KR100612932B1 - 3차원 형상 측정장치 및 방법 - Google Patents
3차원 형상 측정장치 및 방법 Download PDFInfo
- Publication number
- KR100612932B1 KR100612932B1 KR1020050123409A KR20050123409A KR100612932B1 KR 100612932 B1 KR100612932 B1 KR 100612932B1 KR 1020050123409 A KR1020050123409 A KR 1020050123409A KR 20050123409 A KR20050123409 A KR 20050123409A KR 100612932 B1 KR100612932 B1 KR 100612932B1
- Authority
- KR
- South Korea
- Prior art keywords
- illumination
- filter
- control unit
- imaging
- unit
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/50—Depth or shape recovery
- G06T7/55—Depth or shape recovery from multiple images
- G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050123409A KR100612932B1 (ko) | 2005-12-14 | 2005-12-14 | 3차원 형상 측정장치 및 방법 |
US11/637,040 US7830528B2 (en) | 2005-12-14 | 2006-12-12 | 3D image measuring apparatus and method thereof |
JP2006336691A JP2007163498A (ja) | 2005-12-14 | 2006-12-14 | 3次元形状測定装置及び方法 |
CN2008101776052A CN101514893B (zh) | 2005-12-14 | 2006-12-14 | 三维形状测量装置及方法 |
DE102006059132A DE102006059132B4 (de) | 2005-12-14 | 2006-12-14 | Dreidimensionales Bildmessverfahren |
CNB2006101678120A CN100520286C (zh) | 2005-12-14 | 2006-12-14 | 三维形状测量装置及方法 |
JP2010007230A JP2010078619A (ja) | 2005-12-14 | 2010-01-15 | 3次元形状測定装置及び方法 |
US12/878,866 US8319977B2 (en) | 2005-12-14 | 2010-09-09 | 3D image measuring apparatus and method thereof |
JP2013178888A JP5932734B2 (ja) | 2005-12-14 | 2013-08-30 | 3次元形状測定装置及び方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050123409A KR100612932B1 (ko) | 2005-12-14 | 2005-12-14 | 3차원 형상 측정장치 및 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100612932B1 true KR100612932B1 (ko) | 2006-08-14 |
Family
ID=37594381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050123409A KR100612932B1 (ko) | 2005-12-14 | 2005-12-14 | 3차원 형상 측정장치 및 방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100612932B1 (zh) |
CN (2) | CN100520286C (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903346B1 (ko) | 2006-12-28 | 2009-06-22 | (주) 인텍플러스 | 광학식 입체 형상 검사 방법 |
KR100943405B1 (ko) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | 래터럴 스캔을 이용한 3차원 형상 측정 시스템 |
KR100943407B1 (ko) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | 전사 방식의 3차원 형상 측정 시스템 |
KR101158892B1 (ko) | 2009-05-15 | 2012-06-25 | 선문대학교 산학협력단 | 칼라필터를 적용한 임의형상 측정방법 |
KR20180043891A (ko) * | 2016-10-20 | 2018-05-02 | 한국원자력연구원 | 표면 프로파일의 평탄도 측정장치 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010064593A1 (de) * | 2009-05-21 | 2015-07-30 | Koh Young Technology Inc. | Formmessgerät und -verfahren |
DE202010018585U1 (de) * | 2009-05-27 | 2017-11-28 | Koh Young Technology Inc. | Vorrichtung zur Messung einer dreidimensionalen Form |
KR101078781B1 (ko) * | 2010-02-01 | 2011-11-01 | 주식회사 고영테크놀러지 | 3차원 형상 검사방법 |
CN103575234B (zh) * | 2012-07-20 | 2016-08-24 | 德律科技股份有限公司 | 三维影像测量装置 |
KR101622628B1 (ko) * | 2014-12-16 | 2016-05-20 | 주식회사 고영테크놀러지 | 부품이 실장된 기판 검사방법 및 검사장치 |
JP2017083234A (ja) * | 2015-10-26 | 2017-05-18 | オムロン株式会社 | 三次元形状計測装置、三次元形状計測システム、プログラム、コンピュータ読み取り可能な記録媒体、および三次元形状計測方法 |
CN106123807B (zh) * | 2016-06-30 | 2018-09-07 | 苏州图锐智能科技有限公司 | 一种产品3d检测***及相应检测方法 |
TWI595445B (zh) * | 2016-08-31 | 2017-08-11 | 致茂電子股份有限公司 | 抗雜訊之立體掃描系統 |
JP7212240B2 (ja) * | 2018-06-11 | 2023-01-25 | オムロン株式会社 | 計測システムおよび計測方法 |
JP7135495B2 (ja) * | 2018-06-26 | 2022-09-13 | セイコーエプソン株式会社 | 三次元計測装置、制御装置およびロボットシステム |
WO2020263056A1 (ko) * | 2019-06-28 | 2020-12-30 | 주식회사 고영테크놀러지 | 대상체의 3차원 형상을 결정하기 위한 장치 및 방법 |
CN115362469A (zh) * | 2020-02-10 | 2022-11-18 | 康耐视公司 | 复合三维blob工具及其操作方法 |
CN115421349A (zh) * | 2022-11-02 | 2022-12-02 | 四川川大智胜软件股份有限公司 | 非数字光机结构光投射模组、采集装置及三维测量*** |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002048523A (ja) | 2000-08-02 | 2002-02-15 | Ckd Corp | 三次元計測装置 |
KR20020039583A (ko) * | 2000-11-22 | 2002-05-27 | 임쌍근 | 모아레무늬 발생기를 적용한 위상천이 영사식 모아레방법및 장치 |
JP2002162215A (ja) | 2000-11-27 | 2002-06-07 | Matsushita Electric Works Ltd | 3次元形状計測方法およびそのシステム |
KR20040071593A (ko) * | 2003-02-06 | 2004-08-12 | 주식회사 고영테크놀러지 | 3차원형상 측정장치 |
KR20040071532A (ko) * | 2003-02-06 | 2004-08-12 | 주식회사 고영테크놀러지 | 3차원형상 측정장치 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4007500A1 (de) * | 1990-03-09 | 1991-09-12 | Zeiss Carl Fa | Verfahren und vorrichtung zur beruehrungslosen vermessung von objektoberflaechen |
DE4027328B4 (de) * | 1990-08-29 | 2004-07-22 | Sirona Dental Systems Gmbh | 3D-Kamera zur Erfassung von Oberflächenstrukturen, insbesondere für zahnmedizinische Zwecke |
DE19919584A1 (de) * | 1999-04-29 | 2000-11-02 | Klaus Koerner | Verfahren und Anordnung zur 3D-Aufnahme |
JP4077754B2 (ja) * | 2003-04-04 | 2008-04-23 | オリンパス株式会社 | 3次元形状測定装置 |
-
2005
- 2005-12-14 KR KR1020050123409A patent/KR100612932B1/ko active IP Right Grant
-
2006
- 2006-12-14 CN CNB2006101678120A patent/CN100520286C/zh active Active
- 2006-12-14 CN CN2008101776052A patent/CN101514893B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002048523A (ja) | 2000-08-02 | 2002-02-15 | Ckd Corp | 三次元計測装置 |
KR20020039583A (ko) * | 2000-11-22 | 2002-05-27 | 임쌍근 | 모아레무늬 발생기를 적용한 위상천이 영사식 모아레방법및 장치 |
JP2002162215A (ja) | 2000-11-27 | 2002-06-07 | Matsushita Electric Works Ltd | 3次元形状計測方法およびそのシステム |
KR20040071593A (ko) * | 2003-02-06 | 2004-08-12 | 주식회사 고영테크놀러지 | 3차원형상 측정장치 |
KR20040071532A (ko) * | 2003-02-06 | 2004-08-12 | 주식회사 고영테크놀러지 | 3차원형상 측정장치 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903346B1 (ko) | 2006-12-28 | 2009-06-22 | (주) 인텍플러스 | 광학식 입체 형상 검사 방법 |
KR100943405B1 (ko) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | 래터럴 스캔을 이용한 3차원 형상 측정 시스템 |
KR100943407B1 (ko) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | 전사 방식의 3차원 형상 측정 시스템 |
KR101158892B1 (ko) | 2009-05-15 | 2012-06-25 | 선문대학교 산학협력단 | 칼라필터를 적용한 임의형상 측정방법 |
KR20180043891A (ko) * | 2016-10-20 | 2018-05-02 | 한국원자력연구원 | 표면 프로파일의 평탄도 측정장치 |
KR101890330B1 (ko) | 2016-10-20 | 2018-08-23 | 한국원자력연구원 | 표면 프로파일의 평탄도 측정장치 |
Also Published As
Publication number | Publication date |
---|---|
CN101514893A (zh) | 2009-08-26 |
CN1982841A (zh) | 2007-06-20 |
CN100520286C (zh) | 2009-07-29 |
CN101514893B (zh) | 2012-08-08 |
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