JPWO2017010125A1 - 基板処理装置、半導体装置の製造方法及び気化システム - Google Patents
基板処理装置、半導体装置の製造方法及び気化システム Download PDFInfo
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- JPWO2017010125A1 JPWO2017010125A1 JP2017528298A JP2017528298A JPWO2017010125A1 JP WO2017010125 A1 JPWO2017010125 A1 JP WO2017010125A1 JP 2017528298 A JP2017528298 A JP 2017528298A JP 2017528298 A JP2017528298 A JP 2017528298A JP WO2017010125 A1 JPWO2017010125 A1 JP WO2017010125A1
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Abstract
Description
Claims (16)
- 一端部と他端部とを有する気化室と、前記他端部で気化室に接続され、前記一端部に向けて第1キャリアガスと液体原料が混合された混合流体とを供給する第1流体供給部と、前記一端部の前記混合流体に向けて前記一端部の周縁側から中心側へ第2キャリアガスを供給する第2流体供給部と、を備える気化システム。
- 前記第2流体供給部には、前記一端部の周縁部に前記第2キャリアガスが流れる流路を構成する孔が形成されている請求項1記載の気化システム。
- 前記第2流体供給部には、前記孔の下流側に前記孔から供給された前記第2キャリアガスの流れの向きを前記一端部の中心側へ変更するガイド部が構成されている請求項2記載の気化システム。
- 前記第2流体供給部には、前記ガイド部と前記孔の間に隙間が設けられるよう構成されている請求項3記載の気化システム。
- 前記隙間には、前記気化室と前記孔を連通させる複数の切欠き部が設けられるように前記一端部の周縁側の部位が構成されている請求項4記載の気化システム。
- 前記第2流体供給部には、前記孔の上流側に該孔に接続される空間と、該空間へ前記第2キャリアガスを導入するガス導入部とが構成されている請求項2記載の気化システム。
- 前記空間には、前記孔と前記ガス導入部を連通させる複数の溝部が設けられるように構成されている請求項6記載の気化システム。
- 前記第2流体供給部には、前記一端部の中心部に前記第2キャリアガスを噴出する噴出孔が形成されている請求項1記載の気化システム。
- 前記第2流体供給部は、前記噴出孔から前記一端部の中心側の混合流体へ向けて前記第2キャリアガスを供給するよう構成されている請求項8に記載の気化システム。
- 前記第2キャリアガスは、加熱された不活性ガスである請求項1乃至請求項3、請求項6、請求項8または請求項9のうちいずれか一つに記載の気化システム。
- 前記気化管のガイド部の開口断面積と前記一端部の中心側に形成される噴出孔の開口断面積は同じ大きさであるか若しくは前記ガイド部の開口断面積のほうが大きく構成されている請求項1記載の気化システム。
- 前記気化管の側壁は、前記混合流体が前記第2キャリアガスにより気化されたガスを前記気化室から排出する排出孔が設けられる請求項1記載の気化システム。
- 前記排出孔は、前記気化管の側壁に周方向に均等で複数設けられる請求項12記載の気化システム。
- 前記気化室には、前記気化管内に前記気化されたガスの流路が形成され、前記気化されたガスが前記排出孔に流れるよう構成される請求項12または請求項13記載の気化システム。
- 基板を収容する処理室と、基板に反応ガスを供給する反応ガス供給系と、液体原料を気化器により気化させた気化ガスを原料ガスとして前記処理室に供給する原料ガス供給系と、を少なくとも具備し、前記気化器は、一端部と他端部とを有する気化室と、前記他端部で気化室に接続され、前記一端部に向けて第1キャリアガスと液体原料が混合された混合流体とを供給する第1流体供給部と、前記一端部の前記混合流体に向けて前記一端部の周縁側から中心側へ第2キャリアガスを供給する第2流体供給部と、を有するよう構成されている基板処理装置。
- 一端部と他端部とを有する気化室と、前記他端部で気化室に接続され、前記一端部に向けて第1キャリアガスと液体原料が混合された混合流体とを供給する第1流体供給部と、前記一端部の前記混合流体に向けて前記一端部の周縁側から中心側へ第2キャリアガスを供給する第2流体供給部とを備えた気化器により、前記液体原料を気化させた気化ガスを原料ガスとして基板が収容された処理室に供給する工程と、該処理室から原料ガスを除去する工程と、原料ガスが除去された前記処理室に反応ガスを供給する工程と、前記処理室から反応ガスを除去する工程とを有する半導体装置の製造方法。
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