JPWO2005012920A1 - 力学量センサ - Google Patents
力学量センサ Download PDFInfo
- Publication number
- JPWO2005012920A1 JPWO2005012920A1 JP2005512450A JP2005512450A JPWO2005012920A1 JP WO2005012920 A1 JPWO2005012920 A1 JP WO2005012920A1 JP 2005512450 A JP2005512450 A JP 2005512450A JP 2005512450 A JP2005512450 A JP 2005512450A JP WO2005012920 A1 JPWO2005012920 A1 JP WO2005012920A1
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- circuit
- signal
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- mechanical quantity
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- 230000001133 acceleration Effects 0.000 claims abstract description 75
- 230000010355 oscillation Effects 0.000 claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 230000035945 sensitivity Effects 0.000 claims description 26
- 230000003321 amplification Effects 0.000 claims description 9
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 9
- 238000013016 damping Methods 0.000 abstract description 22
- 230000002159 abnormal effect Effects 0.000 abstract description 10
- 230000010363 phase shift Effects 0.000 abstract description 7
- 230000004044 response Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (7)
- 力学量によって加わる応力が互いに逆である2つの圧電振動子と、該2つの圧電振動子に対して共通に電圧信号を印加する電圧信号印加回路と、前記2つの圧電振動子に流れる電流信号をそれぞれ電圧信号に変換する電流電圧変換回路と、該電流電圧変換回路の出力信号同士の位相差を検出して力学量検出信号を出力する位相差信号処理回路とを設けてなる力学量センサにおいて、
前記2つの圧電振動子の電流経路に抵抗を接続し、
前記電圧信号印加回路を、
前記2つの圧電振動子に流れる電流の加算値に相当する加算信号を電圧増幅する電圧増幅回路と、
該電圧増幅回路から出力される電圧信号の振幅を所定値に制限する振幅制限回路と、
前記2つの圧電振動子に対して共通に印加する帰還電圧信号と前記加算信号との位相差を検出し、該位相差が所定値となるように前記帰還電圧信号の位相を制御する位相制御回路と、
前記帰還電圧信号の不要な周波数成分を抑圧するフィルタ回路と、
から構成して、
前記圧電振動子と、前記電圧増幅回路と、前記振幅制限回路と、前記位相制御回路と、前記フィルタ回路とで発振動作させるようにした力学量センサ。 - 前記フィルタ回路を、前記発振周波数を通過帯域に含むローパスフィルタとし、
前記位相制御回路を、前記加算信号と前記帰還電圧信号との位相差を電圧信号に変換する位相差電圧変換回路と、
該位相差電圧変換回路の出力信号と基準信号とを比較する比較回路と、
該比較回路の出力電圧によってインピーダンスが変化する電圧制御抵抗回路と、
該電圧制御抵抗回路のインピーダンスによって位相が変化するオールパスフィルタと、
から構成した請求項1に記載の力学量センサ。 - 前記位相制御回路は、前記帰還電圧信号と前記加算信号との位相差を力学量の検出感度が最大となるように位相制御する請求項1または2に記載の力学量センサ。
- 前記力学量は加速度である請求項1〜3のいずれかに記載の力学量センサ。
- 前記力学量は角加速度である請求項1〜3のいずれかに記載の力学量センサ。
- 前記力学量は角速度である請求項1〜3のいずれかに記載の力学量センサ。
- 前記力学量は荷重である請求項1〜3のいずれかに記載の力学量センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003204074 | 2003-07-30 | ||
JP2003204074 | 2003-07-30 | ||
PCT/JP2004/007248 WO2005012920A1 (ja) | 2003-07-30 | 2004-05-27 | 力学量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005012920A1 true JPWO2005012920A1 (ja) | 2007-09-27 |
JP4654913B2 JP4654913B2 (ja) | 2011-03-23 |
Family
ID=34113634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005512450A Expired - Lifetime JP4654913B2 (ja) | 2003-07-30 | 2004-05-27 | 力学量センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7355321B2 (ja) |
JP (1) | JP4654913B2 (ja) |
DE (1) | DE112004000934B4 (ja) |
WO (1) | WO2005012920A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10308087A1 (de) * | 2003-02-24 | 2004-09-09 | Endress + Hauser Gmbh + Co. Kg | Schutz vor den Effekten von Kondensatbrücken |
GB2425160B (en) * | 2005-04-12 | 2010-11-17 | Perpetuum Ltd | An Electromechanical Generator for, and method of, Converting Mechanical Vibrational Energy into Electrical Energy |
JP4911690B2 (ja) * | 2006-01-31 | 2012-04-04 | Necトーキン株式会社 | 振動ジャイロ用振動子 |
JP5237622B2 (ja) * | 2007-12-21 | 2013-07-17 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 振動補正制御回路及びそれを備えた撮像装置 |
JP5242151B2 (ja) * | 2007-12-21 | 2013-07-24 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 振動補正制御回路及びそれを備えた撮像装置 |
JP2009156945A (ja) * | 2007-12-25 | 2009-07-16 | Sanyo Electric Co Ltd | 撮像装置の防振制御回路 |
JP2010199822A (ja) * | 2009-02-24 | 2010-09-09 | Panasonic Corp | 検波回路、物理量センサ装置 |
FI124794B (fi) * | 2012-06-29 | 2015-01-30 | Murata Manufacturing Co | Parannettu resonaattori |
EP3344968B1 (en) * | 2015-08-31 | 2018-12-26 | Koninklijke Philips N.V. | Electroactive polymer sensors and sensing methods |
US10725202B2 (en) * | 2017-07-21 | 2020-07-28 | Baker Hughes, A Ge Company, Llc | Downhole electronics package having integrated components formed by layer deposition |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6250630A (ja) * | 1985-08-30 | 1987-03-05 | Teraoka Seiko Co Ltd | 振動式荷重測定装置 |
EP1324052A2 (en) * | 2001-12-28 | 2003-07-02 | Murata Manufacturing Co., Ltd. | Mechanical force sensor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1296433B (de) | 1966-08-18 | 1969-05-29 | Gen Precision Inc | Beschleunigungsmesser |
JP3514240B2 (ja) | 2001-02-19 | 2004-03-31 | 株式会社村田製作所 | 加速度センサ |
JP4066916B2 (ja) * | 2003-09-08 | 2008-03-26 | 株式会社村田製作所 | 力学量センサ |
-
2004
- 2004-05-27 DE DE112004000934T patent/DE112004000934B4/de not_active Expired - Lifetime
- 2004-05-27 WO PCT/JP2004/007248 patent/WO2005012920A1/ja active Application Filing
- 2004-05-27 JP JP2005512450A patent/JP4654913B2/ja not_active Expired - Lifetime
- 2004-05-27 US US10/562,363 patent/US7355321B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6250630A (ja) * | 1985-08-30 | 1987-03-05 | Teraoka Seiko Co Ltd | 振動式荷重測定装置 |
EP1324052A2 (en) * | 2001-12-28 | 2003-07-02 | Murata Manufacturing Co., Ltd. | Mechanical force sensor |
Also Published As
Publication number | Publication date |
---|---|
WO2005012920A1 (ja) | 2005-02-10 |
US7355321B2 (en) | 2008-04-08 |
US20070103032A1 (en) | 2007-05-10 |
JP4654913B2 (ja) | 2011-03-23 |
DE112004000934B4 (de) | 2008-06-05 |
DE112004000934T5 (de) | 2006-04-06 |
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