JPS6483659A - Sputtering device for producing oxide superconductive material - Google Patents

Sputtering device for producing oxide superconductive material

Info

Publication number
JPS6483659A
JPS6483659A JP62241876A JP24187687A JPS6483659A JP S6483659 A JPS6483659 A JP S6483659A JP 62241876 A JP62241876 A JP 62241876A JP 24187687 A JP24187687 A JP 24187687A JP S6483659 A JPS6483659 A JP S6483659A
Authority
JP
Japan
Prior art keywords
superconductive material
magnetic fields
oxide superconductive
magnetic
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62241876A
Other languages
Japanese (ja)
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62241876A priority Critical patent/JPS6483659A/en
Priority to US07/246,611 priority patent/US4963524A/en
Priority to CN88107590A priority patent/CN1019251B/en
Priority to EP19880308904 priority patent/EP0309294A3/en
Publication of JPS6483659A publication Critical patent/JPS6483659A/en
Pending legal-status Critical Current

Links

Classifications

    • Y02E40/642—

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To produce the thin films of an oxide superconductive material oriented in a prescribed direction at a low temp. by generating magnetic fields between opposed targets, disposing surfaces to be formed in the magnetic fields and orienting the crystals under film formation. CONSTITUTION:The targets 20, 20' are disposed to face each other. A magnet 7 to form a magnetic circuit is set as N and a magnet 7' as S. The closed magnetic circuit is constituted except in the space for generating the magnetic fields by using the magnetic fields 33, 33' and a coil 21 for generating the magnetic fields so that about >=0.1T magnetic field 31 is generated. Plural substrates 1 are disposed in this magnetic field 31 and the oxide superconductive material 2 is sputtered and formed on the surfaces thereof to be formed with the films. The thin films of the oxide superconductive material operating at the temp. above the liquid nitrogen temp. are thereby formed.
JP62241876A 1987-09-24 1987-09-24 Sputtering device for producing oxide superconductive material Pending JPS6483659A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62241876A JPS6483659A (en) 1987-09-24 1987-09-24 Sputtering device for producing oxide superconductive material
US07/246,611 US4963524A (en) 1987-09-24 1988-09-20 Sputtering device for manufacturing superconducting oxide material and method therefor
CN88107590A CN1019251B (en) 1987-09-24 1988-09-24 Method of mfg. superconducting oxide ceramic material film
EP19880308904 EP0309294A3 (en) 1987-09-24 1988-09-26 Method and apparatus for the manufacture of superconducting oxide materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62241876A JPS6483659A (en) 1987-09-24 1987-09-24 Sputtering device for producing oxide superconductive material

Publications (1)

Publication Number Publication Date
JPS6483659A true JPS6483659A (en) 1989-03-29

Family

ID=17080848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62241876A Pending JPS6483659A (en) 1987-09-24 1987-09-24 Sputtering device for producing oxide superconductive material

Country Status (1)

Country Link
JP (1) JPS6483659A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01246355A (en) * 1988-03-28 1989-10-02 Res Dev Corp Of Japan Formation of multiple oxides superconducting thin film by counter target-type sputtering method and device therefor
US5250998A (en) * 1991-02-28 1993-10-05 Konica Corporation Fixing apparatus having two nip regions
WO2016103126A1 (en) * 2014-12-26 2016-06-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029463A (en) * 1983-07-26 1985-02-14 Konishiroku Photo Ind Co Ltd Niobium nitride film
JPS63257130A (en) * 1987-04-14 1988-10-25 Sumitomo Electric Ind Ltd Manufacture of superconductive thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029463A (en) * 1983-07-26 1985-02-14 Konishiroku Photo Ind Co Ltd Niobium nitride film
JPS63257130A (en) * 1987-04-14 1988-10-25 Sumitomo Electric Ind Ltd Manufacture of superconductive thin film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01246355A (en) * 1988-03-28 1989-10-02 Res Dev Corp Of Japan Formation of multiple oxides superconducting thin film by counter target-type sputtering method and device therefor
US5250998A (en) * 1991-02-28 1993-10-05 Konica Corporation Fixing apparatus having two nip regions
WO2016103126A1 (en) * 2014-12-26 2016-06-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide
US9831353B2 (en) 2014-12-26 2017-11-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide

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