KR100555706B1 - 미세 솔더볼 구현을 위한 ubm 및 이를 이용한 플립칩패키지 방법 - Google Patents
미세 솔더볼 구현을 위한 ubm 및 이를 이용한 플립칩패키지 방법 Download PDFInfo
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- KR100555706B1 KR100555706B1 KR1020030093209A KR20030093209A KR100555706B1 KR 100555706 B1 KR100555706 B1 KR 100555706B1 KR 1020030093209 A KR1020030093209 A KR 1020030093209A KR 20030093209 A KR20030093209 A KR 20030093209A KR 100555706 B1 KR100555706 B1 KR 100555706B1
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- Prior art keywords
- ubm
- substrate
- solder ball
- metal film
- region
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 239000002184 metal Substances 0.000 claims abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 24
- 229910052802 copper Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910015363 Au—Sn Inorganic materials 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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Abstract
Description
Claims (8)
- 제1 기판 및 제2 기판 상에 형성된 대응되는 적어도 하나 이상의 제1 및 제2 전극단자를 플립칩 본딩시 이용되는 미세 솔더볼 구현을 위한 UBM(Under Bump Metal)에 있어서,상기 제1 전극단자 및 상기 솔더볼 사이에 배치되어 전기적으로 연결되며, 돌출부의 주변에 측면이 소정 경사를 이루는 함몰부를 구비하는 상기 제1 기판의 상기 돌출부에 형성되는 금속막; 및 상기 돌출부에 접하는 상기 경사 측면 위에 형성된 금속막;을 포함하는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM.
- 제 1항에 있어서,상기 돌출부에 형성되는 금속막과 상기 경사 측면에 형성되는 금속막은 소정 간격으로 분리되는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM.
- 제 2항에 있어서,상기 제2 전극단자와 연결되는 돌출부의 주변에 측면이 소정 경사를 이루는 함몰부를 구비하는 상기 제2 기판의 상기 돌출부에 형성되는 금속막; 및 상기 돌출부에 접하는 상기 경사 측면 위에 금속막;을 포함하는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM.
- 제1 기판의 적어도 하나 이상의 제1 영역 주변에 측면이 소정 경사를 이루는 함몰부가 형성되도록 상기 기판을 식각하는 단계;상기 함몰부가 형성된 제1 기판 위에 제1 금속막을 형성하는 단계;상기 제1 영역 및 상기 제1 영역에 접하는 경사면 이외에 형성된 제1 금속막을 제거하여 상기 제1 기판의 전극단자와 연결되는 제1 UBM을 형성하는 단계;상기 제1 영역에 형성된 제1 UBM 위에 도전성의 솔더볼을 형성하는 단계;상기 제1 영역에 대응하는 제2 기판의 제2 영역 위에 도전물질을 증착하여 상기 제2 기판의 전극단자와 연결되는 제2 UBM을 형성하는 단계; 및상기 제1 UBM 및 상기 솔더볼이 형성된 상기 제1 기판과 상기 제2 UBM이 형성된 제2 기판을 접합하는 단계;를 포함하는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM을 이용한 플립칩 패키지 방법.
- 제 4항에 있어서,상기 솔더볼을 형성하는 단계는,상기 제1 UBM이 형성된 제1 영역 이외의 영역에 포토레지스트막을 형성하는 단계;상기 제1 UBM이 형성된 제1 영역에 제2 금속막을 형성하는 단계;상기 포토레지스트층을 제거하는 단계; 및상기 제2 금속막을 소정 온도로 가열하여 솔더볼을 형성하는 단계;를 포함하는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM을 이용한 플립칩 패키지 방법.
- 제 4항에 있어서,상기 솔더볼을 형성하는 단계는,상기 제1 UBM이 형성된 제1 영역 위에 소정온도의 솔더볼을 스포이딩하는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM을 이용한 플립칩 패키지 방법.
- 제 4항에 있어서,상기 제1 영역의 금속막과 상기 경사면의 금속막은 소정 간격으로 분리되는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM을 이용한 플립칩 패키지 방법.
- 제 7항에 있어서,제2 UBM은 상기 제1 UBM에 대응되는 패턴 구조로 형성되는 것을 특징으로 하는 미세 솔더볼 구현을 위한 UBM을 이용한 플립칩 패키지 방법.
Priority Applications (4)
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KR1020030093209A KR100555706B1 (ko) | 2003-12-18 | 2003-12-18 | 미세 솔더볼 구현을 위한 ubm 및 이를 이용한 플립칩패키지 방법 |
US11/012,294 US7309924B2 (en) | 2003-12-18 | 2004-12-16 | UBM for fine pitch solder ball and flip-chip packaging method using the same |
EP04029916A EP1544916A1 (en) | 2003-12-18 | 2004-12-16 | Raised solder pad and method using the same |
JP2004367236A JP4105150B2 (ja) | 2003-12-18 | 2004-12-20 | 微細ソルダ・ボール具現のためのubm及びこれを利用したフリップチップ・パッケージ方法 |
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KR1020030093209A KR100555706B1 (ko) | 2003-12-18 | 2003-12-18 | 미세 솔더볼 구현을 위한 ubm 및 이를 이용한 플립칩패키지 방법 |
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DE10145348C1 (de) * | 2001-09-14 | 2003-03-27 | Siemens Dematic Ag | Zwischenträger für elektronische Bauelemente und Verfahren zur Lötkontaktierung eines derartigen Zwischenträgers |
DE10208910A1 (de) * | 2002-02-27 | 2003-09-18 | Siemens Ag | Schaltungsträger und Verfahren zu dessen Herstellung |
DE10223203B4 (de) * | 2002-05-24 | 2004-04-01 | Siemens Dematic Ag | Elektronisches Bauelement-Modul und Verfahren zu dessen Herstellung |
-
2003
- 2003-12-18 KR KR1020030093209A patent/KR100555706B1/ko active IP Right Grant
-
2004
- 2004-12-16 EP EP04029916A patent/EP1544916A1/en not_active Withdrawn
- 2004-12-16 US US11/012,294 patent/US7309924B2/en active Active
- 2004-12-20 JP JP2004367236A patent/JP4105150B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2005183992A (ja) | 2005-07-07 |
KR20050061783A (ko) | 2005-06-23 |
EP1544916A1 (en) | 2005-06-22 |
JP4105150B2 (ja) | 2008-06-25 |
US7309924B2 (en) | 2007-12-18 |
US20050151269A1 (en) | 2005-07-14 |
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