JPS6476993A - Graphite crucible for pulling up silicon single crystal - Google Patents

Graphite crucible for pulling up silicon single crystal

Info

Publication number
JPS6476993A
JPS6476993A JP21805588A JP21805588A JPS6476993A JP S6476993 A JPS6476993 A JP S6476993A JP 21805588 A JP21805588 A JP 21805588A JP 21805588 A JP21805588 A JP 21805588A JP S6476993 A JPS6476993 A JP S6476993A
Authority
JP
Japan
Prior art keywords
crucible
pulling
single crystal
graphite crucible
silicon single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21805588A
Other languages
Japanese (ja)
Inventor
Takeshi Notake
Itsunori Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Carbon Co Ltd
Original Assignee
Nippon Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7222882A external-priority patent/JPS58190892A/en
Application filed by Nippon Carbon Co Ltd filed Critical Nippon Carbon Co Ltd
Priority to JP21805588A priority Critical patent/JPS6476993A/en
Publication of JPS6476993A publication Critical patent/JPS6476993A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To relax stress by bimetal effect and obtain the titled graphite crucible having long life, by providing plural cutting grooves in peripheral face of divided type crucible and/or vertical direction of inside of the crucible and/or horizontal direction or the crucible. CONSTITUTION:Cutting grooves 2, 2'', 2''', 2a and 2b having depth of 1/15-1/8 of inner thickness of crucible main unit 1 are provided in the vertical direction of peripheral face of divided type crucible main unit 1 and/or inside face of the crucible and/or horizontal direction thereof.
JP21805588A 1982-04-28 1988-08-31 Graphite crucible for pulling up silicon single crystal Pending JPS6476993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21805588A JPS6476993A (en) 1982-04-28 1988-08-31 Graphite crucible for pulling up silicon single crystal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7222882A JPS58190892A (en) 1982-04-28 1982-04-28 Graphite crucible for pulling of silicon single crystal
JP21805588A JPS6476993A (en) 1982-04-28 1988-08-31 Graphite crucible for pulling up silicon single crystal

Publications (1)

Publication Number Publication Date
JPS6476993A true JPS6476993A (en) 1989-03-23

Family

ID=26413365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21805588A Pending JPS6476993A (en) 1982-04-28 1988-08-31 Graphite crucible for pulling up silicon single crystal

Country Status (1)

Country Link
JP (1) JPS6476993A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2687623A1 (en) * 2011-12-12 2014-01-22 Shin-Etsu Quartz Products Co., Ltd. Silica container for pulling up single crystal silicon, and method for manufacturing same
JP2014043375A (en) * 2012-08-27 2014-03-13 Shin Etsu Handotai Co Ltd Graphite crucible

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443045U (en) * 1977-08-29 1979-03-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443045U (en) * 1977-08-29 1979-03-23

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2687623A1 (en) * 2011-12-12 2014-01-22 Shin-Etsu Quartz Products Co., Ltd. Silica container for pulling up single crystal silicon, and method for manufacturing same
EP2687623A4 (en) * 2011-12-12 2015-01-07 Shinetsu Quartz Prod Silica container for pulling up single crystal silicon, and method for manufacturing same
US9382640B2 (en) 2011-12-12 2016-07-05 Shin-Etsu Quartz Products Co., Ltd. Single crystal silicon pulling silica container and manufacturing method thereof
JP2014043375A (en) * 2012-08-27 2014-03-13 Shin Etsu Handotai Co Ltd Graphite crucible

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