KR100864147B1 - 포지티브형 레지스트 재료 및 패턴 형성 방법 - Google Patents
포지티브형 레지스트 재료 및 패턴 형성 방법 Download PDFInfo
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- KR100864147B1 KR100864147B1 KR1020050029411A KR20050029411A KR100864147B1 KR 100864147 B1 KR100864147 B1 KR 100864147B1 KR 1020050029411 A KR1020050029411 A KR 1020050029411A KR 20050029411 A KR20050029411 A KR 20050029411A KR 100864147 B1 KR100864147 B1 KR 100864147B1
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
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- G—PHYSICS
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- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
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Abstract
Description
Claims (10)
- 제1항 또는 제2항에 있어서, 산 불안정기가 하기 화학식 (AL10) 및 (AL11)로 표시되는 기, 하기 화학식 (AL12)로 표시되는 탄소수 4 내지 40의 3급 알킬기 또는 탄소수 4 내지 20의 옥소알킬기로부터 선택되는 기, 또는 하기 화학식 (AL11a), (AL11b), (AL12)-19 및 (AL12)-20으로부터 선택되는 기로서 이 기를 갖는 단위를 분자간 또는 분자내 가교하는 기인 포지티브형 레지스트 재료:상기 식 중,R001 및 R004는 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상 알킬기로서, 산소, 황, 질소, 불소로부터 선택되는 헤테로원자를 포함할 수도 있고,a는 0 내지 10의 정수이고,R002 및 R003은 수소 원자, 또는 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상 알킬기로서, 산소, 황, 질소, 불소로부터 선택되는 헤테로원자를 포함할 수도 있고,R002와 R003, R002와 R004, R003과 R004는 각각 결합하여 이들이 결합하는 탄소 원자와 함께 탄소수 3 내지 10의 환을 형성할 수 있으며,R005, R006 및 R007은 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상 알킬기이거나, 또는 R005와 R006, R005와 R007, R006과 R007은 각각 결합하여 이들이 결합하는 탄소 원자와 함께 탄소수 3 내지 16의 환을 형성할 수도 있고,R011 및 R012는 수소 원자, 또는 탄소수 1 내지 8의 직쇄상, 분지상 또는 환상 알킬기를 나타내거나, 또는 R011과 R012는 결합하여 환을 형성할 수도 있고, 환을 형성하는 경우에는 R011 및 R012는 탄소수 1 내지 8의 직쇄상 또는 분지상의 알킬렌기를 나타내며,R013은 탄소수 1 내지 10의 직쇄상, 분지상 또는 환상 알킬렌기이고,b 및 d는 0 또는 1 내지 10의 정수이며,c는 1 내지 7의 정수이고,A는 (c+1)가의 탄소수 1 내지 50의 지방족 또는 지환식 포화 탄화수소기, 방향족 탄화수소기 또는 헤테로환기를 나타내며, 이들 기는 산소, 황, 질소로부터 선택되는 헤테로원자가 개재되어 있을 수도 있거나, 또는 그의 탄소 원자에 결합된 수소 원자의 일부가 수산기, 카르복실기, 카르보닐기 또는 불소 원자에 의해 치환될 수도 있고,B는 -CO-O-, -NHCO-O- 또는 -NHCONH-를 나타내고,R014는 동일하거나 또는 상이하며, 탄소수 1 내지 8의 직쇄상, 분지상 또는 환상 알킬기, 또는 탄소수 6 내지 20의 아릴기 또는 아랄킬기를 나타내고, 산소, 질소, 황으로부터 선택되는 헤테로원자를 가질 수도 있으며,R018은 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상 알킬렌기 또는 아릴렌기를 나타내고, 산소 원자나 황 원자, 질소 원자로부터 선택되는 헤테로원자를 포함하고 있을 수 있으며,c는 1 내지 3의 정수이다.
- (A) 유기 용매,(B) 기재 수지로서 제1항에 기재된 고분자 화합물, 및(C) 산 발생제를 함유하여 이루어지는 것을 특징으로 하는 화학 증폭 포지티브형 레지스트 재료.
- (A) 유기 용매,(B) 기재 수지로서 제1항에 기재된 고분자 화합물,(C) 산 발생제, 및(D) 용해 저지제를 함유하여 이루어지는 것을 특징으로 하는 화학 증폭 포지티브형 레지스트 재료.
- 제6항 또는 제7항에 있어서, 추가로 (E) 염기성 화합물을 배합하는 것을 특징으로 하는 화학 증폭 포지티브형 레지스트 재료.
- 제6항 또는 제7항에 기재된 레지스트 재료를 기판 상에 도포하는 공정, 가열 처리 후 포토마스크를 통해 고에너지선 또는 전자선으로 노광하는 공정, 및 필요에 따라 가열 처리한 후 현상액을 이용하여 현상하는 공정을 포함하는 것을 특징으로 하는 패턴 형성 방법.
- 제9항에 있어서, 노광하는 고에너지선이 파장 180 내지 200 nm의 범위인 것을 특징으로 하는 패턴 형성 방법.
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TWI368825B (en) | 2004-07-07 | 2012-07-21 | Fujifilm Corp | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same |
JP4796792B2 (ja) * | 2005-06-28 | 2011-10-19 | 富士フイルム株式会社 | ポジ型感光性組成物及びそれを用いたパターン形成方法 |
JP4717640B2 (ja) | 2005-12-12 | 2011-07-06 | 東京応化工業株式会社 | 液浸露光用レジスト組成物およびレジストパターン形成方法 |
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KR101116963B1 (ko) * | 2006-10-04 | 2012-03-14 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고분자 화합물, 레지스트 재료, 및 패턴 형성 방법 |
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JP4826840B2 (ja) * | 2009-01-15 | 2011-11-30 | 信越化学工業株式会社 | パターン形成方法 |
JP5874331B2 (ja) * | 2011-10-17 | 2016-03-02 | 住友化学株式会社 | 化学増幅型フォトレジスト組成物 |
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US6448420B1 (en) | 1999-05-19 | 2002-09-10 | Shin-Etsu Chemical Co., Ltd. | Acid-decomposable ester compound suitable for use in resist material |
KR20040002506A (ko) * | 2002-04-26 | 2004-01-07 | 후지 샤신 필름 가부시기가이샤 | 포지티브 레지스트 조성물 |
KR20040012459A (ko) * | 2002-05-31 | 2004-02-11 | 후지 샤신 필름 가부시기가이샤 | 포지티브 레지스트 조성물 |
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TW200615695A (en) | 2006-05-16 |
US20050227173A1 (en) | 2005-10-13 |
KR20060046646A (ko) | 2006-05-17 |
US7255973B2 (en) | 2007-08-14 |
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