KR101578713B1 - Chamfering device of both sides of the optical lens - Google Patents

Chamfering device of both sides of the optical lens Download PDF

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Publication number
KR101578713B1
KR101578713B1 KR1020150088513A KR20150088513A KR101578713B1 KR 101578713 B1 KR101578713 B1 KR 101578713B1 KR 1020150088513 A KR1020150088513 A KR 1020150088513A KR 20150088513 A KR20150088513 A KR 20150088513A KR 101578713 B1 KR101578713 B1 KR 101578713B1
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South Korea
Prior art keywords
optical lens
chamfer
polishing
pick
chamfering
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KR1020150088513A
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Korean (ko)
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황정하
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황정하
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The present invention relates to an optical lens double-side chamfering device for chamfering and discharging an optical lens sequentially from one side of an optical lens by one pick-up in order to improve the productivity of an optical lens and secure an advantage in price competitiveness,
(2), a transfer device (10), a pickup device (20), an upper chamfer device (40) and a lower chamfer device (50) When the optical lens R is picked up, the pick-up device 20 is driven to move away from the pick-up point, and the pick-up device 20 moves the optical lens R R of the optical lens R is picked up by vacuum suction so as to enable rotation of the optical lens R while being picked up and to transfer the picked up optical lens R to the upper portion or the lower portion of the chamber 2, The apparatus 40 is arranged so as to be perpendicular to the pick-up apparatus 20 on the path that the pick-up apparatus 20 picks up the optical lens R and is transported upward, and the upper surface of the optical lens R In order to polish at a set angle, a set polishing angle is formed with reference to the side surface of the optical lens R, And the lower chamfer device 50 is disposed orthogonally to the pickup device 20 on a path where the pickup device 20 is transported downward while picking up the optical lens R, Wherein the polishing surface is configured to be rotated in the vertical direction by forming a set polishing angle with respect to the side surface of the optical lens (R) so as to polish the lower surface of the optical lens (R) at a predetermined angle.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a two-

The present invention relates to an apparatus for chamfering both sides of an optical lens.

As an optical chamfering device of an optical spherical lens, a peripheral chamfer of a lens is proposed, which is attached to a curve generator using a cup-shaped grindstone and is capable of chamfering simultaneously with spherical surface processing of a lens in Patent Document 1. Patent Document 2 proposes a method in which a chamfering grindstone having a convex shape having a radius of curvature larger than the radius of curvature of the concave lens to be chamfered is pressed against the concave lens to be chamfered while being rotated to perform chamfering. Patent Document 3 proposes an inexpensive lens grinding apparatus with chamfer mechanism capable of chamfering efficiently in succession to grinding using a dish-shaped grindstone.

In particular, the lens grinding apparatus with a chamfer mechanism in Patent Document 3 has a grinding machine having a spherical grinding surface and a grinding machine which supports the grinding machine and has a central axis passing through a center of the grinding surface A rotating mechanism for centripetal rotation of the centrifugal rotating body so as to rotate on a conical surface having a central axis of the grinding semi-spindle as the apex of the grinding spindle, a spindle, A grinding half-rotation mechanism for rotating the grinding semi-spindle about a center axis, a lens holder for supporting a lens material to be processed and having a central axis passing through the center of gravity, A workpiece conveying mechanism for conveying the workpiece along the axis toward the grinding machine, And a chamfering mechanism for chamfering the ground lens material obtained by grinding the lens material by the grinding machine. The chamfering mechanism is provided with a chamfering tool having an annular tapered grinding surface A tool movement mechanism for moving the chamfering tool from a chamfer position whose central axis coincides with a center axis of the lens holder to an evacuation position where the chamfering position is evacuated from the chamfer position, The lens holder being supported by the grinded lens material is returned in a direction separating from the grindstone so that the grinded lens material and the grinding wheel And the chamfering tool .

Such a lens grinding apparatus with a chamfer mechanism grinds the lens material while rotating the center of gravity of the grinding wheel having the spherical surface grinding surface so as to form a conical surface whose center of rotation is the apex of the spherical grinding surface. By rotating the tool half in this way, the spherical lens surface with a small curvature can be processed with high precision. In addition, the chamfering can be continuously performed without removing the grinded lens material having the spherical surface from the lens holder. In chamfering, it is preferable to rotate the lens holder on which the ground lens material is held, so that it is not necessary to newly install the rotation shaft due to chamfering. Therefore, it is possible to realize a lens grinding apparatus that can be chamfered by an efficient and inexpensive construction.

However, a lens grinding apparatus with a chamfer mechanism can perform both chamfering only on one surface of a clamped lens, but not on both surfaces. In order to chamfer both sides of the lens, only one grinding half is provided. Therefore, it is necessary to chamfer one side of the lens, then release the clamping of the lens, and then turn it back and clamp it to the grinding machine. There is a limit to realizing this.

[Patent Document 1] Japanese Utility Model Utility Model Publication No. 49-28293 [Patent Document 2] Japanese Unexamined Patent Publication No. 2002-126986 [Patent Document 3] Korean Patent Publication No. 10-0803692 (Published on Feb. 20, 2008)

It is an object of the present invention to provide an optical lens both-side chamfering device for chamfering and discharging an optical lens sequentially from one side of an optical lens by one pick-up, and to thereby improve productivity and cost competitiveness of the lens .

The objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

The object of the present invention as described above includes a chamber 2, a transfer device 10, a pickup device 20, an upper chamfer device 40, and a lower chamfer device 50,

The transfer device 10 transfers the optical lens R received from the outside of the chamber 2 to a pickup point inside the chamber 2 and is driven to deviate from the pick-up point when the optical lens R is picked up ,

The pickup device 20 picks up the optical lens R positioned at the pick-up point by vacuum suction to enable rotation of the optical lens R while picking up the picked up optical lens R, 2 to the upper or lower portion thereof,

The upper chamfering device 40 is disposed orthogonally to the pickup device 20 on a path where the pickup device 20 picks up the optical lens R and is transported upward, And is configured to rotate in a vertical direction by forming a set polishing angle with respect to a side surface of the optical lens R to polish the upper surface at a predetermined angle,

The lower chamfer device 50 is disposed at a position orthogonal to the pick-up device 20 on a path where the pick-up device 20 picks up the optical lens R and is transported downward, And is configured to rotate in the vertical direction by forming a set polishing angle with respect to the side surface of the optical lens (R) so as to polish the lower surface at a predetermined angle.

In the present invention, the process of chamfering and discharging the optical lens sequentially from one side of the optical lens by one pick-up is sequentially automated, and the process of reversing the lens is unnecessary, so that the productivity is improved as the working time is shortened. We can lower the production cost of optical lenses and secure price competitiveness.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a double-side chamfering apparatus for an optical lens according to the present invention,
FIG. 2 to FIG. 4 sequentially illustrate a working process of a double-side chamfering apparatus for an optical lens according to the present invention;

A two-side chamfering apparatus for an optical lens according to the present invention includes a chamber 2, a transferring apparatus 10, a pick-up apparatus 20, an upper chamfering apparatus 40, and a lower chamfering apparatus 50, Transfers the optical lens R received from the outside of the chamber 2 to a pickup point inside the chamber 2 and is driven to deviate from the pick-up point when the optical lens R is picked up, 20 picks up the optical lens R positioned at the pick-up point by vacuum suction and makes it possible to rotate the optical lens R while being picked up and moves the picked up optical lens R to the upper part of the chamber 2 And the upper chamfering device 40 is arranged to be orthogonal to the pick-up device 20 on the path where the pick-up device 20 is transported upward with the optical lens R picked up , The side surface of the optical lens (R) is curved so as to polish the upper surface of the optical lens (R) And the lower chamfering device 50 is configured to rotate in the vertical direction by forming a set abrasive angle on the path of the picking up device 20 to be transported downward while picking up the optical lens R, 20 and is configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R in order to polish the lower surface of the optical lens R at a predetermined angle do.

The pickup device 20 includes a suction unit 21 mounted at a lower end of a vertically disposed hollow rotary shaft 22, a vacuum port 28 provided at an upper end thereof, The suction unit 21 absorbs the impact when the optical lens R is brought into contact with the upper chamfer 40 or the lower chamfer 50 in a state in which the suction unit 21 sucks the optical lens R A shock absorber provided; And a driving unit for rotating the rotation shaft 22.

Such a double-side chamfering device of the optical lens is disposed on the path of the upward and downward movement of the rotation shaft 22 so that the optical lens R is close to the upper chamfering device 40 or the lower chamfering device 50 And a sensor unit 30 for controlling the position of the rotary shaft 22 so as to prevent the rotary shaft 22 from interfering with the feeding of the optical lens R from the outside ); ≪ / RTI >

The upper chamfering device 40 is disposed orthogonal to the pick-up device 20 on a path that the pickup device 20 picks up the optical lens R and is transported upward, and the optical lens R An upper chamfer polishing section 42 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R to polish the upper surface of the optical lens R at a predetermined angle; The upper chamfered polishing part 42 is disposed on a space facing the upper chamfered polishing part 42 to support the upper surface of the optical lens R when the upper chamfered polishing part 42 polishes the upper surface of the optical lens R, The upper portion of the optical lens R is moved to the upper chamfer polishing portion 42 by the moving force of the upper portion of the rotating shaft 22 so that the optical lens R is brought into contact with the upper chamfer polishing portion 42 And an upper chamfer grinding support 41 serving as a cushioning role and a support for contact.

The lower chamfer device 50 is disposed orthogonally to the pickup device 20 on a path where the pick-up device 20 picks up the optical lens R and is transported downward, and the optical lens R A lower chamfer polishing section 52 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R to polish the lower surface of the optical lens R at a predetermined angle; The lower chamfer polishing portion 52 is disposed on a space facing the lower chamfer polishing portion 52 to support the lower surface of the optical lens R when the lower chamfer polishing portion 52 polishes the lower surface of the optical lens R, The lower portion of the optical lens R is moved to the lower chamfer polishing portion 52 by the moving force of the lower portion of the rotary shaft 22 so that the optical lens R is brought into contact with the lower chamfer polishing portion 52 And a lower chamfer grinding support 51 serving as a cushioning role and a support for contact.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

Referring to FIG. 1, a double-side chamfering apparatus for an optical lens of the present invention includes a chamber 2, a conveying apparatus 10, a pick-up apparatus 20, an upper chamfering apparatus 40 and a lower chamfering apparatus 50.

The chamber 2 is supported by the main frame 1 and is installed on the upper part. The interior of the chamber 2 is divided into upper and lower spaces by the diaphragm 3.

A part of the structure of the pick-up device 20 is provided in the upper space inside the chamber 2 and a transfer device 10, an upper chamfer device 40, a lower chamfer device 50, Up device 20 is provided.

More specifically, the transfer device 10 transfers the optical lens R received from the outside of the chamber 2 to a pick-up point inside the chamber 2, and when the optical lens R is picked up, And includes a seat portion 12 on which the optical lens R is seated and a cylinder 11 for horizontally moving the seat portion 12. [

The cylinder 11 enables the seat part 12 to be transferred outwardly and inwardly of the chamber 2 and transfers the seat part 12 to a position other than the pick-up point in the inside thereof.

The pickup device 20 picks up the optical lens R positioned at the pick-up point by vacuum suction to enable rotation of the optical lens R while picking up the picked up optical lens R, 2, a hollow rotary shaft 22 provided vertically, a suction unit 21 mounted on the lower end of the rotary shaft 22, and a suction unit 21 mounted on the upper end of the rotary shaft 22, When the optical lens R is brought into contact with the upper chamfering device 40 or the lower chamfering device 50 while the adsorption part 21 adsorbs the optical lens R, A shock absorber provided on the rotary shaft 22 to absorb the rotation of the rotary shaft 22, and a driving unit for rotating the rotary shaft 22.

The rotary shaft 22 penetrates the diaphragm 3, partly in the lower space of the chamber 2, and partly in the upper space of the chamber 2. A vacuum port 28 is provided at a lower portion of the rotary shaft 22 and a vacuum port 28 is provided at an upper portion of the rotary shaft 22. The vacuum port 28 provides a vacuum to the suction unit 21, .

The shock absorber is provided on the upper side of the rotary shaft 22. This absorbs shock when the optical lens R is attracted or when the optical lens R is brought into contact with the upper chamfer 40 or the lower chamfer 50, The upper plate 23 and the lower plate 24 guided by the guide rods and the spring 25 provided on the rim of the rotary shaft 22 positioned between the upper plate 23 and the lower plate 24 So that it can be buffered.

The rotation shaft 22 is rotatable because the motor 26 mounted on the upper end of the upper plate 23 and the pulley 27 connected to the motor 26 are connected to the rotary shaft 22, To the rotary shaft (22).

The upward and downward movement of the rotary shaft 22 forms a thread of a guide rod for guiding the upper plate 23 and the lower plate 24 and forms a thread on the upper plate 23 and the lower plate 24, .

The sensor unit 30 is disposed on the upward and downward movement path of the rotation shaft 22 and detects whether the optical lens R is close to the upper chamfer apparatus 40 or the lower chamfer apparatus 50 And controls the position of the rotary shaft 22 so that the rotary shaft 22 does not interfere with the feeding of the optical lens R from the outside when the feeding device 10 is fed from the outside. 32, and 33 are disposed on the upward and downward movement paths of the rotary shaft 22 and the sensing reference unit is provided on the rotary shaft 22. When the sensing reference unit senses any one of the sensors 31, 32, and 33, So that the position of the part 21 can be known.

The upper chamfering device 40 is disposed orthogonally to the pickup device 20 on a path where the pickup device 20 picks up the optical lens R and is transported upward, Wherein the lower chamfering device (50) is configured such that the pick-up device (20) is rotatable in the vertical direction by forming a set polishing angle with respect to the side surface of the optical lens (R) The optical lens R is disposed so as to be orthogonal to the pick-up device 20 on a path to be transported downward in a state of picking up the optical lens R, And is configured to rotate in the vertical direction by forming a set polishing angle as a reference.

Specifically, the upper chamfering device 40 includes a pickup device 20, which is disposed orthogonally to the pickup device 20 on a path where the pickup device 20 picks up the optical lens R and is transported upward, An upper chamfer polishing part 42 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R to polish the upper surface of the upper chamfer polishing part 42 And the upper chamfer polishing part 42 supports the upper surface of the optical lens R when the upper surface of the optical lens R is polished so that the optical lens R is supported on the upper chamfer polishing And the upper portion of the optical lens R is brought into contact with the upper chamfered polishing portion 42 by the moving force of the upper portion of the rotating shaft 22 An upper chamfer polishing support portion 41, A motor (43) for transmitting the rotational force to the perch (42).

The lower chamfer device 50 is disposed on the path that the pickup device 20 picks up the optical lens R and is transported to the lower side and perpendicular to the pickup device 20, A lower chamfer polishing section 52 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R to polish the surface at a predetermined angle; The lower chamfer polishing portion 52 supports the lower surface of the optical lens R when the lower surface of the optical lens R is polished so that the optical lens R is supported on the lower chamfer polishing portion 52 And the bottom of the optical lens R is brought into contact with the lower chamfer polishing portion 52 by the moving force of the lower portion of the rotating shaft 22, A support portion 51, and a lower chamfer polishing portion 52 And a motor 53 to deliver power.

Hereinafter, the operation of the double-side chamfering device of the optical lens will be described with reference to Figs. 2 to 4. Fig.

First, the cylinder 11 of the transfer device 10 is driven to transfer the mounting part 12 to the outside of the chamber 2. [ When the mounting part 12 is transferred to the outside of the chamber 2, the optical lens R is supplied. In the state where the optical lens R is supplied, the mounting part 12 is positioned at the pick- do.

The next suction part 21 descends to suck the optical lens R and then ascends to approach the upper chamfer 40 to execute the upper chamfer of the optical lens R. [ At this time, the optical lens R reaches the upper chamfer polishing support portion 41 and approaches the upper chamfer polishing portion 42 while being buffered on the upper chamfer polishing support portion 41. The rotation of the upper chamfer polishing portion 42 And the upper chamfer is performed by the rotation of the rotary shaft 22. [

The next suction portion 21 descends and approaches the lower chamfer 50 to execute the lower chamfer of the optical lens R. [ At this time, the optical lens R first reaches the lower chamfer polishing support portion 51 and approaches the lower chamfer polishing portion 52 while being cushioned by the lower chamfer polishing support portion 51, and the rotation of the lower chamfer polishing portion 52 The lower chamfer is executed by the rotation of the rotary shaft 22. [

The vacuum suction force of the suction part 21 is released to seat the optical lens R on the seat part 12 when the seat part 12 is again located at the pick-up point, 2 and discharged therefrom.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications, and variations will readily occur to those skilled in the art without departing from the spirit and scope of the invention. Therefore, it should be understood that the disclosed embodiments are to be considered in an illustrative rather than a restrictive sense, and that the true scope of the invention is indicated by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof, .

2: chamber
10: Feeding device
20: Pickup device
21:
22:
28: Vacuum port
30:
40: upper chamfering device
41: upper chamfer polishing support
42: Upper chamfer polishing part
50: lower chamfering device
51: Lower chamfer polishing support
52: Lower chamfer polishing part

Claims (4)

And includes a chamber 2, a transfer device 10, a pickup device 20, an upper chamfer device 40, and a lower chamfer device 50,
The transfer device 10 transfers the optical lens R received from the outside of the chamber 2 to a pickup point inside the chamber 2 and is driven to deviate from the pick-up point when the optical lens R is picked up ,
The pickup device 20 picks up the optical lens R positioned at the pick-up point by vacuum suction to enable rotation of the optical lens R while picking up the picked up optical lens R, 2 to the upper or lower portion thereof,
The upper chamfering device 40 is disposed orthogonally to the pickup device 20 on a path where the pickup device 20 picks up the optical lens R and is transported upward, And is configured to rotate in a vertical direction by forming a set polishing angle with respect to a side surface of the optical lens R to polish the upper surface at a predetermined angle,
The lower chamfer device 50 is disposed at a position orthogonal to the pick-up device 20 on a path where the pick-up device 20 picks up the optical lens R and is transported downward, And is configured to rotate in the vertical direction by forming a set polishing angle with respect to the side surface of the optical lens R to polish the lower surface at a predetermined angle,
The pick-up device 20
A suction unit 21 mounted at a lower end of a vertically provided hollow rotary shaft 22, a vacuum port 28 provided at an upper end thereof,
The suction unit 21 absorbs the impact when the optical lens R is brought into contact with the upper chamfer 40 or the lower chamfer 50 in a state in which the suction unit 21 sucks the optical lens R A shock absorber provided;
A driving unit for rotating the rotation shaft 22;
Lt; / RTI >
And is disposed on the path of the upward and downward movement of the rotary shaft 22 so as to detect whether the optical lens R is close to the upper chamfering device 40 or the lower chamfering device 50, A sensor unit 30 for controlling the position of the rotation shaft 22 so that the rotation shaft 22 is not interfered with when the optical lens R is fed from the outside and is being transported; Lt; / RTI >
The upper chamfering device (40)
The pickup device 20 is disposed orthogonally to the pickup device 20 on a path to be transported upward while picking up the optical lens R and the upper surface of the optical lens R is polished at a predetermined angle An upper chamfer polishing part 42 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R;
The upper chamfered polishing part 42 is disposed on a space facing the upper chamfered polishing part 42 to support the upper surface of the optical lens R when the upper chamfered polishing part 42 polishes the upper surface of the optical lens R, The upper portion of the optical lens R is moved to the upper chamfer polishing portion 42 by the moving force of the upper portion of the rotating shaft 22 so that the optical lens R is brought into contact with the upper chamfer polishing portion 42 An upper chamfer grinding support 41 serving as a cushioning role and a support for contact;
Lt; / RTI >
The lower chamfer (50)
The pickup device 20 is disposed orthogonally to the pickup device 20 on a path to be transported downward while picking up the optical lens R and the lower surface of the optical lens R is polished at a predetermined angle A lower chamfer polishing section 52 configured to rotate in a vertical direction by forming a set polishing angle with reference to a side surface of the optical lens R;
The lower chamfer polishing portion 52 is disposed on a space facing the lower chamfer polishing portion 52 to support the lower surface of the optical lens R when the lower chamfer polishing portion 52 polishes the lower surface of the optical lens R, The lower portion of the optical lens R is moved to the lower chamfer polishing portion 52 by the moving force of the lower portion of the rotation shaft 22 so that the optical lens R is brought into contact with the lower chamfer polishing portion 52 A lower chamfer grinding support portion 51 serving as a buffering and supporting portion to be contacted;
Wherein the optical lens is a double-side chamfering device. delete delete delete
KR1020150088513A 2015-06-22 2015-06-22 Chamfering device of both sides of the optical lens KR101578713B1 (en)

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KR1020150088513A KR101578713B1 (en) 2015-06-22 2015-06-22 Chamfering device of both sides of the optical lens

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002036080A (en) * 2000-07-27 2002-02-05 Ebara Corp Substrate edge polisher
JP2011235406A (en) * 2010-05-11 2011-11-24 Daito Electron Co Ltd Wafer chamfering device
JP5078881B2 (en) 2006-04-21 2012-11-21 Ｈｏｙａ株式会社 Lens processing apparatus and lens processing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002036080A (en) * 2000-07-27 2002-02-05 Ebara Corp Substrate edge polisher
JP5078881B2 (en) 2006-04-21 2012-11-21 Ｈｏｙａ株式会社 Lens processing apparatus and lens processing method
JP2011235406A (en) * 2010-05-11 2011-11-24 Daito Electron Co Ltd Wafer chamfering device

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