KR101631368B1

KR101631368B1 - Ingot growing apparatus

Info

Publication number: KR101631368B1
Application number: KR1020140057898A
Authority: KR
Inventors: 박진섭; 김진노; 장준혁
Original assignee: (주)에스테크
Priority date: 2014-05-14
Filing date: 2014-05-14
Publication date: 2016-06-16
Also published as: KR20150130812A

Abstract

An ingot growing apparatus is provided. An ingot growing apparatus according to an exemplary embodiment of the present invention includes a base; A main chamber provided on the base, the main chamber including a crucible for accommodating a raw material and a heater for heating the crucible to melt the raw material; A dome chamber installed at the top of the crucible; A pull chamber installed at an upper portion of the dome chamber; A support portion provided on the base side; A first cylinder installed in the supporting portion to move the main chamber; A second cylinder installed in the supporting portion to move the dome chamber, and a third cylinder installed in the supporting portion to move the pull chamber, wherein at least one of the first to third cylinders is a power cylinder.

Description

[0001] INGOT GROWING APPARATUS [

The present invention relates to an ingot growing apparatus.

Generally, a single crystal ingot is manufactured by a Czochralski crystal growth method (CZ method). More specifically, a crucible provided in a hot zone region is filled with a solid raw material such as polysilicon, heated and melted by an electric heater to melt, and then a single crystal seed is hung from a seed connector and brought into contact with a melt Slowly rotate and raise. Then, the seed connector is pulled up in the order of a neck part, a shoulder part whose diameter increases, a cylindrical body part of a constant diameter, and finally a tail part whose diameter is reduced a single crystal ingot is obtained.

The ingot growing apparatus for growing a single crystal ingot in the above manner comprises a main chamber provided with a cooling means, a quartz crucible provided inside the main chamber for melting polysilicon, a graphite crucible for supporting a quartz crucible, A pedestal for supporting a crucible and a graphite crucible, an electrothermal heater for heating a crucible, a power supply means for supplying a large electric power to the electrothermal heater, a driving shaft for driving, lifting and lowering the crucible and a pedestal, A dome chamber installed above the main chamber, a gate valve and viewport installed in the dome chamber, a pull chamber installed above the dome chamber, and an ingot impression cable installed in the pull chamber. And a Seed Mechanism.

The ingot growing apparatus may further comprise vacuum means for maintaining the vacuum chamber in the pull chamber, the dome chamber and the main chamber, a cooling means for cooling the ingot, a sensing means for sensing the state required for the ingot growth, A control means, a measurement means, and the like.

However, in the conventional ingot growing apparatus, it is common to use a hydraulic cylinder to move the pull chamber, the dome chamber, and the main chamber. When a hydraulic cylinder is used to move the full chamber, the dome chamber, and the main chamber as described above, a separate supply line for supplying hydraulic pressure to the hydraulic cylinder is required, and a separate hydraulic pump is required. .

In the case of a hydraulic cylinder, there is a possibility that an oil leakage may occur, and maintenance is not easy when a problem such as oil leakage occurs.

Further, when the hydraulic cylinder is used to move the pull chamber, the dome chamber, and the main chamber, the limit switch device for adjusting the stroke of the hydraulic cylinder must be separately configured, which complicates the equipment.

An embodiment of the present invention is to provide an ingot growing apparatus having a simple structure.

One embodiment of the present invention is to provide an ingot growing apparatus which is easy to maintain.

According to an aspect of the present invention, A main chamber disposed on the base, the main chamber including a crucible for containing a raw material and a heater for heating the crucible to melt the raw material; A dome chamber installed at an upper portion of the crucible; A pull chamber installed at an upper portion of the dome chamber; A support main body provided on the base side; A first cylinder installed in the supporting portion to move the main chamber; A second cylinder installed in the support portion to move the dome chamber, and a third cylinder installed in the support portion to move the pull chamber, wherein at least one of the first to third cylinders is a power cylinder An ingot growing apparatus is provided.

At this time, the first to third cylinders can be operated by electricity.

The ingot growing apparatus includes first to third guides respectively installed at the ends of the first to third cylinders and first to third guide rails provided at the support and guiding the first to third guides, respectively can do.

The ingot growing apparatus may include a first support having one side thereof rotatably coupled to the first guide and a main chamber fixing member capable of fixing the main chamber to the other side.

The ingot growing apparatus may include a second support having one side rotatably coupled to the second guide and the dome chamber coupled to the other side.

The ingot growing apparatus may include a third support having one side rotatably coupled to the third guide and the other side being coupled to the pull chamber.

The ingot growing apparatus according to an embodiment of the present invention may be constructed in a simple structure by using a power cylinder to move the main chamber, the dome chamber, and the pull chamber.

Since the ingot growing apparatus according to an embodiment of the present invention moves the main chamber, the dome chamber and the pull chamber by using the power cylinder, it is not necessary to construct a separate hydraulic line and a hydraulic pump required when using the hydraulic cylinder, The maintenance is simple.

1 is a side view of an ingot growing apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view of the ingot growing apparatus according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 is a side view of an ingot growing apparatus according to an embodiment of the present invention. FIG. 2 is a perspective view of the ingot growing apparatus according to an embodiment of the present invention. Hereinafter, the ingot growing apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. Hereinafter, the ingot growing apparatus according to an embodiment of the present invention will be described with reference to the constitution of the present invention, and the constitution of the ingot growing apparatus according to an embodiment of the present invention Detailed description will be omitted for the same configuration as that for which no idea is directly related to the idea of the invention.

Referring to FIG. 1, an ingot growing apparatus 1 according to an embodiment of the present invention includes a base 10, a main chamber 20, a dome chamber 30, a pull chamber 40, a support 2, And includes first to third cylinders (62, 72, 82).

The base 10 is provided on the bottom surface on which the ingot growing apparatus 1 is placed and supports the ingot growing apparatus 1. [ The base 10 may have a plurality of frames coupled together.

Referring to FIG. 1, a main chamber support 12 is installed on a base 10, and a main chamber 20 is installed on a main chamber support 12.

The main chamber 20 has a cylindrical shape and may include an upper main chamber 22 and a lower main chamber 24. In the main chamber 20, a crucible for containing a raw material and a heater for melting the raw material by heating the crucible may be provided.

Meanwhile, in the ingot growing apparatus 1 according to the embodiment of the present invention, the support portion 2 is provided on the side of the base 10. The support portion 2 may be formed as a structure extending vertically upward from the bottom surface.

According to an embodiment of the present invention, a main chamber driving unit 60 installed at one side of the main chamber 20 for moving the main chamber 20 may be installed in the supporting unit 2.

The main chamber drive unit 60 may include a first cylinder 62, a first guide 64, a first guide rail 66, and a first support 68.

More specifically, the first cylinder 62 is provided on the lower side of the support portion 2. The extension bar of the first cylinder 62 is formed so as to extend upward.

At this time, according to an embodiment of the present invention, the first cylinder 62 may be a power cylinder. The power cylinder is a cylinder in which an extension bar can be expanded and contracted by the supply of electricity. The power cylinder can extend and contract the extension bar using a motor and a gear, and a limit sensor can be attached to the power cylinder itself.

According to an embodiment of the present invention, since the power cylinder is used as the first cylinder 62 for moving the main chamber, the hydraulic pressure may not be used to drive the first cylinder 62. Accordingly, the ingot growing apparatus according to an embodiment of the present invention does not need to construct a complicated hydraulic line required in the conventional operation using a hydraulic cylinder, and it is not necessary to provide a hydraulic pump.

Further, since the ingot growing apparatus 1 according to the embodiment of the present invention does not use the hydraulic cylinder as the first cylinder, the problem of oil leakage used in the hydraulic cylinder may not occur.

On the other hand, the first guide 64 is coupled to the end of the extended bar of the first cylinder 62. The first guide 64 is formed to be movable in the vertical direction along the first guide rail 66 formed on the side surface of the support portion 2.

On the other hand, the first guide 64 is coupled to the first support 68. The first support base (68) is rotatably coupled to the first guide (64) by a first hinge portion (65). The first support 68 may comprise a bar extending transversely from the first guide 64.

According to one embodiment of the present invention, the main chamber fixing member 69 is provided on the lower end side of the first support base 68 so that the lower end side of the first support base 68 is placed on the main chamber 20 So that the upper main chamber 22 can be fixed to the lower end side of the first support 68. The main chamber fixing member may be in the form of a ring so that the operator can manually fix the upper main chamber to the annular main chamber fixing member, but the shape of the main chamber fixing member is not limited thereto.

2, the ingot growing apparatus 1 according to an embodiment of the present invention is configured to operate the first cylinder 62 in a state where the upper main chamber 22 is fixed to the lower end side of the first support 68 The upper main chamber 22 can be moved in the vertical direction, or the upper main chamber 22 can be rotated in the horizontal direction (arrow direction).

1, a dome chamber 30 is formed in the upper portion of the main chamber 20. [ The dome chamber 30 may have a dome-shaped lower portion and a dome-shaped upper portion may have a cylindrical shape. The dome chamber 30 may be provided with a gas injection portion for injecting gas.

At this time, according to one embodiment of the present invention, the dome chamber driving unit 70 for moving the dome chamber 30 may be installed in the supporting unit 2. [

Referring to FIGS. 1 and 2, the dome chamber driving unit 70 may include a second cylinder 72, a second guide 74, a second guide rail 76, and a second support 78.

More specifically, the second cylinder 72 of the dome chamber driving unit 70 can be positioned on the lower side of the supporting unit 2 in parallel with the first cylinder 62 of the main chamber driving unit 60.

The extension bar of the second cylinder 72 is formed to extend upward. At this time, according to an embodiment of the present invention, a power cylinder can be used as the second cylinder 72 as the first cylinder 62.

At this time, the second guide 74 is coupled to the end of the extension bar of the second cylinder 72. The second guide 74 is formed so as to be movable in the vertical direction along the second guide rail 76 formed on the side surface of the support portion 2.

On the other hand, a second support base 78 is coupled to the second guide 74. The second support base 78 is rotatably coupled to the second guide 74 by a second hinge portion 75 formed on the second guide 74. At this time, one end of the second support table 78 is coupled to the dome chamber 30.

2, when the second guide 74 moves up and down by the second cylinder 72, the dome chamber 30 coupled to the second guide 74 moves up and down . When the second support base 78 rotates about the second guide 74, the dome chamber 30 can be rotated about the second guide 74 in the horizontal direction (arrow direction).

Referring again to FIG. 1, a pool chamber 40 is formed on the dome chamber 30. The pull chamber 40 may be formed of a tubular member extending in the vertical direction.

At the upper end of the pull chamber 40, an ingot lifting module 50 for lifting the ingot is provided. The ingot pulling module 50 is also referred to as a seed mechanism and may include a drum for moving the seed cable and the seed cable, a support roller, a drive motor, a speed reducer, and the like. Since the structure of the ingot lifting module 50 can be a known structure, a detailed description thereof will be omitted.

According to an embodiment of the present invention, a full chamber driving unit 80 for moving the pull chamber 40 may be installed in the supporting unit 2. [

Referring to FIGS. 1 and 2, the full chamber driving unit 80 may include a third cylinder 82, a third guide 84, a third guide rail 86, and a third support 88.

More specifically, the third cylinder 82 of the full chamber driving portion 80 may be located on the upper side of the support portion 2. [ The extension bar of the third cylinder 82 may be formed to extend downward.

At this time, according to the embodiment of the present invention, a power cylinder can be used as the third cylinder 82 as the first cylinder 62 and the second cylinder 72.

At this time, the third guide 84 is coupled to the end of the extension bar of the third cylinder 82. The third guide 84 is formed so as to be movable in the vertical direction along the third guide rail 86 formed on the side surface of the support portion 2.

On the other hand, the third guide 84 is coupled to the third support 88. The third support 88 is rotatably coupled to the third guide 84 by a third hinge 85 formed on the third guide 84. At this time, one end of the third support 88 is coupled to the pull chamber 40.

2, when the third guide 84 is moved in the vertical direction by the third cylinder 82, the pull chamber 40 coupled to the third guide 84 is moved upward and downward Can be moved.

When the third support 88 rotates with respect to the third guide 84, the pull chamber 40 can be rotated about the third guide 84 in the horizontal direction (arrow direction).

The ingot growing apparatus 1 according to an embodiment of the present invention operates the first cylinder 62, the second cylinder 72 and the third cylinder 82 in the process for growing the ingot to form the upper main chamber 22, the dome chamber 30 and the pull chamber 40 in the vertical direction.

At this time, the ingot growing apparatus 1 according to an embodiment of the present invention may be configured such that at least one of the first to third cylinders 62, 72, and 82, for example, all three cylinders, It is possible to realize the ingot growing apparatus with a simpler configuration by omitting the installation of a plurality of constituent elements necessary for using the hydraulic cylinder, for example, the hydraulic line, the hydraulic pump, and the limit sensor device for stroke adjustment.

Further, by using the power cylinder as in the embodiment of the present invention, the constitution and operation of the ingot growing apparatus 1 can be simplified, and the maintenance of the ingot growing apparatus 1 can be facilitated.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

1 Ingot growth device 2
10 Base 12 Main Chamber Support
20 main chamber 22 upper main chamber
24 Lower Main Chamber 30 Dome Chamber
40 Full Chamber 50 Ingot Raise Module
60 main chamber driving part 62 first cylinder
64 first guide 65 first hinge part
66 first guide rail 68 first support rod
69 Main chamber fixing member 70 Dome chamber driving part
72 2nd cylinder 74 2nd guide
75 second hinge portion 76 second guide rail
78 second support frame 80 pull chamber drive part
82 Third cylinder 84 Third guide
85 third hinge portion 86 third guide rail
88 third support

Claims

Base;
A main chamber disposed on the base, the main chamber including a crucible for containing a raw material and a heater for heating the crucible to melt the raw material;
A dome chamber installed at an upper portion of the crucible;
A pull chamber installed at an upper portion of the dome chamber;
A support main body provided on the base side;
A first cylinder installed in the supporting portion to move the main chamber;
A second cylinder installed in the supporting portion to move the dome chamber;
And a third cylinder installed in the support portion to move the pull chamber, wherein the first to third cylinders are power cylinders,
First to third guides installed at the ends of the first to third power cylinders and moved up / down by the first to third power cylinders;
First to third guide rails provided on the support portion for guiding upward and downward movement of the first to third guides, respectively;
A first support rotatably coupled to the first guide at one side and a main chamber fixing member selectively coupled to the main chamber at the other side;
A second support having one side rotatably coupled to the second guide and the dome chamber coupled to the other side;
A third support rotatably coupled to the third guide on one side and coupled to the pull chamber on the other side,
The main chamber may be separated into an upper main chamber formed on the upper side and a lower main chamber formed on the lower side,
Wherein the first guide is located on a side surface of the strut, and the second guide is located on a front surface of the strut,
Wherein the main chamber fixing member coupled to the first guide is capable of rotationally moving the upper main chamber in a lateral direction with respect to the support portion in a state where the main chamber fixing member is engaged with the upper main chamber.

The method according to claim 1,
Wherein the first to third power cylinders are operated by electricity.

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