JPWO2019008674A1 - 部品実装装置 - Google Patents
部品実装装置 Download PDFInfo
- Publication number
- JPWO2019008674A1 JPWO2019008674A1 JP2019528236A JP2019528236A JPWO2019008674A1 JP WO2019008674 A1 JPWO2019008674 A1 JP WO2019008674A1 JP 2019528236 A JP2019528236 A JP 2019528236A JP 2019528236 A JP2019528236 A JP 2019528236A JP WO2019008674 A1 JPWO2019008674 A1 JP WO2019008674A1
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- Prior art keywords
- lifting
- component
- push
- pin
- elevating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003028 elevating effect Effects 0.000 claims abstract description 48
- 238000005070 sampling Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 20
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/0409—Sucking devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/043—Feeding one by one by other means than belts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/082—Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Operations Research (AREA)
- Die Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
Claims (4)
- 複数の部品が貼着されたシートから前記部品を採取して対象物に実装する部品実装装置であって、
ヘッドと、
前記部品を採取するノズルと、
前記ヘッドに対して昇降部材を昇降させる第1昇降装置と、
前記第1昇降装置により前記昇降部材と共に昇降され、前記昇降部材に対して相対的に前記ノズルを昇降させる第2昇降装置と、
前記ノズルが採取しようとする前記部品を前記シートの裏側から押上ピンにより押し上げることにより前記部品を前記シートから剥離させる剥離装置と、
前記ノズルに作用する荷重を測定する荷重測定部と、
前記ノズルが前記部品に接触する位置まで前記昇降部材が下降するように前記第1昇降装置と前記第2昇降装置とを制御し、前記ノズルが前記部品に接触した状態で前記押上ピンを上昇させて前記シートの裏側から前記部品を押し上げるように前記剥離装置を制御すると共に前記荷重測定部により測定される荷重が所定の荷重範囲内に保持されるように前記第2昇降装置を制御し、前記押上ピンを上昇させる際に前記昇降部材が上昇するように前記第1昇降装置を制御する制御装置と、
を備える部品実装装置。 - 請求項1に記載の部品実装装置であって、
前記制御装置は、前記押上ピンを上昇させる際には前記押上ピンの上昇に同期して前記昇降部材が上昇するように前記第1昇降装置を制御する
部品実装装置。 - 請求項1または2に記載の部品実装装置であって、
前記第2昇降装置は、前記昇降部材に対する前記ノズルの相対的な昇降量が前記第1昇降装置による前記ヘッドに対する前記昇降部材の昇降量よりも小さい
部品実装装置。 - 請求項1ないし3のいずれか1項に記載の部品実装装置であって、
前記剥離装置は、前記ノズルが前記部品に接触する位置まで前記昇降部材が下降する際には前記押上ピンが前記シートの裏面から離間した離間位置で待機しており、前記離間位置から前記押上ピンが上昇するものであり、
前記制御装置は、前記押上ピンが前記離間位置から上昇して前記シートの裏面に当接してから、前記押上ピンの上昇に合わせて前記昇降部材が上昇するように前記第1昇降装置を制御する
部品実装装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/024510 WO2019008674A1 (ja) | 2017-07-04 | 2017-07-04 | 部品実装装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019008674A1 true JPWO2019008674A1 (ja) | 2020-01-09 |
JP6891281B2 JP6891281B2 (ja) | 2021-06-18 |
Family
ID=64950657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019528236A Active JP6891281B2 (ja) | 2017-07-04 | 2017-07-04 | 部品実装装置 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP3651561B1 (ja) |
JP (1) | JP6891281B2 (ja) |
CN (1) | CN110832960B (ja) |
WO (1) | WO2019008674A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7421412B2 (ja) | 2020-05-01 | 2024-01-24 | 株式会社Fuji | 吸着装置の状態判定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008300437A (ja) * | 2007-05-29 | 2008-12-11 | Osaki Engineering Co Ltd | ピックアップ装置およびピックアップ方法 |
WO2015140888A1 (ja) * | 2014-03-17 | 2015-09-24 | 富士機械製造株式会社 | 部品装着ヘッド |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4850780A (en) * | 1987-09-28 | 1989-07-25 | Kulicke And Soffa Industries Inc. | Pre-peel die ejector apparatus |
JP2818363B2 (ja) * | 1993-08-31 | 1998-10-30 | 株式会社東芝 | 半導体製造装置 |
JPH09293995A (ja) * | 1996-02-26 | 1997-11-11 | Matsushita Electric Ind Co Ltd | 部品吸着方法 |
JP4136733B2 (ja) | 2003-03-11 | 2008-08-20 | 芝浦メカトロニクス株式会社 | ペレットボンディング方法及びペレットボンディング装置 |
JP2004349516A (ja) * | 2003-05-23 | 2004-12-09 | Hitachi High-Technologies Corp | 基板処理装置 |
JP4156460B2 (ja) * | 2003-07-09 | 2008-09-24 | Tdk株式会社 | ワークのピックアップ方法及びその装置、実装機 |
JP4401937B2 (ja) * | 2004-11-17 | 2010-01-20 | ヤマハ発動機株式会社 | 表面実装機 |
JP2007101373A (ja) * | 2005-10-05 | 2007-04-19 | Renesas Technology Corp | プローブシート接着ホルダ、プローブカード、半導体検査装置および半導体装置の製造方法 |
JP4864816B2 (ja) * | 2007-06-19 | 2012-02-01 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
JP5987205B2 (ja) * | 2011-08-10 | 2016-09-07 | 富士機械製造株式会社 | 電子回路部品装着機の位置決め不良検出方法 |
JP6055239B2 (ja) * | 2012-08-29 | 2016-12-27 | ファスフォードテクノロジ株式会社 | ダイボンディング装置並びにダイピックアップ装置及びダイピックアップ方法 |
WO2014080472A1 (ja) * | 2012-11-21 | 2014-05-30 | 富士機械製造株式会社 | 電子回路部品装着ヘッド |
EP2925109B1 (en) * | 2012-11-21 | 2019-08-14 | FUJI Corporation | Electronic-circuit-component-mounting head |
JP6349496B2 (ja) * | 2014-02-24 | 2018-07-04 | 株式会社新川 | 半導体ダイのピックアップ装置及びピックアップ方法 |
JP6280817B2 (ja) * | 2014-05-30 | 2018-02-14 | ヤマハ発動機株式会社 | 部品装着装置 |
JP6412944B2 (ja) * | 2014-09-04 | 2018-10-24 | 株式会社Fuji | 部品実装装置 |
JP6840158B2 (ja) * | 2016-09-28 | 2021-03-10 | 株式会社Fuji | ダイ実装装置 |
-
2017
- 2017-07-04 WO PCT/JP2017/024510 patent/WO2019008674A1/ja unknown
- 2017-07-04 JP JP2019528236A patent/JP6891281B2/ja active Active
- 2017-07-04 CN CN201780092746.1A patent/CN110832960B/zh active Active
- 2017-07-04 EP EP17916781.2A patent/EP3651561B1/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008300437A (ja) * | 2007-05-29 | 2008-12-11 | Osaki Engineering Co Ltd | ピックアップ装置およびピックアップ方法 |
WO2015140888A1 (ja) * | 2014-03-17 | 2015-09-24 | 富士機械製造株式会社 | 部品装着ヘッド |
Also Published As
Publication number | Publication date |
---|---|
WO2019008674A1 (ja) | 2019-01-10 |
CN110832960B (zh) | 2021-05-11 |
EP3651561B1 (en) | 2022-02-09 |
EP3651561A1 (en) | 2020-05-13 |
CN110832960A (zh) | 2020-02-21 |
JP6891281B2 (ja) | 2021-06-18 |
EP3651561A4 (en) | 2020-07-15 |
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