KR100320557B1 - 전자밸브집합체용 압력조절밸브 및 그것을 구비한 전자밸브조립체 - Google Patents
전자밸브집합체용 압력조절밸브 및 그것을 구비한 전자밸브조립체 Download PDFInfo
- Publication number
- KR100320557B1 KR100320557B1 KR1019990026445A KR19990026445A KR100320557B1 KR 100320557 B1 KR100320557 B1 KR 100320557B1 KR 1019990026445 A KR1019990026445 A KR 1019990026445A KR 19990026445 A KR19990026445 A KR 19990026445A KR 100320557 B1 KR100320557 B1 KR 100320557B1
- Authority
- KR
- South Korea
- Prior art keywords
- pressure
- supply
- solenoid valve
- valve
- valve assembly
- Prior art date
Links
- 230000001105 regulatory effect Effects 0.000 claims abstract description 76
- 239000012530 fluid Substances 0.000 claims abstract description 66
- 230000000712 assembly Effects 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 2
- 230000029058 respiratory gaseous exchange Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
- F15B13/0839—Stacked plate type valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/028—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0821—Attachment or sealing of modular units to each other
- F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0864—Signalling means, e.g. LEDs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0896—Assembly of modular units using different types or sizes of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/30525—Directional control valves, e.g. 4/3-directional control valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/3056—Assemblies of multiple valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/365—Directional control combined with flow control and pressure control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87169—Supply and exhaust
- Y10T137/87193—Pilot-actuated
- Y10T137/87209—Electric
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Control Of Fluid Pressure (AREA)
- Valve Housings (AREA)
- Safety Valves (AREA)
- Magnetically Actuated Valves (AREA)
Abstract
Description
Claims (5)
- 복수의 병설한 전자밸브에 그것들을 관통하는 공급유로 및 배출유로를 형성한 전자밸브집합체에 있어서의 상기한 공급유로에, 조압된 압력유체를 공급하는 압력조절밸브에 있어서,외부에서 압력유체를 공급하는 공급구 및 외부에의 배기구를 갖는 급배기블럭과 상기 전자밸브집합체와의 사이에 장착하는 조절밸브 본체에; 급배기블럭의 공급구에 연통하는 입력구와; 전자밸브집합체에 관통하여 설치된 공급유로에 연통하는 출력구와; 급배기블럭의 공급구로부터 공급되는 압력유체를 조압하여, 상기 출력구를 통과시키어 전자밸브집합체의 공급유로에 2차압을 출력하는 조압기구와; 상기 전자밸브집합체의 배출유로와 급배기블럭의 배기구를 직접적으로 연통하게 하는 배기로를 설치한 것을 특징으로 하는 전자밸브집합체용 압력조절밸브.
- 제 1항에 있어서, 조절밸브 본체에 설치한 조압기구를, 상기한 조절밸브 본체 내에, 전자밸브집합체와의 접합면에 평행히 설치된 밸브공을 갖고 있어, 이 밸브공에 조압밸브봉을 윤활자재에 삽입하여, 상기 조압밸브봉에, 밸브공에 설치한 밸브자리에 붙였다떼었다 하여 입력구와 출력구와의 사이의 유로를 개폐하는 밸브부재를 설치함와 함께, 상기 조압밸브봉의 양단에, 상기출력구의 유체압력에 근거하는 작용력 및 2차압을 설정하는 조압용수철의 탄력에 따라 상기 밸브부재에 의한 밸브자리의 열린 정도를 설정하고, 2차압을 조압용수철에 의한 설정치에 조압하는밸브봉가세수단을 부설하는 것에 의해 구성한 것을 특징으로 하는 전자밸브집합체용 압력조절밸브.
- 복수의 전자밸브를 병설하여, 그것들을 관통하는 공급유로 및 배출유로를 형성하여 이루어지는 전자밸브집합체와; 상기한 공급유로를 통해서 조압된 압력유체를 공급하는 압력조절밸브와; 외부에서 압력유체를 공급하는 공급구 및 외부에의 배기구를 갖는 급배기블럭과; 그것들의 전자밸브집합체, 압력조절밸브 및 급배기블럭을 병설한 상태로 연결하는 연결수단을 구비하고,전자밸브집합체와 급배기블럭과의 사이에 장착하는 상기 압력조절밸브는, 조절밸브 본체에; 급배기블럭의 공급구에 연통하는 입력구와; 전자밸브집합체에 관통하여 설치한 공급유로에 연통하는 출력구와; 급배기블럭의 공급구로부터 공급되는 압력유체를 조압하여, 상기 출력구를 통해서 전자밸브집합체의 공급유로에 2차압을 출력하는 조압기구와; 상기전자밸브집합체의 배출유로와 급배기블럭의 배기구를 직접적으로 연통시키는 배기로를 설치하는것에 의해 구성한 것을 특징으로 하는 압력조절밸브을 구비한 전자밸브조립체.
- 제 3항에 있어서, 조절밸브 본체에 설치한 조압기구를, 상기한 조절밸브 본체 내에, 전자밸브집합체와의 접합면에 평행히 설치된 밸브공을 갖고 있어, 이 밸브공에 조압밸브봉을 윤활자재에 삽입하여, 상기 조압밸브봉에, 밸브공에 설치한 밸브자리에 붙였다떼었다 하여 입력구와 출력구와의 사이의 유로를 개폐하는 밸브부재를 설치함와 함께, 상기 조압밸브봉의 양단에, 상기출력구의 유체압력에 근거하는 작용력 및 2차압을 설정하는 조압용수철의 탄력에 따라 상기 밸브부재에 의한 밸브자리의 열린 정도를 설정하고, 2차압을 조압용수철에 의한 설정치에 조압하는 밸브봉가세수단을 부설하는 것에 의해 구성한 것을 특징으로 하는 압력조절밸브을 구비한 전자밸브조립체.
- 제 3항 또는 4항에 있어서, 전자밸브집합체, 압력조절밸브 및 급배기블럭의 복수조를 단일의 연결수단에 의해 연결한 것을 특징으로 하는 압력조절밸브을 구비한 전자밸브조립체.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP98-199046 | 1998-07-14 | ||
JP19904698A JP4029417B2 (ja) | 1998-07-14 | 1998-07-14 | 電磁弁集合体用圧力調節弁及びそれを備えた電磁弁組立体 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000011424A KR20000011424A (ko) | 2000-02-25 |
KR100320557B1 true KR100320557B1 (ko) | 2002-01-16 |
Family
ID=16401222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990026445A KR100320557B1 (ko) | 1998-07-14 | 1999-07-02 | 전자밸브집합체용 압력조절밸브 및 그것을 구비한 전자밸브조립체 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6170520B1 (ko) |
EP (1) | EP0972948B1 (ko) |
JP (1) | JP4029417B2 (ko) |
KR (1) | KR100320557B1 (ko) |
CN (1) | CN1115501C (ko) |
DE (1) | DE69923887T2 (ko) |
TW (1) | TW405668U (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10019254C2 (de) * | 2000-04-18 | 2002-04-25 | Brueninghaus Hydromatik Gmbh | Drucksteuerventil |
JP4935604B2 (ja) | 2006-11-27 | 2012-05-23 | 住友化学株式会社 | 担持酸化ルテニウムの製造方法 |
DE102007038611A1 (de) * | 2007-08-16 | 2009-02-19 | Festo Ag & Co. Kg | Ventilmodul |
DE102007039663B4 (de) * | 2007-08-22 | 2011-01-13 | Robert Bosch Gmbh | Ventilanordnung mit Diagnosemitteln zum Feststellen eines Wartungsbedarfs |
US9022067B2 (en) * | 2008-10-09 | 2015-05-05 | Eaton Corporation | Dual variable valve solenoid module |
US20100270487A1 (en) * | 2009-04-22 | 2010-10-28 | Eaton Corporation | Electro-hydraulic poppet valve with supply pressure unloading function |
CN108204472A (zh) * | 2015-11-23 | 2018-06-26 | 吴小再 | 二位二通电磁阀及其工作方法 |
CN109204285B (zh) * | 2018-10-30 | 2023-10-27 | 宁波佳尔灵气动机械有限公司 | 一种辅助刹车阀 |
EP3738694B1 (de) * | 2019-05-14 | 2022-06-29 | Bühler AG | Hydraulik-vorrichtung für eine druckgiessmaschine |
CN111810483A (zh) * | 2020-08-04 | 2020-10-23 | 涌镇液压机械(上海)有限公司 | 电液阀换向防冲击结构 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2651324A (en) | 1949-11-01 | 1953-09-08 | New York Air Brake Co | Multiple control valve |
DE1173751B (de) | 1961-08-14 | 1964-07-09 | Kaemper Maschb G M B H | Steuereinrichtung fuer vorzugsweise mehrere von einer Pumpe versorgte hydraulische Antriebe |
DE1259662B (de) | 1964-10-30 | 1968-01-25 | Karl Marx Stadt Ind Werke | Hydraulische oder pneumatische Steuereinrichtung |
US3513876A (en) | 1968-04-09 | 1970-05-26 | Akro Tec Inc | Valve manifold module and system |
DE1775467B1 (de) | 1968-08-10 | 1971-05-27 | Kracht Pumpen Motoren | Mehrfachsteuerventil mit ungeteiltem gegossenem gehaeuse |
DE2022462A1 (de) | 1969-06-03 | 1971-01-28 | Schwermaschb Verlade Und Trans | Druckbegrenzungsventil fuer Blockwegeventile |
TW347882U (en) | 1996-08-01 | 1998-12-11 | Smc Corp | Pressure-control valve mounted on a base-mount selector valve |
JP3561593B2 (ja) | 1996-10-29 | 2004-09-02 | Smc株式会社 | 切換弁用圧力調節弁 |
TW377835U (en) | 1997-04-03 | 1999-12-21 | Smc Corp | Pressure regulating valve used for base type transfer valve |
-
1998
- 1998-07-14 JP JP19904698A patent/JP4029417B2/ja not_active Expired - Fee Related
-
1999
- 1999-06-17 TW TW088210072U patent/TW405668U/zh not_active IP Right Cessation
- 1999-06-18 US US09/335,523 patent/US6170520B1/en not_active Expired - Lifetime
- 1999-07-02 KR KR1019990026445A patent/KR100320557B1/ko not_active IP Right Cessation
- 1999-07-13 EP EP99305555A patent/EP0972948B1/en not_active Expired - Lifetime
- 1999-07-13 DE DE69923887T patent/DE69923887T2/de not_active Expired - Lifetime
- 1999-07-14 CN CN99110446A patent/CN1115501C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69923887D1 (de) | 2005-04-07 |
JP4029417B2 (ja) | 2008-01-09 |
JP2000028021A (ja) | 2000-01-25 |
TW405668U (en) | 2000-09-11 |
US6170520B1 (en) | 2001-01-09 |
EP0972948A3 (en) | 2000-07-12 |
CN1242486A (zh) | 2000-01-26 |
CN1115501C (zh) | 2003-07-23 |
DE69923887T2 (de) | 2006-02-16 |
EP0972948A2 (en) | 2000-01-19 |
KR20000011424A (ko) | 2000-02-25 |
EP0972948B1 (en) | 2005-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100292544B1 (ko) | 파일럿솔레노이드제어밸브및이를이용한유압식제어장치 | |
KR100320557B1 (ko) | 전자밸브집합체용 압력조절밸브 및 그것을 구비한 전자밸브조립체 | |
US20070290151A1 (en) | Valve | |
CA1206836A (en) | Pressure regulating valve | |
KR100261985B1 (ko) | 베이스부착형전환밸브에부착하기위한압력조절밸브 | |
EP0869418B1 (en) | Pressure regulating valve mounted in base-mounted transfer valve | |
US8408237B2 (en) | Modular spool valve | |
KR100244540B1 (ko) | 베이스부착형 전환밸브에 부착하기 위한 압력조절밸브 | |
GB2395767A (en) | Pressure compensated pilot operated check valve | |
US4856558A (en) | Flapper control valve | |
AU2017200677B2 (en) | Proportional pressure controller with isolation valve assembly | |
KR100438637B1 (ko) | 스페이서형 감압밸브 | |
US6257277B1 (en) | Modular multiple output pneumatic pressure valve | |
GB2343935A (en) | Multi-configuration pilot valve | |
KR102403885B1 (ko) | 밸브 장치 및 유체 제어 장치 | |
JPS5983808A (ja) | サ−ボ弁ならびにその駆動方法 | |
JP2679934B2 (ja) | 電磁弁マニホールド | |
KR100928405B1 (ko) | 가스 교환 밸브 제어용 장치 | |
JP2581853Y2 (ja) | 圧力補償弁 | |
RU2185652C2 (ru) | Регулятор расхода жидкости | |
US20040000340A1 (en) | Pressure control apparatus | |
GB2040510A (en) | Servovalve |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121221 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20131220 Year of fee payment: 13 |
|
FPAY | Annual fee payment |
Payment date: 20141219 Year of fee payment: 14 |
|
FPAY | Annual fee payment |
Payment date: 20151218 Year of fee payment: 15 |
|
FPAY | Annual fee payment |
Payment date: 20161216 Year of fee payment: 16 |
|
FPAY | Annual fee payment |
Payment date: 20181220 Year of fee payment: 18 |
|
EXPY | Expiration of term |