KR101633999B1

KR101633999B1 - Apparatus for fixing sample

Info

Publication number: KR101633999B1
Application number: KR1020140144544A
Authority: KR
Inventors: 김찬우; 송상민
Original assignee: 현대제철 주식회사
Priority date: 2014-10-23
Filing date: 2014-10-23
Publication date: 2016-06-27
Also published as: KR20160047943A

Abstract

The present invention relates to an image forming apparatus, And a unit accommodating space forming unit which is installed in an inner space of the apparatus main body part and variably forms a plurality of unit accommodating spaces accommodating the polishing specimen based on the center of the apparatus main body part.

Description

{APPARATUS FOR FIXING SAMPLE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a specimen fixing apparatus, and more particularly, to a specimen fixing apparatus capable of stably fixing a polishing specimen of various sizes and shapes.

Generally, when the specimen is fixed in the specimen polishing jig, the specimen is mounted on the cylindrical fixing portion.

For complex specimens, it is impossible to polish without mounting.

Also, when the number of specimens is large, it takes much time to prepare the specimen.

A prior art related to the present invention is Korean Patent Laid-Open Publication No. 20-2000-0019937 (published on November 25, 2000).

An object of the present invention is to provide a specimen fixing apparatus capable of stably fixing specimens having various shapes and sizes without mounting operation.

In a preferred embodiment of the present invention, And a unit accommodating space forming unit which is installed in an inner space of the apparatus main body part and variably forms a plurality of unit accommodating spaces accommodating the polishing specimen based on the center of the apparatus main body part.

The apparatus main body is preferably formed as a cylindrical body having a bottom surface.

The unit accommodation space forming unit may include a center shaft formed at the center of the inner space of the apparatus main body and a plurality of specimen fixing members connected to the center shaft so as to be rotatable about the center shaft.

Each of the plurality of specimen-fastening members preferably includes a ring-shaped rotary member to be pivoted to rotate about the central axis, and a specimen fixing plate extending from an outer periphery of the rotary member and forming the unit accommodation space.

On the inner wall forming the inner space of the apparatus body portion, a serrated irregular surface is formed.

The end of the specimen fixing plate is preferably formed to have a sharp end so as to extend over the uneven surface.

At the lower end of the specimen fixing plate, a rolling member may be installed.

And a guide groove for guiding rolling movement of the rolling member is formed on a bottom surface of the inner space of the apparatus main body.

In the inner wall of the main body of the apparatus, there may be formed latching grooves spaced along the circumferential direction.

And the end of the specimen fastening plate is inserted and fixed in the fastening groove.

The present invention can vary the position of a plurality of fixed plates rotating around a rotation axis to provide a plurality of spaces in which the specimens are received, thereby fixing a plurality of specimens to one jig to perform the polishing process .

Further, the present invention has an effect that the size of the sample accommodating space can be adjusted by detachably mounting the specimen fixing plate on the rotating shaft.

Further, since the mounting operation can be omitted for a specimen having a complicated shape, the present invention has the effect of reducing the specimen preparation time.

1 is a perspective view showing a specimen fixing apparatus of the present invention.
2 is an exploded perspective view showing the specimen fixing apparatus of the present invention.
3 is a plan view showing the specimen fixing apparatus of the present invention.
4 is a view showing another example of the position fixation of the specimen fastening plate according to the present invention.
5 is a view showing the relationship between the rolling member and the guide groove according to the present invention.

Hereinafter, a specimen fixing apparatus of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a specimen fixing apparatus of the present invention, FIG. 2 is an exploded perspective view showing a specimen fixing apparatus of the present invention, and FIG. 3 is a plan view showing a specimen fixing apparatus of the present invention.

Referring to FIGS. 1 to 3, the specimen fixing apparatus of the present invention includes a main body unit 100 and a unit accommodation space forming unit 200.

In the apparatus main body 100,

The apparatus main body 100 according to the present invention is formed of a cylindrical body having a space formed therein, and a bottom surface is formed in the inner space.

The inner wall of the apparatus body 100 has a serrated irregular surface 110 formed therein.

The irregularities of the uneven surface 110 are formed along the circumferential direction of the apparatus main body 100.

The unit accommodation space forming unit 200 includes:

The unit accommodation space forming unit 200 according to the present invention includes a center shaft 210 and a plurality of sample holding members 220.

The center shaft 210 is installed in the inner space of the apparatus main body 100.

The center shaft 210 is formed upright at the center of the inner space and is fixed to the center of the bottom surface.

Each of the plurality of specimen fixing members 220 is connected to the center shaft 210 so as to be rotatable about the central axis 210.

Each of the plurality of specimen fixing members 220 includes a ring-shaped rotary member 221 and a specimen fixing plate 222.

The rotary member 221 is rotatably mounted on the center shaft 210.

Of course, the rotating member 221 can be removed from the center shaft 210.

One end of the specimen fastening plate 222 is formed integrally with the outer circumferential portion of the rotating member 221.

Although not shown in the drawing, one end of the specimen fixing plate 222 may be detachable from the outer circumferential portion of the rotary member 221.

The attachment / detachment method may be a fitting method or a bolt-fastening method.

Therefore, each of the specimen-fixing members 220 is composed of the rotary member 221 and the specimen-fixing plate 222.

However, the rotational member 221 of each specimen fixing member 220 may be formed at different positions at one end of each specimen fixing plate 222.

Accordingly, the rotating members 221 of the specimen fixing members 220 may be installed in a laminated manner on the central axis 210 in a stepwise manner.

Further, one end of each specimen fastening plate 222 is formed to be sharp.

Therefore, one end of each specimen fastening plate 222 is caught by the uneven surface 110 of the concavo-convex shape, and the moving position can be easily fixed.

4 is a view showing another example of the position fixation of the specimen fastening plate according to the present invention.

Referring to FIG. 4, the inner wall of the apparatus main body 100 according to the present invention is formed with an engagement groove 130 spaced along the circumferential direction of the apparatus main body 100.

The end portion of the specimen fixing plate 222 is fitted to one of the engaging grooves 130, so that the position of the specimen fixing plate 222 can be fixed.

5 is a view showing the relationship between the rolling member and the guide groove according to the present invention.

Referring to FIG. 5, a rolling member 222a is installed at the lower end of the specimen fixing plate 222 of each specimen fixing member 220.

The rolling member 222a may be formed of a roller or a spherical member.

A guide groove 120 is formed in the bottom surface of the inner space of the apparatus body 100 to form a circular path at a position having a predetermined radius from the center axis 210.

The rolling member 222a formed at the lower end of the specimen fixing plate 222 may be positioned in the guide groove 120 to guide the rolling motion.

Therefore, when the position of the specimen fastening plate 222 is moved, the rolling member 222a provided at the lower end of the specimen fastening plate 222 moves along the guiding groove 120, so that the ease of movement can be secured.

Next, the operation of the specimen fixing apparatus according to the present invention will be described with reference to the above configuration.

1 to 3, a plurality of specimen-fixing members 220 are sequentially installed on the center shaft 210.

Therefore, each specimen fixing member 220 is rotatable about the central axis 210 as a center of rotation.

Here, the space between the specimen fixing plates 222 of each specimen fixing member 220 forms a unit accommodation space (a) in which the specimen 10 for polishing can be fixed or accommodated.

Therefore, the size of the unit accommodating space a can be adjusted according to the size and shape of the specimen 10 by varying the rotational position of each specimen fixing member 220.

In addition, the specimen 10 can be fixed with a predetermined pressure by using the specimen fixing plate 222.

Accordingly, when the specimen fixing member 220 is rotated during the specimen polishing, the position of the specimen 10 accommodated in the unit accommodation space a is fixed, the polishing process is normally performed, and the reliability of the polishing specimen test result is secured Can be done.

As described above, according to the above-described configuration and operation, the embodiment according to the present invention varies the position of a plurality of fixed plates rotating around the central axis, thereby providing a plurality of spaces in which the specimens are accommodated, It is possible to fix the wafer on one jig to perform the polishing process.

In addition, in the embodiment of the present invention, the specimen fixing plate can be detachably installed on the rotating shaft, and the size of the specimen accommodating space can be adjusted.

In addition, since the embodiment according to the present invention can omit the mounting operation for the specimen having a complicated shape, it is possible to reduce the specimen preparation time.

As described above, the specimen fixing apparatus of the present invention has been described in detail. However, it is apparent that various modifications can be made without departing from the scope of the present invention.

Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be determined by the scope of the appended claims and equivalents thereof.

It is to be understood that the foregoing embodiments are illustrative and not restrictive in all respects and that the scope of the present invention is indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

100:
110: uneven surface
120: guide groove
130:
200: unit receiving space forming part
210: center axis
220: specimen fixing member
221: Rotating member
222: Specimen plate
222a:
a: Unit accommodation space

Claims

An apparatus body portion in which an internal space is formed; And
And a unit accommodation space forming part provided in an inner space of the apparatus main body part and variably forming a plurality of unit accommodating spaces accommodating the polishing specimen based on the center of the apparatus main body part,
The unit accommodating space forming unit may include:
A central axis formed at the center of the inner space of the apparatus body portion,
And a plurality of specimen fixing members connected to the central shaft so as to be rotatable about the central axis with a rotation center.

The method according to claim 1,
The apparatus main body includes:
And a cylindrical body having a bottom surface formed therein.

delete

The method according to claim 1,
Wherein each of the plurality of specimen fixing members comprises:
A ring-shaped rotary member fitted to be rotatable on the central shaft,
And a specimen fixing plate extending from an outer periphery of the rotary member and forming the unit accommodation space.

5. The method of claim 4,
A serrated irregular surface is formed on the inner wall forming the inner space of the apparatus main body part,
And an end of the specimen fixing plate is formed to have a sharp end so as to extend over the uneven surface.

6. The method of claim 5,
At the lower end of the specimen fixing plate, a rolling member is provided,
Wherein a guide groove for guiding rolling movement of the rolling member is formed on a bottom surface of the inner space of the apparatus main body part.

6. The method of claim 5,
In the inner wall forming the inner space of the main body of the apparatus, the spacing grooves are formed along the circumferential direction,
And an end of the specimen fastening plate is inserted and fixed in the fastening groove.