JPS6475032A - Apparatus for supplying treating liquid - Google Patents
Apparatus for supplying treating liquidInfo
- Publication number
- JPS6475032A JPS6475032A JP22953187A JP22953187A JPS6475032A JP S6475032 A JPS6475032 A JP S6475032A JP 22953187 A JP22953187 A JP 22953187A JP 22953187 A JP22953187 A JP 22953187A JP S6475032 A JPS6475032 A JP S6475032A
- Authority
- JP
- Japan
- Prior art keywords
- piping
- solid materials
- treating liquid
- washing operation
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/002—Avoiding undesirable reactions or side-effects, e.g. avoiding explosions, or improving the yield by suppressing side-reactions
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To prevent solid materials, which are generated in or brought into a treating liquid piping, from sticking to a matter to be treated by automatically carrying out a washing operation to clean out the solid materials etc., in accordance with a generator condition of foreign matters such as solid materials in the piping. CONSTITUTION:A treating section 2, wherein a specified treatment is carried out by supplying a treating liquid to a matter 7 to be treated, is connected with a treating liquid reservoir 1 by way of a piping 5. A detector 11, which is set in the middle of the piping 5, detects an amount of solid materials in the piping 5. A washing operation is carried out by supplying a washing liquid from a washing liquid reservoir 3 to the piping 5, and a waste liquid formed in the piping 5 during the aforementioned washing operation is recovered in a waste liquid reservoir 4. A control section 13, which is connected with the detector 11, controls the washing operation in accordance with the amount of solid materials in the piping 5. By using this apparatus, it is possible to prevent perfectly the solid materials, which are generated in or brought into the treating liquid supply path, from ticking to the matter to be treated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22953187A JPS6475032A (en) | 1987-09-16 | 1987-09-16 | Apparatus for supplying treating liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22953187A JPS6475032A (en) | 1987-09-16 | 1987-09-16 | Apparatus for supplying treating liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6475032A true JPS6475032A (en) | 1989-03-20 |
Family
ID=16893628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22953187A Pending JPS6475032A (en) | 1987-09-16 | 1987-09-16 | Apparatus for supplying treating liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6475032A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04294538A (en) * | 1991-03-22 | 1992-10-19 | Rohm Co Ltd | Chemical liquid supply device in chemical liquid coating device |
JP2020119996A (en) * | 2019-01-24 | 2020-08-06 | 東京エレクトロン株式会社 | Substrate processing device, substrate processing system, and substrate processing method |
-
1987
- 1987-09-16 JP JP22953187A patent/JPS6475032A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04294538A (en) * | 1991-03-22 | 1992-10-19 | Rohm Co Ltd | Chemical liquid supply device in chemical liquid coating device |
JP2020119996A (en) * | 2019-01-24 | 2020-08-06 | 東京エレクトロン株式会社 | Substrate processing device, substrate processing system, and substrate processing method |
TWI839437B (en) * | 2019-01-24 | 2024-04-21 | 日商東京威力科創股份有限公司 | Substrate processing device, substrate processing system, and substrate processing method |
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