JPS6475680A - Plasma cvd device - Google Patents
Plasma cvd deviceInfo
- Publication number
- JPS6475680A JPS6475680A JP23112087A JP23112087A JPS6475680A JP S6475680 A JPS6475680 A JP S6475680A JP 23112087 A JP23112087 A JP 23112087A JP 23112087 A JP23112087 A JP 23112087A JP S6475680 A JPS6475680 A JP S6475680A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electric field
- mask
- electrode
- cvd device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To make an electric field on the surface of a substrate moving under a mask nearly uniform in a CVD device, by fitting an electric field regulating member to the opening in the mask positioned between the substrate and an electrode for electric discharge. CONSTITUTION:A mask 3 is positioned between a substrate 2 and an electrode 5 for electric discharge in a plasma CVD device, the substrate 2 is traveled in the arrow direction and plasma is generated between a substrate side electrode 1 and the electrode 5 to form a thin film on the substrate 2. At this time, an electric field regulating member 7 made of a wire extending in the transverse direction of the substrate 2 is fitted to the central part of the opening 3a in the mask 3 in the transfer direction of the substrate 2 so as to regulate the distribution of an electric field in the opening 3a. The electric field on the surface of the moving substrate is made nearly uniform and a thin film having uniform characteristics is formed on the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23112087A JPH0653928B2 (en) | 1987-09-17 | 1987-09-17 | Plasma CVD equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23112087A JPH0653928B2 (en) | 1987-09-17 | 1987-09-17 | Plasma CVD equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6475680A true JPS6475680A (en) | 1989-03-22 |
JPH0653928B2 JPH0653928B2 (en) | 1994-07-20 |
Family
ID=16918599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23112087A Expired - Fee Related JPH0653928B2 (en) | 1987-09-17 | 1987-09-17 | Plasma CVD equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0653928B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006121068A1 (en) * | 2005-05-10 | 2006-11-16 | Ulvac, Inc. | Winding plasma cvd apparatus |
JP2007308758A (en) * | 2006-05-18 | 2007-11-29 | Denso Corp | Film deposition apparatus and film deposition method |
JP2008057020A (en) * | 2006-09-01 | 2008-03-13 | Ulvac Japan Ltd | Winding type plasma cvd system |
JP2010121156A (en) * | 2008-11-18 | 2010-06-03 | Fuji Electric Holdings Co Ltd | Capacitance-coupling type plasma cvd apparatus |
-
1987
- 1987-09-17 JP JP23112087A patent/JPH0653928B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006121068A1 (en) * | 2005-05-10 | 2006-11-16 | Ulvac, Inc. | Winding plasma cvd apparatus |
US7896968B2 (en) | 2005-05-10 | 2011-03-01 | Ulvac, Inc. | Winding type plasma CVD apparatus |
JP5234911B2 (en) * | 2005-05-10 | 2013-07-10 | 株式会社アルバック | Winding type plasma CVD equipment |
JP2007308758A (en) * | 2006-05-18 | 2007-11-29 | Denso Corp | Film deposition apparatus and film deposition method |
JP2008057020A (en) * | 2006-09-01 | 2008-03-13 | Ulvac Japan Ltd | Winding type plasma cvd system |
JP2010121156A (en) * | 2008-11-18 | 2010-06-03 | Fuji Electric Holdings Co Ltd | Capacitance-coupling type plasma cvd apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0653928B2 (en) | 1994-07-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |