JPS6475032A - Apparatus for supplying treating liquid - Google Patents

Apparatus for supplying treating liquid

Info

Publication number
JPS6475032A
JPS6475032A JP22953187A JP22953187A JPS6475032A JP S6475032 A JPS6475032 A JP S6475032A JP 22953187 A JP22953187 A JP 22953187A JP 22953187 A JP22953187 A JP 22953187A JP S6475032 A JPS6475032 A JP S6475032A
Authority
JP
Japan
Prior art keywords
piping
solid materials
treating liquid
washing operation
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22953187A
Other languages
Japanese (ja)
Inventor
Haruo Amada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22953187A priority Critical patent/JPS6475032A/en
Publication of JPS6475032A publication Critical patent/JPS6475032A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006—Controlling or regulating processes
    • B01J19/002—Avoiding undesirable reactions or side-effects, e.g. avoiding explosions, or improving the yield by suppressing side-reactions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To prevent solid materials, which are generated in or brought into a treating liquid piping, from sticking to a matter to be treated by automatically carrying out a washing operation to clean out the solid materials etc., in accordance with a generator condition of foreign matters such as solid materials in the piping. CONSTITUTION:A treating section 2, wherein a specified treatment is carried out by supplying a treating liquid to a matter 7 to be treated, is connected with a treating liquid reservoir 1 by way of a piping 5. A detector 11, which is set in the middle of the piping 5, detects an amount of solid materials in the piping 5. A washing operation is carried out by supplying a washing liquid from a washing liquid reservoir 3 to the piping 5, and a waste liquid formed in the piping 5 during the aforementioned washing operation is recovered in a waste liquid reservoir 4. A control section 13, which is connected with the detector 11, controls the washing operation in accordance with the amount of solid materials in the piping 5. By using this apparatus, it is possible to prevent perfectly the solid materials, which are generated in or brought into the treating liquid supply path, from ticking to the matter to be treated.
JP22953187A 1987-09-16 1987-09-16 Apparatus for supplying treating liquid Pending JPS6475032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22953187A JPS6475032A (en) 1987-09-16 1987-09-16 Apparatus for supplying treating liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22953187A JPS6475032A (en) 1987-09-16 1987-09-16 Apparatus for supplying treating liquid

Publications (1)

Publication Number Publication Date
JPS6475032A true JPS6475032A (en) 1989-03-20

Family

ID=16893628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22953187A Pending JPS6475032A (en) 1987-09-16 1987-09-16 Apparatus for supplying treating liquid

Country Status (1)

Country Link
JP (1) JPS6475032A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (en) * 1991-03-22 1992-10-19 Rohm Co Ltd Chemical liquid supply device in chemical liquid coating device
JP2020119996A (en) * 2019-01-24 2020-08-06 東京エレクトロン株式会社 Substrate processing device, substrate processing system, and substrate processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (en) * 1991-03-22 1992-10-19 Rohm Co Ltd Chemical liquid supply device in chemical liquid coating device
JP2020119996A (en) * 2019-01-24 2020-08-06 東京エレクトロン株式会社 Substrate processing device, substrate processing system, and substrate processing method
TWI839437B (en) * 2019-01-24 2024-04-21 日商東京威力科創股份有限公司 Substrate processing device, substrate processing system, and substrate processing method

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