KR100402389B1 - 금속 게이트 형성 방법 - Google Patents
금속 게이트 형성 방법 Download PDFInfo
- Publication number
- KR100402389B1 KR100402389B1 KR10-2001-0015150A KR20010015150A KR100402389B1 KR 100402389 B1 KR100402389 B1 KR 100402389B1 KR 20010015150 A KR20010015150 A KR 20010015150A KR 100402389 B1 KR100402389 B1 KR 100402389B1
- Authority
- KR
- South Korea
- Prior art keywords
- metal
- film
- gas
- oxidation process
- selective oxidation
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 67
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 48
- 239000002184 metal Substances 0.000 title claims abstract description 48
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 53
- 230000003647 oxidation Effects 0.000 claims abstract description 51
- 239000007789 gas Substances 0.000 claims abstract description 26
- 125000004433 nitrogen atom Chemical group N* 0.000 claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 13
- 239000012298 atmosphere Substances 0.000 claims abstract description 8
- 238000000059 patterning Methods 0.000 claims abstract description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 10
- 229910044991 metal oxide Inorganic materials 0.000 claims description 10
- 150000004706 metal oxides Chemical class 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 7
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 6
- 230000006911 nucleation Effects 0.000 claims description 6
- 238000010899 nucleation Methods 0.000 claims description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- 229960001730 nitrous oxide Drugs 0.000 claims description 3
- 235000013842 nitrous oxide Nutrition 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 2
- 229910052721 tungsten Inorganic materials 0.000 description 16
- 239000010937 tungsten Substances 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 15
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- -1 for example Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
- H01L29/4941—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a barrier layer between the silicon and the metal or metal silicide upper layer, e.g. Silicide/TiN/Polysilicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32105—Oxidation of silicon-containing layers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Composite Materials (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (5)
- 실리콘 기판 상에 게이트 산화막, 실리콘막, 도전성 장벽막, 그리고 금속막을 차례로 형성하는 단계;상기 적층된 막질들을 패터닝하여 게이트 패턴을 형성하는 단계; 그리고,수소 풍부 수증기 및 질소 원자를 함유하는 가스 분위기에서 실리콘에 대한 선태적 산화 공정을 실시하는 단계를 포함하는 것을 특징으로 하는 금속 게이트 형성 방법.
- 제 1 항에 있어서,상기 질소 원자를 함유하는 가스는 질소, 일산화 질소, 일산화 이질소 또는 암모니아 가스이며, 상기 선택적 산화 공정은 이들 가스 단독 또는 이들 가스의 혼합가스를 포함하는 것을 특징으로 하는 금속 게이트 형성 방법.
- 제 1 항에 있어서,상기 질소 원자를 함유하는 가스는 상기 도전성 장벽막 및 상기 금속막의 산화를 억제하는 것을 특징으로 하는 금속 게이트 형성 방법.
- 제 1 항에 있어서,상기 질소 원자를 함유하는 가스의 질소 원자가 상기 선택적 산화 공정으로 형성되는 금속 산화막(metal oxide)에 포함되어 상기 금속 산화막의 표면 이동도및 위스커 핵형성을 방지하는 작용을 하는 것을 특징으로 하는 금속 게이트 형성 방법.
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서,상기 수소 풍부 수증기는 수소 가스 및 산소 가스를 사용하여 형성되는 것을 특징으로 하는 금속 게이트 형성 방법.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0015150A KR100402389B1 (ko) | 2001-03-23 | 2001-03-23 | 금속 게이트 형성 방법 |
US09/992,980 US6764961B2 (en) | 2001-03-23 | 2001-11-06 | Method of forming a metal gate electrode |
JP2002079597A JP2002343966A (ja) | 2001-03-23 | 2002-03-20 | 金属ゲート形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0015150A KR100402389B1 (ko) | 2001-03-23 | 2001-03-23 | 금속 게이트 형성 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020075000A KR20020075000A (ko) | 2002-10-04 |
KR100402389B1 true KR100402389B1 (ko) | 2003-10-17 |
Family
ID=19707300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2001-0015150A KR100402389B1 (ko) | 2001-03-23 | 2001-03-23 | 금속 게이트 형성 방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6764961B2 (ko) |
JP (1) | JP2002343966A (ko) |
KR (1) | KR100402389B1 (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100414562B1 (ko) * | 2001-06-29 | 2004-01-07 | 주식회사 하이닉스반도체 | 비휘발성 메모리 셀의 제조 방법 |
JP3607684B2 (ja) * | 2002-03-25 | 2005-01-05 | エルピーダメモリ株式会社 | 半導体装置の製造方法 |
US20080070405A1 (en) * | 2002-05-30 | 2008-03-20 | Park Jae-Hwa | Methods of forming metal wiring layers for semiconductor devices |
KR100446300B1 (ko) * | 2002-05-30 | 2004-08-30 | 삼성전자주식회사 | 반도체 소자의 금속 배선 형성 방법 |
KR100495921B1 (ko) * | 2002-12-30 | 2005-06-17 | 주식회사 하이닉스반도체 | 스트레스 제거를 위한 반도체 소자의 제조 방법 |
KR100634163B1 (ko) * | 2003-02-19 | 2006-10-16 | 삼성전자주식회사 | 금속 게이트 전극을 구비하는 반도체 소자의 형성 방법 |
KR100616498B1 (ko) * | 2003-07-26 | 2006-08-25 | 주식회사 하이닉스반도체 | 폴리/텅스텐 게이트 전극을 갖는 반도체 소자의 제조방법 |
US7030431B2 (en) * | 2004-03-19 | 2006-04-18 | Nanya Technology Corp. | Metal gate with composite film stack |
KR100824406B1 (ko) * | 2006-11-01 | 2008-04-22 | 삼성전자주식회사 | 반도체 장치의 제조방법 |
KR20110079831A (ko) * | 2008-10-03 | 2011-07-08 | 비코 프로세스 이큅먼트, 아이엔씨. | 기상 에피택시 시스템 |
JP5361335B2 (ja) | 2008-11-06 | 2013-12-04 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
US9127340B2 (en) * | 2009-02-13 | 2015-09-08 | Asm International N.V. | Selective oxidation process |
US8889565B2 (en) * | 2009-02-13 | 2014-11-18 | Asm International N.V. | Selective removal of oxygen from metal-containing materials |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010003672A (ko) * | 1999-06-24 | 2001-01-15 | 김영환 | 반도체 소자의 게이트 전극 형성 방법 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4505082A (en) * | 1982-02-10 | 1985-03-19 | Peter Schmitz | Structural panel |
JPS59132136A (ja) * | 1983-01-19 | 1984-07-30 | Hitachi Ltd | 半導体装置の製造方法 |
JPH0710935U (ja) * | 1993-07-24 | 1995-02-14 | ヤマハ株式会社 | 縦型熱処理炉 |
JPH10335652A (ja) * | 1997-05-30 | 1998-12-18 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JPH11330468A (ja) * | 1998-05-20 | 1999-11-30 | Hitachi Ltd | 半導体集積回路装置の製造方法および半導体集積回路装置 |
KR100327432B1 (ko) * | 1999-02-22 | 2002-03-13 | 박종섭 | 반도체 소자의 금속 배선 형성 방법 |
US6348380B1 (en) * | 2000-08-25 | 2002-02-19 | Micron Technology, Inc. | Use of dilute steam ambient for improvement of flash devices |
-
2001
- 2001-03-23 KR KR10-2001-0015150A patent/KR100402389B1/ko active IP Right Grant
- 2001-11-06 US US09/992,980 patent/US6764961B2/en not_active Expired - Lifetime
-
2002
- 2002-03-20 JP JP2002079597A patent/JP2002343966A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010003672A (ko) * | 1999-06-24 | 2001-01-15 | 김영환 | 반도체 소자의 게이트 전극 형성 방법 |
Also Published As
Publication number | Publication date |
---|---|
US6764961B2 (en) | 2004-07-20 |
US20020137321A1 (en) | 2002-09-26 |
JP2002343966A (ja) | 2002-11-29 |
KR20020075000A (ko) | 2002-10-04 |
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