KR100726915B1 - 고내마모성 고경도 피막 - Google Patents
고내마모성 고경도 피막 Download PDFInfo
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- KR100726915B1 KR100726915B1 KR1020040055355A KR20040055355A KR100726915B1 KR 100726915 B1 KR100726915 B1 KR 100726915B1 KR 1020040055355 A KR1020040055355 A KR 1020040055355A KR 20040055355 A KR20040055355 A KR 20040055355A KR 100726915 B1 KR100726915 B1 KR 100726915B1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/04—Processes
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
N2 가스 압력 (Pa) | 기판 온도(K) | 바이어스 전압(V) |
2.7 | 673 | -40 |
Claims (10)
- 피처리물의 외측 표면에 형성되는 금속 질화물로 이루어지는 코팅층과, 상기 코팅층과 상기 피처리물 사이에 Cr의 질화물로 이루어지는 기초층과, 상기 코팅층과 상기 기초층의 경계면에 설치되는 중간층이며 상기 중간층에 접하는 상기 코팅층과 상기 기초층의 조성 성분을 포함하는 중간층을 구비하고,상기 코팅층이 Al, Cr 및 Si를 포함하는 금속 질화물인 것을 특징으로 하는 고내마모성 고경도 피막.
- 제1항에 있어서, 상기 중간층이 0.1 내지 2 ㎛의 막 두께를 갖는 것을 특징으로 하는 고내마모성 고경도 피막.
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003201436A JP3621943B2 (ja) | 2003-07-25 | 2003-07-25 | 高耐摩耗性高硬度皮膜 |
JPJP-P-2003-00201436 | 2003-07-25 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070029274A Division KR100792958B1 (ko) | 2003-07-25 | 2007-03-26 | 고내마모성 고경도 피막, 이를 이용하는 공구 및 가공 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050013079A KR20050013079A (ko) | 2005-02-02 |
KR100726915B1 true KR100726915B1 (ko) | 2007-06-11 |
Family
ID=33487656
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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KR1020040055355A KR100726915B1 (ko) | 2003-07-25 | 2004-07-16 | 고내마모성 고경도 피막 |
KR1020070029274A KR100792958B1 (ko) | 2003-07-25 | 2007-03-26 | 고내마모성 고경도 피막, 이를 이용하는 공구 및 가공 방법 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020070029274A KR100792958B1 (ko) | 2003-07-25 | 2007-03-26 | 고내마모성 고경도 피막, 이를 이용하는 공구 및 가공 방법 |
Country Status (11)
Country | Link |
---|---|
US (2) | US7226659B2 (ko) |
EP (1) | EP1500717B1 (ko) |
JP (1) | JP3621943B2 (ko) |
KR (2) | KR100726915B1 (ko) |
CN (1) | CN100339502C (ko) |
BR (1) | BRPI0402752B1 (ko) |
CA (1) | CA2473958C (ko) |
DE (1) | DE602004026664D1 (ko) |
MX (1) | MXPA04007119A (ko) |
PL (1) | PL1500717T3 (ko) |
TW (1) | TWI258513B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100843525B1 (ko) * | 2005-11-11 | 2008-07-03 | 미츠비시 쥬고교 가부시키가이샤 | 표면 피복 부재 및 그 제조 방법 그리고 공구 및 공작 장치 |
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JP4138630B2 (ja) * | 2003-11-07 | 2008-08-27 | 三菱重工業株式会社 | 耐摩耗性硬質皮膜 |
EP1842610B1 (en) * | 2004-12-28 | 2017-05-03 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool and process for producing the same |
WO2006084404A1 (en) * | 2005-02-10 | 2006-08-17 | Oerlikon Trading Ag, Trübbach | High wear resistant triplex coating for cutting tools |
DE112006003471B4 (de) * | 2006-01-18 | 2017-02-09 | Mitsubishi Heavy Industries, Ltd. | Feststoffteilchenerosionsbeständige Beschichtung und damit behandelte rotierende Maschine |
EP1918421B1 (en) * | 2006-09-27 | 2017-03-15 | Hitachi Metals, Ltd. | Hard-material-coated member excellent in durability |
JP4668214B2 (ja) | 2007-01-17 | 2011-04-13 | 株式会社神戸製鋼所 | 成形用金型 |
DE102007000512B3 (de) * | 2007-10-16 | 2009-01-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung |
JP5129009B2 (ja) * | 2008-04-21 | 2013-01-23 | 株式会社神戸製鋼所 | 金型用被膜 |
US8092922B2 (en) * | 2008-06-30 | 2012-01-10 | GM Global Technology Operations LLC | Layered coating and method for forming the same |
JP5027760B2 (ja) * | 2008-08-20 | 2012-09-19 | 株式会社神戸製鋼所 | 硬質皮膜形成部材 |
CN102161106B (zh) * | 2011-04-01 | 2013-02-20 | 山推工程机械股份有限公司 | Ti-TiN&Ti-MoS2/Ti双刀面涂层刀具的制备工艺 |
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RU2461651C1 (ru) * | 2011-05-17 | 2012-09-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
RU2461656C1 (ru) * | 2011-05-20 | 2012-09-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
CN103826773B (zh) | 2011-09-28 | 2016-04-27 | 日立金属株式会社 | 滑动特性优异的被覆构件 |
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JP6515387B2 (ja) * | 2015-09-15 | 2019-05-22 | 日本製鉄株式会社 | 超硬工具及びその製造方法 |
CN105734565A (zh) * | 2016-03-01 | 2016-07-06 | 江苏贝德莱特太阳能科技有限公司 | 一种高温度辐射选择性涂层 |
CN105971617B (zh) * | 2016-05-12 | 2018-08-31 | 西安热工研究院有限公司 | 一种隧道掘进机刀具刀圈的多层薄膜及其制备方法 |
CN107747092B (zh) * | 2017-10-10 | 2019-08-23 | 岭南师范学院 | 一种耐高温硬质复合涂层及其制备方法和涂层刀具 |
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2003
- 2003-07-25 JP JP2003201436A patent/JP3621943B2/ja not_active Expired - Lifetime
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2004
- 2004-06-14 TW TW93117065A patent/TWI258513B/zh not_active IP Right Cessation
- 2004-06-15 US US10/866,869 patent/US7226659B2/en active Active
- 2004-06-18 DE DE200460026664 patent/DE602004026664D1/de not_active Expired - Lifetime
- 2004-06-18 PL PL04014395T patent/PL1500717T3/pl unknown
- 2004-06-18 EP EP20040014395 patent/EP1500717B1/en not_active Expired - Fee Related
- 2004-07-09 BR BRPI0402752 patent/BRPI0402752B1/pt not_active IP Right Cessation
- 2004-07-13 CA CA 2473958 patent/CA2473958C/en not_active Expired - Fee Related
- 2004-07-15 CN CNB2004100716357A patent/CN100339502C/zh not_active Expired - Lifetime
- 2004-07-16 KR KR1020040055355A patent/KR100726915B1/ko active IP Right Grant
- 2004-07-23 MX MXPA04007119A patent/MXPA04007119A/es active IP Right Grant
-
2007
- 2007-03-26 KR KR1020070029274A patent/KR100792958B1/ko active IP Right Grant
- 2007-05-07 US US11/745,292 patent/US7449253B2/en not_active Expired - Lifetime
Patent Citations (2)
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JPH04246164A (ja) * | 1991-01-30 | 1992-09-02 | Mitsubishi Heavy Ind Ltd | 立方晶窒化ホウ素皮膜の形成方法 |
JP2003025113A (ja) * | 2001-07-13 | 2003-01-29 | Hitachi Tool Engineering Ltd | 被覆切削工具 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100843525B1 (ko) * | 2005-11-11 | 2008-07-03 | 미츠비시 쥬고교 가부시키가이샤 | 표면 피복 부재 및 그 제조 방법 그리고 공구 및 공작 장치 |
Also Published As
Publication number | Publication date |
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DE602004026664D1 (de) | 2010-06-02 |
MXPA04007119A (es) | 2005-06-08 |
US7226659B2 (en) | 2007-06-05 |
JP2005042146A (ja) | 2005-02-17 |
PL1500717T3 (pl) | 2010-08-31 |
US7449253B2 (en) | 2008-11-11 |
KR20050013079A (ko) | 2005-02-02 |
CA2473958C (en) | 2009-10-13 |
US20070292712A1 (en) | 2007-12-20 |
KR100792958B1 (ko) | 2008-01-08 |
CA2473958A1 (en) | 2005-01-25 |
KR20070039905A (ko) | 2007-04-13 |
US20050019613A1 (en) | 2005-01-27 |
EP1500717A1 (en) | 2005-01-26 |
TWI258513B (en) | 2006-07-21 |
CN1576387A (zh) | 2005-02-09 |
EP1500717B1 (en) | 2010-04-21 |
TW200508406A (en) | 2005-03-01 |
CN100339502C (zh) | 2007-09-26 |
BRPI0402752A (pt) | 2005-05-24 |
BRPI0402752B1 (pt) | 2013-12-31 |
JP3621943B2 (ja) | 2005-02-23 |
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