JPWO2019229610A5 - - Google Patents

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JPWO2019229610A5
JPWO2019229610A5 JP2020566671A JP2020566671A JPWO2019229610A5 JP WO2019229610 A5 JPWO2019229610 A5 JP WO2019229610A5 JP 2020566671 A JP2020566671 A JP 2020566671A JP 2020566671 A JP2020566671 A JP 2020566671A JP WO2019229610 A5 JPWO2019229610 A5 JP WO2019229610A5
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Japan
Prior art keywords
polishing
layer
rotary tool
assembly
rigid support
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JP2020566671A
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Japanese (ja)
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JP2021525656A (en
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Priority claimed from PCT/IB2019/054339 external-priority patent/WO2019229610A1/en
Publication of JP2021525656A publication Critical patent/JP2021525656A/en
Publication of JPWO2019229610A5 publication Critical patent/JPWO2019229610A5/ja
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Claims (21)

研磨回転工具であって、
前記回転工具の回転軸を画定するシャンクを備える研磨アセンブリホルダと、
研磨アセンブリであって、
約90を超えるショアA硬度を有する剛性支持層、及び
接触面を有する研磨層を備える、研磨アセンブリと、
前記シャンクと前記研磨層との間に配置された弾性層であって、約70未満のショアA硬度を有する弾性層と、を備える研磨用回転工具
It is a polishing rotary tool
A polishing assembly holder with a shank defining the axis of rotation of the rotary tool,
It ’s a polishing assembly,
A polishing assembly comprising a rigid support layer having a Shore A hardness of greater than about 90 and a polishing layer having a contact surface.
A rotary tool for polishing comprising an elastic layer arranged between the shank and the polishing layer and having an elastic layer having a shore A hardness of less than about 70 .
前記シャンクと前記研磨層との間に配置された結合層を更に備える、請求項1に記載の研磨用回転工具。 The polishing rotary tool according to claim 1, further comprising a bonding layer arranged between the shank and the polishing layer. 前記結合層は、約70kPa~約10MPaの剥離圧力を有する、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 2 , wherein the bonding layer has a peeling pressure of about 70 kPa to about 10 MPa . 前記弾性層は、前記結合層と前記剛性支持層との間に配置されている、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 2 , wherein the elastic layer is arranged between the coupling layer and the rigid support layer . 前記磁気結合層は磁石を含み、前記剛性支持層は強磁性材料を含む、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 2 , wherein the magnetic coupling layer contains a magnet and the rigid support layer contains a ferromagnetic material . 前記弾性層は、25%未満の緩和弾性率を有する、請求項1に記載の研磨用回転工具 The polishing rotary tool according to claim 1, wherein the elastic layer has a relaxed elastic modulus of less than 25% . 前記研磨層の接触面と前記回転軸との間の夾角は、5度~90度である、請求項1に記載の研磨用回転工具。 The rotating tool for polishing according to claim 1, wherein the angle between the contact surface of the polishing layer and the axis of rotation is 5 degrees to 90 degrees. 研磨用回転工具であって、
前記回転工具の回転軸を画定するシャンクを備える研磨アセンブリホルダと、
研磨アセンブリであって、
約1GPaを超える圧縮弾性率を有する剛性支持層、及び
接触面を有する研磨層を備える研磨アセンブリと、
前記シャンクと前記研磨層との間に配置された弾性層であって、約0.1GPa未満の弾性率を有する弾性層と、を備える研磨用回転工具
It is a rotary tool for polishing,
A polishing assembly holder with a shank defining the axis of rotation of the rotary tool,
It ’s a polishing assembly,
A polishing assembly with a rigid support layer having a compressive modulus of more than about 1 GPa and a polishing layer having a contact surface.
A rotary tool for polishing, comprising an elastic layer arranged between the shank and the polishing layer and having an elastic modulus of less than about 0.1 GPa .
前記シャンクと前記研磨層との間に配置された結合層を更に備える、請求項に記載の研磨用回転工具。 The polishing rotary tool according to claim 8 , further comprising a bonding layer arranged between the shank and the polishing layer. 前記結合層は、約70kPa~約10MPaの剥離圧力を有する、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 9 , wherein the bonding layer has a peeling pressure of about 70 kPa to about 10 MPa . 前記弾性層は、前記結合層と前記剛性支持層との間に配置されている、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 9 , wherein the elastic layer is arranged between the coupling layer and the rigid support layer . 前記磁気結合層は磁石を含み、前記剛性支持層は強磁性材料を含む、請求項に記載の研磨用回転工具 The rotary tool for polishing according to claim 8 , wherein the magnetic coupling layer contains a magnet and the rigid support layer contains a ferromagnetic material . 前記研磨層の前記接触面は、前記研磨用回転工具の前記回転軸に平行である、請求項に記載の研磨用回転工具。 The polishing rotary tool according to claim 8 , wherein the contact surface of the polishing layer is parallel to the rotation axis of the polishing rotary tool. 前記研磨層の接触面と前記回転軸との間の夾角は、5度~90度である、請求項に記載の研磨用回転工具。 The rotating tool for polishing according to claim 8 , wherein the angle between the contact surface of the polishing layer and the axis of rotation is 5 degrees to 90 degrees. 研磨用回転工具であって、
前記回転工具の回転軸を画定するシャンクを備える研磨アセンブリホルダと、
第1の剛性支持層、及び第1の接触面を有する第1の研磨層を備え、かつ前記研磨アセンブリホルダに結合された第1の研磨アセンブリと、
前記シャンクと前記研磨層との間に配置された結合層と、を備える研磨用回転工具と、
第2の剛性支持層、及び第2の接触面を有する第2の研磨層を備える第2の研磨アセンブリと、
前記第1の研磨アセンブリを前記回転工具から取り外し、前記第2の研磨アセンブリを前記研磨アセンブリホルダに取り付けるように構成された回転工具交換装置と、を備えるポリッシングシステム。
It is a rotary tool for polishing,
A polishing assembly holder with a shank defining the axis of rotation of the rotary tool,
A first polishing assembly comprising a first rigid support layer and a first polishing layer having a first contact surface and coupled to the polishing assembly holder.
A polishing rotary tool comprising a bonding layer disposed between the shank and the polishing layer.
A second polishing assembly with a second rigid support layer and a second polishing layer with a second contact surface.
A polishing system comprising a rotary tool changer configured to remove the first polishing assembly from the rotary tool and attach the second polishing assembly to the polishing assembly holder.
前記研磨アセンブリホルダは、前記結合層を更に備える、請求項15に記載のポリッシングシステム 15. The polishing system of claim 15 , wherein the polishing assembly holder further comprises the bonding layer . 前記研磨用回転工具は、前記シャンクと前記研磨層との間に配置された弾性層を更に備え、前記弾性層は、約70未満のショアA硬度を有し、
前記第1の剛性支持層及び前記第2の剛性支持層は、約90を超えるショアA硬度を有する、請求項15に記載のポリッシングシステム。
The polishing rotary tool further comprises an elastic layer disposed between the shank and the polishing layer, the elastic layer having a shore A hardness of less than about 70.
The polishing system according to claim 15 , wherein the first rigid support layer and the second rigid support layer have a shore A hardness of more than about 90.
前記研磨用回転工具は、前記シャンクと前記研磨層との間に配置された弾性層を更に備え、前記弾性層は、25%たわみにおいて約1.5MPa未満の圧縮率を有し、
前記第1の剛性支持層及び前記第2の剛性支持層は、25%たわみにおいて約2MPaを超える圧縮率を有する、請求項15に記載のポリッシングシステム
The polishing rotary tool further comprises an elastic layer disposed between the shank and the polishing layer, which has a compressibility of less than about 1.5 MPa at 25% deflection.
The polishing system according to claim 15 , wherein the first rigid support layer and the second rigid support layer have a compressibility of more than about 2 MPa at 25% deflection .
コンピュータ制御回転工具ホルダ及び基材プラットフォームを備えるコンピュータ制御式機械加工システムと、
前記基材プラットフォームに固定された基材と、
請求項1に記載の研磨用回転工具と、を備えるアセンブリ
Computer-controlled machining system with computer-controlled rotary tool holder and substrate platform,
The base material fixed to the base material platform and
An assembly comprising the rotary tool for polishing according to claim 1 .
前記研磨用回転工具の研磨アセンブリは第1の研磨アセンブリであり、前記アセンブリは、回転工具交換装置を更に含み、前記回転工具交換装置は、
前記第1の研磨アセンブリを前記回転工具の前記研磨アセンブリホルダから取り外し、
第2の研磨アセンブリを前記回転工具の研磨アセンブリホルダに取り付けるように構成されている、請求項18に記載のアセンブリ。
The polishing assembly of the rotary tool for polishing is a first polishing assembly, the assembly further comprising a rotary tool changer, the rotary tool changer.
The first polishing assembly is removed from the polishing assembly holder of the rotary tool.
18. The assembly of claim 18 , wherein the second polishing assembly is configured to attach to the polishing assembly holder of the rotary tool.
基材をポリッシングするための方法であって、
コンピュータ制御回転工具ホルダ及び基材プラットフォームを含むコンピュータ制御機械加工システムを提供することと、
研磨用回転工具を前記コンピュータ制御機械加工システムの前記回転工具ホルダに固定することと、ここで、前記研磨用回転工具は、
前記回転工具の回転軸を画定するシャンクを備える研磨アセンブリホルダと、
第1の剛性支持層及び第1の接触面を有する第1の研磨層を備え、研磨アセンブリホルダに結合された第1の研磨アセンブリと、
前記シャンクと前記研磨層との間に配置された結合層と、を備えており、
前記コンピュータ制御機械加工システムを作動して、前記研磨用回転工具の前記第1の研磨アセンブリを使用して前記基材の接触面を研磨することと、
前記研磨用回転工具の前記研磨アセンブリホルダから前記第1の研磨アセンブリを取り外すことと、
第2の研磨アセンブリを前記研磨用回転工具の前記研磨アセンブリホルダに取り付けることであって、前記第2の研磨アセンブリは、
第2の剛性支持層と、第2の接触面を有する第2の研磨層とを備える、取り付けることと、を含む方法
A method for polishing the substrate,
To provide a computer controlled machining system including a computer controlled rotary tool holder and a substrate platform.
The polishing rotary tool is fixed to the rotary tool holder of the computer-controlled machining system, and here, the polishing rotary tool is used.
A polishing assembly holder with a shank defining the axis of rotation of the rotary tool,
A first polishing assembly comprising a first rigid support layer and a first polishing layer having a first contact surface and coupled to a polishing assembly holder.
It comprises a bonding layer disposed between the shank and the polishing layer.
To activate the computer-controlled machining system and use the first polishing assembly of the polishing rotary tool to polish the contact surface of the substrate.
Removing the first polishing assembly from the polishing assembly holder of the rotating tool for polishing
The second polishing assembly is attached to the polishing assembly holder of the rotating tool for polishing, and the second polishing assembly is
A method comprising attaching, comprising a second rigid support layer and a second polishing layer having a second contact surface .
JP2020566671A 2018-05-30 2019-05-24 Rotating tool for polishing Withdrawn JP2021525656A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862678115P 2018-05-30 2018-05-30
US62/678,115 2018-05-30
PCT/IB2019/054339 WO2019229610A1 (en) 2018-05-30 2019-05-24 Abrasive rotary tool

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JP2021525656A JP2021525656A (en) 2021-09-27
JPWO2019229610A5 true JPWO2019229610A5 (en) 2022-05-31

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WO (1) WO2019229610A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220395962A1 (en) * 2019-11-05 2022-12-15 3M Innovative Properties Company Molded Abrasive Rotary Tool

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB329323A (en) * 1929-02-14 1930-05-14 Herbert Ralph Stratford Improvements in or relating to the abrading or surfacing of wood, metal and other panels and the like
CA1027761A (en) * 1975-11-26 1978-03-14 Miksa Marton Vacuum sander
SE506665C2 (en) * 1993-01-12 1998-01-26 Sl Innovation Ab Cushion roller with joint tensioning member for elastic sleeve and abrasive sheets
US6773339B2 (en) * 2002-12-10 2004-08-10 Universal Photonics, Inc. Abrasive pad, and method of making the same
WO2012020275A1 (en) * 2010-08-10 2012-02-16 Miksa Marton Sanding apparatus
EP3347162A4 (en) * 2015-09-08 2019-05-15 3M Innovative Properties Company Flexible abrasive rotary tool

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