JPS6469204A - Semiconductor wafer cassette transfer device - Google Patents

Semiconductor wafer cassette transfer device

Info

Publication number
JPS6469204A
JPS6469204A JP22501087A JP22501087A JPS6469204A JP S6469204 A JPS6469204 A JP S6469204A JP 22501087 A JP22501087 A JP 22501087A JP 22501087 A JP22501087 A JP 22501087A JP S6469204 A JPS6469204 A JP S6469204A
Authority
JP
Japan
Prior art keywords
cassette
push
receiving table
running passage
moving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22501087A
Other languages
Japanese (ja)
Inventor
Junji Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22501087A priority Critical patent/JPS6469204A/en
Publication of JPS6469204A publication Critical patent/JPS6469204A/en
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

PURPOSE:To increase a transferred amount, by a method wherein a moving means, moving a relaying receiving table into the direction of Y-axis at the lower part of a parallel running passage arranged in the direction of X-axis, is arranged while a plurality of push-up tables, respectively corresponding to the moving means, is arranged below the running passage. CONSTITUTION:A cassette 2 is put on a waiting relaying receiving table 22, thereafter, the relaying receiving table 22 is moved to the lower position of a predetermined running passage 6 by a moving means 21. Next, a pneumatic cylinder 26 is operated to elevate a push-up table 25, supported by the pneumatic cylinder, 26 and push the cassette 2 on the receiving table 22. Subsequently, a placing table 20 at a retreated point is moved to the upper position of the receiving table 22. Then, the push-up table 25 is lowered, then, the cassette 2 is shifted onto the placing table 20. Thereafter, the placing table 20, on which the cassette 2 is placed is moved along the running passage 20.
JP22501087A 1987-09-08 1987-09-08 Semiconductor wafer cassette transfer device Pending JPS6469204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22501087A JPS6469204A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22501087A JPS6469204A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette transfer device

Publications (1)

Publication Number Publication Date
JPS6469204A true JPS6469204A (en) 1989-03-15

Family

ID=16822661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22501087A Pending JPS6469204A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette transfer device

Country Status (1)

Country Link
JP (1) JPS6469204A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5609124A (en) * 1993-05-21 1997-03-11 Leclerc; Jacques Hot water tank cleaning device
KR20220020909A (en) * 2019-06-14 2022-02-21 실트로닉 아게 Semiconductor wafer polishing apparatus and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5609124A (en) * 1993-05-21 1997-03-11 Leclerc; Jacques Hot water tank cleaning device
KR20220020909A (en) * 2019-06-14 2022-02-21 실트로닉 아게 Semiconductor wafer polishing apparatus and method
JP2022537523A (en) * 2019-06-14 2022-08-26 ジルトロニック アクチエンゲゼルシャフト Equipment and method for polishing semiconductor wafers

Similar Documents

Publication Publication Date Title
KR940001150B1 (en) Semiconductor wafer transfer system
US4315705A (en) Apparatus for handling and treating wafers
TW273633B (en)
TW349171B (en) Tray positioning platform for handler device
WO2000003467A3 (en) Wafer carrier and method for handling of wafers with minimal contact
DE3889473D1 (en) Device for handling a wafer.
JPS6424440A (en) Device for transferring and positioning flat-platelike object
DK345083D0 (en) METHOD AND APPARATUS FOR PALLETING AND PALLETING DISPENSES
JPS5720444A (en) Feeding device for semiconductor wafer
CA2108393A1 (en) Method and Apparatus for Conveying Trays
JPS6469204A (en) Semiconductor wafer cassette transfer device
DE60116731D1 (en) Integrated system for handling workpieces and materials
JPS552534A (en) Apparatus for recovering roll core and transferring textile roll
JPS5758330A (en) Wafer transferring apparatus
JPS5719219A (en) Wafer carrier jig conveyor
DE3466376D1 (en) Method and arrangement for conveying articles
JPS5790316A (en) Part transfer unit
JPS6443419A (en) Supply device for hybrid integrated circuit substrate where duplex printing is effected
WO1986005466A1 (en) Handling limp fabric
JPS6461031A (en) Device for mounting chip
JPS5618432A (en) Aligning device for semiconductor frame
JPS5419673A (en) Object trasfer device
JPS6414947A (en) Lead forming apparatus of semiconductor device
JPS5757128A (en) Pallet loading device
JPS5767419A (en) Apparatus for transferring material between conveyers