KR101107957B1 - In-Ga-Zn계 산화물 스퍼터링 타겟 - Google Patents
In-Ga-Zn계 산화물 스퍼터링 타겟 Download PDFInfo
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Abstract
산화물 A: 인듐 원소(In), 갈륨 원소(Ga) 및 아연 원소(Zn)를 포함하고, X선 회절 측정(Cukα선)에 의해 입사각(2θ)이 7.0°~8.4°, 30.6°~32.0°, 33.8°~35.8°, 53.5°~56.5° 및 56.5°~59.5°인 각 위치에서 회절 피크가 관측되는 산화물.
Description
도 2는 참조예에서 제작한 산화물 소결체의 X선 회절 차트이다.
도 3은 실시예 1에서 제작한 산화물 소결체의 X선 회절 차트이다.
도 4는 실시예 2에서 제작한 산화물 소결체의 X선 회절 차트이다.
Claims (6)
- 하기에 나타내는 산화물 A와,
빅스바이트형의 결정 구조를 갖는 산화인듐(In2O3)을 함유하는 스퍼터링 타겟:
산화물 A: 인듐 원소(In), 갈륨 원소(Ga) 및 아연 원소(Zn)를 포함하고, X선 회절 측정(Cukα선)에 의해 입사각(2θ)이 7.0°~8.4°, 30.6°~32.0°, 33.8°~35.8°, 53.5°~56.5° 및 57.0°~59.5°인 각 위치에서 회절 피크가 관측되는 산화물. - 제 1 항에 있어서,
인듐 원소(In), 갈륨 원소(Ga) 및 아연 원소(Zn)의 원자비가 하기 식 (1) 및 (2)를 만족하는 스퍼터링 타겟.
0.10≤Zn/(In+Ga+Zn)≤0.45 (1)
0.05<Ga/(In+Ga+Zn)<0.18 (2) - 제 1 항 또는 제 2 항에 있어서,
인듐 원소(In) 및 갈륨 원소(Ga)의 원자비가 하기 식 (3)을 만족하는 스퍼터링 타겟.
0.14≤Ga/(In+Ga) (3) - 제 1 항 또는 제 2 항에 있어서,
함유되는 금속 원소가 In, Ga, Zn 및 불가피적 불순물인 스퍼터링 타겟. - 제 1 항 또는 제 2 항에 있어서,
저항이 10mΩcm 이하, 상대 밀도가 95% 이상인 스퍼터링 타겟. - 제 1 항 또는 제 2 항에 기재된 스퍼터링 타겟을 이용하여 제작된 산화물 박막.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2009264085A JP4843083B2 (ja) | 2009-11-19 | 2009-11-19 | In−Ga−Zn系酸化物スパッタリングターゲット |
JPJP-P-2009-264085 | 2009-11-19 | ||
PCT/JP2010/006758 WO2011061936A1 (ja) | 2009-11-19 | 2010-11-18 | In-Ga-Zn系酸化物スパッタリングターゲット |
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KR20110086878A KR20110086878A (ko) | 2011-08-01 |
KR101107957B1 true KR101107957B1 (ko) | 2012-03-02 |
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KR1020117015302A KR101107957B1 (ko) | 2009-11-19 | 2010-11-18 | In-Ga-Zn계 산화물 스퍼터링 타겟 |
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US (1) | US8641930B2 (ko) |
JP (1) | JP4843083B2 (ko) |
KR (1) | KR101107957B1 (ko) |
CN (1) | CN102362003B (ko) |
TW (1) | TWI403602B (ko) |
WO (1) | WO2011061936A1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20180118195A (ko) * | 2016-04-13 | 2018-10-30 | 가부시키가이샤 코베루코 카겐 | 산화물 소결체 및 스퍼터링 타깃, 그리고 그것들의 제조 방법 |
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KR20180118195A (ko) * | 2016-04-13 | 2018-10-30 | 가부시키가이샤 코베루코 카겐 | 산화물 소결체 및 스퍼터링 타깃, 그리고 그것들의 제조 방법 |
KR102099197B1 (ko) | 2016-04-13 | 2020-04-09 | 가부시키가이샤 코베루코 카겐 | 산화물 소결체 및 스퍼터링 타깃, 그리고 그것들의 제조 방법 |
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US8641930B2 (en) | 2014-02-04 |
WO2011061936A1 (ja) | 2011-05-26 |
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