KR101040137B1 - Thin film transistor with asymmetric staggered electrode structure and method for manufacturing the same - Google Patents
Thin film transistor with asymmetric staggered electrode structure and method for manufacturing the same Download PDFInfo
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- KR101040137B1 KR101040137B1 KR1020090121015A KR20090121015A KR101040137B1 KR 101040137 B1 KR101040137 B1 KR 101040137B1 KR 1020090121015 A KR1020090121015 A KR 1020090121015A KR 20090121015 A KR20090121015 A KR 20090121015A KR 101040137 B1 KR101040137 B1 KR 101040137B1
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- Prior art keywords
- thin film
- channel layer
- film transistor
- drain electrode
- electrode
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- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- JUGMVQZJYQVQJS-UHFFFAOYSA-N [B+3].[O-2].[Zn+2] Chemical compound [B+3].[O-2].[Zn+2] JUGMVQZJYQVQJS-UHFFFAOYSA-N 0.000 description 1
- AWYARIJCKIGEDR-UHFFFAOYSA-N [O].[Nb].[Zn].[Bi] Chemical compound [O].[Nb].[Zn].[Bi] AWYARIJCKIGEDR-UHFFFAOYSA-N 0.000 description 1
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- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
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- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
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- 150000003377 silicon compounds Chemical class 0.000 description 1
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- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- JRFBNCLFYLUNCE-UHFFFAOYSA-N zinc;oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[Ti+4].[Zn+2] JRFBNCLFYLUNCE-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
Abstract
The thin film transistor may include a channel layer including a first surface and a second surface; A source electrode positioned at least partially at one end of the channel layer in contact with the first surface; A drain electrode positioned at least partially at the other end of the channel layer in contact with the second surface; A gate insulating layer in contact with the drain electrode; And a gate electrode in contact with the gate insulating layer. The thin film transistor may have an asymmetric staggered electrode structure having a source electrode and a drain electrode interposed between the channel layer, thereby improving electron mobility through the channel and turning off characteristics of the thin film transistor.
Description
Embodiments relate to a thin film transistor having asymmetric electrode structures applied to a source electrode and a drain electrode, and a method of manufacturing the same.
A display device such as an organic light emitting diode (OLED) or a liquid crystal display (LCD) may include a thin film transistor (TFT) as a switching device. As described above, the thin film transistor is widely used as a switching device or a driving device in the electronic device field.
On the other hand, as the gate channel length of the thin film transistor is shortened, the depletion region generated in the drain electrode region and the source electrode region when the voltage is applied increases, thereby increasing the sub-threshold swing and turning off the threshold voltage. The deterioration of the turn-off characteristic due to the increase of off-current has emerged as a problem to be solved.
In addition, due to the dominant effect on the transistor performance according to the interfacial characteristics of the thin film, it appears as a factor of deterioration of reliability and driving characteristics.
In addition, since the performance of the display device using the thin film transistor varies according to the degree of switching performance of the thin film transistor, many studies have been made to improve the switching performance of the thin film transistor.
According to an aspect of the present invention, a thin film transistor having improved characteristics by applying an asymmetric staggered electrode structure, which has not been used in a conventional thin film transistor, to a source electrode and a drain electrode of the thin film transistor, and a method of manufacturing the same can be provided. have.
In one embodiment, a thin film transistor includes: a channel layer including a first surface and a second surface; A source electrode positioned at least partially at one end of the channel layer in contact with the first surface; A drain electrode positioned at least partially at the other end of the channel layer in contact with the second surface; A gate insulating layer in contact with the drain electrode; And a gate electrode in contact with the gate insulating layer.
According to one or more exemplary embodiments, a method of manufacturing a thin film transistor includes: forming a gate electrode; Forming a gate insulating film covering the gate electrode; Forming a drain electrode on the gate insulating film; Forming a channel layer on the gate insulating film and the drain electrode to partially cover the drain electrode; And forming a source electrode on the gate insulating layer and the channel layer to partially cover the channel layer.
In another embodiment, a method of manufacturing a thin film transistor includes forming a source electrode; Forming a channel layer to partially cover the source electrode; Forming a drain electrode to partially cover the channel layer; Forming a gate insulating film on the channel layer and the drain electrode to partially cover the drain electrode; And forming a gate electrode on the gate insulating layer.
In the above-described methods of manufacturing the thin film transistor, both ends of the channel layer may contact the source electrode and the drain electrode, respectively.
According to an aspect of the present invention, the source electrode and the drain electrode of the thin film transistor are formed in an asymmetric electrode structure with the channel layer interposed therebetween, thereby forming a channel between the surface of the channel and the channel and the gate insulating film when the channel is formed in the on-state. Not disturbed by the interfacial properties of the channel can be formed in a low resistance state.
In addition, the drain electrode may be disposed between the channel layer and the gate insulating layer to prevent the channel characteristic from being degraded due to the bulk effect, and the electron mobility through the channel may be improved.
In addition, a strong electric field is formed between the source electrode and the drain electrode under the influence of the interface and the surface of the channel, and the drain electrode from which the electrons escape from the channel can be formed on the same plane as the channel, thereby turning the thin film transistor. Turn-off characteristics can be improved.
According to the thin film transistor, it is possible to obtain a high efficiency compared to the prior art by using a device of the same area, and / or it is possible to manufacture a device having the same performance by miniaturization compared to the prior art.
Hereinafter, some embodiments of the present invention will be described in detail with reference to the accompanying drawings.
1A is a perspective view illustrating a thin film transistor according to an exemplary embodiment. FIG. 1A illustrates a thin film transistor of a bottom gate type in which the
Referring to FIG. 1A, the thin film transistor may include a
The
In another embodiment, the
The
The
FIG. 1B is a perspective view illustrating only the
1A and 1B, the
In one embodiment, the
The
The
In addition, the
The
For example, the
In the thin film transistor configured as described above, when a voltage is applied to the
In addition, a strong electric field may be formed between the
Therefore, in the thin film transistor according to the above-described embodiment, the
2A to 2E are perspective views illustrating each step of a method of manufacturing a thin film transistor, according to an exemplary embodiment.
Referring to FIG. 2A, a
Referring to FIG. 2B, a
Referring to FIG. 2C, a
Referring to FIG. 2D, the
Referring to FIG. 2E, the
In this case, the
In an exemplary embodiment, the
In the method of manufacturing the thin film transistor described above, at least one of the
In the method of manufacturing the thin film transistor described above, the constituent materials constituting the
3A is a perspective view illustrating a thin film transistor according to another exemplary embodiment. 3A illustrates a top gate thin film transistor in which a
Referring to FIG. 3A, the thin film transistor may include a
The
3B is a perspective view illustrating only the
The
In an embodiment, the
The
The
In the embodiment shown in FIGS. 3A and 3B, the constituent materials constituting each of the
The thin film transistor according to the exemplary embodiment described above represents a thin film transistor in which the asymmetric electrode structures of the
4A to 4E are perspective views illustrating respective steps of a method of manufacturing a thin film transistor according to another embodiment.
Referring to FIG. 4A, a
Referring to FIG. 4B, the
Referring to FIG. 4C, the
Referring to FIG. 4D, the
Referring to FIG. 4E, the
In the above-described method of manufacturing a thin film transistor, at least one of the
In the method of manufacturing the thin film transistor described above, the material constituting each of the
The embodiments described above have been described by the thin film transistor according to any one of the upper gate method and the lower gate method, but this is merely an example, and the thin film transistor and the method of manufacturing the same according to the embodiments are specific types and / or It is not limited in a way. In addition, the shape of the components of the thin film transistor and / or the relative sizes therebetween shown in the accompanying drawings of the present specification are shown by way of example only for understanding of the present invention, the configuration of the thin film transistor according to the embodiments The shape of the elements and / or the relative sizes between them may be different from that shown in the figures.
5 is a graph illustrating a current according to a gate voltage in a thin film transistor according to an exemplary embodiment in comparison with a thin film transistor according to the related art.
In FIG. 5, the
As can be seen from FIG. 5, the thin film transistor according to the embodiment has excellent current-voltage characteristics compared to the thin film transistors according to the prior art. For example, when the gate voltage is negative in the
6 is a graph illustrating output curves according to drain voltages in a channel layer of a thin film transistor according to an exemplary embodiment.
Each of the
Although the present invention described above has been described with reference to the embodiments illustrated in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and variations may be made therefrom. However, such modifications should be considered to be within the technical protection scope of the present invention. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.
1A is a perspective view of a thin film transistor according to an exemplary embodiment.
FIG. 1B is a perspective view of a channel layer in the thin film transistor of FIG. 1A.
2A to 2E are perspective views illustrating each step of a method of manufacturing a thin film transistor, according to an exemplary embodiment.
3A is a perspective view of a thin film transistor according to another embodiment.
3B is a perspective view of a channel layer in the thin film transistor of FIG. 3A.
4A to 4E are perspective views illustrating respective steps of a method of manufacturing a thin film transistor according to another embodiment.
5 is a graph illustrating a current according to a gate voltage in a thin film transistor according to an exemplary embodiment in comparison with a thin film transistor according to the related art.
6 is a graph illustrating output characteristics according to drain voltages in a channel layer of a thin film transistor according to an exemplary embodiment.
Claims (4)
Priority Applications (1)
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KR1020090121015A KR101040137B1 (en) | 2009-12-08 | 2009-12-08 | Thin film transistor with asymmetric staggered electrode structure and method for manufacturing the same |
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KR1020090121015A KR101040137B1 (en) | 2009-12-08 | 2009-12-08 | Thin film transistor with asymmetric staggered electrode structure and method for manufacturing the same |
Publications (1)
Publication Number | Publication Date |
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KR101040137B1 true KR101040137B1 (en) | 2011-06-10 |
Family
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KR1020090121015A KR101040137B1 (en) | 2009-12-08 | 2009-12-08 | Thin film transistor with asymmetric staggered electrode structure and method for manufacturing the same |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011085114A1 (en) * | 2011-10-24 | 2013-04-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thin film transistor |
EP2731127A4 (en) * | 2012-06-04 | 2015-03-18 | Beijing Boe Optoelectronics | Tft array substrate, method of fabricating same, and display device |
KR20220129160A (en) * | 2021-03-16 | 2022-09-23 | 한국과학기술원 | Transistor with asymmetric source/drain structure and the manufacturing method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11233783A (en) | 1998-02-17 | 1999-08-27 | Sharp Corp | Thin film transistor and its manufacturing method |
JP2006261498A (en) * | 2005-03-18 | 2006-09-28 | Ricoh Co Ltd | Organic thin film transistor, image display comprising it, and process for fabricating organic thin film transistor |
KR20080072981A (en) * | 2007-02-05 | 2008-08-08 | 연세대학교 산학협력단 | Fabrication method of thin film transistor using 1 dimensional nano-wire channel |
-
2009
- 2009-12-08 KR KR1020090121015A patent/KR101040137B1/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11233783A (en) | 1998-02-17 | 1999-08-27 | Sharp Corp | Thin film transistor and its manufacturing method |
JP2006261498A (en) * | 2005-03-18 | 2006-09-28 | Ricoh Co Ltd | Organic thin film transistor, image display comprising it, and process for fabricating organic thin film transistor |
KR20080072981A (en) * | 2007-02-05 | 2008-08-08 | 연세대학교 산학협력단 | Fabrication method of thin film transistor using 1 dimensional nano-wire channel |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011085114A1 (en) * | 2011-10-24 | 2013-04-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thin film transistor |
DE102011085114B4 (en) * | 2011-10-24 | 2016-02-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thin film transistor |
EP2731127A4 (en) * | 2012-06-04 | 2015-03-18 | Beijing Boe Optoelectronics | Tft array substrate, method of fabricating same, and display device |
US9053988B2 (en) | 2012-06-04 | 2015-06-09 | Beijing Boe Optoelectronics Technology Co., Ltd. | TFT array substrate, manufacturing method of the same and display device |
US9305945B2 (en) | 2012-06-04 | 2016-04-05 | Boe Technology Group Co., Ltd. | TFT array substrate, manufacturing method of the same and display device |
KR20220129160A (en) * | 2021-03-16 | 2022-09-23 | 한국과학기술원 | Transistor with asymmetric source/drain structure and the manufacturing method thereof |
KR102547478B1 (en) * | 2021-03-16 | 2023-06-27 | 한국과학기술원 | Transistor with asymmetric source/drain structure and the manufacturing method thereof |
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