KR100323362B1 - Ceramic Composition for Piezoelectric Actuators with Excellent Temperature Characteristics - Google Patents
Ceramic Composition for Piezoelectric Actuators with Excellent Temperature Characteristics Download PDFInfo
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- KR100323362B1 KR100323362B1 KR1019980033119A KR19980033119A KR100323362B1 KR 100323362 B1 KR100323362 B1 KR 100323362B1 KR 1019980033119 A KR1019980033119 A KR 1019980033119A KR 19980033119 A KR19980033119 A KR 19980033119A KR 100323362 B1 KR100323362 B1 KR 100323362B1
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- 239000000203 mixture Substances 0.000 title claims abstract description 26
- 239000000919 ceramic Substances 0.000 title claims abstract description 16
- 238000006073 displacement reaction Methods 0.000 abstract description 28
- 230000005684 electric field Effects 0.000 description 11
- 239000000843 powder Substances 0.000 description 9
- 239000004372 Polyvinyl alcohol Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 5
- 229910052748 manganese Inorganic materials 0.000 description 5
- 229910018380 Mn(NO3)2.6H2 O Inorganic materials 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
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Abstract
본 발명은 전계 인가에 따른 발생 변위가 크면서도 온도 특성이 우수한 압전 액츄에이터 (piezoelectric actuator)용 세라믹 조성물에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic composition for piezoelectric actuators having a large displacement and an excellent temperature characteristic.
본 발명의 압전 액츄에이터용 세라믹 조성물은 Pb(Zr0.53, Ti0.47)O3를 기본 조성으로 하고, 조성물의 전체 중량을 기준으로 하여 Nb2O50.5 중량% 내지 1.5 중량% 및 MnO20.04 중량% 내지 0.22 중량%를 함유한다.The ceramic composition for a piezoelectric actuator of the present invention is based on Pb (Zr 0.53 , Ti 0.47 ) O 3 , and based on the total weight of the composition, 0.5% to 1.5% by weight of Nb 2 O 5 and 0.04% by weight of MnO 2. To 0.22% by weight.
Description
본 발명은 전계 인가에 따른 발생 변위가 크면서도 온도 특성이 우수한 압전 액츄에이터 (piezoelectric actuator)용 세라믹 조성물에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic composition for piezoelectric actuators having a large displacement and an excellent temperature characteristic.
압전 액츄에이터는 초음파 세정기, 음파탐지기 (SONAR) 등에 광범위하게 응용되고 있으며, 이와 같은 응용에서는 인가되는 전계에 비해 상대적으로 큰 변위가 얻어지는 지의 여부와 가혹한 사용 조건에 따른 기계적 안정성이 중요한 고려 요소가 된다. 그러나, 최근에는 산업의 자동화, 마이크로화, 고지능화에 따른 미세 변위 소자의 필요성으로 인해 정밀한 위치 제어에 압전체가 액츄에이터로 사용되기 시작하였으며, 구체적으로는, 잉크젯 프린터 헤드, 초음파 모터, 전자현미경 등 전자 광학 기기의 시편 이동대, 선반 등 공작기계의 이동대 등 정밀한 위치 제어가 필요한 분야에서 널리 사용되고 있다. 이러한 정밀한 용도 중심의 압전 액츄에이터는 단순히 발생되는 변위가 큰 것보다는 전계 변화에 따른 발생 변위의 이력 및 온도 변화에 따른 발생 변위의 안정성 등이 중요하게 된다.Piezoelectric actuators have been widely applied to ultrasonic cleaners, sonar (SONAR), etc. In such applications, whether the relatively large displacement is obtained compared to the applied electric field and mechanical stability due to the severe use conditions is an important consideration. Recently, however, piezoelectric elements have been used as actuators for precise position control due to the necessity of micro displacement devices due to industrial automation, micronization, and high intelligence. Specifically, piezoelectric elements have been used as actuators for inkjet printer heads, ultrasonic motors, electron microscopes It is widely used in the field that requires precise position control, such as the moving table of the machine tool such as the specimen moving table of the optical equipment, lathe. In such a precise use-oriented piezoelectric actuator, it is more important than simply generating a large displacement, such as the hysteresis of the generated displacement due to the electric field change and the stability of the generated displacement due to the temperature change.
압전 액츄에이터의 대표적인 예로는 Pb(Zr0.53, Ti0.47)O3(PbZrO353 몰% 및 PbTiO347 몰%, 이하, PZT라 칭함)계의 고용체를 들 수 있으며, PZT는 이들에 첨가되는 첨가제에 따라 압전 특성, 기계적 성질, 미세 구조 등이 크게 변화하는 특징을 가지는 재료이다. 전자 공여체인 Nb, Ta 등의 5가 금속을 PZT에 첨가하면, 전기 기계 결합 계수 (k)가 증가되고, 단위 전계 인가에 따른 발생 변위 또한 증가하게 되지만, 기계적 품질 계수 (Qm)가 감소되어 고주파 및(또는) 고전력하에서 동작될 때 발열 등의 문제점이 야기된다. 반면에, 전자 수용체인 Fe 등의 3가 금속을 PZT에 첨가하게 되면, Qm이 증가되어 기계적으로 안정하게 되지만, 보통 k값과 전계 인가에 따른 발생 변위는 감소하게 된다 (제프 (B. Jaffe), 쿠크 (W.R. Cook, Jr.) 및 제프 (H. Jaffe)의 문헌 [Piezoelectric Ceramics, Academic Press, London, 제141∼162 페이지 (1971)] 참조).A typical example of the piezoelectric actuator is Pb (Zr 0.53, Ti 0.47) O 3 may be mentioned (PbZrO 3 53 mol%, and PbTiO 3 47 mol%, or less, PZT quot;) based solid solution, PZT is additive to be added to these It is a material having the characteristic that the piezoelectric properties, mechanical properties, microstructures, etc. are greatly changed according to the above. When pentavalent metals such as electron donors Nb and Ta are added to PZT, the electromechanical coupling coefficient (k) is increased, and the displacement generated due to the unit electric field is also increased, but the mechanical quality factor (Q m ) is decreased. Problems such as heat generation are caused when operating under high frequency and / or high power. On the other hand, when trivalent metal such as Fe, an electron acceptor, is added to PZT, Q m is increased and mechanically stabilized, but the generated displacement due to k value and electric field is decreased. ), WR Cook, Jr. and H. Jaffe (Piezoelectric Ceramics, Academic Press, London, pages 141-162 (1971)).
본 발명자들은 전계 인가시 큰 변위를 얻기 위해 일반적으로 단위 전계 인가에 대해 발생 변위를 크게 하는 효과가 있다고 알려져 있는 공여체 재료 중 Nb2O5를 PZT에 첨가하는 경우, 순수한 PZT에 비하여 발생 변위는 증대되지만 온도 안정성은 저하된다는 사실을 발견하였다. 한편, 상기 문헌에 의하면 PZT에 우라늄 (U)이나 크롬 (Cr)을 첨가하는 경우 원자가가 여러개이므로 PZT의 제반 특성이 안정화되는 것으로 보고되어 있는데, Mn의 경우도 원자가가 여러개이므로, 본 발명자들은 PZT에 Nb2O5와 Mn을 병용하여 첨가하면, 발생 변위도 증대되면서 온도 안정성도 향상되지 않을까 하는 점에 착안하여 본 발명을 완성하게 되었다.When the present inventors add Nb 2 O 5 to PZT of donor material, which is known to have an effect of increasing the generation displacement for unit electric field application in order to obtain a large displacement when applying electric field, the generation displacement is increased as compared to pure PZT. However, the temperature stability is found to be lowered. On the other hand, according to the above document, when uranium (U) or chromium (Cr) is added to PZT, it is reported that various characteristics of PZT are stabilized because there are several valences. When the Nb 2 O 5 and Mn are added in combination to each other, the present invention has been completed by focusing on the fact that the generated displacement is increased and the temperature stability is also improved.
따라서, 본 발명의 목적은 Pb(Zr0.53, Ti0.47)O3(PZT)를 기본 조성으로 하는 온도 특성이 우수한 압전 액츄에이터용 세라믹 조성물을 제공하는 것이다.Accordingly, an object of the present invention is to provide a ceramic composition for piezoelectric actuators having excellent temperature characteristics based on Pb (Zr 0.53 , Ti 0.47 ) O 3 (PZT).
도 1은 본 발명에 따라 제조된 세라믹 조성물에 전계 인가시 세라믹 조성물의 온도에 따른 발생 변위의 변화를 나타낸 그래프이다.1 is a graph showing a change in generation displacement according to the temperature of a ceramic composition when an electric field is applied to the ceramic composition prepared according to the present invention.
본 발명자들은 상기 목적을 달성하기 위해 예의 연구를 거듭한 결과, 본 발명을 완성하게 되었다.MEANS TO SOLVE THE PROBLEM As a result of earnestly researching in order to achieve the said objective, the present inventors completed this invention.
본 발명은 Pb(Zr0.53, Ti0.47)O3를 기본 조성으로 하고, 조성물의 전체 중량을 기준으로 하여, Nb2O50.5 중량% 내지 1.5 중량% 및 MnO20.04 중량% 내지 0.22 중량%를 함유하는 압전 액츄에이터용 세라믹 조성물을 제공하는 것이다.The present invention is based on Pb (Zr 0.53 , Ti 0.47 ) O 3 and based on the total weight of the composition, 0.5% to 1.5% by weight of Nb 2 O 5 and 0.04% to 0.22% by weight of MnO 2 . It is to provide a ceramic composition for piezoelectric actuators containing.
압전 액츄에이터용 세라믹 조성물은 Pb(Zr0.53, Ti0.47)O3를 기본 조성으로 하고, 조성물의 전체 중량을 기준으로 하여, Nb2O50.5 중량% 내지 1.5 중량% 및 Mn(NO3)2·6H2O 0.45 중량% 내지 0.75 중량%를 첨가제로 사용하여 통상의 방법으로 제조된다. 이 때, Mn의 원료로서 액상인 질산염을 사용하는 것은 원료를 혼합할 때 PZT 고용체 내에 Mn이 균일하게 분포되어 고르게 고용되도록 하기 위해서이다.Ceramic compositions for piezoelectric actuators are based on Pb (Zr 0.53 , Ti 0.47 ) O 3 , and based on the total weight of the composition, 0.5 to 1.5 wt.% Nb 2 O 5 and Mn (NO 3 ) 2. 0.45% to 0.75% by weight of 6H 2 O is prepared by a conventional method using an additive. At this time, the use of liquid nitrate as the raw material of Mn is to make Mn evenly distributed in the PZT solid solution when the raw materials are mixed.
세라믹 조성물에 첨가되는 Nb2O5의 첨가량이 1.5 중량%를 초과하면 전기 기계 결합 계수 (k) 및 단위 전계 인가에 따른 발생 변위가 더 이상 증가되지 않으며, 0.5 중량% 미만이면 전기 기계 결합 계수 및 단위 전계 인가에 따른 발생 변위의 증가 효과가 불충분하게 된다.When the amount of Nb 2 O 5 added to the ceramic composition exceeds 1.5% by weight, the electromechanical coupling coefficient (k) and the generated displacement due to the unit electric field are no longer increased, and when less than 0.5% by weight, the electromechanical coupling coefficient and The effect of increasing the generated displacement due to the application of the unit electric field becomes insufficient.
또다른 첨가제인 Mn(NO3)2·6H2O의 첨가량이 0.75 중량%를 초과하하는 경우 온도 안정성의 추가적인 개선 효과는 미약한데 반하여 발생 변위가 너무 감소되며, 0.45 중량% 미만인 경우 발생 변위는 높은 수준이 유지되나, 만족할만한 온도 안정성을 얻기가 곤란하다.When the amount of addition of another additive, Mn (NO 3 ) 2 .6H 2 O, exceeds 0.75% by weight, the effect of further improvement in temperature stability is insignificant, while the generated displacement is reduced too much. Although high levels are maintained, it is difficult to obtain satisfactory temperature stability.
본 발명의 압전 액츄에이터용 세라믹 조성물을 제조하는 방법을 구체적으로 설명하면 다음과 같다.Referring to the method of manufacturing the ceramic composition for a piezoelectric actuator of the present invention in detail.
먼저, 기본 성분인 PbO, ZrO 및 TiO2를 적정 비율로 정확히 칭량하여 습식 볼 밀링에 의해 혼합 및 분쇄하여 건조 및 체질한다. 수득된 일정 입도의 분말에 소정량의 Nb2O5및 Mn(NO3)2·6H2O를 첨가하여 다시 볼 밀링에 의해 혼합 및 분쇄하여 건조 및 체질한다. 체질된 분말을 2시간 동안 하소하고, 다시 분쇄한 후 폴리비닐알콜 (PVA) 수용액을 결합제로서 미량 첨가하고 조립화한다. 조립화된 분말을 가압 성형한 후 성형체를 500℃에서 일정 시간동안 유지하여 PVA 결합제를 제거하고, 1200℃에서 소결시킨다.First, PbO, ZrO and TiO 2 , which are basic components, are accurately weighed at an appropriate ratio, mixed and ground by wet ball milling, and dried and sieved. A predetermined amount of Nb 2 O 5 and Mn (NO 3 ) 2 .6H 2 O are added to the obtained particle size powder, mixed and ground again by ball milling, and dried and sieved. The sieved powder is calcined for 2 hours, pulverized again and a small amount of polyvinyl alcohol (PVA) aqueous solution is added as a binder and granulated. After the molded powder is press-molded, the molded body is kept at 500 ° C. for a period of time to remove the PVA binder and sintered at 1200 ° C.
이하, 실시예에 의해 본 발명을 더욱 구체적으로 설명한다.Hereinafter, the present invention will be described in more detail with reference to Examples.
<실시예><Example>
출발 원료로서 99.9% 이상의 순도를 갖는 PbO, ZrO2및 TiO2를 하기 표 1에 나타낸 조성 비율로 정확히 칭량하였다.PbO, ZrO 2 and TiO 2 having a purity of at least 99.9% as starting materials were weighed accurately in the composition ratios shown in Table 1 below.
이 때, PbO를 목적량의 3 중량% 만큼 과량으로 첨가한 이유는 PbO가 휘발성이 크기 때문이다. 칭량된 원료를 메틸 알콜과 ZrO2볼을 사용하여 2시간 동안 볼 밀링한 후, 건조시켜 80 메쉬 표준체로 체질하였다. 수득된 분말에 하기 표 2에 나타낸 첨가제 조성에 따라 Nb2O5및 Mn(NO3)2·6H2O를 첨가한 9 종류의 배치를 만들었다. 각 배치는 10시간 동안 다시 볼 밀링한 후 건조시켜 건조된 분말을 다시 80 메쉬 표준체로 체질하였다. 체질된 분말은 850℃에서 2시간 동안 하소하였고 다시 분쇄한 후, 성형을 돕기 위해 결합제로서 농도 5%의 PVA 수용액을 하소된 분말 기준으로 2 중량% 첨가하였다. 하소된 분말에 PVA 수용액을 첨가한 후 100 메쉬 표준체를 사용하여 조립화하였다. 조립화된 분말을 지름 12 mm의 주형을 사용하여 3 x 107Pa의 압력으로 일축 가압 성형한 후, 다시 2 x 108Pa의 압력으로 정수압 성형시켰다. 성형체를 500℃에서 2시간 동안 유지하여 PVA 결합제를 제거하였으며, 이 후 300℃/hr로 1200℃까지 승온시킨 후 1200℃에서 2시간동안 소결하였다. 소결할 때는, PbO의 휘발을 억제하기 위해 이중 알루미나 도가니와, PbZrO3및 ZrO2를 혼합한 분위기 분말을 사용하였다.At this time, the reason why PbO is added in excess of 3% by weight of the target amount is that PbO has high volatility. The weighed raw material was ball milled for 2 hours using methyl alcohol and ZrO 2 balls, then dried and sieved to 80 mesh standards. Nine kinds of batches were prepared in which the obtained powder was added with Nb 2 O 5 and Mn (NO 3 ) 2 .6H 2 O in accordance with the additive composition shown in Table 2 below. Each batch was again ball milled for 10 hours and dried to sift the dried powder back to 80 mesh standards. The sieved powder was calcined at 850 ° C. for 2 hours and crushed again, and then 2% by weight of a 5% aqueous PVA solution as a binder was added as a binder to aid molding. PVA aqueous solution was added to the calcined powder and then granulated using 100 mesh standards. The granulated powder was uniaxially press-molded at a pressure of 3 × 10 7 Pa using a mold having a diameter of 12 mm, and then hydrostatically molded at a pressure of 2 × 10 8 Pa. The molded body was maintained at 500 ° C. for 2 hours to remove the PVA binder, after which the temperature was raised to 300 ° C./hr to 1200 ° C. and then sintered at 1200 ° C. for 2 hours. When sintering, was used as a double alumina crucible and, PbZrO 3 powder and atmosphere a mixture of ZrO 2 in order to suppress volatilization of PbO.
소결물은 최종적인 시편의 치수가 직경 10 mm, 두께 1 mm가 되도록 SiC 연마지 (#1000, #2000)를 사용하여 연마하였다. 연마 후 은 페이스트를 시편의 양쪽 면에 바르고, 600℃에서 30분간 열처리하여 전극을 형성하였다. 압전 물성은 국제 표준인 공진반공진법을 사용하고, k값은 경방향 값인 kp로서 측정하였다. 전계 인가 변위의 측정을 위하여 변위 게이지를 전극의 한쪽 면에 부착시켰다. 시편과 게이지는 함께 실리콘 오일에 담그어 실제 압전 액츄에이터가 사용되는 온도 범위라고 할 수 있는 -30℃에서 +85℃의 온도 범위 사이에서 1.5 kV/mm의 전압 인가에 따른 발생 변위를 측정하였다. 온도 강하는 드라이아이스에 의하고 온도 상승은 히터에 의하였다.The sinter was polished using SiC abrasive paper (# 1000, # 2000) so that the final specimens had dimensions of 10 mm in diameter and 1 mm in thickness. After polishing, silver paste was applied to both sides of the specimen and heat-treated at 600 ° C. for 30 minutes to form electrodes. The piezoelectric properties were measured using the resonance anti-resonance method, which is an international standard, and the k value was measured as k p, which is a radial value. A displacement gauge was attached to one side of the electrode for the measurement of field applied displacement. The specimen and gauge were immersed in silicone oil together to measure the displacement produced by the application of a voltage of 1.5 kV / mm between the temperature range of -30 ° C to + 85 ° C, which is the temperature range in which the actual piezo actuator is used. The temperature drop was caused by dry ice and the temperature increase was caused by a heater.
상술한 바와 같이 제조한 세라믹 조성물에 전계 인가시, 세라믹 조성물이 나타내는 압전 특성 및 변위 특성을 하기 표 2에 나타내었다.The piezoelectric and displacement characteristics of the ceramic composition when the electric field is applied to the ceramic composition prepared as described above are shown in Table 2 below.
상기 표 2의 결과에서 순수한 PZT에 Nb2O5의 첨가량을 증가시킴에 따라 kp는 매우 증가하는데 이는 전형적인 전자 공여체 첨가 효과이다. 순수한 PZT에 Nb2O5만을 첨가하는 경우 그 효과는 1.0 중량% 첨가시 극대화되는 것으로 나타났으며, 이 때 발생 변위는 매우 커서 1,150x10-6에 이르는 것으로 나타났다. 그러나 발생 변위의 온도 계수는 +45% ∼ -50% 사이에서 비교적 큰 값을 나타내었다.In the results of Table 2, k p increases greatly with increasing the amount of Nb 2 O 5 added to pure PZT, which is a typical electron donor addition effect. When only Nb 2 O 5 was added to pure PZT, the effect was maximized when 1.0 wt% was added, and the generated displacement was very large, reaching 1,150 × 10 −6 . However, the temperature coefficient of the generated displacement showed a relatively large value between + 45% and -50%.
1.0 중량%의 Nb2O5가 첨가된 조성에서 Mn(NO3)2·6H2O의 첨가량을 증가시키면 Kp및 발생 변위는 감소되었으나 온도 변화에 따른 변위의 안정성은 매우 우수해지는 것으로 나타났다. 0.6 중량%의 Mn(NO3)2·6H2O를 첨가한 실시예 8의 경우 +0% ∼ -15% 사이의 매우 안정한 온도 특성을 나타내었으며, 0.75 중량%의 Mn(NO3)2·6H2O가 첨가된 실시예 9의 경우 온도 특성의 추가적인 개선 효과는 미약한데 반하여 발생 변위는 더욱 감소하였다.Increasing the amount of Mn (NO 3 ) 2 · 6H 2 O in the composition containing 1.0% by weight of Nb 2 O 5 decreased K p and the generated displacement, but the stability of the displacement with temperature was very excellent. Example 8 with 0.6% by weight of Mn (NO 3 ) 2 .6H 2 O showed very stable temperature characteristics between + 0% and -15%, and 0.75% by weight of Mn (NO 3 ) 2. In Example 9 to which 6H 2 O was added, the effect of further improving the temperature characteristic was slight, while the occurrence displacement was further reduced.
본 발명에 따라 PZT 기본 조성에 Nb2O5와 Mn(NO3)2·6H2O를 적정량 혼합하여 제조한 압전 액츄에이터용 세라믹 조성물은 단위 전계 인가에 따른 발생 변위가 크면서도 온도 특성이 우수하다.According to the present invention, a ceramic composition for piezoelectric actuators prepared by mixing an appropriate amount of Nb 2 O 5 and Mn (NO 3 ) 2 · 6H 2 O in a PZT basic composition has a high temperature characteristic while generating large displacements due to unit electric field application. .
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| JPH09132456A (en) * | 1995-11-08 | 1997-05-20 | Murata Mfg Co Ltd | Piezoelectric porcelain |
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