JPS6482446A - Electron beam illuminating device - Google Patents
Electron beam illuminating deviceInfo
- Publication number
- JPS6482446A JPS6482446A JP23969287A JP23969287A JPS6482446A JP S6482446 A JPS6482446 A JP S6482446A JP 23969287 A JP23969287 A JP 23969287A JP 23969287 A JP23969287 A JP 23969287A JP S6482446 A JPS6482446 A JP S6482446A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- conducting tube
- sample
- electron beam
- illuminating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To reduce contamination by illuminating an ion beam guided into a device main body to a sample through a conducting tube fixed at the constant potential. CONSTITUTION:A conducting tube 7 made of stainless steel, nonmagnetic material such as ceramic material with good conductivity, magnetic material such as permalloy, or a combination of the nonmagnetic material and the magnetic material and fixed at the ground potential in the frame of an electron beam illuminating device main body is provided, and an ion beam is illuminated to a sample 6 through this conducting tube 7. The conducting tube 7 shields the ion beam from the electric field or the magnetic field or both of them in the frame, the mutual interference between the electron beam and the ion beam can be decreased, thus the focusing property of the ion beam is rarely reduced, and the ion beam with high energy density can be illuminated to the sample. Contamination can be thereby reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62239692A JP2561486B2 (en) | 1987-09-24 | 1987-09-24 | Electron beam irradiation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62239692A JP2561486B2 (en) | 1987-09-24 | 1987-09-24 | Electron beam irradiation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6482446A true JPS6482446A (en) | 1989-03-28 |
JP2561486B2 JP2561486B2 (en) | 1996-12-11 |
Family
ID=17048496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62239692A Expired - Lifetime JP2561486B2 (en) | 1987-09-24 | 1987-09-24 | Electron beam irradiation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2561486B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54124366A (en) * | 1978-03-06 | 1979-09-27 | Midrex Corp | Method of treating granular material with gas and its device |
-
1987
- 1987-09-24 JP JP62239692A patent/JP2561486B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54124366A (en) * | 1978-03-06 | 1979-09-27 | Midrex Corp | Method of treating granular material with gas and its device |
Also Published As
Publication number | Publication date |
---|---|
JP2561486B2 (en) | 1996-12-11 |
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