JPS6490032A - Molecular beam cell - Google Patents

Molecular beam cell

Info

Publication number
JPS6490032A
JPS6490032A JP24835287A JP24835287A JPS6490032A JP S6490032 A JPS6490032 A JP S6490032A JP 24835287 A JP24835287 A JP 24835287A JP 24835287 A JP24835287 A JP 24835287A JP S6490032 A JPS6490032 A JP S6490032A
Authority
JP
Japan
Prior art keywords
molecular beam
gas
molecular
reaction tube
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24835287A
Other languages
Japanese (ja)
Other versions
JP2652947B2 (en
Inventor
Chiaki Sasaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62248352A priority Critical patent/JP2652947B2/en
Publication of JPS6490032A publication Critical patent/JPS6490032A/en
Application granted granted Critical
Publication of JP2652947B2 publication Critical patent/JP2652947B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To obtain a molecular beam at a low temp. and to suppress the effects of gas released from the cell and entrainment by setting a vessel contg. starting material for molecular beam formation in a reaction tube provided with a small pipe for introducing gas, a pressure regulating means which is also used as a molecular beam blowing nozzle and a heating means. CONSTITUTION:A reaction tube 4 is provided with a small pipe 10 for introducing gas, a pressure regulating means 11 which doubles as a molecular beam blowing nozzle and a heating means 3 such as a tantalum heater. A boat 2 contg. starting material 1 for molecular beams such as Ga is set in the reaction tube 4. Gas 6 such as Cl is introduced into the tube 4 from a stainless steel pipe 8 through the small pipe 10. Since molecular beams can be obtd. at a low temp. in the resulting cell, the effect of gas and splashes released from the cell together wit molecular beams can be suppressed.
JP62248352A 1987-09-30 1987-09-30 Molecular beam cell Expired - Lifetime JP2652947B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62248352A JP2652947B2 (en) 1987-09-30 1987-09-30 Molecular beam cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62248352A JP2652947B2 (en) 1987-09-30 1987-09-30 Molecular beam cell

Publications (2)

Publication Number Publication Date
JPS6490032A true JPS6490032A (en) 1989-04-05
JP2652947B2 JP2652947B2 (en) 1997-09-10

Family

ID=17176819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62248352A Expired - Lifetime JP2652947B2 (en) 1987-09-30 1987-09-30 Molecular beam cell

Country Status (1)

Country Link
JP (1) JP2652947B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5222074A (en) * 1990-06-05 1993-06-22 Matsushita Electric Industrial Co., Ltd. Thermal decomposition cell

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261294A (en) * 1985-05-14 1986-11-19 Nippon Telegr & Teleph Corp <Ntt> Method of molecular beam epitaxial growth and molecular beam source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261294A (en) * 1985-05-14 1986-11-19 Nippon Telegr & Teleph Corp <Ntt> Method of molecular beam epitaxial growth and molecular beam source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5222074A (en) * 1990-06-05 1993-06-22 Matsushita Electric Industrial Co., Ltd. Thermal decomposition cell

Also Published As

Publication number Publication date
JP2652947B2 (en) 1997-09-10

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