KR101609205B1 - Apparatus and method for transferring board-like work - Google Patents

Apparatus and method for transferring board-like work Download PDF

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KR101609205B1
KR101609205B1 KR1020117002856A KR20117002856A KR101609205B1 KR 101609205 B1 KR101609205 B1 KR 101609205B1 KR 1020117002856 A KR1020117002856 A KR 1020117002856A KR 20117002856 A KR20117002856 A KR 20117002856A KR 101609205 B1 KR101609205 B1 KR 101609205B1
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plate
work
mounting
workpiece
series
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KR1020117002856A
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KR20110039455A (en
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히로카즈 오쿠무라
야스히로 사와무라
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니폰 덴키 가라스 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A transfer facility (10) for a plate work according to the present invention comprises a series of movable arms (13) having multiple joints and is provided at the tip of a series of movable arms (13) Joint robot 1 and a robot arm 2 provided with a robot arm 11 and a robot arm 11 on the lower side 3a of the workpiece 3 supplied to the acquisition position 4 by the articulated robot 11 The upper surface 3b on the opposite side of the mounting surface 3a is mounted on the mounting surface 26 at the mounting position. The acquisition position (4) and the mounting position are arranged opposite to each other, and the articulated robot (11) is arranged on the side of the opposite space. The articulated robot 11 performs an operation of transferring the plate work 3 from the acquisition position 4 to the mounting position through the counter space by the swinging motion of the series of movable arms 13, As a part of the conveying operation, the reversing operation for mounting the upper surface 3b of the plate-like work 3 on the mounting surface 26. [

Figure R1020117002856

Description

TECHNICAL FIELD [0001] The present invention relates to an apparatus and a method for transferring a plate work,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transfer facility and a transfer method for a plate-shaped work, and more particularly to a facility for transferring a glass substrate for a flat panel display (FPD) such as a liquid crystal display, a plasma display or an organic EL, ≪ / RTI >

Conventional multi-degree-of-freedom robot arms such as multi-axis vertical articulated robots and multi-axis horizontal articulated robots are conventionally applied to this kind of transportation equipment. Since the glass plate is fragile, it is difficult to handle by hand, and it is very difficult for an operator to carry a large glass plate of 1000 mm x 1000 mm or more. In addition, since a high cleanliness (cleanliness) is required for the glass plate according to the above applications, handling by workers who generate organic substances or the like tends to be avoided. In this regard, the degree of freedom of the work posture of the multi-degree of freedom robot arm is high, so that the user (operator) can set a desired motion locus. In addition, since the possibility of oscillation of organic matter and the like is lower than that of a worker, the multi-degree of freedom robot arm is preferably used for transferring the glass plate.

Particularly, since there is a surface to which various display elements are attached to the glass plate (glass substrate) according to the above applications, one side of the glass substrate to be the attachment surface needs to be treated with more care than the other side. That is, with respect to the conveyance of the glass substrate, it is preferable that the conveyance is performed without contacting the attachment surface as much as possible.

For example, Japanese Unexamined Patent Application Publication No. 2003-322993 discloses an exchanger constituting a substrate exchange apparatus having a thin film formed on one surface thereof, a receiving concave portion opened to at least one of a conveying end or a side of the conveying means of the substrate, And the arm base is attached to the swivel base in such a manner that the arm base can be lifted and lowered. In order to attract the surface (bottom surface) opposite to the thin film forming side of the substrate through the articulated arm to the arm base, And a head is attached to the robot. By rotating the swivel base of the exchange machine 90 degrees around the vertical axis, for example, the substrate attracted by the receiving concave portion is transferred to the exchange position. The head base of the adsorption head is rotatably connected to the distal end of the articulated arm around a horizontal axis. The adsorption head held in the adsorption head is vertically inverted by reversing the adsorption head in the horizontal posture by 180 degrees.

Patent Document 2 discloses an inter-pressurized conveying robot for carrying a workpiece into and out of a press machine. The robot includes a linear base disposed parallel to the workpiece conveying direction, a linear base, a swing base linearly movable on the linear base, A second arm attached to the first arm so as to be able to move forward and backward with respect to the first arm and a second arm which is attached to the distal end of the first arm so as to be movable forward and backward, And a wrist portion attached to the wrist portion. Further, two work-holding hands for holding and holding a work by arranging two inter-press transfer robots so as to sandwich the conveying path of the work are supported by two inter-press transfer robots, and two press- Discloses that the work is transferred between presses by cooperating the robot.

Japanese Patent Application Laid-Open No. 2001-180822 Japanese Patent Application Laid-Open No. 2004-337918

In recent years, however, there is a strong demand for cost reduction by mass production in order to further promote FPD products represented by liquid crystal displays. For this reason, further reduction of the glass substrate transport time is demanded in this field.

In addition, if the operating range of the robot arm becomes large, the installation area of the safety fence or the like must be wide, and the footprint (device occupied area) can not be increased. As a result, the improvement of working efficiency can not be expected, and it may result in lowering of working efficiency and productivity. In addition, since the facility is installed in a clean environment in many cases, it can be an obstacle to reduction of the management cost required for maintaining the clean environment. For this reason, the space saving of the transfer facility has been required up to now.

In this respect, in the exchanging apparatus according to Patent Document 1, the multi-joint arm sucking and holding the substrate is pivotally moved about its vertical axis, thereby transferring the substrate from its receiving position to the exchanging position, so that the feeding path becomes longer. Also, considering the stopping operation at the exchange position, it is difficult to move the robot arm at a high speed. Therefore, it is difficult to shorten the transfer time as long as such a transfer path is adopted. In addition, it is disadvantageous in view of the footprint because it is necessary to increase the operating space of the exchanger (robot arm). Further, since the reversing operation of the substrate is performed around an axis separate from the above-described pivotal feed, a dedicated driving mechanism is required for each of them. Therefore, the overall weight reduction of cancer is difficult.

In the transport apparatus according to Patent Document 2, the two arms are arranged on the left and right sides of the work, and the work for holding the work by suction is held by the two arms and supported by both arms to carry the work . Therefore, it is necessary to move both arms in synchronism with each other, which may interfere with the speeding up of the carrying operation. In addition, since the transporting apparatus is not equipped with a mechanism for carrying out the reverse operation in consideration of the front and back surfaces of the work in the beginning, it is difficult to apply it directly to the transporting equipment of the glass plate.

Of course, the above-described problems are not limited to the glass plate, but are also suitable for workpieces in different plate form, particularly for plate-shaped workpieces having large planes.

In view of the above circumstances, it is a technical problem to be solved by the present invention to reduce the conveyance time of the plate work and the space required for the conveyance.

The solution of the above problem is achieved by the glass plate conveying equipment according to the present invention. That is, this transfer facility is a facility for acquiring the plate work at the acquisition position of the plate work and transferring the obtained plate work to the mounting position, and has a series of movable arms having multiple joints, And a holding section for holding and acquiring one face of the plate-like workpiece. The upper surface of the plate-like workpiece opposite to the lower surface is held at the mounting position by holding the lower surface of the supply side of the plate- The multi-joint robot is disposed on the side of the confronting space, and the multi-joint robot is moved in a plate-like manner by a series of moving and moving movements of the movable arm. The work is moved from the acquisition position through the opposing space to the mounting position, and as a part of the transfer operation, the upper surface of the plate- And is also characterized by being configured to also perform an inverting operation for mounting on the surface.

In this manner, the articulated robot is disposed at a position deviating laterally from the opposing space between the acquisition position and the mounting position of the plate work, and the plate work is transferred through the opposing space to turn the work around the robot body Or the position of the robot main body is not displaced at the time of transferring the work. Therefore, the transfer time can be reduced, and the area of the peripheral area to be ensured in the transfer of the plate work can be made smaller than in the prior art. As a result, the occupied area (footprint) of the transfer facility can be reduced to improve the working efficiency and to contribute to the reduction of the management cost required for maintaining the clean environment. Further, since a part of the conveying operation also serves as a reversing operation for mounting the plate-like work, a mechanism for performing only the reversing operation independently of the conveying operation is not required. Further, a driving source (motor or the like) used only for the inversion operation is unnecessary, and a driving motor for the feeding operation is sufficient. From the above, it is possible to make the series of movable arms lightweight, and to increase the arm rigidity, thereby improving the moving speed of the arm.

Here, the conveying operation of the plate-like work may be performed by the turning / flexing movement of the series of movable arms about the horizontal axis. This is because the acquisition position and the mounting position are opposed to each other and the transfer and posture change (inversion) of the plate work from the transfer form is sufficient only for the rotation around the horizontal axis. With such a configuration, it is possible to further reduce the practical equipment occupied area (footprint) required for the transfer facility to a minimum, thereby further improving the operation efficiency.

Further, all of the above-described configurations do not require the use of a general-purpose six-axis robot arm such as a six-axis robot arm. For example, the robot arm may be provided with a horizontal joint, It may be. Preferably, the robot may be provided with three-jointed robots which are all horizontal and parallel to each other. Further, if the number of links and joints (axes) is reduced, the operation speed of the entire movable arm is not limited by the limitation of one joint having a slow operation speed. In addition, since the number of joints is reduced, the arm stiffness is improved as compared with the conventional art, so that it becomes possible to transfer the plate work at high speed while securing high positional accuracy.

On the other hand, the conveying operation may include, for example, an operation of holding the lower surface of the plate-shaped workpiece by inserting the holding portion below the plate-shaped workpiece supplied to the acquisition position, and then pushing up the plate-shaped workpiece upward. When a series of movable arms are moved in this manner, the feeding of the plate work can be started by pressing the plate work from the lower side of the carrying side. Therefore, even if the feeding speed is increased immediately after the start of feeding, there is no fear that the plate work will be released from (released) from the holding portion.

The feeding operation may include, for example, an operation of moving the plate work to a position where the plate work is opposed to the mounting surface, and then moving the plate work to the mounting surface while maintaining the front facing posture. This is a mounting operation that is effective when a plate work is loaded. According to this operation, even when the plate-like workpiece is mounted on the mounting surface and the position of the actual mounting surface slightly deviates in the stacking direction, it can be mounted on the already mounted plate-like workpiece with high precision. This mounting operation and the above-described obtaining operation can be performed by any of a series of movable arms (articulated robots) having at least three axes.

The feeding operation of the plate work by the articulated robot may be set so that the sum of the outputs of the drive motors provided at the respective joints of the articulated robot is minimized with respect to the workpiece conveyance path. This is because the plate-like workpiece can not be linearly transferred from the acquisition position to the mount position simply because of adopting the mode of conveying accompanied with the reversal. In addition, even if the trajectory that minimizes the path length is found, it is difficult to set the path of the motor in consideration of the air resistance acting on the plate-like work, It is considered that the feed rate as set is not obtained by the ratio between the feed rate and the feed rate. For this reason, in the present invention, attention has been paid to the outputs of the drive motors of the respective joints, thereby realizing a movement in which the total sum of the outputs is minimized. As a result, it becomes possible to efficiently and rapidly transfer the plate work. In addition, if the feed operation (path) is set based on the motor output, it is not necessary to use a motor having a large output. Therefore, a relatively small-capacity motor can be used, so that the weight of the entire arm can be reduced, thereby realizing the high-speed feeding operation as set.

As a specific example of the feeding operation, for example, an operation of turning a series of movable arms in a direction of pushing up the lower surface of the plate-like work, reversing the plate work to a position where the upper surface is opposed to the mounting surface and a front- And a feeding operation having an operation of keeping the opposing posture and linearly moving the plate-like workpiece toward the mounting surface.

Alternatively, the feeding operation of the plate-like workpiece by the articulated robot may be set such that the total sum of the kinetic energy lost by receiving the air resistance during the feeding operation as the other feeding path is minimized. This is because an optimum feed path is set based on the relationship between the air resistance and the path length received by the plate-like workpiece at the time of feeding, in view of minimizing the air resistance received by the plate-shaped workpiece. Therefore, by setting the feeding operation (feeding path) as described above, the feeding speed of the plate work can be maximized to shorten the time required for feeding.

As a concrete example of the feeding operation, for example, an operation of lifting the plate-shaped work from the base end side thereof and erecting the tip end of the plate-shaped workpiece downward, and the operation of lifting the plate- And a feeding operation having an operation of sliding the plate-shaped workpiece toward the mounting surface while reversing the plate-shaped workpiece by rotating the base-plate side. Here, " root end " means an end portion near the main body of a series of movable arms of the plate-like work, and " tip end " means a series of end portions of the plate-

The articulated robot having the above-described structure may be arranged on the base so as to horizontally move the articulated robot in a direction perpendicular to the feeding direction of the plate workpiece with respect to the base. The plate-like workpiece transferred to the mounting position is configured to be mounted in a state in which the plate-like workpiece is accurately positioned with respect to the mounting surface. However, in the case of a feeding operation with an emphasis on the feeding speed, Even when a slight deviation occurs in the stop position of the plate-like work, it is possible to correct the deviation and mount it in the correct position by moving the articulated robot body in the horizontal direction.

The transfer facility of the plate work according to the above description can be provided, for example, in the form shown below. That is, it is preferable that the conveying device, the conveying means for conveying the plate work at the acquisition position, and one or a plurality of palletizing pallets for wrapping the plate work in a state where the plate work is stacked thereon, Jointed robot is arranged on the side of the opposite space between the respective acquisition positions and the pallet for packing and the plate-like workpiece conveyed to the acquisition position by the conveying means is conveyed by the articulated robot And can be provided as a packing facility for a plate-like workpiece configured to be selectively loaded on each pallet for packaging by operation. By using a plurality of transfer facilities in this way, the transfer efficiency (packing efficiency) can be improved. Further, when the different types of plate-like workpieces are carried by the same carrying means, it is possible to accurately and efficiently load each of the workpieces.

On the other hand, a solution to the above problem is to obtain a plate work at a position where the plate work is acquired and to transfer the obtained plate work to the mounting position, and has a series of movable arms having multiple joints, In which the upper side on the side opposite to the lower surface is mounted on the mounting surface of the mounting position while the lower surface of the supply side of the plate workpiece fed to the obtaining position is held by using the articulated robot provided with the holding portion for holding and acquiring one surface of the plate- In the transferring method, the acquisition position and the mounting position are opposed to each other, the multi-joint robot is disposed on the side of the confronting space, and the plate-like workpiece is moved from the acquisition position by the turning and bending motion of a series of movable arms of the multi- And a part of the conveying operation is carried out by passing the upper surface of the plate-like workpiece on the mounting surface, The can be achieved by the transfer method of the plate-shaped workpiece, characterized in that to President.

(Effects of the Invention)

INDUSTRIAL APPLICABILITY As described above, according to the transfer facility and transfer method of the flaked work according to the present invention, the transfer time of the flaked work and the space required for transfer can be reduced.

1 is a plan view of a packaging system for a glass substrate according to an embodiment of the present invention.
2 is a side view of the transfer facility according to the present invention.
Fig. 3 is a view for explaining a feeding operation according to the first operation example of the glass substrate, and is a side view of the feeding facility just before the start of feeding. Fig.
4 is a view for explaining a feeding operation according to the first operation example of the glass substrate, and is a side view of the feeding apparatus during the feeding operation.
Fig. 5 is a view for explaining the feeding operation according to the first operation example of the glass substrate, and is a side view of the feeding facility during the feeding operation. Fig.
6 is a view for explaining the feeding operation according to the first operation example of the glass substrate, and is a side view of the feeding apparatus before the feeding operation is changed to the next feeding operation.
7 is a view for explaining the feeding operation according to the first operation example of the glass substrate, and is a side view of the feeding apparatus before the feeding operation is changed to the next feeding operation.
Fig. 8 is a view for explaining the transport operation according to the second operation example of the glass substrate, and is a side view of the transport facility immediately before the start of transport. Fig.
Fig. 9 is a view for explaining the feeding operation according to the second operation example of the glass substrate, and is a side view of the feeding facility immediately after the start of feeding. Fig.
Fig. 10 is a side view of the transfer facility during the transfer operation, illustrating the transfer operation according to the second operation example of the glass substrate; Fig.
Fig. 11 is a side view of the transfer facility during the transfer operation, illustrating the transfer operation according to the second operation example of the glass substrate; Fig.
Fig. 12 is a side view of the transfer facility during the transfer operation, illustrating the transfer operation according to the second operation example of the glass substrate; Fig.
Fig. 13 is a view for explaining the feeding operation according to the second operation example of the glass substrate, and is a side view of the feeding facility during the feeding operation. Fig.
Fig. 14 is a side view of the transfer facility during the transfer operation, illustrating the transfer operation according to the second operation example of the glass substrate; Fig.
Fig. 15 is a view for explaining the feeding operation according to the second operation example of the glass substrate, and is a side view of the feeding apparatus before the feeding operation is changed to the next feeding operation. Fig.
16 is a view for explaining the feeding operation according to the second operation example of the glass substrate, and is a side view of the feeding apparatus before the feeding operation is changed to the next feeding operation.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a packaging equipment 1 for a glass substrate according to an embodiment of the present invention. Fig. The packaging equipment 1 according to this figure is obtained by taking the glass substrate 3 for liquid crystal display conveyed to the acquisition position 4 by the transfer means 2 by using the transfer facility 10, 3 are stacked on a packaging pallet 5 provided on the side of the conveying means 2. The plurality of conveying facilities 10, the conveying means 2 and the glass substrate 3 are stacked And one or a plurality of palletizing pallets 5 for wrapping the pallet in one state.

More specifically, the conveying means 2 has a conveying path 6 capable of conveying the glass substrate 3 in a horizontal posture. The conveying path 6 is constituted by suitable driving means such as a roller conveyor. There are one or a plurality of acquisition positions 4 of the glass substrate 3 by the transfer facility 10 on the transfer path 6. At the acquisition position 4, the concave portion 7 having a shape capable of passing the work holding portion 23 of the articulated robot 11, which will be described later, in the vertical direction is opened to the side of the conveying means 2 And the glass substrate 3 in a stopped state at the acquisition position 4 can be held and acquired by the work holding section 23 from below. Alignment means 8 is arranged on the transport path 6 at the acquisition position 4 to align the transport direction of the glass substrate 3 stopped at the acquisition position 4 in the transport direction.

The pallet 5 for packaging of the glass substrate 3 is arranged at a position facing the acquisition position 4 in the transfer means 2. [ The right and left ends of the glass substrate 3 at the acquisition position 4 and the right and left end faces of the glass substrate 3 (at the mounting position) mounted on the mounting surface 26 of the packaging pallet 5 (The opposite distance or the direction) with respect to the conveying means 2 (the acquisition position 4) of the packaging pallet 5 is determined so as to be parallel to each other. The articulated robot 11 of the transfer facility 10 is disposed on the side of the confronting space 9 formed between the acquisition position 4 and the placement position (pallet 5 for packaging). In this embodiment, the concave portion 7 (the acquisition position 4) is formed at a predetermined interval on the carrying path 6, and the packing pallet 5 and the articulated robot 11 are respectively disposed.

Fig. 2 shows a side view of the transfer facility 10. Fig. As shown in this figure, the transfer facility 10 is provided with a articulated robot 11 and is disposed on a grounded base 12. Here, the articulated robot 11 has a series of movable arms 13 and a control panel 14 (see Fig. 1) for controlling the operation of the series of movable arms 13. A series of movable arms 13 have a so-called articulated robot arm structure, and all the joint axes are parallel to each other and arranged in a direction across the conveying direction of the glass substrate 3 by the conveying means 2. [ In other words, the structure of the series of movable arms 13 and the position of the acquisition position (the center of gravity) of the movable arm 13 are determined so that the normal line of the glass substrate 3 held by the workpiece holding portion 23 maintains an orientation orthogonal to any joint axis 4) and the mounting position (pallet 5 for packaging) of the articulated robot 11 are set.

Here, the series of movable arms 13 will be described in detail. The series of movable arms 13 has a triaxial joint structure, and the first link 15 located at the most base 12 side is a base 12 and one end of the second link 17 is connected to the other end of the first link 15 through the first joint 16. [ One end of the third link 19 is connected to the other end of the second link 17 through the second joint 18 and the other end of the third link 19 is connected to the other end of the third link 19 via the third joint 20. [ The wrist 21 of the wrist 23 is connected. The corresponding drive motors (only the drive motors 22 for the first joint 16 are shown) are integrally arranged in the vicinity of the respective joints 16, 18 and 20, 15, 17, and 19 constitute a series of movable arms 13. Further, a speed reducer may be attached to each of the joints 16, 18, 20, or a motor with a speed reducer may be used as the drive motor. In order to further improve the stiffness of the rock, a reduction gear that suppresses the occurrence of backlash (for example, a roller drive that is a zero backlash precision gear reducer manufactured by Sankyo Seisakusho Co., Ltd. Trademark) < / RTI > Further, all of the links 15, 17, and 19 can rotate independently of each other around the respective joints 16, 18, and 20, and when interference occurs between the links or an object in the vicinity due to the rotation angle .

The work holding section 23 has such a shape that it can pass through the concave section 7 formed on the carrying path 6 in the vertical direction. In the illustrated example, a plurality of the projecting sections are arranged in parallel . A plurality of suction pads 24 are disposed on one side of the work holding portion 23 and are attached to the suction pads 24 by a decompression means 25 such as a vacuum pump connected to a series of movable arms 13 So that the object can be held by suction.

The packaging pallet 5 has a mounting surface 26 inclined at a predetermined angle (for example, 72 degrees) in the illustrated example, and a plurality of glass substrates 3 can be stacked on the mounting surface 26 . Here, a joint feeding means for feeding the lumber 27 to the mounting surface 26 is disposed above the packaging pallet 5, though not shown, at the time of loading. Each time the glass substrate 3 is mounted on the mounting surface 26 of the packaging pallet 5 by the articulated robot 11, the laminate 27 is placed on the mounting surface 26 When the substrate 3 is mounted on the lower surface 3a of the uppermost glass substrate 3 so that a plurality of glass substrates 3 are stacked on the mounting surface 26 via the laminate 27 . As shown in Fig. 2, each joint 16, 18, 20 is provided between the base 12 and a series of movable arms 13 in order to secure the positional accuracy of the glass substrate 3, It is also possible to provide a sliding mechanism 28 capable of sliding along the axial direction of the housing.

Hereinafter, an example of the transfer operation of the glass substrate 3 using the transfer facility 10 having the above-described configuration will be described mainly with reference to Figs. 3 to 7. Fig. It should be noted that the sum of the time products of the loads for the respective motors is the sum of the outputs of the drive motors provided in the respective joints 16, 18, 20 of the series of movable arms 13 And the feeding operation of the glass substrate 3 by the series of movable arms 13 is set to the minimum.

First, the arrival of the glass substrate 3 conveyed on the conveying path 6 by the conveying means 2 at the acquisition position 4 shown in Fig. 1 is detected by a suitable position sensor (not shown) And the like. Thereby, the glass substrate 3 is stopped and set on the acquisition position 4. At this time, for example, the horizontal position of the glass substrate 3 (the position on the virtual axis perpendicular to the transport direction) is adjusted by the appropriate alignment means 8 provided on the acquisition position 4, for example. At this stage, the work holding portions 23 of the series of movable arms 13 are arranged immediately below the glass substrate 3 set on the acquisition position 4 as shown in Fig. Further, the second joint 18 is located below the first joint 16 or the third joint 20.

The lower surface 3a of the glass substrate 3 is sucked and held by the plurality of suction pads 24 provided on the work holding portion 23 at the positions shown in Fig. 3 and from this state, the second joint 18 The glass substrate 3 is pushed up from the conveying path 6 as shown in Fig. 4 by turning the third link 19 in the counterclockwise direction in Fig. . At this time, the wrist 21 remains fixed to the third link 19, and the second link 17 moves clockwise with respect to the first link 15 little by little in accordance with the turning operation of the third link 19, Direction. In the illustrated embodiment, the glass substrate 3 is attracted to the glass substrate 3 and lifted up slightly to bend the series of movable arms 13 to move the glass substrate 3 in parallel from the front side (around the packaging pallet 5) . So as to avoid interference with other objects on the acquisition position 4. As described above, by rotating the third link 19 around the second joint 18 positioned below the articulated robot 11, the rotational movement distance of the glass substrate 3 can be reduced, (Position facing the mounting surface 26 in front of the mounting surface 26).

By rotating the series of movable arms 13 as described above, the glass substrate 3 held at the front end (work holding portion 23) is rotated and transferred around the horizontal axis, and the position shown in Fig. 5, The upper surface 3b of the substrate 3 on the loading side and the loading surface 26 of the packaging pallet 5 come to a position facing each other and the transfer operation of the glass substrate 3 is changed as follows. That is to say, a series of movable arms 13 are stretched while maintaining the front face-to-face postures of the upper face 3b and the mounting face 26 of the glass substrate 3 to slide the glass substrate 3 toward the mounting face 26 Linearly). Whereby the glass substrate 3 is mounted on the mounting surface 26 of the packaging pallet 5 in a state in which the glass substrate 3 is correctly positioned. At this time, a series of movable arms 13 may be slightly moved in the direction orthogonal to the conveying direction by the sliding mechanism 28 shown in Fig. 2 so that the mounting position of the glass substrate 3 may be finely adjusted. In the state shown in Fig. 5, although the laminate 27 is supplied on the lower surface 3a of the glass substrate 3 on which the laminate 27 is previously mounted, the laminate 27 can be supplied between the glass substrates 3, The supply timing is arbitrary.

After the transfer operation and the loading operation of the glass substrate 3 are completed in this way, the work holding unit 23 is moved to the lower side of the acquisition position 4 to carry out the transfer and loading operation of the glass substrate 3 again. 6, first, the wrist 21 is rotated clockwise around the third joint 20 to close the work holding portion 23 horizontally, and at the same time, the third link 19 is rotated 2 joint 18 in the clockwise direction to approach the work holding portion 23 to the acquisition position 4. [ 7, the work holding portion 23 is placed below the glass substrate 3 set at the acquisition position 4, and the glass substrate 3 is brought into contact with the glass substrate 3, That is, at the position shown in Fig. Specifically, the third link 19 is rotated in the clockwise direction about the second joint 18 while the series of movable arms 13 are bent, and the wrist 21 is rotated around the third joint 20 The operation of inserting the movable arm 13 is performed by extending the series of movable arms 13 from the state where the tip end of the work holding portion 23 is tilted down. By repeating the series of operations as described above with reference to Figs. 3 to 7, a plurality of glass substrates 3 are stacked on the mounting surface 26 of the packaging pallet 5.

In this embodiment, a plurality of acquisition positions 4 are provided on the carrier path 6 and the pallet 5 for packaging and the articulated robot 11 of the same number as the acquisition positions 4 are provided at the same position . Therefore, during the transfer and loading operation of the glass substrate 3 set at one acquisition position 4 in one articulated robot 11, the other articulated robot 11 acquires the corresponding other acquisition position 4, The set and transported glass substrates 3 can be transported and stacked, and the transporting and loading efficiency of the glass substrates 3 can be greatly increased. Of course, even in the case where different kinds of glass substrates 3 are transported on the same transport path 6 in this kind of packing equipment 1, the transporting equipment 10 corresponding to each of the various glass substrates 3 is constituted, (3) can be carried out and loaded.

As described above, an example of the feeding operation (the first operation example) of the glass substrate 3 using the feeding apparatus 10 according to the present invention has been described. Of course, it is also possible to adopt other feeding operations. Hereinafter, another example (second operation example) of the feeding operation using the feeding apparatus 10 will be described. In the following operation example, the glass substrate 3 transported in the horizontal position on the acquisition position 4 is transported toward the mount table 29 provided with the mounting surface 26 in a horizontal state As an example. The transporting equipment 10 to be used is the same as that in the first operation example.

Here, the feeding operation sets the feed operation of the glass substrate 3 by the series of movable arms 13 so that the sum of kinetic energy lost by the glass substrate 3 receiving the air resistance is minimized during the feeding operation Fig. This is because, from the viewpoint that minimizing the air resistance received by the glass substrate 3 is most effective for improving the conveying speed, the optimum conveying path is selected based on the relationship between the air resistance and the path length received by the glass substrate 3 during conveyance .

First, as shown in Fig. 8, the work holding portion 23 is disposed immediately below the glass substrate 3 set on the acquisition position 4, as in the first operation example. At this time, the second joint 18 is located above the first joint 16 and the third joint 20. At this position, the lower surface 3a of the glass substrate 3 is sucked and held by the plurality of suction pads 24 provided on the work holding portion 23, and as shown in Fig. 9, the glass substrate 3 Is slightly moved upward and moved in parallel to the mount table 29, the actual transfer operation is started. 10, the second link 17 is rotated counterclockwise around the first joint 16 (in addition, in this example, in accordance with the turning operation of the second link 17, The wrist 21 is rotated in the clockwise direction around the third joint 20 so that the glass substrate 3 is positioned at the mounting position Lift the side up and tilt.

The glass substrate 3 is tilted and moved toward the mount table 29 as described above so that the second link 17 and the third link 19 are arranged in a straight line, The glass substrate 3 is moved to the position where the movable arm 13 of the glass substrate 3 is completely extended vertically upward. At the same time, the glass substrate 3 is set up and the wrist 21 is rotated so that the end side end portion of the glass substrate 3 is downwardly erected in a state where the series of movable arms 13 are completely extended vertically upward .

Then, from this state, the wrist 21 is rotated in the clockwise direction, and the second link 17 is rotated clockwise and the third link 19 is rotated counterclockwise, respectively (Fig. 12 Reference). By moving the series of movable arms 13 so as to bend the glass substrate 3, the third joint 20 is moved downward to slowly lower the glass substrate 3.

In this embodiment, as shown in FIG. 13, during the lowering operation of the glass substrate 3, the second link 17, which has been rotated in the clockwise direction, is reversed and turned in the counterclockwise direction, And is transported to slide on the mounting surface 26. The glass substrate 3 is moved from the acquisition position 4 to the opposite space 9 with the operation of lowering the end on the wrist 21 side while bringing the glass substrate 3 close to the horizontal posture It is transported toward the mounting position. Thus, as shown in Fig. 14, the glass substrate 3 is transported to a position where it faces the mounting surface 26 in a state in which the glass substrate 3 is inverted.

14, from the position facing the mounting surface 26 with the glass substrate 3 in a substantially horizontal posture, the upper surface 3b on the mounting side of the glass substrate 3 (Linearly moves) the glass substrate 3 toward the mounting surface 26 while keeping the front surface facing posture of the mounting surface 26 and the mounting surface 26 facing downward. Whereby the glass substrate 3 is mounted on the mounting surface 26 of the mount table 29 in a state where the glass substrate 3 is correctly positioned. In the state shown in Fig. 14, the lumber 27 has already been supplied onto the mounting surface 26 by suitable lint feeding means (all of which are not shown here).

After the transfer operation and the loading operation of the glass substrate 3 are completed in this way, the work holding section 23 is moved downwardly of the acquisition position 4 to carry out the transfer and mounting operation of the glass substrate 3 again. 15, first, both the second link 17 and the third link 19 are rotated in the clockwise direction so as to stand substantially vertically upward, and at the same time, the wrist 21 is rotated counterclockwise So that the work holding section 23 is moved from the horizontal posture to the upright posture. The third link 19 is further rotated in the clockwise direction while the upright posture of the work holding portion 23 is maintained so that the third joint 20 is moved from the position located below the second joint 18 to the wrist 21, Is rotated about the third joint 20 in the counterclockwise direction. As a result, the work holding portion 23 is placed below the glass substrate 3 set at the acquisition position 4 from the position shown in Fig. 16 as in the first operation example and placed just below the glass substrate 3 . By repeating the series of operations according to Figs. 8 to 16, the transfer and mounting operation of the glass substrate 3 from the acquisition position 4 to the mounting table 29 (mounting surface 26) is repeated. When the glass substrate 3 is not mounted on the mounting surface 26 and the mounting table 29 constitutes a part of an appropriate carrying means, the glass substrate 3 is transported one by one toward the next working step It is good.

As above, an example of the transfer operation of the glass substrate 3 by the transfer facility 10 has been described, but it goes without saying that the present invention is not limited to the above operation example. The articulated robot 11 is disposed on the side of the opposite space 9 between the acquisition position 4 and the mounting position, The glass substrate 3 is transferred from the acquisition position 4 to the mounting position through the opposing space 9 by the turning and bending motion of the glass substrate 3 as a part of the transfer operation, (10) can be employed as long as it is configured so as to also serve as a reversing operation for mounting the transfer device (3b) on the mounting surface (26).

In the above description, the glass substrate 3 is placed on the packaging pallet 5 as an example. However, the glass substrate 3, which is the workpiece, is transferred from one transferring step to another, The present invention can also be applied to an arbitrary process during production from the production of the glass substrate 3 to a shipment or a process for lowering the product after shipment.

Although the glass substrate 3 for a liquid crystal display is exemplified as a work to be transported in the above description, the present invention is not limited to the liquid crystal display, but may be applied to various flat panel displays such as a plasma display, an organic EL display, an FED, A glass plate (for example, a plate having a plate thickness of 0.4 mm or more and 1.2 mm or less) or a glass plate used as a substrate for forming various electronic display functional elements or thin films can be a transfer target. It goes without saying that, in the present invention, as long as it is a plate-shaped work, other than a glass material, it may be a transfer object.

1: Packaging equipment for glass substrates 2:
3: glass substrate 3a: (on the conveying side)
3b: Top side (on the mount side) 4: Acquisition position
5: Pallet for packing 6:
7: recess 8: alignment means
9: confronting space 10: glass substrate conveyance facility
11: articulated robot 12: expectation
13: a series of movable arms 14: a control panel
15; First link 16: First joint
17: second link 18: second joint
19: third link 20: third joint
21: wrist 22: drive motor
23: work holding portion 24: adsorption pad
25: decompression means 26: mounting surface
27: laminate 28: sliding mechanism
29: Mounting table

Claims (13)

An apparatus for acquiring a plate work at a position where a plate work is obtained and transferring the obtained plate work to a mounting position of the plate work is provided with a series of movable arms having multiple joints, And a holding portion for holding and acquiring one surface of the plate workpiece, wherein the robot arm holds the lower surface of the supply side of the plate workpiece supplied to the acquisition position by the articulated robot, In a transfer facility for a plate-like workpiece,
Wherein the acquisition position and the mounting position are opposed to each other and the articulated robot is disposed on the side of the confronting space,
Wherein the articulated robot performs an operation of transferring the plate work from the acquisition position through the counter space to the mounting position by the turning and buckling motion of the series of movable arms, And also serves as a reversing operation for mounting the upper surface of the plate work on the mounting surface,
The feeding operation may include:
An operation of lifting the plate-shaped work from the base end side thereof and erecting the tip end of the plate-shaped workpiece downward,
And an operation of lowering the plate work by the bending of the series of movable arms from the upright state and rotating the plate work about the base end side thereof so as to slide the plate work against the mounting surface while reversing the plate work. Transfer facility for plate work. An apparatus for obtaining a plate work at a position where a plate work is acquired and for transferring the obtained plate work to a mounting position of the plate work, wherein the transfer facility is provided with a articulated robot, Wherein the upper surface on the opposite side to the lower surface is mounted on the mounting surface of the mounting position while the lower surface of the supply side of the supplied plate workpiece is held and the articulated robot has a series of movable arms having multiple joints, And a holding portion for holding and acquiring one surface of the plate workpiece is provided at the tip of the arm,
Wherein the acquisition position and the mounting position are opposed to each other and the articulated robot is disposed on the side of the confronting space,
Wherein the articulated robot performs an operation of transferring the plate work from the acquisition position through the counter space to the mounting position by the turning and buckling motion of the series of movable arms, And also serves as a reversing operation for mounting the upper surface of the plate work on the mounting surface,
The feeding operation may include:
Wherein the link is rotated about the intermediate joint in a direction in which the lower surface of the plate workpiece is pushed up and the tip end side of the intermediate joint of the series of movable arms is rotated around the intermediate joint so that the plate workpiece is reversed ,
And an operation of linearly moving the plate-shaped workpiece toward the mounting surface by maintaining a frontal-facing posture with respect to the mounting surface by performing the turning and bending motion to extend the series of movable arms from the bent state The conveying system of the plate work. The method according to claim 1,
Wherein the conveying operation is performed by turning / flexing around the horizontal axis of the series of movable arms. The method according to claim 1,
Wherein the articulated robot has three axes which are both horizontal and parallel to each other. The method according to claim 1,
Wherein the feeding operation includes an operation of holding the lower surface of the plate-like work by inserting the holding portion below the plate-like workpiece supplied to the acquisition position, and then pushing up the plate-like workpiece upwardly. Conveying equipment. 3. The method of claim 2,
Wherein the conveying operation is performed by turning / flexing around the horizontal axis of the series of movable arms. 3. The method of claim 2,
Wherein the articulated robot has three axes which are both horizontal and parallel to each other. 3. The method of claim 2,
Wherein the feeding operation includes an operation of holding the lower surface of the plate-like work by inserting the holding portion below the plate-like workpiece supplied to the acquisition position, and then pushing up the plate-like workpiece upwardly. Conveying equipment. The method according to claim 1,
Wherein the feeding operation includes moving the plate work to a position where the plate work is opposed to the mounting surface and then moving the plate work to the mounting surface while maintaining the front facing posture. Conveying equipment. The method according to claim 1,
Wherein the articulated robot is disposed on a base,
Wherein the articulated robot is configured to be horizontally movable in a direction orthogonal to a feeding direction of the plate work with respect to the base. 11. A plate-shaped workpiece carrying apparatus according to any one of claims 1 to 10, a conveying means for carrying the plate-like workpiece to the acquisition position, and a conveying means for conveying the plate- And one or a plurality of palletizing compartments for packing the pallet,
Wherein the carrying means is provided with the same number of acquisition positions as the packaging pallets, and the articulated robot is disposed at a side of a confronting space between each of the acquisition positions and the packing pallets, Wherein the platelike work conveyed to the acquisition position is selectively placed on each pallet for wrapping by the feeding operation of the articulated robot. A method for obtaining a plate work at an acquisition position of a plate work and transferring the obtained plate work to a mounting position thereof is characterized by comprising a series of movable arms each having a plurality of joints, Shaped workpiece by using the articulated robot provided with a holding part for holding and acquiring the plate-like workpiece, and holding the supply-side lower surface of the plate workpiece fed to the obtaining position and mounting the upper surface on the opposite side of the lower surface to the mounting surface of the mounting position In the transfer method,
Wherein the robot arm is disposed at a side of the confronting space and the take-up position and the mounting position are opposed to each other, and the plate-like workpiece is taken by the turning and bending movements of the series of movable arms of the articulated robot From the position to the mounting position and also serves as a reversing operation for mounting the upper surface of the plate work on the mounting surface as a part of the feeding operation,
The feeding operation may include:
An operation of lifting the plate-shaped work from the base end side thereof and erecting the tip end of the plate-shaped workpiece downward,
And an operation of lowering the plate work by the bending of the series of movable arms from the upright state and rotating the plate work about the base end thereof to slide the plate work while reversing the plate work and sliding it toward the mounting surface A method of conveying a plate work. A method for obtaining a plate work at an acquisition position of a plate work and transferring the obtained plate work to a mounting position thereof is characterized by comprising a series of movable arms each having a plurality of joints, Shaped workpiece by using the articulated robot provided with a holding part for holding and acquiring the plate-like workpiece, and holding the supply-side lower surface of the plate workpiece fed to the obtaining position and mounting the upper surface on the opposite side of the lower surface to the mounting surface of the mounting position In the transfer method,
Wherein the robot arm is disposed at a side of the confronting space and the take-up position and the mounting position are opposed to each other, and the plate-like workpiece is taken by the turning and bending movements of the series of movable arms of the articulated robot From the position to the mounting position and also serves as a reversing operation for mounting the upper surface of the plate work on the mounting surface as a part of the feeding operation,
The feeding operation may include:
Wherein the link is rotated about the intermediate joint in a direction in which the lower surface of the plate workpiece is pushed up and the tip end side of the intermediate joint of the series of movable arms is rotated around the intermediate joint so that the plate workpiece is reversed ,
And an operation of linearly moving the plate-shaped workpiece toward the mounting surface by maintaining a frontal-facing posture with respect to the mounting surface by performing the turning and bending motion to extend the series of movable arms from the bent state Of the workpiece.
KR1020117002856A 2008-07-29 2009-06-12 Apparatus and method for transferring board-like work KR101609205B1 (en)

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Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4723044B1 (en) 2010-09-17 2011-07-13 日東電工株式会社 Liquid crystal display device manufacturing system and manufacturing method
JP4676026B1 (en) 2010-09-17 2011-04-27 日東電工株式会社 Liquid crystal display device manufacturing system and manufacturing method
JP4689763B1 (en) 2010-09-29 2011-05-25 日東電工株式会社 Liquid crystal display element continuous manufacturing system and liquid crystal display element continuous manufacturing method
JP4733227B1 (en) 2010-09-30 2011-07-27 日東電工株式会社 Liquid crystal display device manufacturing system and manufacturing method
CN102050330B (en) * 2010-11-05 2013-02-06 深圳市华星光电技术有限公司 Mechanical arm and transport device provided with same
JP4750227B1 (en) 2011-01-14 2011-08-17 日東電工株式会社 Liquid crystal display element continuous manufacturing system and liquid crystal display element continuous manufacturing method
JP5861495B2 (en) * 2011-04-18 2016-02-16 株式会社デンソー VEHICLE TEMPERATURE CONTROL DEVICE AND IN-VEHICLE HEAT SYSTEM
JP5808577B2 (en) * 2011-05-27 2015-11-10 日東電工株式会社 LCD panel reversing device
JP6101431B2 (en) 2012-04-16 2017-03-22 日東電工株式会社 Optical display panel continuous manufacturing method and optical display panel continuous manufacturing system
CN103372618B (en) * 2012-04-18 2015-08-12 珠海格力电器股份有限公司 Sheet metal component automatic stacking system
DE102012019841B4 (en) 2012-10-09 2022-01-05 Grenzebach Maschinenbau Gmbh Method and device for moving large, extremely oversized panels
CN102923508B (en) * 2012-11-07 2015-08-05 天津南玻节能玻璃有限公司 The convertible glass lower piece table of a kind of automatic transport
JP6488553B2 (en) * 2014-03-31 2019-03-27 日本電気株式会社 Component conveying apparatus, component conveying method, and program
AT14702U1 (en) * 2014-10-20 2016-04-15 Lisec Austria Gmbh Method and device for handling plate-shaped objects
ITUB20152339A1 (en) * 2015-07-21 2017-01-21 Giuseppe Gallucci EQUIPMENT FOR THE TILTING OF SHEETS AND / OR PANELS
CN106185280B (en) * 2016-08-30 2018-07-17 朱洋 Every magnetic lever bracket disk feed mechanism
JP6948125B2 (en) * 2016-12-22 2021-10-13 川崎重工業株式会社 Transport system and its operation method
US11213952B2 (en) 2017-04-26 2022-01-04 Nidec Corporation Articulated robot and articulated robot system
CN107611072A (en) * 2017-07-27 2018-01-19 彩虹（合肥）液晶玻璃有限公司 A kind of device and its method for turning for being used to overturn TFT-LCD glass substrates
JP2019064764A (en) * 2017-09-29 2019-04-25 日本電産サンキョー株式会社 Conveyance system
US11117252B2 (en) * 2018-02-28 2021-09-14 Seiko Epson Corporation Robot
CN109625969A (en) * 2019-01-07 2019-04-16 彩虹（合肥）液晶玻璃有限公司 Liquid crystal glass base unreeling device and put plate method
CN110482220A (en) * 2019-07-26 2019-11-22 蚌埠凯盛工程技术有限公司 A kind of glass substrate storage technology, device and application
JP7366344B2 (en) 2019-10-09 2023-10-23 日本電気硝子株式会社 Glass plate manufacturing method and its manufacturing device
KR20220079812A (en) * 2019-10-11 2022-06-14 니폰 덴키 가라스 가부시키가이샤 The manufacturing method and manufacturing apparatus of a glass plate package
WO2021117555A1 (en) 2019-12-10 2021-06-17 日本電気硝子株式会社 Method for manufacturing glass plates
JP7463891B2 (en) 2020-07-13 2024-04-09 日本電気硝子株式会社 Work position changing tool, work position changing device, and method for manufacturing package
KR102578346B1 (en) * 2021-09-07 2023-09-14 아주엠씨엠(주) How to automatically attach the door leaf restorative material to the fire doorr
CN116354124B (en) * 2023-04-26 2023-10-20 东莞市坤鹏伯爵机械设备有限公司 Board placing machine and board transferring method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001180822A (en) 1999-12-24 2001-07-03 Kanegafuchi Chem Ind Co Ltd Method and device for delivering substrate
JP2002145448A (en) 2000-11-08 2002-05-22 Kawasaki Heavy Ind Ltd Reversal piling up device
JP2005272113A (en) 2004-03-25 2005-10-06 Sharp Corp Substrate carrying device and substrate carrying method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243300B2 (en) * 1974-02-01 1977-10-29
JPH0628514Y2 (en) * 1986-09-08 1994-08-03 日本板硝子株式会社 Interleaving device
JPH02225225A (en) * 1989-02-27 1990-09-07 Nippon Sheet Glass Co Ltd Inserting device for plate glass
JPH03256393A (en) * 1990-03-06 1991-11-15 Matsushita Electric Ind Co Ltd Manufacture of printed wiring board
JP3256393B2 (en) * 1994-11-07 2002-02-12 東洋鋼鈑株式会社 Positioning method and apparatus in sheet material processing machine-robot system
JPH11881A (en) * 1997-06-11 1999-01-06 Shin Meiwa Ind Co Ltd Clean robot
JP2001225286A (en) * 2000-02-14 2001-08-21 Nachi Fujikoshi Corp Conveying device
JP4032778B2 (en) * 2002-03-07 2008-01-16 セイコーエプソン株式会社 Plate member conveying device
TWI287528B (en) * 2002-11-19 2007-10-01 Murata Machinery Ltd Carrier system
JP4378603B2 (en) * 2003-07-24 2009-12-09 株式会社ダイフク Plate body take-out device
JP4388493B2 (en) * 2005-03-16 2009-12-24 東レエンジニアリング株式会社 How to apply film for glass substrates

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001180822A (en) 1999-12-24 2001-07-03 Kanegafuchi Chem Ind Co Ltd Method and device for delivering substrate
JP2002145448A (en) 2000-11-08 2002-05-22 Kawasaki Heavy Ind Ltd Reversal piling up device
JP2005272113A (en) 2004-03-25 2005-10-06 Sharp Corp Substrate carrying device and substrate carrying method

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WO2010013549A1 (en) 2010-02-04
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JP2010030744A (en) 2010-02-12
CN102105375B (en) 2014-01-29

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