JPS6483504A - Production of ultrafine silicon nitride powder - Google Patents

Production of ultrafine silicon nitride powder

Info

Publication number
JPS6483504A
JPS6483504A JP23867087A JP23867087A JPS6483504A JP S6483504 A JPS6483504 A JP S6483504A JP 23867087 A JP23867087 A JP 23867087A JP 23867087 A JP23867087 A JP 23867087A JP S6483504 A JPS6483504 A JP S6483504A
Authority
JP
Japan
Prior art keywords
gas
raw material
nitride powder
silicon nitride
silicon tetrachloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23867087A
Other languages
Japanese (ja)
Inventor
Masahiko Nakajima
Yoshiyuki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP23867087A priority Critical patent/JPS6483504A/en
Publication of JPS6483504A publication Critical patent/JPS6483504A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/121—Coherent waves, e.g. laser beams

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE:To obtain ultrafine silicon nitride powder from an inexpensive and safely handleable silicon tetrachloride gas as a raw material, by using a mixed gas obtained by adding hydrogenated chlorosilane to silicon tetrachloride and ammonia as a raw material gas and irradiating the mixed gas with laser beam of carbon dioxide gas. CONSTITUTION:In producing silicon nitride powder by feeding a raw material gas to a reactor and irradiating the raw material gas with laser beam of carbon dioxide gas, the following method is used. Namely, a mixed gas of silicon tetrachloride containing 0.5-20mol.% hydrogenated chlorosilane and ammonia is used as the raw material gas. Trichlorosilane or dichlorosilane may be cited as the hydrogenated chlorosilane. These silanes have economical merits wherein contents of the silanes can be industrially controlled in synthesis of SiCl4.
JP23867087A 1987-09-25 1987-09-25 Production of ultrafine silicon nitride powder Pending JPS6483504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23867087A JPS6483504A (en) 1987-09-25 1987-09-25 Production of ultrafine silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23867087A JPS6483504A (en) 1987-09-25 1987-09-25 Production of ultrafine silicon nitride powder

Publications (1)

Publication Number Publication Date
JPS6483504A true JPS6483504A (en) 1989-03-29

Family

ID=17033572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23867087A Pending JPS6483504A (en) 1987-09-25 1987-09-25 Production of ultrafine silicon nitride powder

Country Status (1)

Country Link
JP (1) JPS6483504A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride

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