KR100612932B1 - 3차원 형상 측정장치 및 방법 - Google Patents

3차원 형상 측정장치 및 방법 Download PDF

Info

Publication number
KR100612932B1
KR100612932B1 KR1020050123409A KR20050123409A KR100612932B1 KR 100612932 B1 KR100612932 B1 KR 100612932B1 KR 1020050123409 A KR1020050123409 A KR 1020050123409A KR 20050123409 A KR20050123409 A KR 20050123409A KR 100612932 B1 KR100612932 B1 KR 100612932B1
Authority
KR
South Korea
Prior art keywords
illumination
filter
control unit
imaging
unit
Prior art date
Application number
KR1020050123409A
Other languages
English (en)
Korean (ko)
Inventor
고광일
성은형
전문영
김민영
이승준
Original Assignee
주식회사 고영테크놀러지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 고영테크놀러지 filed Critical 주식회사 고영테크놀러지
Priority to KR1020050123409A priority Critical patent/KR100612932B1/ko
Application granted granted Critical
Publication of KR100612932B1 publication Critical patent/KR100612932B1/ko
Priority to US11/637,040 priority patent/US7830528B2/en
Priority to JP2006336691A priority patent/JP2007163498A/ja
Priority to CN2008101776052A priority patent/CN101514893B/zh
Priority to DE102006059132A priority patent/DE102006059132B4/de
Priority to CNB2006101678120A priority patent/CN100520286C/zh
Priority to JP2010007230A priority patent/JP2010078619A/ja
Priority to US12/878,866 priority patent/US8319977B2/en
Priority to JP2013178888A priority patent/JP5932734B2/ja

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object
    • G01B11/2527Projection by scanning of the object with phase change by in-plane movement of the patern
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • G06T7/55Depth or shape recovery from multiple images
    • G06T7/586Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020050123409A 2005-12-14 2005-12-14 3차원 형상 측정장치 및 방법 KR100612932B1 (ko)

Priority Applications (9)

Application Number Priority Date Filing Date Title
KR1020050123409A KR100612932B1 (ko) 2005-12-14 2005-12-14 3차원 형상 측정장치 및 방법
US11/637,040 US7830528B2 (en) 2005-12-14 2006-12-12 3D image measuring apparatus and method thereof
JP2006336691A JP2007163498A (ja) 2005-12-14 2006-12-14 3次元形状測定装置及び方法
CN2008101776052A CN101514893B (zh) 2005-12-14 2006-12-14 三维形状测量装置及方法
DE102006059132A DE102006059132B4 (de) 2005-12-14 2006-12-14 Dreidimensionales Bildmessverfahren
CNB2006101678120A CN100520286C (zh) 2005-12-14 2006-12-14 三维形状测量装置及方法
JP2010007230A JP2010078619A (ja) 2005-12-14 2010-01-15 3次元形状測定装置及び方法
US12/878,866 US8319977B2 (en) 2005-12-14 2010-09-09 3D image measuring apparatus and method thereof
JP2013178888A JP5932734B2 (ja) 2005-12-14 2013-08-30 3次元形状測定装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050123409A KR100612932B1 (ko) 2005-12-14 2005-12-14 3차원 형상 측정장치 및 방법

Publications (1)

Publication Number Publication Date
KR100612932B1 true KR100612932B1 (ko) 2006-08-14

Family

ID=37594381

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050123409A KR100612932B1 (ko) 2005-12-14 2005-12-14 3차원 형상 측정장치 및 방법

Country Status (2)

Country Link
KR (1) KR100612932B1 (zh)
CN (2) CN100520286C (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903346B1 (ko) 2006-12-28 2009-06-22 (주) 인텍플러스 광학식 입체 형상 검사 방법
KR100943405B1 (ko) * 2007-07-23 2010-02-19 주식회사 나노시스템 래터럴 스캔을 이용한 3차원 형상 측정 시스템
KR100943407B1 (ko) * 2007-07-23 2010-02-19 주식회사 나노시스템 전사 방식의 3차원 형상 측정 시스템
KR101158892B1 (ko) 2009-05-15 2012-06-25 선문대학교 산학협력단 칼라필터를 적용한 임의형상 측정방법
KR20180043891A (ko) * 2016-10-20 2018-05-02 한국원자력연구원 표면 프로파일의 평탄도 측정장치

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010064593A1 (de) * 2009-05-21 2015-07-30 Koh Young Technology Inc. Formmessgerät und -verfahren
DE202010018585U1 (de) * 2009-05-27 2017-11-28 Koh Young Technology Inc. Vorrichtung zur Messung einer dreidimensionalen Form
KR101078781B1 (ko) * 2010-02-01 2011-11-01 주식회사 고영테크놀러지 3차원 형상 검사방법
CN103575234B (zh) * 2012-07-20 2016-08-24 德律科技股份有限公司 三维影像测量装置
KR101622628B1 (ko) * 2014-12-16 2016-05-20 주식회사 고영테크놀러지 부품이 실장된 기판 검사방법 및 검사장치
JP2017083234A (ja) * 2015-10-26 2017-05-18 オムロン株式会社 三次元形状計測装置、三次元形状計測システム、プログラム、コンピュータ読み取り可能な記録媒体、および三次元形状計測方法
CN106123807B (zh) * 2016-06-30 2018-09-07 苏州图锐智能科技有限公司 一种产品3d检测***及相应检测方法
TWI595445B (zh) * 2016-08-31 2017-08-11 致茂電子股份有限公司 抗雜訊之立體掃描系統
JP7212240B2 (ja) * 2018-06-11 2023-01-25 オムロン株式会社 計測システムおよび計測方法
JP7135495B2 (ja) * 2018-06-26 2022-09-13 セイコーエプソン株式会社 三次元計測装置、制御装置およびロボットシステム
WO2020263056A1 (ko) * 2019-06-28 2020-12-30 주식회사 고영테크놀러지 대상체의 3차원 형상을 결정하기 위한 장치 및 방법
CN115362469A (zh) * 2020-02-10 2022-11-18 康耐视公司 复合三维blob工具及其操作方法
CN115421349A (zh) * 2022-11-02 2022-12-02 四川川大智胜软件股份有限公司 非数字光机结构光投射模组、采集装置及三维测量***

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048523A (ja) 2000-08-02 2002-02-15 Ckd Corp 三次元計測装置
KR20020039583A (ko) * 2000-11-22 2002-05-27 임쌍근 모아레무늬 발생기를 적용한 위상천이 영사식 모아레방법및 장치
JP2002162215A (ja) 2000-11-27 2002-06-07 Matsushita Electric Works Ltd 3次元形状計測方法およびそのシステム
KR20040071593A (ko) * 2003-02-06 2004-08-12 주식회사 고영테크놀러지 3차원형상 측정장치
KR20040071532A (ko) * 2003-02-06 2004-08-12 주식회사 고영테크놀러지 3차원형상 측정장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4007500A1 (de) * 1990-03-09 1991-09-12 Zeiss Carl Fa Verfahren und vorrichtung zur beruehrungslosen vermessung von objektoberflaechen
DE4027328B4 (de) * 1990-08-29 2004-07-22 Sirona Dental Systems Gmbh 3D-Kamera zur Erfassung von Oberflächenstrukturen, insbesondere für zahnmedizinische Zwecke
DE19919584A1 (de) * 1999-04-29 2000-11-02 Klaus Koerner Verfahren und Anordnung zur 3D-Aufnahme
JP4077754B2 (ja) * 2003-04-04 2008-04-23 オリンパス株式会社 3次元形状測定装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048523A (ja) 2000-08-02 2002-02-15 Ckd Corp 三次元計測装置
KR20020039583A (ko) * 2000-11-22 2002-05-27 임쌍근 모아레무늬 발생기를 적용한 위상천이 영사식 모아레방법및 장치
JP2002162215A (ja) 2000-11-27 2002-06-07 Matsushita Electric Works Ltd 3次元形状計測方法およびそのシステム
KR20040071593A (ko) * 2003-02-06 2004-08-12 주식회사 고영테크놀러지 3차원형상 측정장치
KR20040071532A (ko) * 2003-02-06 2004-08-12 주식회사 고영테크놀러지 3차원형상 측정장치

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903346B1 (ko) 2006-12-28 2009-06-22 (주) 인텍플러스 광학식 입체 형상 검사 방법
KR100943405B1 (ko) * 2007-07-23 2010-02-19 주식회사 나노시스템 래터럴 스캔을 이용한 3차원 형상 측정 시스템
KR100943407B1 (ko) * 2007-07-23 2010-02-19 주식회사 나노시스템 전사 방식의 3차원 형상 측정 시스템
KR101158892B1 (ko) 2009-05-15 2012-06-25 선문대학교 산학협력단 칼라필터를 적용한 임의형상 측정방법
KR20180043891A (ko) * 2016-10-20 2018-05-02 한국원자력연구원 표면 프로파일의 평탄도 측정장치
KR101890330B1 (ko) 2016-10-20 2018-08-23 한국원자력연구원 표면 프로파일의 평탄도 측정장치

Also Published As

Publication number Publication date
CN101514893A (zh) 2009-08-26
CN1982841A (zh) 2007-06-20
CN100520286C (zh) 2009-07-29
CN101514893B (zh) 2012-08-08

Similar Documents

Publication Publication Date Title
KR100612932B1 (ko) 3차원 형상 측정장치 및 방법
JP5932734B2 (ja) 3次元形状測定装置及び方法
KR100612933B1 (ko) 3차원 형상 측정장치 및 방법
US10206558B2 (en) Method and camera for the three-dimensional measurement of a dental object
KR100413103B1 (ko) 본딩장치 및 본딩방법
JP3878165B2 (ja) 三次元計測装置
JP6275622B2 (ja) 走行面上の複数の製品の位置と三次元的な形状を非接触で検出する方法およびスキャナ
KR20130045351A (ko) 웨이퍼 톱니 자국의 3차원 조사 장치 및 방법
US20070024846A1 (en) Device for Dark Field Illumination and Method for Optically Scanning of Object
JP2008128811A (ja) 欠陥検査装置
JP6908373B2 (ja) 検査対象物の表面の凹凸を検査する方法及びその表面検査装置
CN110402386A (zh) 圆筒体表面检查装置及圆筒体表面检查方法
US9115984B2 (en) Method of generating height information in circuit board inspection apparatus
KR100950590B1 (ko) 집광 조명을 이용한 스캐닝 모아레 측정방법
KR20210050565A (ko) 광학 검사 시스템들에 대한 멀티모달리티 멀티플렉싱 조명
JP2002131238A (ja) 外観検査装置
KR20080088946A (ko) 입체 형상 검사 장치 및 그를 이용한 입체 형상 검사 방법
JP4162319B2 (ja) 欠陥検査装置
KR102610300B1 (ko) 결점 검출장치
JP4875354B2 (ja) オートフォーカス装置及びオートフォーカス方法
KR100844830B1 (ko) Lcd패널 검사장치 및 방법
KR20080089314A (ko) 입체 형상 검사 장치 및 그를 이용한 입체 형상 검사 방법
JP6659149B2 (ja) 検出装置、検出方法、リソグラフィ装置および物品の製造方法
JP2009074876A (ja) 計測装置およびその計測方法
KR101490359B1 (ko) 표면 형상 측정 장치

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130722

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20140625

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20150805

Year of fee payment: 10

FPAY Annual fee payment

Payment date: 20160608

Year of fee payment: 11

FPAY Annual fee payment

Payment date: 20170621

Year of fee payment: 12