JPS6484639A - Al wiring and manufacture thereof - Google Patents
Al wiring and manufacture thereofInfo
- Publication number
- JPS6484639A JPS6484639A JP24235487A JP24235487A JPS6484639A JP S6484639 A JPS6484639 A JP S6484639A JP 24235487 A JP24235487 A JP 24235487A JP 24235487 A JP24235487 A JP 24235487A JP S6484639 A JPS6484639 A JP S6484639A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- gas
- nitrogen
- thin film
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To inhibit the generation of an electromigration and to make long the longevity of an Al wiring by a method wherein nitrogen is contained in the Al wiring and the amount of this nitrogen is adjusted. CONSTITUTION:Ar gas, which is inert gas, is added in a chamber 5, which is brought in a vacuum state by a vacuum pump 6, being controlled by a mass flow controller 7 in such a way that its flow rate comes to 20cc/min. With that, N2 gas is added while its flow rate is controlled by a mass flow controller 7 in such a way as to come to 0.14-18cc/min. A high voltage is applied between a wafer holder 1 and a target 3 in a state that the amount of gas in the chamber 5 is adjusted and a reactive sputtering is performed to deposit an Al-Si-N2 thin film on the surface of a semiconductor wafer 2. This thin film is patterned by performing a photolithography process after that to form an Al wiring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24235487A JPS6484639A (en) | 1987-09-25 | 1987-09-25 | Al wiring and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24235487A JPS6484639A (en) | 1987-09-25 | 1987-09-25 | Al wiring and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484639A true JPS6484639A (en) | 1989-03-29 |
Family
ID=17087943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24235487A Pending JPS6484639A (en) | 1987-09-25 | 1987-09-25 | Al wiring and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484639A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0542271A2 (en) * | 1991-11-15 | 1993-05-19 | Casio Computer Company Limited | Thin-film device with a compound conductive layer |
JP2009006093A (en) * | 2007-06-27 | 2009-01-15 | Hisato Aramaki | Bathtub-attached type bathing care assisting device |
-
1987
- 1987-09-25 JP JP24235487A patent/JPS6484639A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0542271A2 (en) * | 1991-11-15 | 1993-05-19 | Casio Computer Company Limited | Thin-film device with a compound conductive layer |
EP0542271A3 (en) * | 1991-11-15 | 1994-01-19 | Casio Computer Co Ltd | |
JP2009006093A (en) * | 2007-06-27 | 2009-01-15 | Hisato Aramaki | Bathtub-attached type bathing care assisting device |
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