KR100210704B1 - Portable apparatus for formation of liquid nitrogen - Google Patents
Portable apparatus for formation of liquid nitrogen Download PDFInfo
- Publication number
- KR100210704B1 KR100210704B1 KR1019930000561A KR930000561A KR100210704B1 KR 100210704 B1 KR100210704 B1 KR 100210704B1 KR 1019930000561 A KR1019930000561 A KR 1019930000561A KR 930000561 A KR930000561 A KR 930000561A KR 100210704 B1 KR100210704 B1 KR 100210704B1
- Authority
- KR
- South Korea
- Prior art keywords
- pressure
- storage tank
- gas
- refrigerant storage
- liquid nitrogen
- Prior art date
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 56
- 239000007788 liquid Substances 0.000 title claims abstract description 50
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000007789 gas Substances 0.000 claims abstract description 51
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 44
- 238000000926 separation method Methods 0.000 claims abstract description 23
- 239000003507 refrigerant Substances 0.000 claims description 71
- 238000001816 cooling Methods 0.000 claims description 36
- 239000012535 impurity Substances 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000007872 degassing Methods 0.000 claims description 5
- 238000009833 condensation Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 2
- 230000001737 promoting effect Effects 0.000 claims 1
- 238000007710 freezing Methods 0.000 abstract description 16
- 230000008014 freezing Effects 0.000 abstract description 16
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000009413 insulation Methods 0.000 abstract description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 239000001569 carbon dioxide Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000002826 coolant Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005481 NMR spectroscopy Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/0002—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
- F25J1/0012—Primary atmospheric gases, e.g. air
- F25J1/0015—Nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0244—Operation; Control and regulation; Instrumentation
- F25J1/0254—Operation; Control and regulation; Instrumentation controlling particular process parameter, e.g. pressure, temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
- F25J1/0261—Details of cold box insulation, housing and internal structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
- F25J3/04078—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression
- F25J3/04084—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression of nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
- F25J3/04109—Arrangements of compressors and /or their drivers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2210/00—Processes characterised by the type or other details of the feed stream
- F25J2210/40—Air or oxygen enriched air, i.e. generally less than 30mol% of O2
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/04—Recovery of liquid products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
극저온냉동기를 배치한 단열용기(1)내에, 공기분리장치(4)내에서 대기로부터 분리정제된 질소가스를 공급하여 액체질소를 제조하는 장치로서, 공기분리장치(4)의 제품가스조(20)내의 압력을 검출하는 압력센서(21)와, 단열용기(1)내의 부압력을 검출하는 부압센서(16)를 각각 배치하여, 양 센서(21)(16)의 적어도 한 쪽이 소정압력으로 도달한 것으로, 공급되는 질소가스중에 함유되어 있는 불순가스의 동결을 검출하고, 이 양 센서의 어느 것의 검출작동에 의하여 극저온냉동기의 운전을 정지시키도록 하였다.An apparatus for producing liquid nitrogen by supplying purified nitrogen gas separated from the atmosphere in an air separation device 4 in an insulated container 1 in which a cryogenic chiller is arranged, the product gas tank 20 of the air separation device 4. The pressure sensor 21 which detects the pressure in the inside) and the negative pressure sensor 16 which detects the negative pressure in the heat insulation container 1 are arrange | positioned, respectively, and at least one of both sensors 21 and 16 is made into predetermined pressure. When it reached, the freezing of the impure gas contained in the nitrogen gas supplied was detected, and the operation | movement of the cryogenic freezer was stopped by the detection operation of either of these sensors.
Description
제1도는 본 발명의 개략구성도.1 is a schematic configuration diagram of the present invention.
제2도는 본 발명을 구성하는 단열용기의 요부 종단면도.Figure 2 is a longitudinal sectional view of the main portion of the heat insulating container constituting the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 냉매저장조 2 : 냉각헤드1: refrigerant storage tank 2: cooling head
3 : 극저온 냉동기 4 : 공기분리장치3: cryogenic freezer 4: air separator
6 : 냉각단 7 : 팬6: cooling stage 7: fan
9 : 불순가스제거 정제기 11 : 케이싱9: impurity gas removal purifier 11: casing
12 : 금속사 14 : 기부 플랜지12: metal yarn 14: base flange
17 : 제어장치 19 : 안전밸브17: control device 19: safety valve
20 : 제품조 23 : 유량센서20: product tank 23: flow sensor
본 발명은, 예컨대 초전도자석형 핵자기 공명장치(SCM-NMR) 등의 이과학기기(理科學機器)에 냉열원으로 공급되는 액체질소를 간단하게 제조하는 장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus for simply manufacturing liquid nitrogen supplied as a cold heat source to a scientific apparatus such as a superconducting magnet nuclear magnetic resonance apparatus (SCM-NMR), for example.
종래, 실험실등에서 간편하게 액체질소를 제조하기 위한 장치로서, 단열용기로 형성한 냉매저장조의 상단개구부로부터 극저온냉동기의 냉각헤드를 냉매저장조에 돌입배치하고, 이 냉매저장조에 공기분리장치로 대기로부터 분리한 질소가스를 기체상태로 도입하여, 냉각헤드에 발생하는 냉열을 도입질소가스에 작용시켜 액화시키도록 한 것이 있다.Conventionally, as a device for easily producing liquid nitrogen in a laboratory or the like, a cooling head of a cryogenic freezer is placed in a refrigerant storage tank from an upper opening of a refrigerant storage tank formed by an insulated container, and the refrigerant storage tank is separated from the air by an air separation device. Nitrogen gas is introduced in a gaseous state, and cooling heat generated in the cooling head is applied to the introduced nitrogen gas to liquefy.
이 경우, 공기분리장치로는 대기중의 수소나 헬륨가스등의 저빙점가스, 또는 수분, 이산화탄소가스를 완전히 제거할 수 없기 때문에, 공기분리장치로 분리생성된 질소는 저빙점 가스나 수분, 이산화탄소가스등의 불순물 성분을 함유한 상태로 단열용기 내에 공급된다. 이 불순물로서의 수분이나 이산화탄소의 빙점은 질소에 비하여 높기 때문에, 이 수분이나 이산화탄소가스가 극저온냉동기의 냉각헤드에 발생하는 냉열로 액화·동결되어 냉매저장조내에서의 질소가스 공급로를 폐쇄시켜 버림으로써 극저온냉동기가 공운전의 상태로 되기도 하고, 공기분리장치의 압축기에 큰 배압이 걸리기도 하여, 냉매저장조나 공기분리장치에 큰 부하가 작용하는 문제가 있었다.In this case, since the air separation device cannot completely remove the freezing point gas such as hydrogen or helium gas, water, or carbon dioxide gas in the air, the nitrogen separated by the air separation device is used as the freezing point gas, water, carbon dioxide gas, etc. It is supplied in the heat insulation container in the state containing the impurity component of. The moisture and carbon freezing point of this impurity are higher than that of nitrogen, so the moisture or carbon dioxide gas is liquefied and frozen by the cold heat generated in the cooling head of the cryogenic freezer, thereby closing the nitrogen gas supply passage in the refrigerant storage tank, thereby The refrigerator may be in an idle state, and a large back pressure may be applied to the compressor of the air separation device, and a large load may be applied to the refrigerant storage tank or the air separation device.
한편, 대기중의 수소나 헬륨가스 등의 저빙점가스는, 액화질소제조용의 냉동기에서 발생하는 냉열온도로는 액화되지 않고 가스체로 단열용기내의 상부에 체류하게 된다. 그리고, 단열용기내에 이 저빙점가스의 체류량이 증대하면, 질소가스의 냉각헤드와의 사이에 저빙점 가스층이 위치하여 질소가스와 냉각헤드와의 냉열교환이 저해됨으로써 질소가스의 액화량이 감소하는 문제도 있었다.On the other hand, the low-point gas such as hydrogen or helium gas in the atmosphere is not liquefied at the cold heat temperature generated in the freezer for liquefied nitrogen production, but stays in the upper portion of the heat insulation container as a gas body. Then, if the amount of retention of this freezing point gas in the insulated container increases, the freezing point gas layer is located between the cooling heads of the nitrogen gas, which inhibits cold heat exchange between the nitrogen gas and the cooling heads, thereby reducing the amount of liquefied nitrogen gas. There was also.
본 발명의 첫 번째 목적은, 냉매저장조나 공기분리장치에 큰 부하가 작용하는 것을 방지할 수 있는 액체질소 제조장치를 제공하는 것이다.It is a first object of the present invention to provide a liquid nitrogen production apparatus capable of preventing a large load from acting on a refrigerant storage tank or an air separation device.
이를 위하여, 본 발명에서는, 극저온 냉동기를 배치한 단열용기에 공기분리장치로 대기로부터 분리한 질소가스를 공급하는 것에 의하여, 단열용기내에서 질소가스를 액화시켜 단열용기내에 액화질소를 제조하도록 한 액화질소의 제조장치에 있어서, 공기분리장치의 제품조(製品槽)에 압력검출기기를 배치함과 함께, 냉매저장조에 부압 압력센서를 배치한다. 제품조의 내압이 설정압력에 도달한 것을 압력검출기기가 검출하거나, 냉매저장조 내부가 부압으로 된 것을 부압압력 센서가 검출하거나 하는 것에 의하여 극저온 냉동기의 냉각헤드의 운전을 정지함과 아울러 경보를 발생하도록 구성한 것을 특징으로 한다.To this end, in the present invention, by supplying the nitrogen gas separated from the atmosphere to the insulated container in which the cryogenic freezer is disposed, the nitrogen gas is liquefied in the insulated container to produce liquefied nitrogen in the insulated container. In the nitrogen production apparatus, a pressure detector is arranged in a product tank of an air separation device, and a negative pressure sensor is disposed in a refrigerant storage tank. The pressure detecting device detects that the internal pressure of the product tank has reached the set pressure, or the negative pressure sensor detects that the inside of the refrigerant reservoir has become negative pressure, thereby stopping the operation of the cooling head of the cryogenic freezer and generating an alarm. It is characterized by.
또한 본 발명의 두 번째 목적은, 냉매저장조 내에 체류하는 가스체를 자동배출하는 것에 의하여, 냉매저장조에서 저빙점가스의 체류를 없게하여 고능력의 액체질소 제조장치를 제공하는 것이다.In addition, a second object of the present invention is to provide a liquid nitrogen production apparatus having a high capacity by eliminating the retention of the low freezing point gas in the refrigerant storage tank by automatically discharging the gas body remaining in the refrigerant storage tank.
이를 위하여, 본 발명에서는, 극저온냉동기를 배치한 단열용기에 공기분리장치로 대기로부터 분리한 질소가스를 공급하는 것에 의하여, 단열용기내에서 질소가스를 액화시켜, 단열용기내에 액화질소를 제조하도록 한 액화질소의 제조장치에 있어서, 단열용기의 상면개구부를 폐쇄하고 있는 기부플랜지로부터 압력연통관을 도출한다.To this end, in the present invention, by supplying the nitrogen gas separated from the atmosphere to the insulated container in which the cryogenic chiller is disposed, the nitrogen gas separated from the atmosphere is liquefied to produce liquefied nitrogen in the insulated container. In the apparatus for producing liquefied nitrogen, a pressure communication tube is derived from a base flange closing the upper opening of the heat insulating container.
이 압력도출관에 단열용기내의 압력이 대기압보다도 조금 높은 압력으로 설정한 안전밸브를 배치한 것을 특징으로 한다.The pressure relief pipe is characterized by arranging a safety valve in which the pressure in the heat insulation container is set at a pressure slightly higher than atmospheric pressure.
이하, 첨부도면에 의거하여 상세히 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail.
이 액체질소 제조장치는 단열용기로 구성한 냉매저장조(1)와, 이 냉매저장조(1)의 상단개구부에 냉각헤드(2)를 배치한 극저온 냉각기(3)와, 냉매저장조(1)에 냉매가스를 공급하는 압력진동식 공기분리장치(4)로 구성되어 있다. 또한, 공기분리장치(4)는 분자사식(分子篩式) 공기분리장치나 투과식 공기분리장치로 되어 있어도 좋다. 도면중 부호 5는 극저온냉각기(3)의 압축기 유니트이다.The liquid nitrogen production apparatus includes a refrigerant storage tank (1) composed of a heat insulating container, a cryogenic cooler (3) having a cooling head (2) disposed at an upper end opening of the refrigerant storage tank (1), and a refrigerant gas in the refrigerant storage tank (1). It consists of a pressure vibration type air separation device (4) for supplying the gas. The air separator 4 may be a molecular type air separator or a permeable air separator. Reference numeral 5 in the drawings denotes a compressor unit of the cryogenic cooler 3.
냉각헤드(2)의 냉각단(6)은 냉매저장조(1)의 상단개구부로부터 냉매저장조(1)내에 돌입하는 상태로 배치되어 있고, 냉각단(6)에 응축액화증진용 팬(7)이 열적으로 접속되어 있다. 또한, 냉매저장조(1)의 상단개구부에는, 냉각단(6)부분을 둘러싸는 상태로 단열재 링(8)이 배치되어 있고, 이 단열재 링(8)의 벽내부에 불순물가스제거 정제기(9)의 장착공(10)이 수직으로 투설되어 있다.The cooling stage 6 of the cooling head 2 is arranged so as to intrude into the refrigerant storage tank 1 from the upper end opening of the refrigerant storage tank 1, and the cooling stage 6 has a condensation liquefaction fan 7 in the cooling stage 6. It is thermally connected. In addition, the heat insulating material ring 8 is arranged at the upper end opening of the refrigerant storage tank 1 so as to surround the cooling end 6 portion, and the impurity gas removal purifier 9 is disposed inside the wall of the heat insulating material ring 8. Mounting holes 10 are vertically thrown.
불순가스제거 정제기(9)는, 황동등의 열전도성이 양호한 재질의 케이싱(11)내에 동 등의 열전도성이 양호한 금속사(金屬絲)(12)를 충진하고, 그 돌입선단부에 다공판(13)을 장착하여 구성되어 있다. 그리고, 이 불순물가스제거 정제기(9)는, 그 상단 집합부를 냉매저장조(1)의 상단개구부를 폐쇄하는 상태로 배치한 기부플랜지(14)에 탈착 가능한 상태로 기밀고정함과 함께, 그 하단 집합부분을 단열재 링(8)의 하측면에 따라 배치한 전열판(15)에 테이퍼결합에 의해 부착고정되어 있다. 이 전열판(15)은 동이나 알루미늄등의 열전도성이 양호한 금속으로 형성되어 있고, 그 일단부는 냉각단(6)에 열적으로 접속되어 있다.The impurity gas removal purifier 9 fills a metal yarn 12 having good thermal conductivity, such as copper, in a casing 11 made of a material having good thermal conductivity, such as brass, and has a porous plate ( 13) is mounted. The impurity gas removal purifier 9 is hermetically fixed in a state where the upper end assembly is detachably attached to the base flange 14 in which the upper end assembly is arranged in a state in which the upper end opening of the refrigerant storage tank 1 is closed. The part is fixed to the heat transfer plate 15 arranged along the lower surface of the heat insulating material ring 8 by tapering. The heat transfer plate 15 is made of a metal having good thermal conductivity such as copper or aluminum, and one end thereof is thermally connected to the cooling end 6.
또한, 냉매저장조(1)에는 접점을 가지는 압력계나 압력변환기(16)등으로 구성한 부압 압력센서(16)가 배치되어 있고, 이 부압 압력센서(16)로 냉매저장조(1)내의 압력이 규정압력 이하로 저하된 것을 검출하면 그 검출신호가 제어장치(17)에 입력되고, 제어장치(17)로부터의 출력으로 극저온 냉각기(3)의 냉각헤드(2)의 운전을 정지하도록 구성되어 있다.In addition, the refrigerant storage tank 1 is provided with a negative pressure pressure sensor 16 constituted by a pressure gauge or a pressure transducer 16 having a contact point, and the pressure in the refrigerant storage tank 1 is controlled by the negative pressure pressure sensor 16. When it detects a fall below, the detection signal is input into the control apparatus 17, and it is comprised so that the operation of the cooling head 2 of the cryogenic cooler 3 may be stopped by the output from the control apparatus 17. FIG.
이 부압 압력센서(16)는 냉매저장조(1)의 상단개구부를 폐쇄하고 있는 기부플랜지(14)의 냉각헤드를 삽입용 개구의 내주면부분에 연통되어 있는 압력연통관(18)에 장착되어 있고, 이 압력 연통관(18)의 도출선단부에 안전밸브(19)가 배치되어 있다. 이 안전밸브(19)의 작동설정압력은 계기압 0.3-0.5㎏/㎠의 범위로 설정되어 있다.This negative pressure pressure sensor 16 is attached to the pressure communication pipe 18 which communicates the cooling head of the base flange 14 which closes the upper end opening of the refrigerant storage tank 1 to the inner peripheral surface part of the insertion opening. A safety valve 19 is disposed at the leading end of the pressure communication tube 18. The operating set pressure of this safety valve 19 is set in the range of a gauge pressure of 0.3-0.5 kg / cm <2>.
한편, 공기분리장치(4)의 제품조(20)에는 접점을 가지는 압력계나 변환기등의 압력검출기기(21)가 배치되어 있고, 또한 공기분리장치(4)의 제품조(20)와 냉매저장조(1)에 장착한 불순가스제거 정제기(9)를 연통접속하는 질소가스 이송관(22)에 유량센서(23)가 배치되어 있다.On the other hand, in the product tank 20 of the air separation device 4, a pressure detector 21 such as a pressure gauge or a transducer having a contact point is disposed, and the product tank 20 and the refrigerant storage tank of the air separation device 4 are arranged. The flow rate sensor 23 is arrange | positioned in the nitrogen gas feed pipe 22 which connects and connects the impurity gas removal refiner 9 attached to (1).
그리고, 공기분리장치(4)의 압축기의 고장 또는 성능저하에 따라 강하하여, 제품조(20)내의 압력이 설정압력 이하로 된 것을 압력검출기기(21)가 검출하기도 하면, 그 검출신호가 제어장치(17)에 입력되고, 제어장치(17)로부터의 출력으로 극저온냉각기(3)의 냉각헤드(2)의 운전을 정지함과 함께, 경보를 발하도록 구성되어 있다.Then, if the pressure detecting device 21 detects that the pressure in the product tank 20 falls below the set pressure due to a failure or a decrease in the performance of the compressor of the air separation device 4, the detection signal is controlled. It is input to the apparatus 17, and it is comprised so that the operation | movement of the cooling head 2 of the cryogenic chiller 3 may be stopped, and an alarm will be output by the output from the control apparatus 17. FIG.
도면중 부호 24는 액체질소 이송관이고, 이 액체질소 이송관(24)은 그 일단을 냉매저장조(1)내의 저부까지 돌입함과 함께, 그 타단부를 초전도자석형 핵자기 공명장치(SCM-NMR)등의 액체질소 사용기기(25), 또한 액체질소 송출용 듀워병(Dewar vessel)(26)에 접속하고 있다. 따라서, 액체질소 이송관(24)이 사이폰관으로 작용하고, 냉매저장조(1)내의 압력으로 액체질소를 송출하도록 되어 있다.In the figure, reference numeral 24 denotes a liquid nitrogen transfer tube, and the liquid nitrogen transfer tube 24 enters one end to the bottom of the refrigerant storage tank 1 and the other end thereof is a superconducting magnet-type nuclear magnetic resonance apparatus (SCM-). A liquid nitrogen using device 25 such as NMR) and a Dewar vessel 26 for delivering liquid nitrogen are connected. Therefore, the liquid nitrogen transfer pipe 24 acts as a siphon tube and delivers liquid nitrogen at the pressure in the refrigerant storage tank 1.
질소가스 이송관(22)은 금속호스로 구성한 가요성관으로 구성되어 있다. 그리고, 그 질소가스 이송관(22)은 유량센서(23)와 불순가스제거 정제기(9)와의 사이로부터 분기로(27)를 분기도출하고, 이 분기로(27)의 선단부에 상개형(常開型)의 전자밸브(28)가 배치되어 있다. 또한, 각 액체질소 사용기기(25)에 접속되어 있는 액체질소 이송관(24)에는 상폐형(常閉型)의 전자밸브(29)가 배치되어 있다. 그리고, 각 전자밸브(28)(29)는 제어장치(17)로부터의 지령으로 밸브개폐 작동하도록 되어 있고, 분기로(27)의 선단부에 배치한 상개형의 전자밸브(28)는 액체질소의 사용기기(25)로의 이송시에 밸브폐쇄 작동되도록 되어 있다. 그리고, 이 분기로(27)의 선단부에 상개형의 전자밸브(28)로부터는 극저온냉각기(3)의 운전시에는 질소가스 이송관(22)을 흐르는 질소가스의 20-30% 정도의 가스가 방출되도록 되어 있다. 또한, 액체질소 이송관(24)은 연동관으로 구성되어 있고, 냉매저장조(1)밖에 위치하는 부분은 외면을 방수처리한 단열재로 피복되어 있다.The nitrogen gas delivery pipe 22 is composed of a flexible pipe composed of a metal hose. The nitrogen gas delivery pipe 22 branches out to the branch passage 27 between the flow rate sensor 23 and the impurity gas removal purifier 9, and is open to the tip of the branch passage 27. A solenoid valve 28 is arranged. In addition, an upper-closed solenoid valve 29 is disposed in the liquid nitrogen transfer pipe 24 connected to each liquid nitrogen using device 25. And each solenoid valve 28 and 29 is made to open and close a valve by the instruction | command from the control apparatus 17, and the upper type solenoid valve 28 arrange | positioned at the front-end | tip of the branch path 27 is made of liquid nitrogen. The valve closing operation is carried out at the time of transfer to the use device 25. From the upper solenoid valve 28 at the tip of this branch path 27, 20-30% of the nitrogen gas flowing through the nitrogen gas feed pipe 22 is operated during operation of the cryogenic cooler 3. It is intended to be released. In addition, the liquid nitrogen transfer pipe 24 is composed of a peristaltic pipe, and the portion located outside the refrigerant storage tank 1 is covered with a heat insulating material having a waterproof surface on the outside thereof.
그리고, 이 액체질소 제조장치에서는, 그 시동시에는, 우선 공기분리장치(4)가 기동하여 공기분리장치(4)의 제품조(20)의 압력이 상승하고, 질소가스가 질소가스 이송관(22)내를 흐르기 시작하여 이 질소가스 이송관(22)을 흐르는 질소가스량이 소정량에 도달한 것을 유량센서(23)가 검지하면, 극저온냉각기(3)의 운전을 개시하여 냉매저장조(1) 내에서 공기로부터 분리정제한 질소가스를 이용하여 냉매저장조(1)내에 액체질소를 생성한다. 이때, 공기분리장치(4)로 분리되지 않은 저빙점 가스나 수분·이산화탄소가스의 불순가스 중, 수분과 이산화탄소가스는 불순가스제거 정제기(9)내를 통과하는 사이에 냉각된 열전도성이 양호한 금속사(12)와 접속하여 응축부착되어 제거되므로 냉매저장조(1)내에는 고순도의 액체질소가 저장되게 된다.In this liquid nitrogen production apparatus, at the time of its start-up, first, the air separation device 4 is started, and the pressure of the product tank 20 of the air separation device 4 increases, so that nitrogen gas is transferred to the nitrogen gas transfer pipe ( 22. When the flow rate sensor 23 detects that the amount of nitrogen gas flowing through the nitrogen gas transfer pipe 22 has reached the predetermined amount, the operation of the cryogenic cooler 3 starts, and the refrigerant storage tank 1 Liquid nitrogen is produced in the refrigerant storage tank (1) using nitrogen gas purified from the air. At this time, the water and carbon dioxide gas of the low freezing point gas or the impurity gas of water and carbon dioxide gas which are not separated by the air separation device 4 pass through the inside of the impurity degassing purifier 9, and have a good thermal conductivity. Since the condenser is attached to and removed from the yarns 12, the liquid nitrogen of the high purity is stored in the refrigerant storage tank 1.
그리고, 극저온냉각기(3)를 사용하여 액체질소를 제조할 때에 가스도입로가 동결등으로 폐쇄되면, 냉매저장조(1)내부가 과냉각의 상태로 되어 냉매저장조(1)의 내압이 소정의 부압력보다도 낮게 되므로, 냉매저장조(1)내의 압력저하를 검출한 부압 압력센서(16)로부터의 신호에 의하여, 극저온냉각기(3)의 냉각헤드(2)의 운전을 정지함과 아울러 경보를 발하게 된다.When the gas introduction path is closed by freezing or the like when liquid nitrogen is produced using the cryogenic cooler 3, the inside of the refrigerant storage tank 1 is in a state of supercooling, and the internal pressure of the refrigerant storage tank 1 becomes a predetermined negative pressure. Since the pressure is lower than that, the signal from the negative pressure pressure sensor 16 that detects the pressure drop in the refrigerant storage tank 1 stops the operation of the cooling head 2 of the cryogenic cooler 3 and generates an alarm.
또한, 공기분리장치(4)의 압축기의 고장, 성능저하등에 의한 제품조(20)의 압력강하시에도, 제품조(20)로부터 송출되는 질소가스의 유량이 저하되므로 같은 작동을 한다.In addition, even when the pressure drop of the product tank 20 due to the failure of the compressor of the air separation device 4, the performance decrease, etc., the flow rate of the nitrogen gas sent from the product tank 20 is lowered, thereby performing the same operation.
이것에 의하여, 질소가스중에 혼입되어 있는 질소가스보다도 빙점이 높은 불순가스는, 불순가스제거 정제기(9)로 제거되기 때문에, 냉매저장조(1)내에는 불순물 혼입이 없는 고순도의 액화질소가 저장체류됨과 함께, 공기분리장치(4)의 기기의 이상이나 질소가스 도입계에서의 불순물 동결등에 의하여 질소가스의 공급유량이 저하하여, 냉매저장조(1)내부가 소정의 부압력보다도 저압으로 된 것을 부압 압력센서(16)가 검출하는 것에 의하여 극저온냉각기(3)의 냉각헤드(2)의 운전을 정지함과 아울러 경보를 발생하도록 구성되어 있어서 액체질소 제조장치를 장기간 안정하여 작동시킬 수가 있다.As a result, the impurity gas having a freezing point higher than that of the nitrogen gas mixed in the nitrogen gas is removed by the impurity degassing purifier 9, so that the high-purity liquid nitrogen containing no impurities is contained in the refrigerant storage tank 1. In addition, the supply flow rate of nitrogen gas decreases due to an abnormality in the equipment of the air separation device 4 or the freezing of impurities in the nitrogen gas introduction system, so that the inside of the refrigerant storage tank 1 is lower than the predetermined negative pressure. The detection by the pressure sensor 16 stops the operation of the cooling head 2 of the cryogenic cooler 3 and generates an alarm so that the liquid nitrogen production apparatus can be stably operated for a long time.
냉매저장조(1)로부터 액체질소 사용기기(25)로 액체질소를 이송하는 경우에는 극저온냉각기(3)의 운저을 정지한 상태로 냉매저장조(1)내에 질소가스를 도입하는 것에 의하여 행해진다. 결국, 극저온냉각기(3)의 운전정지 상태로 액체질소 사용기기(25)에 배치한 냉매공급센서로부터의 액체질소 요구신호가 제어장치(17)에 입력되면, 제어장치(17)로부터의 지령으로 질소가스 이송관(22)의 분기로(27)에 배치한 상개형 전자밸브(28)를 밸브폐쇄 작동시킴과 함께 액체질소 이송관(24)에 배치한 상폐형 전자밸브(29)를 밸브개방 작동시킨다. 그리고 냉매저장조(1)내에 공기분리장치(4)로부터의 질소가스를 전량보내는 것에 의하여 냉매저장조(1)의 내압을 상승시켜, 이 상승한 냉매저장조(1)의 내압에 의해, 냉매저장조(1)내의 액체질소를 액체질소 사용기기(25)에 압출하여 자동적으로 공급한다.In the case of transferring liquid nitrogen from the refrigerant storage tank 1 to the liquid nitrogen using device 25, nitrogen gas is introduced into the refrigerant storage tank 1 while the cooler of the cryogenic cooler 3 is stopped. As a result, when the liquid nitrogen request signal from the refrigerant supply sensor disposed in the liquid nitrogen using device 25 in the operation stop state of the cryogenic cooler 3 is input to the control device 17, the command from the control device 17 is followed. The valve closing operation of the upper type solenoid valve 28 disposed in the branch passage 27 of the nitrogen gas transfer pipe 22 is performed, and the upper closing type solenoid valve 29 disposed in the liquid nitrogen transfer tube 24 is opened. It works. The internal pressure of the refrigerant storage tank 1 is increased by sending all of the nitrogen gas from the air separation device 4 into the refrigerant storage tank 1, and the refrigerant storage tank 1 is operated by the internal pressure of the elevated refrigerant storage tank 1. The liquid nitrogen inside is extruded to the liquid nitrogen using device 25 and automatically supplied.
그리고, 냉매공급센서가 액체질소 사용기기(25)내의 액체질소량이 소정량에 도달한 것을 검출하면, 질소가스 이송관(22)의 분기로(27)에 배치한 상개형 전자밸브(28)를 밸브개방 작동시킴과 함께 액체질소 이송관(24)에 배치한 상폐형 전자밸브(29)를 밸브폐쇄 작동시켜 공급을 정지한다.When the refrigerant supply sensor detects that the amount of liquid nitrogen in the liquid nitrogen using device 25 has reached a predetermined amount, the upper solenoid valve 28 disposed in the branch path 27 of the nitrogen gas delivery pipe 22 is opened. In addition to the valve opening operation, the closing operation of the upper-closed solenoid valve 29 disposed in the liquid nitrogen transfer pipe 24 stops the supply.
또한, 냉매저장조(1)에 유입하는 질소가스중에 혼입되어 있는 수소, 헬륨, 네온, 크세논, 크립톤 등의 저빙점 가스는, 냉매저장조(1)내에 유입하여도 냉각헤드(6)에 발생한 냉열로는 액화되지 않기 때문에, 냉매저장조(1)내의 상부에 가스체의 상태로 잔류하게 되지만, 이 잔류하고 있는 가스는 액체질소의 액체질소 사용기기(25)로의 이송작업시에, 안전밸브(19)로부터 질소가스와 함께 방출된다. 즉, 전술한 것처럼 액체질소의 이송시에는, 극저온냉각기(3)의 운전을 정지한 상태에서 냉매저장조(1)내에 질소가스를 공급하지만, 극저온냉각기(3)를 정지시킨 상태에서 냉매저장조(1)내에 질소가스를 공급하면, 냉매저장조(1)내의 압력이 상승하여 안전밸브(19)의 작동설정압에 도달하고, 안전밸브(19)가 작동하여 냉매저장조(1)로부터 질소가스가 방출된다. 이 때, 저빙점 가스는 냉매저장조(1)의 상부에 잔류하고 있기 때문에 안전밸브(19)의 작동으로 냉매저장조(1)내에 체류하고 있는 저빙점가스가 질소가스와 함께 냉매저장조(1)내에서 배출되게 된다.In addition, even if the freezing point gas, such as hydrogen, helium, neon, xenon, krypton, and the like, which is mixed in the nitrogen gas flowing into the refrigerant storage tank 1, flows into the refrigerant storage tank 1, the cooling heat path generated in the cooling head 6 Since the liquid is not liquefied, it remains in the state of a gaseous body in the upper portion of the refrigerant storage tank 1, but the remaining gas is transferred to the liquid nitrogen using device 25 during the transfer operation of the liquid nitrogen to the safety valve 19. It is released together with nitrogen gas from. That is, as described above, when the liquid nitrogen is transferred, nitrogen gas is supplied into the refrigerant storage tank 1 while the cryogenic cooler 3 is stopped, but the refrigerant storage tank 1 is stopped while the cryogenic cooler 3 is stopped. When nitrogen gas is supplied into the tank, the pressure in the refrigerant storage tank 1 rises to reach the operating set pressure of the safety valve 19, and the safety valve 19 is operated to release nitrogen gas from the refrigerant storage tank 1. . At this time, since the freezing point gas remains in the upper portion of the coolant storage tank 1, the freezing point gas remaining in the coolant storage tank 1 by the operation of the safety valve 19 is in the coolant storage tank 1 together with the nitrogen gas. Will be discharged from.
이것에 의하여, 냉매저장조(1)내에 질소온도로는 액화되지 않는 저빙점가스가 체류하는 것이 없게 되어, 액화질소를 효율이 좋게 제조할 수 있도록 되어 있다.As a result, the freezing point gas which is not liquefied at the nitrogen temperature in the refrigerant storage tank 1 does not remain, and the liquid nitrogen can be produced efficiently.
또한, 냉매공급센서나 전자밸브의 고장에 대응하기 위하여, 액체질소 사용기기(25)에 오버플로우 센서(30)를 배치하고, 이 오버플로우 센서(30)으로부터의 오버플로우 검출신호를 제어장치(17)에 입력하여, 제어장치(17)로부터의 출력으로 질소가스 이송관(22)의 분기로(27)에 배치한 상개형 전자밸브(28)를 밸브개방작동시켜 냉매저장조(1)의 가압을 개방하여, 액체질소의 이송을 긴급정지시키도록 구성되어 있다.In addition, in order to cope with a failure of the refrigerant supply sensor or the solenoid valve, the overflow sensor 30 is disposed in the liquid nitrogen using device 25, and the overflow detection signal from the overflow sensor 30 is controlled by a control device ( 17, the valve opening operation of the upper type solenoid valve 28 arranged in the branch path 27 of the nitrogen gas feed pipe 22 by the output from the control apparatus 17 pressurizes the refrigerant | coolant storage tank 1. It is configured to emergencyly stop the transfer of liquid nitrogen by opening the.
불순가스의 동결에 따라 불순가스제거 정제기(9)가 막힌 경우에는, 불순가스제거 정제기(9)를 냉매저장조(1)로부터 분해시키고, 재생처리후의 새로운 불순가스제거 정제기(9)를 냉매저장조(1)에 장착함과 함께 분해한 불순가스제거 정제기(9)를 질소가스 이송관(22)으로부터 분기도출한 가스방출구에 접속하여, 공기분리장치(4)에서 분리정제한 질소가스의 일부를 방출하는 것에 의해, 불순가스제거 정제기(9)내에 포착되어 있는 수분 및 이산화탄소가스는 질소가스에서 제거되어 불순가스제거 정제기(9)를 재생한다.When the impurity gas removal purifier 9 is clogged due to freezing of the impurity gas, the impurity gas removal purifier 9 is decomposed from the refrigerant storage tank 1, and the new impurity gas removal purifier 9 after the regeneration treatment is replaced with the refrigerant storage tank ( 1) and the denitrated gas removal purifier 9 which has been decomposed and connected to the gas outlet port branched out from the nitrogen gas delivery pipe 22, and a part of the nitrogen gas separated and purified by the air separation device 4 is removed. By releasing, the moisture and carbon dioxide gas trapped in the impurity degassing purifier 9 are removed from the nitrogen gas to regenerate the impurity degassing purifier 9.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930000561A KR100210704B1 (en) | 1993-01-18 | 1993-01-18 | Portable apparatus for formation of liquid nitrogen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930000561A KR100210704B1 (en) | 1993-01-18 | 1993-01-18 | Portable apparatus for formation of liquid nitrogen |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940018641A KR940018641A (en) | 1994-08-18 |
KR100210704B1 true KR100210704B1 (en) | 1999-07-15 |
Family
ID=19349725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930000561A KR100210704B1 (en) | 1993-01-18 | 1993-01-18 | Portable apparatus for formation of liquid nitrogen |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100210704B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006122393A1 (en) * | 2005-05-18 | 2006-11-23 | Shoji Kanamori | Compact cryogenic liquefaction system |
-
1993
- 1993-01-18 KR KR1019930000561A patent/KR100210704B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006122393A1 (en) * | 2005-05-18 | 2006-11-23 | Shoji Kanamori | Compact cryogenic liquefaction system |
Also Published As
Publication number | Publication date |
---|---|
KR940018641A (en) | 1994-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5327729A (en) | Simplified apparatus for producing liquid nitrogen | |
US20070271933A1 (en) | Cryogenic system | |
EP0235295B1 (en) | Oxygen gas production unit | |
KR900005985B1 (en) | High- purity nitrogen gas production equipment | |
JP2005310811A (en) | Superconductive magnet device | |
JPWO2006114887A1 (en) | Method and apparatus for producing slush fluid | |
KR100210704B1 (en) | Portable apparatus for formation of liquid nitrogen | |
CN1087825C (en) | Simplified apparatus for producing liquid nitrogen | |
JP2816959B2 (en) | Simple liquid nitrogen production equipment | |
US5386707A (en) | Withdrawal of cryogenic helium with low impurity from a vessel | |
JP2712096B2 (en) | Cryogenic liquid pumping method and apparatus | |
JPH0781778B2 (en) | Safety device for simple liquid nitrogen production equipment | |
JP3320772B2 (en) | Operation method of superconducting magnet device | |
JP2003075004A (en) | Cryogenic apparatus | |
JP4164203B2 (en) | Gas liquefaction recovery equipment | |
JP2006348877A (en) | Purge gas supply method for low temperature fluid transfer pump and its device | |
JP2005156051A (en) | Superconductive member cooling device, and its control method | |
JP3043089B2 (en) | Cryogenic liquid injection device | |
JP2010243017A (en) | Simplified liquid nitrogen manufacturing device | |
JP2004226020A (en) | Heater controller of helium gas purifier and control method | |
JPH0445740B2 (en) | ||
JPH0686963B2 (en) | Device for removing hydrogen etc. in the helium freeze liquefaction system | |
JP2691389B2 (en) | Method and apparatus for recovering fluorine-based gas | |
JPS5984405A (en) | Cryogenic cooling equipment | |
JPH06188465A (en) | Magnetic flux trap release method for superconductor device and device thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20060330 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |