KR100495900B1 - 전자부품 및 솔더 도포 검사장치 - Google Patents
전자부품 및 솔더 도포 검사장치 Download PDFInfo
- Publication number
- KR100495900B1 KR100495900B1 KR10-2002-0028386A KR20020028386A KR100495900B1 KR 100495900 B1 KR100495900 B1 KR 100495900B1 KR 20020028386 A KR20020028386 A KR 20020028386A KR 100495900 B1 KR100495900 B1 KR 100495900B1
- Authority
- KR
- South Korea
- Prior art keywords
- light
- light sources
- splitter
- passing
- ccd camera
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
- G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
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- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (3)
- 모아레 무늬를 이용한 전자부품 및 솔더 도포 검사장치에 있어서,적어도 3 이상의 광원과;상기 각 광원으로부터의 광에 의해 격자무늬를 생성하는 적어도 3 이상의 고정격자와;상기 각 고정격자를 통과한 상기 격자무늬의 광들이 상호간에 위상 천이되어 각각 측정대상물에 투영되게 하는 광분할기와;상기 광분할기를 통과한 광에 의해 상기 측정대상물에 형성된 모아레 무늬를 촬상하여 영상신호화하는 CCD 카메라와;상기 광원들이 순차적으로 광을 조사하도록 제어하고, 상기 CCD 카메라로부터 상기 각 광원으로부터 순차적으로 조사된 광에 대응하는 적어도 3 이상의 영상신호를 수신하는 제어부와;상기 제어부로부터 수신한 상기 3 이상의 영상신호를 이용하여 3 버킷 이상의 알고리즘을 적용하여 3차원 영상정보를 제작하는 신호 처리부를 포함하는 전자부품 및 솔더 도포 검사장치.
- 제 1 항에 있어서,상기 광분할기는 프리즘형인 것을 특징으로 하는 전자부품 및 솔더 도포 검사장치.
- 제 1 항 또는 제 2 항에 있어서,상기 각 광원과 상기 광분할기 사이에 각각 배치되어 상기 각 광원으로부터 주사된 광을 균질하게 하는 적어도 3 이상의 디퓨저와;상기 광분할기를 통과한 광을 응집하는 집광렌즈와;상기 집광렌즈를 통과한 광을 상기 측정대상물에 투영하는 투영렌즈를 더 포함하는 것을 특징으로 하는 전자부품 및 솔더 도포 검사장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0028386A KR100495900B1 (ko) | 2002-05-22 | 2002-05-22 | 전자부품 및 솔더 도포 검사장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0028386A KR100495900B1 (ko) | 2002-05-22 | 2002-05-22 | 전자부품 및 솔더 도포 검사장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030090317A KR20030090317A (ko) | 2003-11-28 |
KR100495900B1 true KR100495900B1 (ko) | 2005-06-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR10-2002-0028386A KR100495900B1 (ko) | 2002-05-22 | 2002-05-22 | 전자부품 및 솔더 도포 검사장치 |
Country Status (1)
Country | Link |
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KR (1) | KR100495900B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010134694A2 (ko) * | 2009-05-20 | 2010-11-25 | 에스엔유 프리시젼 주식회사 | 3차원 형상 측정방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103376555A (zh) * | 2012-04-19 | 2013-10-30 | 致茂电子(苏州)有限公司 | 光学取像装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870107A (ja) * | 1981-10-21 | 1983-04-26 | Hoya Corp | 立体形状の光学的測定法 |
JPH02128327A (ja) * | 1988-11-07 | 1990-05-16 | Minolta Camera Co Ltd | 光ピックアップ装置 |
US5202749A (en) * | 1988-12-23 | 1993-04-13 | Klaus Pfister | Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting |
US5583632A (en) * | 1994-06-21 | 1996-12-10 | New Creation Co., Ltd. | Apparatus for two or three dimensional optical inspection of a sample |
WO1997004285A1 (en) * | 1995-07-18 | 1997-02-06 | The Budd Company | Moire interferometry system and method with extended imaging depth |
WO1999058592A1 (fr) * | 1998-05-14 | 1999-11-18 | Hitachi Chemical Company, Ltd. | Composition de resine et procede utilisant cette composition pour produire un article durci |
EP1203947A2 (en) * | 2000-11-06 | 2002-05-08 | Kabushiki Kaisha Toshiba | Pattern detection, processing and testing apparatus |
-
2002
- 2002-05-22 KR KR10-2002-0028386A patent/KR100495900B1/ko active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870107A (ja) * | 1981-10-21 | 1983-04-26 | Hoya Corp | 立体形状の光学的測定法 |
JPH02128327A (ja) * | 1988-11-07 | 1990-05-16 | Minolta Camera Co Ltd | 光ピックアップ装置 |
US5202749A (en) * | 1988-12-23 | 1993-04-13 | Klaus Pfister | Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting |
US5583632A (en) * | 1994-06-21 | 1996-12-10 | New Creation Co., Ltd. | Apparatus for two or three dimensional optical inspection of a sample |
WO1997004285A1 (en) * | 1995-07-18 | 1997-02-06 | The Budd Company | Moire interferometry system and method with extended imaging depth |
WO1999058592A1 (fr) * | 1998-05-14 | 1999-11-18 | Hitachi Chemical Company, Ltd. | Composition de resine et procede utilisant cette composition pour produire un article durci |
EP1203947A2 (en) * | 2000-11-06 | 2002-05-08 | Kabushiki Kaisha Toshiba | Pattern detection, processing and testing apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010134694A2 (ko) * | 2009-05-20 | 2010-11-25 | 에스엔유 프리시젼 주식회사 | 3차원 형상 측정방법 |
WO2010134694A3 (ko) * | 2009-05-20 | 2011-01-13 | 에스엔유 프리시젼 주식회사 | 3차원 형상 측정방법 |
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KR20030090317A (ko) | 2003-11-28 |
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