample according to a circular target on a PC image. However, since the position of one of the X-ray generating part and the detecting part is shifted during transportation for a long period of time in the environment (vibration and the like) during transportation, the part to be actually inspected and the circular target on the PC often turn out.

Particularly, when using a very small irradiation diameter of 0.5 mm, there is a problem in this part. Since the X-ray can not be seen by the human eye, when the fluorescent film is placed at the sample position, do.

Accordingly, a method of fixing the fluorescent film to an automatic stage for moving the sample stage, periodically matching the PC image target with the actual X-ray can be used. In order to match the PC image target with the actual X-ray, Can be used.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims and their equivalents. Of course, such modifications are within the scope of the claims.

Description of the Related Art
110: X-ray generator 120:
130: Detection unit 140:
150: plate-shaped filter unit 151: filter
160: plate-shaped adjusting portion 161: circular plate portion
162: wing portion 163:
164: transmission port 170: rotating means
171: first rotating means 172: second rotating means

Claims (7)

An X-ray generating unit 110 for generating X-rays;
A sample stage 120 on which a sample to be analyzed is placed;
A detector 130 for detecting fluorescent X-rays generated in the sample;
An analyzer 140 for analyzing the energy of the fluorescent X-rays detected by the detector 130 and analyzing the elements in the sample;
Filters 151 disposed to be positioned between the X-ray generating unit 110 and the sample stage 120 and having different energy transmitting regions so that X-rays of energy suitable for the analysis of the sample can be irradiated to the sample A plate-shaped filter unit 150 provided in a circular arrangement;
Rays 163 of different sizes for controlling the irradiation range of X-rays irradiated to the sample from the X-ray generating unit 110 are disposed between the X-ray generating unit 110 and the sample stage 120, A plate-shaped regulating portion 160 formed into a circular array structure; And
And a rotating unit 170 for rotating the plate-shaped adjusting unit 160 and the plate-shaped filter unit 150 so that X-rays having an irradiation range and energy suitable for the sample to be analyzed can be irradiated to the sample,
The plate-like regulating unit 160 includes:
A circular plate portion 161 formed with the irradiation surfaces 163; And a plurality of transmissive X-rays passing through the fluorescent X-rays emitted from the sample to the detection unit 130 are formed in a structure inclined from the circumference of the circular plate 161 to the outside of the circular plate 161 and toward the sample stage 120 And a wing (162) having a sphere (164) formed therein. delete The method according to claim 1,
Wherein the plate filter unit (150) further comprises a lead filter. The method according to claim 1,
Wherein the plate-shaped filter unit (150) further comprises a transparent filter. The method according to claim 1,
The rotating means (170)
A first rotating unit 171 connected to the plate-shaped filter unit 150 to rotate the plate-shaped filter unit 150; And
And a second rotating unit (172) connected to the plate-shaped adjusting unit (160) and rotating the plate-shaped adjusting unit (160). delete delete
KR1020150086582A 2015-06-18 2015-06-18 Apparatus for multi-element analyzing X-ray fluorescence KR101669220B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102162745B1 (en) * 2019-04-29 2020-10-07 한국표준과학연구원 Automated system for radiochromic film analysis
KR20220142685A (en) * 2021-04-15 2022-10-24 주식회사 한울이엔지 Rotary type X-ray filter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102162745B1 (en) * 2019-04-29 2020-10-07 한국표준과학연구원 Automated system for radiochromic film analysis
KR20220142685A (en) * 2021-04-15 2022-10-24 주식회사 한울이엔지 Rotary type X-ray filter
KR102513641B1 (en) * 2021-04-15 2023-03-24 주식회사 한울이엔지 Rotary type X-ray filter

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