JPWO2005112517A1 - ORGANIC EL ELEMENT AND METHOD FOR PRODUCING ORGANIC EL ELEMENT - Google Patents

ORGANIC EL ELEMENT AND METHOD FOR PRODUCING ORGANIC EL ELEMENT Download PDF

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JPWO2005112517A1
JPWO2005112517A1 JP2006519533A JP2006519533A JPWO2005112517A1 JP WO2005112517 A1 JPWO2005112517 A1 JP WO2005112517A1 JP 2006519533 A JP2006519533 A JP 2006519533A JP 2006519533 A JP2006519533 A JP 2006519533A JP WO2005112517 A1 JPWO2005112517 A1 JP WO2005112517A1
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transparent electrode
electrode film
inorganic material
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JP4964591B2 (en
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根岸　敏夫
敏夫 根岸
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Ulvac Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes

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Abstract

発光効率が良い有機ＥＬ素子を提供する。 本発明の有機ＥＬ素子１は透明電極膜１２上に酸化チタンからなる無機材料膜１４を有しており、無機材料膜１４は水のような溶媒に対する親和性が透明電極膜１２よりも高いので、正孔輸送材料のような第一の有機材料が、溶媒に分散された第一の有機材料を無機材料膜１４表面に配置すると、第一の有機材料は無機材料膜１４の表面に広がり、膜厚均一な第一の有機層２１が形成される。第一の有機層２１の表面は平坦なので、第一の有機層２１の上に第二の有機材料を配置すると、膜厚均一な第二の有機層２２が形成される。このように、本発明の有機ＥＬ素子１は有機膜２０を構成する第一〜第三の有機層２１〜２３の膜厚が均一になるので、発光物質を有する有機層２２を発光させたときに、その発光量が均一になり、発光効率が高い。Provided is an organic EL element having high luminous efficiency. The organic EL element 1 of the present invention has an inorganic material film 14 made of titanium oxide on a transparent electrode film 12, and the inorganic material film 14 has a higher affinity for a solvent such as water than the transparent electrode film 12. When the first organic material, such as a hole transport material, is disposed on the surface of the inorganic material film 14, the first organic material spreads on the surface of the inorganic material film 14, A first organic layer 21 having a uniform thickness is formed. Since the surface of the first organic layer 21 is flat, when the second organic material is disposed on the first organic layer 21, the second organic layer 22 having a uniform film thickness is formed. As described above, in the organic EL element 1 of the present invention, since the film thicknesses of the first to third organic layers 21 to 23 constituting the organic film 20 are uniform, when the organic layer 22 having a luminescent material is caused to emit light. Moreover, the light emission amount becomes uniform and the light emission efficiency is high.

Description

本発明は有機ＥＬ素子の技術に関し、特に表示装置に用いられる有機ＥＬ素子と、その製造技術に関する。  The present invention relates to an organic EL element technology, and more particularly to an organic EL element used in a display device and a manufacturing technique thereof.

従来より、有機ＥＬ（Ｅｌｅｃｔｒｏ−Ｌｕｍｉｎｅｓｃｅｎｃｅ）素子を用いた表示装置が用いられている。有機ＥＬ素子の製造工程の一例について説明すると、図４（ａ）の符号１１０は有機ＥＬ素子の製造に用いる処理対象基板を示している。  Conventionally, a display device using an organic EL (Electro-Luminescence) element has been used. An example of the manufacturing process of the organic EL element will be described. A reference numeral 110 in FIG. 4A indicates a processing target substrate used for manufacturing the organic EL element.

処理対象基板１１０は透明基板１１１と、透明基板１１１の表面に形成された透明電極膜１１２と、透明基板１１１の透明電極膜１１２が形成された側の面に配置された隔壁膜１１５とを有しており、隔壁膜１１５には孔１１６が形成され、孔１１６の底面には透明電極膜１１２が露出している。  The processing target substrate 110 includes a transparent substrate 111, a transparent electrode film 112 formed on the surface of the transparent substrate 111, and a partition film 115 disposed on the surface of the transparent substrate 111 on which the transparent electrode film 112 is formed. In addition, a hole 116 is formed in the partition film 115, and the transparent electrode film 112 is exposed on the bottom surface of the hole 116.

この処理対象基板１１０を用いて有機ＥＬ素子を製造するには、正孔輸送物質が分散された液状の第一の有機材料をインクジェットプリンタのタンクに充填し、該インクジェットプリンタのノズルを孔１１６に向けた状態で、第一の有機材料を噴出し、孔１１６底面の透明電極膜１１２の表面に第一の有機材料の塗布層を形成した後、該塗布層を乾燥して溶媒を蒸発させ、正孔輸送物質を主成分とする第一の有機層１２１を形成する（図４（ｂ））。  In order to manufacture an organic EL element using the substrate 110 to be processed, a liquid first organic material in which a hole transport material is dispersed is filled in a tank of an ink jet printer, and the nozzle of the ink jet printer is inserted into the hole 116. The first organic material is ejected in a state directed to form a coating layer of the first organic material on the surface of the transparent electrode film 112 at the bottom of the hole 116, and then the coating layer is dried to evaporate the solvent. A first organic layer 121 containing a hole transport material as a main component is formed (FIG. 4B).

発光物質が分散された第二の有機材料と、電子輸送物質が分散された第三の有機材料を用意し、上述した第一の有機層１２１と同様にインクジェットプリンタを用いて、発光物質を主成分とする第二の有機層１２２と、電子輸送物質を主成分とする第三の有機層１２３とを形成し、更に、第三の有機層１２３上に上部電極膜１２５を形成すると有機ＥＬ素子１０１が得られる（図４（ｃ））。  A second organic material in which a luminescent material is dispersed and a third organic material in which an electron transport material is dispersed are prepared, and the luminescent material is mainly used by using an ink jet printer in the same manner as the first organic layer 121 described above. When a second organic layer 122 as a component and a third organic layer 123 containing an electron transport material as a main component are formed, and further, an upper electrode film 125 is formed on the third organic layer 123, an organic EL element 101 is obtained (FIG. 4C).

第一〜第三の有機層１２１〜１２３からなる有機膜１２０は透明電極膜１１２と上部電極膜１２５とで挟まれた状態になっており、透明電極膜１１２と上部電極膜１２５にそれぞれ正電圧と負電圧を印加すると、第一の有機層１２１に正孔が注入され、第三の有機層１２３に電子が注入される。  The organic film 120 composed of the first to third organic layers 121 to 123 is sandwiched between the transparent electrode film 112 and the upper electrode film 125, and a positive voltage is applied to the transparent electrode film 112 and the upper electrode film 125, respectively. When a negative voltage is applied, holes are injected into the first organic layer 121 and electrons are injected into the third organic layer 123.

第一〜第三の有機層１２１〜１２３は正孔輸送物質と、発光物質と、電子輸送物質とをそれぞれ主成分とするので、正孔は第一の有機層１２１から第二の有機層１２２に運ばれ、電子は第三の有機層１２３から第二の有機層１２２へ運ばれ、第二の有機層１２２で成功と電子が結合すると、第二の有機層１２２が発光する。  Since the first to third organic layers 121 to 123 are mainly composed of a hole transport material, a light emitting material, and an electron transport material, holes are transferred from the first organic layer 121 to the second organic layer 122. The electrons are carried from the third organic layer 123 to the second organic layer 122, and when the success and the electrons are combined in the second organic layer 122, the second organic layer 122 emits light.

第二の有機層１２２から放出される光のうち、透明電極膜１１２側へ放出される光は透明電極膜１１２と透明基板１１１とを透過して有機ＥＬ素子１０１の外部に放出される。  Of the light emitted from the second organic layer 122, the light emitted toward the transparent electrode film 112 passes through the transparent electrode film 112 and the transparent substrate 111 and is emitted to the outside of the organic EL element 101.

上述したように、インクジェットプリンタを用いれば、所望の位置にだけ第一〜第三の有機材料を塗布できるので、第一〜第三の有機材料が無駄にすることなく、効率良く第一〜第三の有機層１２１〜１２３を形成することができる。  As described above, if the ink jet printer is used, the first to third organic materials can be applied only at a desired position, so that the first to third organic materials can be efficiently and efficiently used without wasting them. Three organic layers 121-123 can be formed.

しかしながら、一般に第一の有機材料に用いられる溶媒と、透明電極膜１１２との親和性は低く、第一の有機材料を孔１１６内部に配置した時には第一の有機材料が透明電極膜１１２表面で広がらず、滴状になってしまい、図４（ｂ）に示すように、孔１１６底面の中央部分では第一の有機層１２１の膜厚が厚くなり、孔１１６の側面近傍では膜厚が薄くなり、第一の有機層１２１の膜厚が不均一になってしまう。  However, the affinity between the solvent used for the first organic material and the transparent electrode film 112 is generally low, and when the first organic material is disposed inside the hole 116, the first organic material is on the surface of the transparent electrode film 112. As shown in FIG. 4B, the film thickness of the first organic layer 121 is thick at the center portion of the bottom surface of the hole 116, and the film thickness is thin near the side surface of the hole 116. Accordingly, the film thickness of the first organic layer 121 becomes non-uniform.

その状態で、第二の有機材料を第一の有機層１２１表面に塗布し、第二の有機層１２２を形成すると、第二の有機層１２２の膜厚も不均一になってしまう。第二の有機層１２２のように、発光物質を含有する層の膜厚が不均一になると、有機膜１２０内での発光量や発光色が安定せず、不均一になり、発光効率が低下することになる。  In this state, when the second organic material is applied to the surface of the first organic layer 121 and the second organic layer 122 is formed, the film thickness of the second organic layer 122 also becomes nonuniform. When the film thickness of the layer containing the luminescent material is not uniform as in the second organic layer 122, the light emission amount and the light emission color in the organic film 120 are not stable and non-uniform, and the light emission efficiency is lowered. Will do.

このような問題を解決するために、透明電極膜１１２の表面に予め親水性有機薄膜を形成した後、第一の有機材料を塗布する方法が公知である（例えば特許文献１を参照）。しかしながら、この方法では有機ガスの雰囲気にガラス基板を長時間置くことで親水性有機薄膜を形成するため、製造時間が長くなってしまう。また、親水性有機薄膜の第一の有機材料に対する親和性も十分ではなかった。
特開２００２−２３７３８３号公報 In order to solve such a problem, a method of applying a first organic material after forming a hydrophilic organic thin film in advance on the surface of the transparent electrode film 112 is known (see, for example, Patent Document 1). However, in this method, since the hydrophilic organic thin film is formed by placing the glass substrate in an organic gas atmosphere for a long time, the manufacturing time becomes long. Further, the affinity of the hydrophilic organic thin film for the first organic material was not sufficient.
JP 2002-237383 A

本発明は上記従来技術の不都合を解決するために創作されたものであり、その目的は、発光効率の高い有機ＥＬ素子を提供することにある。  The present invention was created to solve the above-described disadvantages of the prior art, and an object of the present invention is to provide an organic EL element with high luminous efficiency.

上記課題を解決するために本発明は、透明基板上に配置され、所定形状にパターニングされた透明電極膜と、少なくとも前記透明電極膜上に位置する隔壁膜と、前記隔壁膜に形成され、底面に前記透明電極膜が位置する複数の孔と、前記各孔内にそれぞれ配置された有機膜と、少なくとも前記有機膜上に配置された上部電極膜とを有し、前記透明電極膜と前記上部電極膜との間に電圧を印加すると、前記有機膜が発光する有機ＥＬ素子を製造する有機ＥＬ素子の製造方法であって、前記透明電極膜上に前記隔壁膜を配置し、前記隔壁膜が有する前記孔底面に露出する前記透明電極膜上に無機材料膜を形成した後、含有する溶媒の前記無機材料膜に対する親和性が、前記透明電極膜に対する親和性よりも高い液状の有機材料を、前記無機材料膜の表面に配置して前記有機膜を形成する有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記有機材料の液滴を前記孔に向けて噴出して前記無機膜表面へ前記組成物を配置する有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記有機材料は、ポリエチレンジオキシチオフェンと、ポリアニリンのいずれか一方又は両方を含有する有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記有機材料に含有される前記溶媒は親水性溶媒である有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記親水性溶媒は水とアルコールのいずれか一方又は両方を含有する有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記無機材料膜は、酸化チタンを主成分とする有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子の製造方法であって、前記無機材料膜の構成物質を含むターゲットをスパッタリングしてスパッタ粒子を放出させ、前記孔底面に位置する前記透明電極膜の表面に前記スパッタ粒子を付着させて前記無機材料膜を形成する有機ＥＬ素子の製造方法である。
本発明は有機ＥＬ素子であって、透明基板上に配置され、所定形状にパターニングされた透明電極膜と、少なくとも前記透明電極膜上に位置する隔壁膜と、前記隔壁膜に形成され、底面に前記透明電極膜が位置する複数の孔と、前記各孔内にそれぞれ配置された有機膜と、少なくとも前記有機膜上に配置された上部電極膜とを有し、前記透明電極膜と前記上部電極膜との間に電圧を印加すると、前記有機膜が発光する有機ＥＬ素子であって、前記各孔内に位置する前記透明電極膜上には酸化チタンを主成分とする無機材料膜が形成され、前記有機膜は前記無機材料膜の表面に形成された有機ＥＬ素子である。
本発明は有機ＥＬ素子であって、前記有機膜はポリエチレンジオキシチオフェンと、ポリアニリンのいずれか一方又は両方を含有する有機ＥＬ素子である。
本発明は有機ＥＬ素子であって、前記無機材料膜は親水性である有機ＥＬ素子である。
本発明は有機ＥＬ素子であって、前記透明電極膜は疎水性の導電材料を主成分とする有機ＥＬ素子である。
本発明は有機ＥＬ素子であって、前記疎水性の導電材料はインジウム錫酸化物と、酸化亜鉛と、酸化錫とからなる群より選択されるいずれか１種類の導電材料を含有する有機ＥＬ素子である。In order to solve the above problems, the present invention provides a transparent electrode film disposed on a transparent substrate and patterned into a predetermined shape, a partition film positioned on at least the transparent electrode film, and formed on the partition film, A plurality of holes in which the transparent electrode film is located, an organic film disposed in each of the holes, and an upper electrode film disposed on at least the organic film, the transparent electrode film and the upper part An organic EL element manufacturing method for manufacturing an organic EL element that emits light when an electric voltage is applied to an electrode film, wherein the partition film is disposed on the transparent electrode film, After forming the inorganic material film on the transparent electrode film exposed at the bottom of the hole, a liquid organic material having a higher affinity for the inorganic material film of the solvent contained than the affinity for the transparent electrode film, The inorganic material film Arranged on the surface is a manufacturing method of the organic EL device forming the organic film.
The present invention is a method for manufacturing an organic EL element, wherein the organic material element is ejected toward the hole to dispose the composition on the surface of the inorganic film.
This invention is a manufacturing method of an organic EL element, Comprising: The said organic material is a manufacturing method of the organic EL element containing either one or both of polyethylenedioxythiophene and polyaniline.
The present invention is a method for producing an organic EL element, wherein the solvent contained in the organic material is a hydrophilic solvent.
This invention is a manufacturing method of an organic EL element, Comprising: The said hydrophilic solvent is a manufacturing method of the organic EL element containing either one or both of water and alcohol.
This invention is a manufacturing method of an organic EL element, Comprising: The said inorganic material film | membrane is a manufacturing method of the organic EL element which has a titanium oxide as a main component.
The present invention is a method for manufacturing an organic EL device, wherein a sputtering target is sputtered from a target containing the constituent material of the inorganic material film, and the sputtered particle is applied to the surface of the transparent electrode film located at the bottom of the hole. It is a manufacturing method of the organic EL element which makes it adhere and forms the said inorganic material film | membrane.
The present invention is an organic EL element, which is formed on a transparent electrode film disposed on a transparent substrate and patterned into a predetermined shape, a barrier film positioned on at least the transparent electrode film, and the barrier film, A plurality of holes in which the transparent electrode film is located; an organic film disposed in each of the holes; and an upper electrode film disposed on at least the organic film; and the transparent electrode film and the upper electrode The organic film emits light when a voltage is applied to the film, and an inorganic material film mainly composed of titanium oxide is formed on the transparent electrode film positioned in each hole. The organic film is an organic EL element formed on the surface of the inorganic material film.
This invention is an organic EL element, Comprising: The said organic film | membrane is an organic EL element containing either or both of polyethylenedioxythiophene and polyaniline.
The present invention is an organic EL device, wherein the inorganic material film is hydrophilic.
This invention is an organic EL element, Comprising: The said transparent electrode film is an organic EL element which has a hydrophobic conductive material as a main component.
The present invention is an organic EL device, wherein the hydrophobic conductive material contains any one type of conductive material selected from the group consisting of indium tin oxide, zinc oxide, and tin oxide. It is.

本発明によれば、孔の底面に位置する透明電極膜の表面には、有機材料の溶媒に対する親和性の高い無機材料膜が形成されているので、孔内部に有機材料を配置した場合に、有機材料が無機材料膜の表面に広がり、膜厚均一な有機層が形成される。この有機層表面に新たな有機材料を配置する場合にも、新たな有機材料は膜厚均一な有機層の表面に配置されるため、その塗布層の膜厚も均一になる。従って、透明電極膜上には膜厚均一な有機層が積層され、複数の有機層を有する有機膜が形成される。発光物質が含有された有機層の膜厚が均一な場合には、有機膜に電圧を印加すると、発光量や発光色は安定し、発光効率が高くなる。無機材料膜をスパッタリングにより形成すれば、成膜時間が短いだけではなく、膜厚のコントロールも容易であり、また、成膜された無機材料膜と透明電極膜との密着性も高い。  According to the present invention, since the inorganic material film having high affinity for the solvent of the organic material is formed on the surface of the transparent electrode film located on the bottom surface of the hole, when the organic material is arranged inside the hole, The organic material spreads on the surface of the inorganic material film, and an organic layer having a uniform film thickness is formed. Even when a new organic material is disposed on the surface of the organic layer, the new organic material is disposed on the surface of the organic layer having a uniform film thickness, so that the film thickness of the coating layer is also uniform. Accordingly, an organic layer having a uniform film thickness is laminated on the transparent electrode film to form an organic film having a plurality of organic layers. When the film thickness of the organic layer containing the light emitting substance is uniform, when a voltage is applied to the organic film, the light emission amount and the light emission color are stabilized, and the light emission efficiency is increased. When the inorganic material film is formed by sputtering, not only the film formation time is short, but also the film thickness can be easily controlled, and the adhesion between the formed inorganic material film and the transparent electrode film is high.

［図１］（ａ）〜（ｄ）：本発明の有機ＥＬ素子の製造工程の前半を説明する断面図
［図２］（ａ）〜（ｄ）：本発明の有機ＥＬ素子の製造工程の後半を説明する断面図
［図３］本発明の有機ＥＬ素子の製造工程の他の例を説明する断面図
［図４］（ａ）〜（ｃ）：従来技術の有機ＥＬ素子の製造工程を説明する断面図[FIG. 1] (a)-(d): Sectional drawing explaining the first half of the manufacturing process of the organic EL element of this invention [FIG. 2] (a)-(d): The manufacturing process of the organic EL element of this invention Cross-sectional view explaining the latter half [FIG. 3] Cross-sectional views explaining another example of the manufacturing process of the organic EL element of the present invention [FIG. 4] (a) to (c): The manufacturing process of the organic EL element of the prior art Cross section to explain

符号の説明Explanation of symbols

１、３……有機ＥＬ素子 １１……基板 １２……透明電極膜 １４、３４……無機材料膜 １５……隔壁膜 １６……孔 ２０……有機膜 ２１…第一の有機層 ２２……第二の有機層 ２３……第三の有機層  DESCRIPTION OF SYMBOLS 1, 3 ... Organic EL element 11 ... Substrate 12 ... Transparent electrode film 14, 34 ... Inorganic material film 15 ... Partition film 16 ... Hole 20 ... Organic film 21 ... First organic layer 22 ... Second organic layer 23 …… Third organic layer

本発明の有機ＥＬ素子の製造工程の一例について説明する。図１（ａ）の符号１０は有機ＥＬ素子の製造に用いられる処理対象基板を示しており、この処理対象基板１０は透明基板１１を有している。  An example of the manufacturing process of the organic EL element of the present invention will be described. Reference numeral 10 in FIG. 1A denotes a processing target substrate used for manufacturing an organic EL element. The processing target substrate 10 includes a transparent substrate 11.

透明基板１１の表面には互いに絶縁された細長の透明電極膜１２が複数本延設されており、透明基板１１の透明電極膜１２が配置された側の面には隔壁膜１５が形成されている。  A plurality of elongated transparent electrode films 12 that are insulated from each other are extended on the surface of the transparent substrate 11, and a partition film 15 is formed on the surface of the transparent substrate 11 on which the transparent electrode film 12 is disposed. Yes.

隔壁膜１５は複数の孔１６を有しており、各透明電極膜１２上には孔１６が複数個ずつ配置されている。各孔１６は絶縁性樹脂膜である絶縁膜がエッチングされて形成されており、各孔１６の底面には透明電極膜１２が露出している。  The partition film 15 has a plurality of holes 16, and a plurality of holes 16 are arranged on each transparent electrode film 12. Each hole 16 is formed by etching an insulating film, which is an insulating resin film, and the transparent electrode film 12 is exposed on the bottom surface of each hole 16.

この処理対象基板１０を用いて有機ＥＬ素子を製造するには、チタンからなるターゲットが配置され、予め真空雰囲気が形成されたスパッタ装置の真空槽内部に処理対象基板１０を搬入し、処理対象基板１０の隔壁膜１５が形成された側の面をターゲットに向けて配置する。  In order to manufacture an organic EL element using this processing target substrate 10, a target made of titanium is arranged, and the processing target substrate 10 is carried into a vacuum chamber of a sputtering apparatus in which a vacuum atmosphere is formed in advance. The surface on which the ten partition walls 15 are formed is arranged facing the target.

図１（ｂ）は処理対象基板１０がターゲット５に向けて配置された状態を示しており、その状態では隔壁膜１５上にはマスク１８が配置されている。マスク１８は孔１６上の位置に開口を有しており、開口の内部には孔１６底面に位置する透明電極膜１２が露出しているが、隔壁膜１５の表面はマスク１８で覆われている。  FIG. 1B shows a state in which the substrate 10 to be processed is disposed toward the target 5, and in this state, a mask 18 is disposed on the partition wall film 15. The mask 18 has an opening at a position on the hole 16, and the transparent electrode film 12 located on the bottom surface of the hole 16 is exposed inside the opening, but the surface of the partition film 15 is covered with the mask 18. Yes.

従って、真空槽内部を真空排気しながら、Ｏ２ガスからなる反応ガスを導入し、ターゲット５をスパッタリングすると、マスク１８で覆われた部分にはスパッタ粒子は到達しないが、マスク１８の開口を通過したスパッタ粒子は孔１６の底面に露出する透明電極膜１２に到達し、反応ガスと反応して酸化チタン（ＴｉＯ２）からなる無機材料膜１４が形成される（図１（ｃ））。Therefore, when a reactive gas composed of O 2 gas is introduced while evacuating the inside of the vacuum chamber and the target 5 is sputtered, sputter particles do not reach the portion covered with the mask 18 but pass through the opening of the mask 18. The sputtered particles reach the transparent electrode film 12 exposed at the bottom of the hole 16 and react with the reaction gas to form an inorganic material film 14 made of titanium oxide (TiO 2 ) (FIG. 1C).

無機材料膜１４を構成する酸化チタン膜の膜厚は特に限定されるものではないが、設定膜厚が５Å以下であると膜厚を均一に形成することが非常に困難であり、また膜厚が５０Åを超えるとＨＯＬＥ（正孔）の移動が阻害されるので、その膜厚は０．５ｎｍ以上５ｎｍ以下（５Å以上５０Å以下）であることが好ましい。  The film thickness of the titanium oxide film constituting the inorganic material film 14 is not particularly limited, but if the set film thickness is 5 mm or less, it is very difficult to form a uniform film thickness. When the thickness exceeds 50 mm, the movement of HOLE (holes) is inhibited. Therefore, the film thickness is preferably from 0.5 nm to 5 nm (5 mm to 50 mm).

次に、水からなる第一の溶媒に正孔輸送物質からなる第一の有機化合物が分散された液状の第一の有機材料を、不図示のインクジェットプリンタのタンクに充填し、該インクジェットプリンタのノズルを、真空槽から取り出した処理対象基板１０の孔１６上の位置で静止させ、ノズルから第一の有機材料を噴出させると、第一の有機材料の液滴が孔１６内部に着弾し、第一の有機材料が無機材料膜１４の表面に配置される。  Next, a liquid first organic material in which a first organic compound made of a hole transport material is dispersed in a first solvent made of water is filled in a tank of an ink jet printer (not shown), and the ink jet printer When the nozzle is stopped at a position on the hole 16 of the processing target substrate 10 taken out from the vacuum chamber, and the first organic material is ejected from the nozzle, a droplet of the first organic material lands in the hole 16, The first organic material is disposed on the surface of the inorganic material film 14.

一般に、正孔輸送物質を分散させる溶媒（第一の溶媒）にはエタノール、メタノールのようなアルコール類や、水が用いられている。隔壁膜１５はポリイミド樹脂のような絶縁性材料で構成されており、その表面は予めプラズマに晒されることで、上述した第一の溶媒に対する親和性が低くなっているので、第一の有機材料が噴出される時にノズルの位置がずれ、孔１６の外側で隔壁膜１５表面に着弾したとしても、第一の有機材料は隔壁膜１５表面で広がらず滴状になる。  In general, alcohols such as ethanol and methanol, and water are used as a solvent (first solvent) in which the hole transport material is dispersed. The partition film 15 is made of an insulating material such as polyimide resin, and the surface thereof is exposed to plasma in advance, so that the affinity for the first solvent described above is low, so the first organic material Even if the position of the nozzle is shifted when the nozzle is ejected and landed on the surface of the partition wall film 15 outside the hole 16, the first organic material does not spread on the surface of the partition wall film 15 and becomes droplets.

酸化チタンからなる無機材料膜１４の第一の溶媒に対する親和性は、隔壁膜１５表面の第一の溶媒に対する親和性に比べて非常に高く、従って第一の有機材料の着弾位置が孔１６の近傍であれば、滴状になった第一の有機材料は無機材料膜１４に引き寄せられて孔１６内部に移動し、結局、第一の有機材料は無機材料膜１４の表面に配置されることになる。  The affinity of the inorganic material film 14 made of titanium oxide to the first solvent is very high compared to the affinity of the surface of the partition film 15 to the first solvent. Therefore, the landing position of the first organic material is the hole 16. If it is in the vicinity, the first organic material in the form of droplets is attracted to the inorganic material film 14 and moves into the hole 16, and eventually the first organic material is disposed on the surface of the inorganic material film 14. become.

透明電極膜１２はＩＴＯ（インジウム・錫酸化物）のような透明導電材料からなり、このような透明電極膜１２の第一の溶媒に対する親和性は、無機材料膜１４に比べて非常に低いので、透明電極膜１２表面に第一の有機材料が直接配置されると弾かれてしまうが、第一の有機材料が無機材料膜１４表面に配置されると、弾かれずに広がり、膜厚均一な塗布層が形成される。
次いで全体を加熱乾燥し、塗布層から余分な第一の溶媒を除去すれば、第一の有機化合物を主成分とし、膜厚が均一な第一の有機層２１が形成される（図１（ｄ））。The transparent electrode film 12 is made of a transparent conductive material such as ITO (indium / tin oxide), and the affinity of the transparent electrode film 12 for the first solvent is much lower than that of the inorganic material film 14. If the first organic material is directly disposed on the surface of the transparent electrode film 12, it will be repelled, but if the first organic material is disposed on the surface of the inorganic material film 14, it will spread without being repelled and the film thickness will be uniform. A coating layer is formed.
Next, the whole is heated and dried to remove the excess first solvent from the coating layer, thereby forming the first organic layer 21 having the first organic compound as a main component and a uniform film thickness (FIG. 1 ( d)).

次に、発光物質からなる第二の有機化合物が、第二の溶媒に分散された液状の第二の有機材料を、インクジェットプリンタのタンクに充填し、該インクジェットプリンタのノズルを孔１６上で静止させ、ノズルから第二の有機材料を噴出させると、第二の有機材料の液滴が孔１６の内部に着弾し、第二の有機材料が第一の有機層２１表面に配置される。  Next, a second organic compound made of a luminescent material is filled with a liquid second organic material dispersed in a second solvent into a tank of the ink jet printer, and the nozzle of the ink jet printer is stationary over the hole 16. Then, when the second organic material is ejected from the nozzle, a droplet of the second organic material lands on the inside of the hole 16 and the second organic material is disposed on the surface of the first organic layer 21.

上述したように、第一の有機層２１の膜厚は均一であり、その表面は平坦になっているので、第二の有機材料が第一の有機層２１の表面に配置されると、膜厚均一な塗布層が形成される。次いで全体を加熱乾燥して、該塗布層から余分な第二の溶媒を除去すれば、第二の有機化合物を主成分とし、膜厚均一な第二の有機層２２が形成される（図２（ａ））。  As described above, since the film thickness of the first organic layer 21 is uniform and the surface thereof is flat, when the second organic material is disposed on the surface of the first organic layer 21, the film A uniform coating layer is formed. Next, the whole is heated and dried to remove excess second solvent from the coating layer, whereby a second organic layer 22 having a second organic compound as a main component and a uniform film thickness is formed (FIG. 2). (A)).

次に、電子輸送物質からなる第三の有機化合物が第三の溶媒に分散された液状の第三の有機材料をインクジェットプリンタのタンクに充填し、該インクジェットプリンタのノズルを孔１６上で静止させ、ノズルから第三の有機材料を噴出させると、第三の有機材料の液滴が孔１６の内部に着弾し、第三の有機材料が第二の有機層２２の表面に配置され、塗布層が形成される。次いで、全体を加熱乾燥して、第三の有機材料の塗布層から余分な第三の溶媒を除去すると、第三の有機層２３が形成される（図２（ｂ））。  Next, a liquid third organic material in which a third organic compound made of an electron transporting material is dispersed in a third solvent is filled in the tank of the ink jet printer, and the nozzle of the ink jet printer is stopped on the hole 16. When the third organic material is ejected from the nozzle, a droplet of the third organic material lands on the inside of the hole 16, the third organic material is disposed on the surface of the second organic layer 22, and the coating layer Is formed. Next, the whole is heated and dried to remove an excess third solvent from the third organic material coating layer, whereby a third organic layer 23 is formed (FIG. 2B).

図２（ｂ）の符号２０は孔１６の内部に形成された第一〜第三の有機層２１〜２３からなる有機膜を示している。次に、有機膜２０が形成された状態の処理対象基板１０を、予め真空雰囲気が形成された蒸着装置の真空槽内部に搬入し、隔壁膜１５側の面を真空槽内部の蒸着源に向けた状態で配置し、図２（ｃ）に示すように隔壁膜１５上に電極用マスク２８を配置する。  Reference numeral 20 in FIG. 2B denotes an organic film composed of first to third organic layers 21 to 23 formed inside the hole 16. Next, the substrate 10 to be processed in a state where the organic film 20 is formed is carried into the vacuum chamber of a vapor deposition apparatus in which a vacuum atmosphere has been formed in advance, and the surface on the partition film 15 side is directed to the vapor deposition source inside the vacuum chamber. The electrode mask 28 is disposed on the partition wall film 15 as shown in FIG.

電極用マスク２８は細長の開口を複数有している。電極用マスク２８が隔壁膜１５上に配置された状態では、各開口が透明電極膜１２と孔１６上の位置で交差するようにされており、従って各開口の内部には隔壁膜１５の表面と、有機膜２０の表面が露出している。  The electrode mask 28 has a plurality of elongated openings. In a state where the electrode mask 28 is disposed on the partition film 15, each opening intersects the transparent electrode film 12 at a position on the hole 16, and therefore, the surface of the partition film 15 is located inside each opening. The surface of the organic film 20 is exposed.

この状態で、蒸着源から電極材料の蒸気を放出させると、開口を通過した蒸気が、隔壁膜１５表面の開口内に露出する部分と有機膜２０の表面に付着し、孔１６上の位置で透明電極膜１２と交差する細長の上部電極膜が、開口と同じ数形成される。  In this state, when the vapor of the electrode material is released from the vapor deposition source, the vapor that has passed through the opening adheres to the exposed portion of the surface of the partition wall film 15 and the surface of the organic film 20, and at a position on the hole 16. The same number of elongated upper electrode films intersecting the transparent electrode film 12 as the openings are formed.

図２（ｄ）の符号１は上部電極膜２５が形成された状態の有機ＥＬ素子を示している。ここでは、各透明電極膜１２は直線状に形成され、互いに所定間隔を空けて平行に配置されており、各上部電極膜２５も直線状に形成されされ、透明電極膜１２と直交するようにそれぞれ交差しているので、同じ透明電極膜１２上に形成された複数の有機膜２０には、それぞれ異なる上部電極膜２５が密着した状態になっている。  Reference numeral 1 in FIG. 2D indicates an organic EL element in which the upper electrode film 25 is formed. Here, each transparent electrode film 12 is formed in a straight line and arranged in parallel with a predetermined distance from each other, and each upper electrode film 25 is also formed in a straight line so as to be orthogonal to the transparent electrode film 12. Since they intersect each other, different upper electrode films 25 are in close contact with the plurality of organic films 20 formed on the same transparent electrode film 12.

従って、透明電極膜１２と上部電極膜２５とを選択して正電圧と負電圧をそれぞれ印加すると、選択された透明電極膜１２上の有機膜２０のうち、選択された上部電極膜２５と密着する有機膜２０に電子が注入される。  Accordingly, when the transparent electrode film 12 and the upper electrode film 25 are selected and a positive voltage and a negative voltage are applied, the organic film 20 on the selected transparent electrode film 12 is in close contact with the selected upper electrode film 25. Electrons are injected into the organic film 20.

有機膜２０は第三の有機層２３が形成された側の面が上部電極膜２５と密着しており、第三の有機層２３は電子輸送物質からなる第三の有機化合物を含有するので、上部電極膜２５から注入された電子は第三の有機層２３から第二の有機層２２へ輸送される。
他方、透明電極膜１２は無機材料膜１４に密着されているので、無機材料膜１４には正孔が注入される。The surface of the organic film 20 on which the third organic layer 23 is formed is in close contact with the upper electrode film 25, and the third organic layer 23 contains a third organic compound made of an electron transport material. Electrons injected from the upper electrode film 25 are transported from the third organic layer 23 to the second organic layer 22.
On the other hand, since the transparent electrode film 12 is in close contact with the inorganic material film 14, holes are injected into the inorganic material film 14.

ここでは、第一の有機化合物は正孔輸送物質であるＰＥＤＯＴ（ｐｏｌｙ（ｅｔｈｙｌｅｎｅｄｉｏｘｙ）ｔｈｉｏｐｈｅｎｅ、ポリエチレンジオキシチオフェン）で構成されており、ＰＥＤＯＴを用いた場合の第一の有機層２１の仕事関数は５．０ｅＶである。また、ＩＴＯからなる透明電極膜１２の仕事関数は４．８ｅＶである。これに対し、酸化チタンからなる無機材料膜１４の仕事関数は４．８ｅＶと５．０ｅＶの間にあるので、無機材料膜１４に注入された正孔は第一の有機層２１に輸送され、更に、第一の有機層２１中のＰＥＤＯＴに輸送されて第二の有機層２２に注入される。  Here, the first organic compound is composed of PEDOT (poly (ethylenedioxy) thiophene, polyethylenedioxythiophene) which is a hole transport material, and the work function of the first organic layer 21 when PEDOT is used is 5.0 eV. The work function of the transparent electrode film 12 made of ITO is 4.8 eV. On the other hand, since the work function of the inorganic material film 14 made of titanium oxide is between 4.8 eV and 5.0 eV, the holes injected into the inorganic material film 14 are transported to the first organic layer 21, Further, it is transported to PEDOT in the first organic layer 21 and injected into the second organic layer 22.

第二の有機層２２は発光物質からなる第二の有機化合物を主成分とするので、第二の有機層２２に注入された電子と正孔が結合すると、発光物質が励起し、第二の有機層２２が発光する。上述したように、本発明では第二の有機層２２の膜厚が均一になっているので、第二の有機層２２内で抵抗差が生じず、第二の有機層２２が均一に発光する。  Since the second organic layer 22 is mainly composed of a second organic compound made of a luminescent material, when the electrons and holes injected into the second organic layer 22 are combined, the luminescent material is excited, The organic layer 22 emits light. As described above, in the present invention, since the film thickness of the second organic layer 22 is uniform, there is no resistance difference in the second organic layer 22, and the second organic layer 22 emits light uniformly. .

無機材料膜１４の膜厚は透光性を有する程度に薄くなっているので、第二の有機層２２から放出される光のうち、無機材料膜１４側に放出される光は、第一の有機層２１と、無機材料膜１４と、透明電極膜１２と、透明基板１１とを通って有機ＥＬ素子１の外部に放出される。  Since the film thickness of the inorganic material film 14 is thin enough to have translucency, the light emitted from the second organic layer 22 to the inorganic material film 14 side is the first It is emitted to the outside of the organic EL element 1 through the organic layer 21, the inorganic material film 14, the transparent electrode film 12 and the transparent substrate 11.

上述したように、この有機ＥＬ素子１では、選択された透明電極膜１２上に位置する有機膜２０のうち、選択された上部電極膜２５と密着する有機膜２０だけに電圧が印加されて光が放出されるので、上部電極膜２５と透明電極膜１２を選択することで、所望の有機膜２０だけを発光させ、文字や図のような画像情報を表示することができる。  As described above, in the organic EL element 1, a voltage is applied to only the organic film 20 that is in close contact with the selected upper electrode film 25 among the organic films 20 positioned on the selected transparent electrode film 12. Therefore, by selecting the upper electrode film 25 and the transparent electrode film 12, only the desired organic film 20 can emit light, and image information such as characters and figures can be displayed.

有機膜２０に色素を添加すれば、有機ＥＬ素子から放出される光を色素の色に着色することができる。例えば、３つ以上の有機膜２０を１組の発光単位とし、発光単位を構成する各有機膜２０に赤、緑、青等の異なる色の色素を含有させ、各発光単位を１つの画素として発光させれば、画像情報をカラー表示することもできる。  If a dye is added to the organic film 20, the light emitted from the organic EL element can be colored in the color of the dye. For example, three or more organic films 20 are used as one set of light emitting units, and each organic film 20 constituting the light emitting units is made to contain pigments of different colors such as red, green, and blue, and each light emitting unit is used as one pixel. If the light is emitted, the image information can be displayed in color.

複数の有機層２１〜２３からなる有機膜２０に色素を添加させる場合には、色素を添加する有機層２１〜２３は特に限定されるものではないが、発光物質を含有する有機層２２よりも無機材料膜１４側の有機層２２、２１に添加することが好ましく、それらの中でも発光物質を含有する有機層２２に添加することがより好ましい。  When adding a pigment | dye to the organic film 20 which consists of several organic layers 21-23, although the organic layers 21-23 which add a pigment | dye are not specifically limited, Than the organic layer 22 containing a luminescent substance It is preferable to add to the organic layers 22 and 21 on the inorganic material film 14 side, and it is more preferable to add to the organic layer 22 containing a light emitting substance among them.

以上は、孔１６の底面に露出する透明電極膜１２表面だけに無機材料膜１４を形成する場合について説明したが、本発明はこれに限定されるものではない。
図３の符号３は本発明の他の例の有機ＥＬ素子を示している。この有機ＥＬ素子３では、無機材料膜３４がスパッタリングによって、孔１６の側面と、孔１６の底面に連続して形成されている。The above describes the case where the inorganic material film 14 is formed only on the surface of the transparent electrode film 12 exposed on the bottom surface of the hole 16, but the present invention is not limited to this.
Reference numeral 3 in FIG. 3 represents an organic EL element of another example of the present invention. In the organic EL element 3, the inorganic material film 34 is continuously formed on the side surface of the hole 16 and the bottom surface of the hole 16 by sputtering.

この有機ＥＬ素子３においても、第一の有機材料は孔１６の内部の位置で無機材料膜３４の表面に配置されるので、第一の有機層２１は膜厚均一になり、従って、第一の有機層２１表面に形成される第二の有機層２２の膜厚も均一になる。  Also in this organic EL element 3, the first organic material is disposed on the surface of the inorganic material film 34 at a position inside the hole 16. The film thickness of the second organic layer 22 formed on the surface of the organic layer 21 is also uniform.

以上は、有機膜２０が第一〜第三の有機層２１〜２３を有する場合について説明したが本発明はこれに限定されるものではなく、有機膜が少なくとも正孔輸送物質と、発光物質とを有しているのであれば、２層以下の有機層で１つの有機膜を構成してもよく、また、４層以上の有機層で１つの有機膜を構成することもできる。正孔輸送物質と、発光物質は別々の有機層に含有させてもよいし、同じ有機層に含有させてもよい。  The above describes the case where the organic film 20 has the first to third organic layers 21 to 23, but the present invention is not limited to this, and the organic film includes at least a hole transport material, a light emitting material, and the like. If there is, one organic film may be constituted by two or less organic layers, and one organic film may be constituted by four or more organic layers. The hole transport material and the light emitting material may be contained in separate organic layers or in the same organic layer.

透明電極膜１２と無機材料膜１４の間と、有機膜２０と上部電極膜２５との間のいずれか一方又は両方にバッファ層のような他の層を設けてもよい。正孔輸送物質はＰＥＤＯＴからなるものに限定されず、ＰＥＤＯＴ／ＰＳＳ（ｐｏｌｙ（ｓｔｙｒｅｎｅｓｕｌｆｏｎａｔｅ））、ＰＡＮＩ（ｐｏｌｙａｎｉｌｉｎｅ、ポリアニリン）等も用いることができる。  Another layer such as a buffer layer may be provided between one or both of the transparent electrode film 12 and the inorganic material film 14 and between the organic film 20 and the upper electrode film 25. The hole transport material is not limited to those made of PEDOT, and PEDOT / PSS (poly (styrenesulfonate)), PANI (polyaniline, polyaniline), and the like can also be used.

第一の有機化合物を分散する溶媒（第一の溶媒）も水に限定されるものではなく、無機材料膜１４に対する親和性が、透明電極膜１２よりも高いものであれば、メタノール、エタノール、ブタノール等のアルコール類を用いることが可能であり、またそれらの溶媒を２種類以上混合して用いることもできる。
アルコールは親水性溶媒であるので、アルコール又は水を有する第一の溶媒は、親水性溶媒である。従って、無機材料膜１４の主成分に親水性の無機材料を用い、透明電極膜の主成分に疎水性の導電材料を用いれば、上記第一の溶媒の無機材料膜１４に対する親和性が、透明電極膜１２よりも高くなる。
尚、本発明に用いる第一の溶媒はアルコールや水に限定されず、第一の有機化合物を化学的に変性させないものであれば、他の親水性溶媒を用いることができる。
また、正孔輸送物質のような第一の有機化合物と一緒に、色素や分散剤や緩衝剤等の添加剤を溶媒に分散させることもできる。The solvent (first solvent) in which the first organic compound is dispersed is not limited to water. If the affinity for the inorganic material film 14 is higher than that of the transparent electrode film 12, methanol, ethanol, Alcohols such as butanol can be used, and a mixture of two or more of these solvents can also be used.
Since alcohol is a hydrophilic solvent, the first solvent with alcohol or water is a hydrophilic solvent. Therefore, if a hydrophilic inorganic material is used as the main component of the inorganic material film 14 and a hydrophobic conductive material is used as the main component of the transparent electrode film, the affinity of the first solvent for the inorganic material film 14 is transparent. It becomes higher than the electrode film 12.
The first solvent used in the present invention is not limited to alcohol and water, and other hydrophilic solvents can be used as long as they do not chemically modify the first organic compound.
Further, together with a first organic compound such as a hole transport material, additives such as a dye, a dispersant, and a buffer can be dispersed in a solvent.

本発明に用いる発光物質は特に限定されるものではなく、ポリパラフェニレンビニレン及びその誘導体やポリナフチレンビニレン、ポリアルキルチオフェン等種々の発光物質を用いることができる。  The light-emitting substance used in the present invention is not particularly limited, and various light-emitting substances such as polyparaphenylene vinylene and derivatives thereof, polynaphthylene vinylene, and polyalkylthiophene can be used.

電子輸送物質としては、Ａｌｑ（トリス（８−キノリノラト）アルミニウム（ＩＩＩ）錯体）や、シロール誘導体、亜鉛のベンゾチアゾール錯体等種々のものを用いることができる。また、発光物質や電子輸送物質を分散させる溶媒（第二、第三の溶媒）も特に限定されるものではなく、水、キシレン、エタノール、メタノール等種々の溶媒を用いることが可能である。これらの溶媒は単独で用いても良いし、２種類以上を混合して用いてもよい。また、発光物質や電子輸送物質を溶媒に分散させた液状の有機材料に、分散剤、緩衝剤、色素等の添加物を添加することもできる。  As the electron transporting substance, various substances such as Alq (tris (8-quinolinolato) aluminum (III) complex), silole derivatives, zinc benzothiazole complex, and the like can be used. In addition, the solvent (second and third solvents) in which the light-emitting substance and the electron transporting substance are dispersed is not particularly limited, and various solvents such as water, xylene, ethanol, and methanol can be used. These solvents may be used alone or in combination of two or more. In addition, additives such as a dispersing agent, a buffering agent, and a dye can be added to a liquid organic material in which a light emitting substance or an electron transporting substance is dispersed in a solvent.

透明電極膜１２を構成する物質もＩＴＯに限定されず、透光性が高く、かつ導電性を有するものであれば、酸化亜鉛や酸化錫等他の導電材料を透明電極膜１２の主成分として用いることが可能であり、またこれらの導電材料を２種類以上一緒に用いることもできる。ＩＴＯと、酸化亜鉛と、酸化錫は疎水性の導電材料であり、疎水性の導電材料を主成分とする透明電極膜１２上に、上記親水性の無機材料膜を配置すれば、親水性溶媒を含有する有機材料が弾かれずに無機材料膜１４上に塗布される。  The material constituting the transparent electrode film 12 is not limited to ITO, and other conductive materials such as zinc oxide and tin oxide can be used as the main component of the transparent electrode film 12 as long as they have high translucency and conductivity. They can be used, and two or more of these conductive materials can be used together. ITO, zinc oxide, and tin oxide are hydrophobic conductive materials. If the hydrophilic inorganic material film is disposed on the transparent electrode film 12 mainly composed of a hydrophobic conductive material, a hydrophilic solvent is obtained. The organic material containing is applied onto the inorganic material film 14 without being repelled.

上部電極膜２５を構成する導電材料も特に限定されるものではなく、マグネシウム合金、アルミニウム合金、金属カルシウム等種々の導電材料を用いることが可能である。上部電極膜の成膜法も真空蒸着法に限定されず、イオンプレーティング法、イオン化蒸着法、スパッタ法等他の成膜方法で成膜することもできる。  The conductive material constituting the upper electrode film 25 is not particularly limited, and various conductive materials such as magnesium alloy, aluminum alloy, and calcium metal can be used. The film formation method of the upper electrode film is not limited to the vacuum vapor deposition method, and the film can be formed by other film formation methods such as an ion plating method, an ionization vapor deposition method, and a sputtering method.

隔壁膜１５を構成する樹脂材料はポリイミド樹脂に限定されるものではなく、エポキシ樹脂等他の樹脂材料を用いることもできる。また、隔壁膜１５を構成する材料は樹脂材料に限定されず、シリコン等無機材料も用いることが可能であるが、絶縁性材料を用いることが好ましい。また、絶縁材料からなる絶縁層を２種類以上積層し、１つの隔壁膜を形成してもよい。  The resin material constituting the partition film 15 is not limited to polyimide resin, and other resin materials such as epoxy resin can also be used. The material constituting the partition wall film 15 is not limited to a resin material, and an inorganic material such as silicon can be used, but an insulating material is preferably used. Alternatively, two or more insulating layers made of an insulating material may be stacked to form one partition film.

以上は、透明電極膜１２と上部電極膜２５の両方をそれぞれ複数本ずつ形成する場合について説明したが本発明はこれに限定されるものでははい。透明電極膜１２と上部電極膜２５のうち、いずれか一方の電極膜を大面積に成膜し、他方の電極膜を複数個に分割し、分割された各電極膜に個別に電圧を印加できるようなトランジスタ等の電気手段をそれぞれ設ければ、電圧を印加する電極膜を選択することで、所望の有機膜だけを発光させることができる。  The case where a plurality of both the transparent electrode film 12 and the upper electrode film 25 are formed has been described above, but the present invention is not limited to this. Either one of the transparent electrode film 12 and the upper electrode film 25 is formed in a large area, the other electrode film is divided into a plurality of pieces, and a voltage can be individually applied to each of the divided electrode films. If such an electric means such as a transistor is provided, only a desired organic film can emit light by selecting an electrode film to which a voltage is applied.

Claims (12)

透明基板上に配置され、所定形状にパターニングされた透明電極膜と、
少なくとも前記透明電極膜上に位置する隔壁膜と、
前記隔壁膜に形成され、底面に前記透明電極膜が位置する複数の孔と、
前記各孔内にそれぞれ配置された有機膜と、
少なくとも前記有機膜上に配置された上部電極膜とを有し、
前記透明電極膜と前記上部電極膜との間に電圧を印加すると、前記有機膜が発光する有機ＥＬ素子を製造する有機ＥＬ素子の製造方法であって、
前記透明電極膜上に前記隔壁膜を配置し、
前記隔壁膜が有する前記孔底面に露出する前記透明電極膜上に無機材料膜を形成した後、
含有する溶媒の前記無機材料膜に対する親和性が、前記透明電極膜に対する親和性よりも高い液状の有機材料を、前記無機材料膜の表面に配置して前記有機膜を形成する有機ＥＬ素子の製造方法。A transparent electrode film disposed on a transparent substrate and patterned into a predetermined shape;
A partition film located on at least the transparent electrode film;
A plurality of holes formed in the partition film and having the transparent electrode film positioned on a bottom surface;
An organic film disposed in each of the holes;
Having at least an upper electrode film disposed on the organic film,
When a voltage is applied between the transparent electrode film and the upper electrode film, an organic EL element manufacturing method for manufacturing an organic EL element that emits light from the organic film,
The partition film is disposed on the transparent electrode film,
After forming an inorganic material film on the transparent electrode film exposed on the hole bottom surface of the partition film,
Manufacture of an organic EL device in which a liquid organic material having a higher affinity for the inorganic material film than the transparent electrode film is disposed on the surface of the inorganic material film to form the organic film Method. 前記有機材料の液滴を前記孔に向けて噴出して前記無機膜表面へ前記組成物を配置する請求項１記載の有機ＥＬ素子の製造方法。The method for producing an organic EL element according to claim 1, wherein the composition is disposed on the surface of the inorganic film by ejecting droplets of the organic material toward the hole. 前記有機材料は、ポリエチレンジオキシチオフェンと、ポリアニリンのいずれか一方又は両方を含有する請求項１記載の有機ＥＬ素子の製造方法。The method for producing an organic EL element according to claim 1, wherein the organic material contains one or both of polyethylene dioxythiophene and polyaniline. 前記有機材料に含有される前記溶媒は親水性溶媒である請求項１記載の有機ＥＬ素子の製造方法。The method for producing an organic EL element according to claim 1, wherein the solvent contained in the organic material is a hydrophilic solvent. 前記親水性溶媒は水とアルコールのいずれか一方又は両方を含有する請求項４記載の有機ＥＬ素子の製造方法。The method for producing an organic EL element according to claim 4, wherein the hydrophilic solvent contains one or both of water and alcohol. 前記無機材料膜は、酸化チタンを主成分とする請求項１記載の有機ＥＬ素子の製造方法。The method of manufacturing an organic EL element according to claim 1, wherein the inorganic material film contains titanium oxide as a main component. 前記無機材料膜の構成物質を含むターゲットをスパッタリングしてスパッタ粒子を放出させ、前記孔底面に位置する前記透明電極膜の表面に前記スパッタ粒子を付着させて前記無機材料膜を形成する請求項１記載の有機ＥＬ素子の製造方法。The target including the constituent material of the inorganic material film is sputtered to release sputtered particles, and the sputtered particles are attached to the surface of the transparent electrode film located on the bottom of the hole to form the inorganic material film. The manufacturing method of the organic EL element of description. 透明基板上に配置され、所定形状にパターニングされた透明電極膜と、
少なくとも前記透明電極膜上に位置する隔壁膜と、
前記隔壁膜に形成され、底面に前記透明電極膜が位置する複数の孔と、
前記各孔内にそれぞれ配置された有機膜と、
少なくとも前記有機膜上に配置された上部電極膜とを有し、
前記透明電極膜と前記上部電極膜との間に電圧を印加すると、前記有機膜が発光する有機ＥＬ素子であって、
前記各孔内に位置する前記透明電極膜上には酸化チタンを主成分とする無機材料膜が形成され、
前記有機膜は前記無機材料膜の表面に形成された有機ＥＬ素子。A transparent electrode film disposed on a transparent substrate and patterned into a predetermined shape;
A partition film located on at least the transparent electrode film;
A plurality of holes formed in the partition film and having the transparent electrode film positioned on a bottom surface;
An organic film disposed in each of the holes;
Having at least an upper electrode film disposed on the organic film,
An organic EL element in which the organic film emits light when a voltage is applied between the transparent electrode film and the upper electrode film,
An inorganic material film mainly composed of titanium oxide is formed on the transparent electrode film located in each hole,
The organic film is an organic EL element formed on the surface of the inorganic material film. 前記有機膜はポリエチレンジオキシチオフェンと、ポリアニリンのいずれか一方又は両方を含有する請求項８記載の有機ＥＬ素子。The organic EL element according to claim 8, wherein the organic film contains one or both of polyethylenedioxythiophene and polyaniline. 前記無機材料膜は親水性である請求項８記載の有機ＥＬ素子。The organic EL element according to claim 8, wherein the inorganic material film is hydrophilic. 前記透明電極膜は疎水性の導電材料を主成分とする請求項１０記載の有機ＥＬ素子。The organic EL element according to claim 10, wherein the transparent electrode film is mainly composed of a hydrophobic conductive material. 前記疎水性の導電材料はインジウム錫酸化物と、酸化亜鉛と、酸化錫とからなる群より選択されるいずれか１種類の導電材料を含有する請求項１１記載の有機ＥＬ素子。The organic EL element according to claim 11, wherein the hydrophobic conductive material contains any one type of conductive material selected from the group consisting of indium tin oxide, zinc oxide, and tin oxide.
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