JPS6476993A - Graphite crucible for pulling up silicon single crystal - Google Patents
Graphite crucible for pulling up silicon single crystalInfo
- Publication number
- JPS6476993A JPS6476993A JP21805588A JP21805588A JPS6476993A JP S6476993 A JPS6476993 A JP S6476993A JP 21805588 A JP21805588 A JP 21805588A JP 21805588 A JP21805588 A JP 21805588A JP S6476993 A JPS6476993 A JP S6476993A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- pulling
- single crystal
- graphite crucible
- silicon single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To relax stress by bimetal effect and obtain the titled graphite crucible having long life, by providing plural cutting grooves in peripheral face of divided type crucible and/or vertical direction of inside of the crucible and/or horizontal direction or the crucible. CONSTITUTION:Cutting grooves 2, 2'', 2''', 2a and 2b having depth of 1/15-1/8 of inner thickness of crucible main unit 1 are provided in the vertical direction of peripheral face of divided type crucible main unit 1 and/or inside face of the crucible and/or horizontal direction thereof.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21805588A JPS6476993A (en) | 1982-04-28 | 1988-08-31 | Graphite crucible for pulling up silicon single crystal |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7222882A JPS58190892A (en) | 1982-04-28 | 1982-04-28 | Graphite crucible for pulling of silicon single crystal |
JP21805588A JPS6476993A (en) | 1982-04-28 | 1988-08-31 | Graphite crucible for pulling up silicon single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6476993A true JPS6476993A (en) | 1989-03-23 |
Family
ID=26413365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21805588A Pending JPS6476993A (en) | 1982-04-28 | 1988-08-31 | Graphite crucible for pulling up silicon single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6476993A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2687623A1 (en) * | 2011-12-12 | 2014-01-22 | Shin-Etsu Quartz Products Co., Ltd. | Silica container for pulling up single crystal silicon, and method for manufacturing same |
JP2014043375A (en) * | 2012-08-27 | 2014-03-13 | Shin Etsu Handotai Co Ltd | Graphite crucible |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5443045U (en) * | 1977-08-29 | 1979-03-23 |
-
1988
- 1988-08-31 JP JP21805588A patent/JPS6476993A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5443045U (en) * | 1977-08-29 | 1979-03-23 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2687623A1 (en) * | 2011-12-12 | 2014-01-22 | Shin-Etsu Quartz Products Co., Ltd. | Silica container for pulling up single crystal silicon, and method for manufacturing same |
EP2687623A4 (en) * | 2011-12-12 | 2015-01-07 | Shinetsu Quartz Prod | Silica container for pulling up single crystal silicon, and method for manufacturing same |
US9382640B2 (en) | 2011-12-12 | 2016-07-05 | Shin-Etsu Quartz Products Co., Ltd. | Single crystal silicon pulling silica container and manufacturing method thereof |
JP2014043375A (en) * | 2012-08-27 | 2014-03-13 | Shin Etsu Handotai Co Ltd | Graphite crucible |
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