JPWO2018154941A1 - テストシステム - Google Patents
テストシステム Download PDFInfo
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- JPWO2018154941A1 JPWO2018154941A1 JP2019501079A JP2019501079A JPWO2018154941A1 JP WO2018154941 A1 JPWO2018154941 A1 JP WO2018154941A1 JP 2019501079 A JP2019501079 A JP 2019501079A JP 2019501079 A JP2019501079 A JP 2019501079A JP WO2018154941 A1 JPWO2018154941 A1 JP WO2018154941A1
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- 238000012360 testing method Methods 0.000 title claims abstract description 139
- 239000000523 sample Substances 0.000 claims abstract description 257
- 230000007246 mechanism Effects 0.000 claims abstract description 78
- 238000005259 measurement Methods 0.000 claims abstract description 43
- 230000007723 transport mechanism Effects 0.000 claims abstract description 38
- 230000003028 elevating effect Effects 0.000 claims abstract description 10
- 238000003384 imaging method Methods 0.000 claims description 51
- 230000032258 transport Effects 0.000 description 31
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 13
- 238000007689 inspection Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 210000000078 claw Anatomy 0.000 description 7
- 238000012546 transfer Methods 0.000 description 6
- 230000004308 accommodation Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000003068 static effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000003708 edge detection Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Lubricants (AREA)
Abstract
Description
Claims (5)
- 被試験デバイスの電気特性試験を実施するテストシステムであって、
前記被試験デバイスが載置される載置台と、
前記載置台を搬送する搬送機構と、
前記電気特性試験を行うための測定回路を含むテストヘッドと、
前記被試験デバイスの電極を前記測定回路に接続するためのプローブと、
前記載置台を第1方向に沿って移動させることにより、前記電極と前記プローブとを接触又は離間させる昇降機構と、
前記テストヘッドに設けられ、前記第1方向と交差する平面上で前記プローブを移動することにより、前記平面における前記プローブと前記電極との位置合わせを行うアライメント機構と、
を備えるテストシステム。 - 前記搬送機構は、前記被試験デバイスを前記載置台に載置するための第1ステーション、前記電気特性試験を実施するための第2ステーション、及び前記被試験デバイスを前記載置台から搬出するための第3ステーションの順に前記載置台を搬送する、請求項1に記載のテストシステム。
- 前記第1ステーションにおいて、前記載置台に載置されている前記被試験デバイスを撮像する第1撮像装置をさらに備え、
前記アライメント機構は、前記第1撮像装置によって撮像された前記被試験デバイスの画像に基づいて、前記位置合わせを行う、請求項2に記載のテストシステム。 - 前記プローブを着脱可能に保持するプローブホルダと、
前記プローブを撮像する第2撮像装置と、
をさらに備え、
前記アライメント機構は、前記第2撮像装置によって撮像された前記プローブの画像に基づいて、前記位置合わせを行う、請求項1〜請求項3のいずれか一項に記載のテストシステム。 - 前記アライメント機構は、前記平面を規定する第2方向及び第3方向に前記プローブを移動可能であるとともに、前記第1方向を軸として前記プローブを回転可能である、請求項1〜請求項4のいずれか一項に記載のテストシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017031180 | 2017-02-22 | ||
JP2017031180 | 2017-02-22 | ||
PCT/JP2017/045546 WO2018154941A1 (ja) | 2017-02-22 | 2017-12-19 | テストシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018154941A1 true JPWO2018154941A1 (ja) | 2019-12-12 |
JP6885456B2 JP6885456B2 (ja) | 2021-06-16 |
Family
ID=63254342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019501079A Active JP6885456B2 (ja) | 2017-02-22 | 2017-12-19 | テストシステム |
Country Status (6)
Country | Link |
---|---|
US (1) | US11125814B2 (ja) |
JP (1) | JP6885456B2 (ja) |
CN (1) | CN110023773B (ja) |
DE (1) | DE112017007108T5 (ja) |
TW (1) | TWI772347B (ja) |
WO (1) | WO2018154941A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI676031B (zh) * | 2018-09-06 | 2019-11-01 | 致茂電子股份有限公司 | 滑移式電子元件測試裝置 |
US11001078B2 (en) | 2018-09-28 | 2021-05-11 | Rohinni, LLC | Interchangeable guide head for transfer mechanism |
US11232968B2 (en) * | 2018-09-28 | 2022-01-25 | Rohinni, LLC | Variable pitch multi-needle head for transfer of semiconductor devices |
JP7128415B2 (ja) * | 2018-10-29 | 2022-08-31 | 澁谷工業株式会社 | 半導体素子検査装置 |
US11217471B2 (en) | 2019-03-06 | 2022-01-04 | Rohinni, LLC | Multi-axis movement for transfer of semiconductor devices |
CN110888034A (zh) * | 2019-12-06 | 2020-03-17 | 苏州苏汀达自动化科技有限公司 | 一种雪崩光电二极管雪崩偏压查找的装置 |
KR102141535B1 (ko) * | 2020-03-03 | 2020-08-05 | 장용철 | 멀티 플라잉 프로브 테스터 |
KR20220002101A (ko) * | 2020-06-30 | 2022-01-06 | 도쿄엘렉트론가부시키가이샤 | 검사 장치 및 검사 방법 |
JP7435536B2 (ja) | 2021-04-28 | 2024-02-21 | 株式会社村田製作所 | 電子部品の生産装置 |
TWI815281B (zh) * | 2022-01-20 | 2023-09-11 | 致茂電子股份有限公司 | 雙迴道檢測裝置及其檢測方法 |
Citations (6)
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JPS6115341A (ja) * | 1984-07-02 | 1986-01-23 | Canon Inc | ウエハプロ−バ |
JPH0341466Y2 (ja) * | 1986-11-20 | 1991-08-30 | ||
JP2568104B2 (ja) * | 1988-04-13 | 1996-12-25 | 東京エレクトロン株式会社 | プロービング方法及びプロービング装置 |
JP2007095993A (ja) * | 2005-09-29 | 2007-04-12 | Micronics Japan Co Ltd | プローブの針先と被検査体の電極との位置合わせ方法 |
US20100271062A1 (en) * | 2009-04-28 | 2010-10-28 | Formfactor, Inc. | Method and apparatus for probe card alignment in a test system |
JP2016206150A (ja) * | 2015-04-28 | 2016-12-08 | 新東工業株式会社 | 検査装置および検査方法 |
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-
2017
- 2017-12-19 US US16/482,830 patent/US11125814B2/en active Active
- 2017-12-19 DE DE112017007108.9T patent/DE112017007108T5/de active Pending
- 2017-12-19 CN CN201780074186.7A patent/CN110023773B/zh active Active
- 2017-12-19 WO PCT/JP2017/045546 patent/WO2018154941A1/ja active Application Filing
- 2017-12-19 JP JP2019501079A patent/JP6885456B2/ja active Active
- 2017-12-22 TW TW106145226A patent/TWI772347B/zh active
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JPS6115341A (ja) * | 1984-07-02 | 1986-01-23 | Canon Inc | ウエハプロ−バ |
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JP2016206150A (ja) * | 2015-04-28 | 2016-12-08 | 新東工業株式会社 | 検査装置および検査方法 |
Also Published As
Publication number | Publication date |
---|---|
US20190353701A1 (en) | 2019-11-21 |
CN110023773A (zh) | 2019-07-16 |
TWI772347B (zh) | 2022-08-01 |
DE112017007108T5 (de) | 2019-11-21 |
CN110023773B (zh) | 2022-03-01 |
WO2018154941A1 (ja) | 2018-08-30 |
JP6885456B2 (ja) | 2021-06-16 |
US11125814B2 (en) | 2021-09-21 |
TW201831915A (zh) | 2018-09-01 |
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