KR101383449B1 - Apparatus for detecting alignment of fork installed stocker - Google Patents

Apparatus for detecting alignment of fork installed stocker Download PDF

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KR101383449B1
KR101383449B1 KR1020120111881A KR20120111881A KR101383449B1 KR 101383449 B1 KR101383449 B1 KR 101383449B1 KR 1020120111881 A KR1020120111881 A KR 1020120111881A KR 20120111881 A KR20120111881 A KR 20120111881A KR 101383449 B1 KR101383449 B1 KR 101383449B1
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South Korea
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fork
sensor unit
stocker
fixed frame
optical communication
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KR1020120111881A
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Korean (ko)
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최동열
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주식회사 알티자동화
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/1633—Programme controls characterised by the control loop compliant, force, torque control, e.g. combined with position control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

The present invention relates to an apparatus for detecting an aligned condition of a fork of a stocker. The stocker consists of: a pair of rail blocks moving along guide rails; a fixed frame fixed on the upper parts of the rail blocks; a vertically-moving plate moving vertically along the fixed frame; a fork unit which is installed on a surface of the upper center of the vertically-moving plate and which rotates a full 360 degrees and moves back and forth. The apparatus for detecting an aligned condition of a fork of a stocker comprises: a sensor unit which is fixed on the lower surface of the fork and which detects roll, pitch and yaw of the fork; an optical communication unit or a serial wireless LAN which receives data detected by the sensor unit by communicating with the sensor unit in real time without wire and which is installed outside the fixed frame; an access point (AP) communicating 1:1 or 1:N through a TCP/IP protocol with the optical communication unit or the serial wireless LAN; and a monitoring PC which communicates with the optical communication unit or the AP without wire, displays the data detected by the sensor unit, and sounds the alarm. The apparatus according to the present invention is provided to quickly check and adjust deflection, distortion, and twisting by detecting the alignment condition of the fork in real time, thereby preventing occurrence of an accident in large facilities; to perform an accurate setting work based on predetermined reference values; to reduce setting hours; and to facilitate the setting work, thereby reducing manpower, hours and expenses for maintaining the stocker.

Description

스토커의 포크 정렬 상태 검출장치{APPARATUS FOR DETECTING ALIGNMENT OF FORK INSTALLED STOCKER}Stalker fork alignment detection device {APPARATUS FOR DETECTING ALIGNMENT OF FORK INSTALLED STOCKER}

본 발명은 스토커의 포크 정렬 상태 검출장치에 관한 것으로, 보다 상세하게는 카세트를 이송하는 포크의 정렬 상태를 실시간 검출하여 정렬 불량에 의해 발생되는 설비사고를 미연에 방지함은 물론 정렬 불량시 제로 세팅을 정확하게 수행할 수 있도록 안내하는 기능이 구비된 스토커의 포크 정렬 상태 검출장치에 관한 것이다.
The present invention relates to an apparatus for detecting a fork alignment state of a stocker, and more particularly, to detect a misalignment state of a fork carrying a cassette in real time to prevent equipment accidents caused by misalignment, as well as zero setting when misalignment. It relates to a fork alignment state detection device of the stocker with a function of guiding to accurately perform.

LCD, PDP, OLED 등의 평판표시소자(Flat Panel Display)는 화면 크기의 증가와 해상도 증가에 의해 그 수요 및 이용폭이 대폭 증가하고 있다. Flat panel displays, such as LCD, PDP, OLED, etc., are increasing in demand and usage due to the increase in screen size and resolution.

이러한 평판표시소자의 제조공정에는 유리 원판을 취급하므로, 필수적으로 여러 장의 기판을 적재하여 동시에 이동시키고 보관할 수 있는 카세트를 사용하게 된다.In the manufacturing process of such a flat panel display device, since a glass disc is handled, a cassette capable of moving and storing several substrates at the same time is essentially used.

그리고, 이러한 카세트는 여러 공정을 옮겨다니면서 각 공정에 유리 원판을 공급하거나 받아오게 되며, 특정한 경우에는 유리 원판을 임시 저장하는 역할을 한다.In addition, such a cassette is supplied to or receives a glass disc for each process while moving several processes, and in certain cases serves to temporarily store the glass disc.

이와 같이 다수의 유리 원판 혹은 기판들이 수납된 카세트를 반입, 반출하기 위해 크레인 설비가 사용되는데, 주로 스태커(Stacker)와 스토커(Stocker)가 활용되며, 이들 크레인 설비는 유사하지만 처리 중량에 따라 구별된다.As such, crane equipment is used to import and export cassettes containing a large number of glass discs or substrates. Stackers and stockers are mainly used, and these crane equipment are similar but distinguished according to the processing weight. .

예컨대, 스태커와 관련된 기술로 등록특허 제0476951호, 등록특허 제0574266호, 등록특허 제0670599호 등이 개시되어 있고, 스토커와 관련된 기술로는 등록실용 제0441118호, 공개특허 제2007-0071263호 등이 개시되어 있다.For example, Patent No. 0476951, Patent No. 0574266, Patent No. 0670599, and the like are disclosed as technologies related to stackers, and Patents No. 0441118 and 2007-0071263 are disclosed as technologies related to stockers. Is disclosed.

이들 중, 특히 스토커의 경우에는 이동성과 소규모 처리가 용이하므로 공정간 카세트의 입, 출고에 많이 활용된다.Among them, particularly in the case of stockers, since mobility and small scale processing are easy, the stocker is widely used for the entry and exit of cassettes between processes.

이때, 상기 스토커에는 카세트를 떠올리거나 내리면서 해당 공정으로 반송시켜 입,출고하는 포크(Fork)가 구비되는데, 상기 포크에는 카세트가 실리기 때문에 항상 힘을 받고 있어 수직방향으로 처지기 쉽고, 또 좌우의 레벨이 틀어지기 쉬우며, 뿐만 아니라 수평방향으로의 뒤틀림도 발생한다.At this time, the stocker is provided with a fork for conveying into and out of the process while the cassette is lifted or lowered, and the fork is always driven by the cassette because the cassette is loaded, so it is liable to sag in the vertical direction, and the level of the left and right. This is easy to be twisted, as well as a distortion in the horizontal direction occurs.

이러한 현상이 발생될 경우, 반송되던 카세트가 쏟아지면서 낙하 파손되는 사고를 일으키거나 혹은 주행중 탈선, 충돌 등의 문제를 야기시키며, 그 상태가 지속적으로 유지되면 처짐(Pitch), 틀어짐(Roll), 비틀림(Yaw)이 가중되어 스토커를 구성하는 휠, 캐스터, 크로스 롤러 베어링 등의 문제를 야기하고 급기야는 대형 설비사고를 초래하여 인명 피해는 물론 커다란 물적 사고로까지 이어져 엄청난 손실을 야기시키게 된다.If this phenomenon occurs, it may cause accidents such as dropping or falling of the cassette being poured, or problems such as derailment or collision while driving, and if the state is maintained continuously, the pitch, roll and twist may be caused. Yaw is aggravated, causing problems with the wheels, casters, and cross roller bearings that make up the stalker, and the supply field causes large-scale equipment accidents, which can lead to not only human damage but also large physical accidents, causing enormous losses.

때문에, 스토커의 포크에 이상이 발생되면 작업자가 직감에 의지하여 기울어진 축을 다시 세팅하여 바로 잡는데, 세팅값에 대한 기준이 없어 현장에서 체득한 감에 의존하다 보니 정확한 제로 세팅이 이루어지지 않고, 임시방편적인 조치에 지나지 않게 되어 결국, 스토커 사용주기가 짧아지고 유지 보수에 따른 시간이 급증하게 되는 현상이 초래된다.Therefore, if an error occurs in the fork of the stocker, the operator relies on intuition to set the tilted axis again and corrects it.There is no standard for setting value, so it depends on the sense acquired in the field. As a result of this, the stalker cycle is shortened and maintenance time increases rapidly.

그럼에도 불구하고, 상술한 선행기술들을 비롯한 다수의 관련 기술들에서도 아직까지 이를 해결할 수 있는 적절한 대응책이 개시된 바 없어, 이와 같은 문제 해결을 위한 대응책이 시급히 요청되고 있는 실정이다.
Nevertheless, a number of related technologies, including the above-mentioned prior arts, have not yet been disclosed as appropriate countermeasures to solve this problem. Therefore, there is an urgent need for countermeasures for solving such problems.

본 발명은 상술한 바와 같은 상황 인식하에 종래 기술상의 문제들을 쉽고 빠르면서 간편하게 해결할 수 있도록 창출된 것으로, 스토커의 포크에서 발생되는 처짐, 틀어짐, 비틀림을 실시간 검출하고, 검출값이 일정범위를 벗어날 경우 알람을 발생시키도록 하며, 제로 세팅시에도 기준값이 정해져 있기 때문에 단시간에 아주 편리하면서 정확하게 세팅할 수 있어 대형 설비사고를 미연에 방지하면서 비용과 시간을 절약하고, 생산성도 향상시키도록 한 스토커의 포크 정렬 상태 검출장치를 제공함에 그 주된 목적이 있다.
The present invention was created to easily and quickly and easily solve the problems of the prior art under the above-described situation, the real-time detection of deflections, distortions and twists generated in the fork of the stalker, when the detected value is out of a certain range It is designed to generate an alarm, and the reference value is set even at zero setting, so it is very convenient and accurate to set in a short time, so that the fork of the stalker saves cost, time, and improves productivity while preventing large equipment accidents. Its main purpose is to provide an alignment state detection device.

본 발명은 상기한 목적을 달성하기 위한 수단으로, 가이드레일을 따라 움직이는 한 쌍의 레일블록, 레일블록 상부에 고정된 고정프레임, 고정프레임을 따라 승하강되는 승하강플레이트, 승하강플레이트의 중앙 상면에 설치되고 360°및 전후진 동작하는 포크를 구비한 포크유닛,을 포함하는 스토커에 있어서; 상기 포크의 하면에 고정되고, 포크의 롤(Roll), 피치(Pitch), 요(Yaw)를 검출하는 센서유닛과; 상기 센서유닛과 실시간 무선통신하여 상기 센서유닛이 계측한 데이터를 수신하도록 상기 고정프레임의 외측면에 설치된 광통신장치 또는 시리얼 무선랜과; 상기 광통신장치 또는 시리얼 무선랜과 TCP/IP 프로토콜로 1:1 또는 1:N으로 무선통신하는 AP(Access Point)와; 상기 광통신장치 또는 AP와 무선통신하여 상기 센서유닛이 검출한 데이터를 디스플레이하는 모니터링PC;를 포함하여 구성되는 것을 특징으로 하는 스토커의 포크 정렬 상태 검출장치를 제공한다.The present invention is a means for achieving the above object, a pair of rail blocks moving along the guide rail, a fixed frame fixed to the upper rail block, the elevating plate is lowered along the fixed frame, the elevating plate center upper surface A stocker comprising: a fork unit, the fork unit having a fork installed at 360 ° and moving forward and backward; A sensor unit fixed to a lower surface of the fork and detecting a roll, pitch, and yaw of the fork; An optical communication device or a serial wireless LAN installed on an outer surface of the fixed frame to receive data measured by the sensor unit in real time wireless communication with the sensor unit; An access point (AP) for wirelessly communicating 1: 1 or 1: N with the optical communication device or a serial wireless LAN through a TCP / IP protocol; And a monitoring PC for wirelessly communicating with the optical communication device or the AP to display the data detected by the sensor unit.

또한, 제어기능을 수행하는 컨트롤러, 상기 컨트롤러와 연결되고 상기 포크의 롤(Roll)과 피치(Pitch)를 검출하는 기울기센서인 제1,2센서, 상기 포크의 요(Yaw)를 검출하는 지자계센서인 제3센서, 상기 제1,2,3센서가 검출한 검출값을 시리얼 무선랜으로 무선통신하여 송신하는 무선통신부;를 포함하여 구성되는 것에도 그 특징이 있다.In addition, a controller that performs a control function, first and second sensors which are connected to the controller and are tilt sensors for detecting roll and pitch of the fork, and a geomagnetic field for detecting the yaw of the fork And a third sensor, which is a sensor, and a wireless communication unit for wirelessly communicating and transmitting the detected values detected by the first, second, and third sensors through a serial wireless LAN.

뿐만 아니라, 상기 포크에 설치되기 전에, 진북을 가리키는 나침반이 설치된 수평의 정반위에서 롤(Roll), 피치(Pitch), 요(Yaw)의 값이 절대값으로 제로 세팅(각각 0°세팅)되고, 제로 세팅된 센서유닛을 기준으로 포크의 기울기가 0°(Zero Set)로 조정되는 것에도 그 특징이 있다.
In addition, the roll, pitch, and yaw values are set to zero at the absolute position (horizontal setting of 0 °), respectively, before being installed in the fork, in the horizontal position where the compass pointing to true north is installed. It is also characterized by the inclination of the fork to 0 ° (Zero Set) with respect to the zero set sensor unit.

본 발명에 따르면, 스토커의 포크 정렬 상태를 실시간 검출할 수 있어 처짐, 틀어짐, 비틀림 발생시 즉시 확인하고 조정가능하기 때문에 대형 설비사고를 방지하는 효과를 얻을 수 있다. 또한, 기준값이 정해져 있기 때문에 제로 세팅시 정확한 세팅이 가능하고, 세팅 작업시간을 줄이며, 작업이 간편 용이하게 때문에 스토커 유지 관리에 따른 인력과 시간 및 비용을 절감하는 효과도 얻을 수 있다.
According to the present invention, the fork alignment state of the stocker can be detected in real time, so that it is possible to immediately check and adjust when sagging, twisting, or torsion occurs, thereby obtaining an effect of preventing a large-scale equipment accident. In addition, since the reference value is set, accurate setting at zero setting can be performed, setting work time can be reduced, and work can be easily performed, thereby reducing the manpower, time, and cost according to the stocker maintenance.

도 1은 본 발명에 따른 스토커의 예시적인 사시도이다.
도 2는 본 발명에 따른 스토커의 포크 유닛을 보인 예시도이다.
도 3은 본 발명에 따른 스토커의 구현예를 보인 예시도이다.1 is an exemplary perspective view of a stocker according to the invention.
Figure 2 is an exemplary view showing a fork unit of the stocker according to the present invention.
3 is an exemplary view showing an embodiment of a stalker according to the present invention.

이하에서는, 첨부도면을 참고하여 본 발명에 따른 바람직한 실시예를 보다 상세하게 설명하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명 설명에 앞서, 이하의 특정한 구조 내지 기능적 설명들은 단지 본 발명의 개념에 따른 실시예를 설명하기 위한 목적으로 예시된 것으로, 본 발명의 개념에 따른 실시예들은 다양한 형태로 실시될 수 있으며, 본 명세서에 설명된 실시예들에 한정되는 것으로 해석되어서는 아니된다.Before describing the present invention, the following specific structural or functional descriptions are merely illustrative for the purpose of describing an embodiment according to the concept of the present invention, and embodiments according to the concept of the present invention may be embodied in various forms, And should not be construed as limited to the embodiments described herein.

또한, 본 발명의 개념에 따른 실시예는 다양한 변경을 가할 수 있고 여러 가지 형태를 가질 수 있으므로, 특정 실시예들은 도면에 예시하고 본 명세서에 상세하게 설명하고자 한다. 그러나, 이는 본 발명의 개념에 따른 실시예들을 특정한 개시 형태에 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경물, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다.In addition, since the embodiments according to the concept of the present invention can make various changes and have various forms, specific embodiments are illustrated in the drawings and described in detail herein. However, it should be understood that the embodiments according to the concept of the present invention are not intended to limit the present invention to specific modes of operation, but include all modifications, equivalents and alternatives falling within the spirit and scope of the present invention.

도 1에 도시된 바와 같이, 본 발명에 따른 스토커는 공정간을 이동할 수 있도록 배열설치된 가이드레일(100)을 따라 이동가능하게 구성된다.As shown in FIG. 1, the stocker according to the present invention is configured to be movable along a guide rail 100 arranged to move between processes.

이를 위해, 상기 스토커는 하단에 한 쌍의 레일블록(110)을 포함하며, 상기 레일블록(110)이 상기 가이드레일(100)을 따라 움직일 수 있게 된다.To this end, the stocker includes a pair of rail blocks 110 at a lower end thereof, and the rail blocks 110 may move along the guide rails 100.

이때, 상기 레일블록(110)의 구동방식은 공지된 것으로, 구체적으로 도시하지 않았으나, 리니어 모션 블록(Linear Motion Block) 타입 혹은 캐스터 드라이빙 블록(Caster Driving Block) 타입이 보편적이다.At this time, the driving method of the rail block 110 is known, and not shown in detail, a linear motion block type or a caster driving block type is common.

그리고, 상기 한 쌍의 레일블록(110)에는 각각 고정프레임(120)이 수직하게 세워진 상태로 고정되며, 상기 고정프레임(120)들이 서로 마주보는 면에는 가이드홈(122)이 형성된다.The fixed frame 120 is vertically fixed to the pair of rail blocks 110, and guide grooves 122 are formed on surfaces of the fixing frames 120 facing each other.

아울러, 상기 가이드홈(122)을 따라 승하강되는 승하강플레이트(200)가 구비된다.In addition, the elevating plate 200 which is raised and lowered along the guide groove 122 is provided.

상기 승하강플레이트(200)는 볼스크류 혹은 체인, 벨트, 기어결합 등 다양한 공지된 방법 중 하나를 통해 상기 가이드홈(122)을 따라 승하강될 수 있도록 구성되는데, 본 발명은 이러한 승하강플레이트(200)의 구조 자체의 개량에 특징이 있는 것이 아니므로 여기에서는 구체적인 설명을 생략한다.The lifting plate 200 is configured to be moved up and down along the guide groove 122 through one of a variety of known methods such as ball screw or chain, belt, gear coupling, the present invention is such a lifting plate ( Since there is no characteristic in improving the structure itself, the detailed description is omitted here.

따라서, 본 발명에 따른 스토커는 가이드레일(100)을 따라 수평선상으로 이동가능하고, 또한 승하강플레이트(200)가 상하이동가능하므로 카세트와 같은 피이송물을 특정 공정으로 반송시킬 수 있는 기본 구성을 갖게 되며, 이들 구성은 현재 생산현장에서 사용되고 있는 스토커 자체의 구성 그대로이다.Therefore, the stocker according to the present invention is movable on a horizontal line along the guide rail 100, and also the lifting plate 200 is movable, so the basic configuration that can convey the conveyed object such as a cassette to a specific process These configurations are the same as the stocker itself currently used in production.

또한, 상기 승하강플레이트(200)의 상면 중앙에는 포크 유닛(400)이 탑재된다.In addition, the fork unit 400 is mounted at the center of the upper surface of the elevating plate 200.

보다 구체적으로, 상기 포크 유닛(400)은 도 2의 도시와 같이, 상기 승하강플레이트(200)에 삽입 안착되는 고정블록(410)과, 상기 고정블록(410)의 상면에 회전가능하게 설치되는 회전판(420)과, 상기 회전판(420)에 축고정되어 회전판(420)과 함께 회전됨은 물론 자체 회전이 가능한 제1아암(430)과, 상기 제1아암(430)의 단부에 고정되는 제2아암(450)과, 상기 제2아암(450)을 상기 제1아암(430)의 단부에 회전가능하게 결합시키는 기어링크(440)와, 상기 제2아암(450)의 단부에 고정된 포크(460)를 포함하여 구성된다.More specifically, the fork unit 400, as shown in Figure 2, the fixed block 410 is inserted and seated in the elevating plate 200, and is rotatably installed on the upper surface of the fixed block 410 Rotating plate 420, the first axis 430 is fixed to the rotating plate 420 is rotated with the rotating plate 420, as well as self-rotating, and the second fixed to the end of the first arm 430 An arm 450, a gear link 440 for rotatably coupling the second arm 450 to an end of the first arm 430, and a fork fixed to an end of the second arm 450; 460).

그리고, 상기 포크(460)의 저면 일부에는 센서유닛(500)이 고정된다.The sensor unit 500 is fixed to a portion of the bottom surface of the fork 460.

이때, 상기 고정블록(410)의 하면에는 상기 회전판(420)과 상기 제1아암(430)을 회전구동시키는 구동수단이 구비되는데, 상기 구동수단은 통상 구동모터이다.At this time, the lower surface of the fixed block 410 is provided with a driving means for rotating the rotating plate 420 and the first arm 430, the driving means is a conventional drive motor.

특히, 상기 제1아암(430)을 회전시키는 구동수단은 상기 회전판(420)의 하면에서 회전판(420)과 함께 회전될 수 있도록 회전판(420) 상에 고정되며, 상기 기어링크(440)는 일종의 평기어 결합구조로 이루어져 상기 제1아암(430)이 회전할 때 제2아암(450)을 펼치거나 접도록 동작하게 된다.In particular, the driving means for rotating the first arm 430 is fixed on the rotating plate 420 to be rotated with the rotating plate 420 on the lower surface of the rotating plate 420, the gear link 440 is a kind of It is composed of a spur gear coupling structure to expand or fold the second arm 450 when the first arm 430 rotates.

이 경우, 상기 기어링크(440)의 기어비를 조절하면 상기 포크(460)의 전,후진 속도를 빠르게 하거나 느리게 하도록 조절할 수 있다.In this case, by adjusting the gear ratio of the gear link 440 can be adjusted to speed up or slow down the forward, backward speed of the fork 460.

뿐만 아니라, 상기 기어링크(440)는 태양기어와 유성기어의 조합형태를 가질 수도 있는데, 이렇게 하면 기어들을 상하로 포갤 수 있어 설치 공간을 줄일 수 있는 잇점이 있다.In addition, the gear link 440 may have a combination of a sun gear and a planetary gear, and this allows the gears to be folded up and down, thereby reducing the installation space.

다만, 이들 기어링크(440)도 당해 분야에서 공지된 구조이므로 개략적으로만 설명하고, 구체적으로 분해 설명하는 것은 생략한다.However, these gear links 440 also have a structure known in the art, and only a schematic description thereof, and detailed description thereof will be omitted.

이와 같은 포크 유닛(400)의 구성에 의해 포크(460)는 회전판(420)을 중심으로 360°회전 가능하며, 또한 제1,2아암(430,450)이 접혔다 펴지는 형태로 움직이면서 상기 포크(460)를 전후진시킬 수 있다.By the configuration of the fork unit 400 as described above, the fork 460 can be rotated 360 ° about the rotating plate 420, and the first and second arms 430 and 450 are folded and moved in the form of being unfolded. ) Can be advanced.

때문에, 피이송물인 카세트를 반송시킬 때, 카세트가 적층되어 있는 지점에서 포크(460)를 전진시켜 카세트 하부를 지지한 다음 승하강플레이트(200)를 약간 상승시킴으로써 카세트를 리프팅시킬 수 있고, 이렇게 리프팅된 카세트는 포크(460)를 후진시켜 안정한 상태로 지지되게 한 후 고정프레임(120)을 반송위치로 이동시킨 다음 다시 포크(460)를 전진시켜 안착 위치에 위치시키고, 승하강플레이트(200)를 하강시켜 카세트를 내려 놓은 후 포크(460)를 빼내 홈포지션으로 이동시키면 카세트의 반입, 반출을 용이하게 수행할 수 있게 된다.Therefore, when conveying the cassette as the conveyed object, the cassette can be lifted by advancing the fork 460 at the point where the cassette is stacked to support the cassette lower portion and then raising the elevating plate 200 slightly, thus lifting the cassette. The cassette is moved back to the fork 460 to be supported in a stable state, and then move the fixed frame 120 to the transport position, and then fork 460 to move forward to position in the seating position, the lifting plate 200 After lowering the cassette down, the fork 460 is pulled out and moved to the home position so that the cassette can be easily carried in and out.

여기에서, 본 발명은 상기 센서유닛(500)의 설치 및 운용에 가장 큰 특징이 있는 것으로, 상술한 동작이 반복적으로 수행되는 동안 포크(460)는 피치(Pitch), 롤(Roll), 요(Yaw) 등의 현상이 초래되면서 문제를 야기시키므로 이를 사전에 감지하고 조정할 수 있도록 상기 센서유닛(500)을 구성한 것이다.Here, the present invention has the greatest feature in the installation and operation of the sensor unit 500, while the fork 460 is a pitch (Pitch), roll (Roll), yaw ( Yaw) and the like cause a problem, so the sensor unit 500 is configured to detect and adjust in advance.

본 발명에 따르면, 상기 센서유닛(500)은 상기 포크(460)의 하면에 직접 고정될 수도 있으나, 보다 안정적인 고정을 위해 상기 포크(460)의 하면 적소에는 삽입홈(462)이 요입 형성되고, 상기 삽입홈(462)의 내벽에는 적어도 하나 이상의 걸림부(464)가 형성되는데, 상기 걸림부(464)는 반원형 홈 형태가 바람직하다.According to the present invention, the sensor unit 500 may be directly fixed to the lower surface of the fork 460, but the insertion groove 462 is formed in the lower surface of the fork 460 in place for more stable fixing, At least one locking portion 464 is formed on an inner wall of the insertion groove 462, and the locking portion 464 is preferably in the shape of a semi-circular groove.

이때, 상기 센서유닛(500)은 포크(460)에 설치되기 전에 미리 절대값을 갖도록 제로 세팅되는데, 이를 테면 진북을 가리키는 나침반이 설치된 수평의 정반 위에서 롤(Roll), 피치(Pitch), 요(Yaw)의 값을 각각 0°(Zero Set)로 설정한다. 그 상태에서, 센서유닛(500)을 삽입홈(462)에 장착하고 승하강플레이트(310)와 포크(460)를 조정하여 설비를 0°(Zero Set)로 조정한다. At this time, the sensor unit 500 is set to zero to have an absolute value in advance before being installed in the fork 460, for example, roll, pitch, yaw ( Yaw) is set to 0 ° (Zero Set), respectively. In this state, the sensor unit 500 is mounted in the insertion groove 462 and the lifting plate 310 and the fork 460 are adjusted to adjust the equipment to 0 ° (Zero Set).

센서유닛(500)의 삽입홈(462)은 카세트가 보관되어 있는 곳(Shelf)을 최대한 수직으로 향하게 함으로써 포크(460) 위에 카세트가 위치할 때 포크(460)의 미세한 처짐의 변화를 알 수 있도록 설치한다.The insertion groove 462 of the sensor unit 500 is directed to the place where the cassette is stored (Shelf) as vertically as possible so that the change in the fine deflection of the fork 460 when the cassette is positioned on the fork 460 can be seen. Install.

또한, 롤(Roll) 방향은 승하강플레이트(310)의 기울기 혹은 포크(460) 자체의 미세한 기울기의 변화를 알 수 있도록 설치한다.In addition, the roll (Roll) direction is installed so that the change in the inclination of the elevating plate 310 or the fine inclination of the fork 460 itself.

그리고, 요(Yaw) 방향은 회전판(420)의 회전각의 변화를 알 수 있도록 설치한다.And, the yaw direction is installed so that the change in the rotation angle of the rotating plate 420 can be known.

또한, 상기 센서유닛(500)은 제1,2,3센서(520,530,540)를 내장한 일종의 합성수지물로 된 하우징이므로 그 측면에 상기 걸림부(464)와 대응되는 반원형 돌기(502)를 돌출시켜 상기 걸림부(464)와 상호 결합될 수 있도록 구성됨이 바람직하다.In addition, since the sensor unit 500 is a housing made of a kind of synthetic resin containing the first, second, and third sensors 520, 530, and 540, the semi-circular protrusion 502 corresponding to the locking portion 464 protrudes from the side thereof. It is preferable that it is configured to be coupled with the locking portion 464.

이에 따라, 상기 센서유닛(500)을 상기 삽입홈(462)에 끼우게 되면 상기 반원형돌기(502)가 탄성변형되면서 상기 걸림부(464)에 딸깍하고 강제 끼움되면서 고정되므로 안정적인 고정성을 유지할 수 있고, 분리시에는 약간의 힘만 가해 센서유닛(500)을 당기게 되면 쉽게 탈착시킬 수 있다.Accordingly, when the sensor unit 500 is inserted into the insertion groove 462, the semi-circular protrusion 502 is elastically deformed and fixed to the locking portion 464 while being fixed while being securely fixed. And, when detached by applying a slight force to pull the sensor unit 500 can be easily removable.

아울러, 상기 센서유닛(500)은 컨트롤러(510)를 내장하며, 상기 컨트롤러(510)에는 제1센서(520), 제2센서(530), 제3센서(540), 전원공급부(550) 및 무선통신부(560)가 연결된다.In addition, the sensor unit 500 includes a controller 510, and the controller 510 includes a first sensor 520, a second sensor 530, a third sensor 540, a power supply unit 550 and Wireless communication unit 560 is connected.

이때, 상기 제1,2센서(520,530)는 기울기센서로서, 2개축을 구성하고,제3센서(540)는 지자계센서로서, 1개축을 구성한다.In this case, the first and second sensors 520 and 530 are inclination sensors and constitute two axes, and the third sensor 540 is an earth magnetic field sensor and constitute one axis.

그리하여, 제1,2센서(520,530)는 롤(Roll)과 피치(Pitch)를 검출하고, 제3센서(540)는 요(Yaw)를 검출한다.Thus, the first and second sensors 520 and 530 detect the roll and the pitch, and the third sensor 540 detects the yaw.

즉, 상기 센서유닛(500)이 포크(460)에 부착된 상태에서, 제로 세팅을 실시하여 제1,2,3센서(520,530,540)의 축을 각각 0°로 설정한 후 포크(460)를 사용하게 되면 포크(460)의 상태가 기울어지거나 처지거나 혹은 옆으로 휘어질 경우 값이 + 혹은 -로 각도가 표시되게 되는데, 이 값을 확인하여 이 값이 설정범위를 넘어설 경우 알람을 발하도록 하여 작업자가 쉽게 인지하고 후속 조치를 취할 수 있도록 구성할 수 있다.That is, in the state where the sensor unit 500 is attached to the fork 460, the zero setting is performed to set the axes of the first, second, and third sensors 520, 530, and 540 to 0 °, respectively, to use the fork 460. If the state of the fork 460 is tilted, sag or bent sideways, the angle is displayed as + or-. If this value is out of the setting range, an alarm is issued to the operator. Can be configured for easy recognition and follow-up.

아울러, 상기 전원공급부(550)는 상기 센서유닛(500)의 구동원이다.In addition, the power supply unit 550 is a driving source of the sensor unit 500.

또한, 상기 센서유닛(500)은 무선통신부(560)를 통해 광통신장치 또는 시리얼 무선랜(600)과 통신하고, 광통신장치 또는 시리얼 무선랜(600)은 AP(Access Point)(700)를 통해 모니터링PC(800)와 접속되어 센서유닛(500)에서 검출한 신호값을 표시하고, 관리 감독할 수 있도록 하여준다.In addition, the sensor unit 500 communicates with the optical communication device or the serial wireless LAN 600 through the wireless communication unit 560, the optical communication device or the serial wireless LAN 600 is monitored through the AP (Access Point) 700 It is connected to the PC 800 to display and manage the signal value detected by the sensor unit 500.

이때, 상기 AP(700)는 여러개 구비할 수 있는 바, 이 경우 다수개의 스토커를 하나의 모니터링PC(800)를 통해 동시 관리할 수 있는 잇점이 있다.At this time, the AP 700 may be provided with a plurality of bars, in this case, there is an advantage that can manage a plurality of stockers at the same time through one monitoring PC (800).

특히, 상기 무선통신부(500)와 시리얼 무선랜(600) 및 AP(700)는 인터넷 프로토콜인 TCP/IP 연결을 손쉽게 하여 주므로 통신장애없이 쉽고 편리하게 모니터링할 수 있도록 하여 준다.In particular, the wireless communication unit 500 and the serial wireless LAN 600 and the AP 700 facilitates TCP / IP connection, which is an Internet protocol, so that the wireless communication unit 500 can be easily and conveniently monitored without a communication obstacle.

즉, 상기 시리얼 무선랜(600)은 무선통신부(560)와 실시간 데이터 통신이 이루어지고, 상기 AP(700)는 여러개의 스토커와 데이터 통신을 수행하며, 상기 모니터링PC(800)는 실시간 측정 데이터를 디스플레이하면서 측정값이 설정값을 벗어났을 때 알람을 발생시키도록 구성된다.That is, the serial wireless LAN 600 is a real-time data communication with the wireless communication unit 560, the AP 700 performs data communication with a plurality of stockers, the monitoring PC 800 is a real-time measurement data It is configured to display an alarm when the measured value is outside the set value while displaying.

아울러, 상기 시리얼 무선랜(600)은 스토커의 고정프레임(120) 외측면에 설치 고정됨이 바람직하다.In addition, the serial wireless LAN 600 is preferably installed fixed to the outer surface of the fixed frame 120 of the stocker.

다시 말해, 본 발명은 상기 센서유닛(500)과 실시간 무선통신하여 상기 센서유닛(500)이 계측한 데이터를 수신하도록 상기 고정프레임(120)의 외측면에 설치된 광통신장치 또는 시리얼 무선랜(600)과; 상기 광통신장치 또는 시리얼 무선랜(600)과 TCP/IP 프로토콜로 1:1 또는 1:N으로 무선통신하는 AP(Access Point)(700)와; 상기 AP(700)와 무선통신하여 상기 센서유닛(500)이 검출한 데이터를 디스플레이하고, 설정값을 벗어났을 때 알람을 발생시키는 모니터링PC(800);를 포함하는 것이다.In other words, the present invention is an optical communication device or a serial wireless LAN (600) installed on the outer surface of the fixed frame 120 to receive the data measured by the sensor unit 500 in real time wireless communication with the sensor unit 500 and; An AP (Access Point) 700 for wirelessly communicating 1: 1 or 1: N with the optical communication device or the serial wireless LAN 600 through a TCP / IP protocol; And a monitoring PC 800 wirelessly communicating with the AP 700 to display the data detected by the sensor unit 500 and to generate an alarm when the sensor unit 500 deviates from a set value.

한편, 알람이 발생될 경우, 작업자는 스토커를 정지시킨 상태에서 센서유닛(500)에 의해 검출된 값을 참고하여 포크(460)의 롤(Roll), 피치(Pitch), 요(Yaw)를 정확하게 제로 세팅할 수 있으므로 스토커 사용상 안전성을 증대시키고, 사용수명을 향상시키며, 대형 설비사고를 미연에 방지할 수 있게 된다.
On the other hand, when an alarm occurs, the operator accurately checks the roll, pitch, and yaw of the fork 460 by referring to the value detected by the sensor unit 500 while the stalker is stopped. The zero setting increases the safety of the stocker, improves service life, and prevents large equipment accidents.

100: 가이드레일 200: 승하강플레이트
400: 포크유닛 500: 센서유닛
600: 시리얼 무선랜 700: AP(Access Point)
800: 모니터링PC100: guide rail 200: lifting plate
400: fork unit 500: sensor unit
600: serial wireless LAN 700: AP (Access Point)
800: monitoring PC

Claims (3)

가이드레일을 따라 움직이는 한 쌍의 레일블록, 레일블록 상부에 고정된 고정프레임, 고정프레임을 따라 승하강되는 승하강플레이트, 승하강플레이트의 중앙 상면에 설치되고 360°및 전후진 동작하는 포크를 구비한 포크유닛,을 포함하는 스토커에 있어서;
상기 포크의 하면에 고정되고, 포크의 롤(Roll), 피치(Pitch), 요(Yaw)를 검출하는 센서유닛과;
상기 센서유닛과 실시간 무선통신하여 상기 센서유닛이 계측한 데이터를 수신하도록 상기 고정프레임의 외측면에 설치된 광통신장치 또는 시리얼 무선랜과;
상기 광통신장치 또는 시리얼 무선랜과 TCP/IP 프로토콜로 1:1 또는 1:N으로 무선통신하는 AP(Access Point)와;
상기 광통신장치 또는 AP와 무선통신하여 상기 센서유닛이 검출한 데이터를 디스플레이하는 모니터링PC;를 포함하여 구성되는 것을 특징으로 하는 스토커의 포크 정렬 상태 검출장치
A pair of rail blocks moving along the guide rail, a fixed frame fixed to the upper rail block, a lifting plate which is lifted up and down along the fixed frame, and a fork installed at the center upper surface of the lifting plate and operating 360 ° and forward and backward In a stocker comprising a fork unit;
A sensor unit fixed to a lower surface of the fork and detecting a roll, pitch, and yaw of the fork;
An optical communication device or a serial wireless LAN installed on an outer surface of the fixed frame to receive data measured by the sensor unit in real time wireless communication with the sensor unit;
An access point (AP) for wirelessly communicating 1: 1 or 1: N with the optical communication device or a serial wireless LAN through a TCP / IP protocol;
And a monitoring PC for displaying data detected by the sensor unit in wireless communication with the optical communication device or AP.
청구항 1에 있어서;
상기 센서유닛은,
제어기능을 수행하는 컨트롤러, 상기 컨트롤러와 연결되고 상기 포크의 롤(Roll)과 피치(Pitch)를 검출하는 기울기센서인 제1,2센서, 상기 포크의 요(Yaw)를 검출하는 지자계센서인 제3센서, 상기 제1,2,3센서가 검출한 검출값을 시리얼 무선랜으로 무선통신하여 송신하는 무선통신부;를 포함하여 구성되는 것을 특징으로 하는 스토커의 포크 정렬 상태 검출장치.
The method of claim 1,
The sensor unit includes:
A controller that performs a control function, the first and second sensors connected to the controller to detect the roll and the pitch of the fork, and the geomagnetic field sensor to detect the yaw of the fork. And a wireless communication unit for transmitting a third sensor and the detected value detected by the first, second, and third sensors by wireless communication through a serial WLAN.
청구항 1에 있어서;
상기 센서유닛은,
상기 포크에 설치되기 전에, 진북을 가리키는 나침반이 설치된 수평의 정반위에서 롤(Roll), 피치(Pitch), 요(Yaw)의 값이 절대값으로 제로 세팅(각각 0°세팅)되고, 제로 세팅된 센서유닛을 기준으로 포크의 기울기가 0°(Zero Set)로 조정되는 것을 특징으로 하는 스토커의 포크 정렬 상태 검출장치.The method of claim 1,
The sensor unit includes:
Before being installed in the fork, the roll, pitch, and yaw values are set to zero in absolute values (0 ° setting each) and set to zero at a horizontal position with a compass pointing true north. Fork alignment state detection device of the stocker, characterized in that the inclination of the fork is adjusted to 0 ° (Zero Set) with respect to the sensor unit.
KR1020120111881A 2012-10-09 2012-10-09 Apparatus for detecting alignment of fork installed stocker KR101383449B1 (en)

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