JPS56153656A - Electron microscope equipped with x-ray analyzing device - Google Patents

Electron microscope equipped with x-ray analyzing device

Info

Publication number
JPS56153656A
JPS56153656A JP5691080A JP5691080A JPS56153656A JP S56153656 A JPS56153656 A JP S56153656A JP 5691080 A JP5691080 A JP 5691080A JP 5691080 A JP5691080 A JP 5691080A JP S56153656 A JPS56153656 A JP S56153656A
Authority
JP
Japan
Prior art keywords
objective lens
reflected electrons
shielding plate
electron microscope
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5691080A
Other languages
Japanese (ja)
Inventor
Moriki Kubozoe
Masahiro Tomita
Tsutomu Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5691080A priority Critical patent/JPS56153656A/en
Publication of JPS56153656A publication Critical patent/JPS56153656A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable a constantly stable X-ray analysis to be carried out by making a shielding body which shields reflected electrons to be opened and shut according to the magnetized condition of an objective lens. CONSTITUTION:A shielding plate 22 is provided between a sample 3 and a magnetic electrode 15 located on the upper side of an objective lens to make reflected electrons 23 to be shielded, thereby any damage to an X-ray detector 11 being prevented. The shielding plate 22 can be operated from outside the vacuum condition in a marror body, and its operation is allowed to be linked to the operation mode of an electron microscope. When the objective lens is in such a strongly magnetized condition that a lens is formed in its front magnetic field, the shielding plate 22 is kept being drawn from the shielding position since the reflected electrons 23 are curved by the front magnetic field and have no chance of jumping into the X-ray detector 11 through an X-ray passing hole.
JP5691080A 1980-04-28 1980-04-28 Electron microscope equipped with x-ray analyzing device Pending JPS56153656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5691080A JPS56153656A (en) 1980-04-28 1980-04-28 Electron microscope equipped with x-ray analyzing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5691080A JPS56153656A (en) 1980-04-28 1980-04-28 Electron microscope equipped with x-ray analyzing device

Publications (1)

Publication Number Publication Date
JPS56153656A true JPS56153656A (en) 1981-11-27

Family

ID=13040606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5691080A Pending JPS56153656A (en) 1980-04-28 1980-04-28 Electron microscope equipped with x-ray analyzing device

Country Status (1)

Country Link
JP (1) JPS56153656A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143252A (en) * 1981-01-30 1982-09-04 Philips Nv Electron microscope
WO2010115873A1 (en) * 2009-04-06 2010-10-14 Bruker Nano Gmbh Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta
US8368019B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
US8450215B2 (en) 2009-08-07 2013-05-28 Carl Zeiss Microscopy Gmbh Particle beam systems and methods

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143252A (en) * 1981-01-30 1982-09-04 Philips Nv Electron microscope
JPH0465490B2 (en) * 1981-01-30 1992-10-20 Fuiritsupusu Furuuiranpenfuaburiken Nv
US8368019B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
US8368020B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
WO2010115873A1 (en) * 2009-04-06 2010-10-14 Bruker Nano Gmbh Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta
US8450215B2 (en) 2009-08-07 2013-05-28 Carl Zeiss Microscopy Gmbh Particle beam systems and methods

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